Agilent Technologies B1542A User manual

Agilent Technologies
Agilent B1542A
Pulsed IV Package for
B1500A/EasyEXPERT
User’s Guide

Notices
© Agilent Technologies 2006, 2007
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Manual Part Number
B1542-90003
Edition
Edition 1, July 2006
Edition 2, September 2006
Edition 3, February 2007
Edition 4, June 2007
Agilent Technologies, Inc.
5301 Stevens Creek Blvd
Santa Clara, CA 95051 USA
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In This Manual
This manual provides the information about Agilent Technologies B1542A and
consists of the following chapters. This manual supports the pulsed IV system
software revision A.01.02.
•Chapter 1, “Introduction”
Describes product overview of Agilent B1542A.
•Chapter 2, “Installation”
Explains how to install Agilent B1542A.
•Chapter 3, “Performing System Setup and Compensation”
Explains how to perform system setup and how to update compensation data.
•Chapter 4, “Performing Measurement”
Describes measurement examples by using the pulsed IV test system.
•Chapter 5, “PLSDIV Test Definitions”
Provides reference information for application test definitions (PLSDIV test
definitions) used for the pulsed IV measurement.
•Chapter 6, “PLSDIV TIS Commands”
Provides reference information for execution files (Plsdiv commands, PLSDIV TIS)
used in the PLSDIV test definitions.
•Chapter 7, “Status Code and Error Messages”
Lists the status code and the error messages.
NOTE The pulsed IV test system consists of some instruments, oscilloscope, pulse
generator, source monitor unit, and so on. To use the instruments independently or for
details of the instruments, see the manual of each instrument.
NOTE To get the latest firmware/software/electronic manuals/support information, visit
Agilent Technologies support site (http://www.home.agilent.com), and click
Additional Test & Measurement Products > Parametric Test, click Semiconductor
Parameter/Device Analyzer Series, and click B1500A Semiconductor Device Analyzer.
You can reach Agilent B1500A support site.

Contents
Agilent B1542A User’s Guide, Edition 4
1. Introduction
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Typical Technical Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Accessories and Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
2. Installation
Inspection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
RF Probes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
DC Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Hardware Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Installing Instruments. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Connecting GPIB Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Installing Pulsed IV Test System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Installing DC + Pulsed IV Test System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Connecting RF Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
Connecting DC Probes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
System Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20
Installing Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
Installing Cable Compensation Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
After Software Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
Updating Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
If You Remove Pulsed IV Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23
Rack-mounting Pulse/dc Switch Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24
Rack-mounting Pulse/dc Switch Units. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26
Rack-mounting the Infiniium Oscilloscope . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28
3. Performing System Setup and Compensation

Agilent B1542A User’s Guide, Edition 4
Contents
Pulsed IV System Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Starting System Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Starting System Setup for B1542A-003 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Compensation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Drain Cable Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
4. Performing Measurement
Theory of Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Terminal Voltage and Source Output Value. . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Before Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Performing System Reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Pulse Waveform Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Pulsed Id-Vd Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Pulsed Id-Vg Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12
DC I-V Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
5. PLSDIV Test Definitions
PLSDIV Capt Wave. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
PLSDIV DC IdVd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
PLSDIV DC IdVd SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
PLSDIV DC IdVg . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
PLSDIV DC IdVg SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14
PLSDIV IdVd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
PLSDIV IdVg . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21

Contents
Agilent B1542A User’s Guide, Edition 4
PLSDIV IV SMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25
PLSDIV Reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29
PLSDIV Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30
Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31
6. PLSDIV TIS Commands
Command Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Entering Plsdiv Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Command Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Defining Numeric/Vector Input Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Defining String/Numeric Input Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Defining Numeric Output Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Defining Vector Output Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Defining String Output Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Defining Format Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Setup Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Command Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
DispMessage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
PlsdivCaptureMonData . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
PlsdivCaptureTimeData . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
PlsdivCutoffVd. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
PlsdivCutoffVg. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
PlsdivErrorMessage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
PlsdivForceVd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
PlsdivForceVg . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
PlsdivInit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
PlsdivMeasureId. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
PlsdivSetAdjustStat . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
PlsdivSetAveraging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

Agilent B1542A User’s Guide, Edition 4
Contents
PlsdivSetDeviceDelay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
PlsdivSetMeasTime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
PlsdivSetPulseWidth . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
PlsdivSetSampling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
PlsdivSetSmoothing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
PlsdivSetTransTime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
PlsdivSetVgLevel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
PlsdivUninit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24
7. Status Code and Error Messages

1Introduction

1-2 Agilent B1542A User’s Guide, Edition 4
Introduction
Agilent B1542A Pulsed IV Package for B1500/EasyEXPERT is a solution package
for the Agilent B1500A or Desktop EasyEXPERT users and provides the automated
pulsed IV test environment. This chapter introduces Agilent B1542A, and consists
of the following sections.
•“Overview”
•“Typical Technical Information”
•“Accessories and Options”