AMT VAC COAT DTT User manual

DTT
Triple Source Thermal
Evaporation Coater
User Manual
For technical and applications advice plus online order for spares and consumables parts visit www.vaccoat.com

Vaccoat Co. | DTT Operating Manual
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Vaccoat Ltd. is the owner and manufacturer of DTT Thermal evaporator.
Vac Coat Ltd.
20, Dryden Rd., Harrow, HA3 7Jz, London/ UK
Tel: [phone]
Mon: [phone]
E-mail: [e-mail]
Web: www.vaccoat.com
For technical and applications advice plus online order for spares and consumables
parts visit www.vaccoat.com
Disclaimer
The components and packages described in this document are mutually compatible and guaranteed to
meet or exceed the published performance specifications. No performance guarantees, however, can
be given in circumstances where these component packages are used in conjunction with equipment
supplied by companies other than Vaccoat Ltd.

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This Operating Manual is divided up into the following major sections, each section
dealing with specific topics, as follows:
Section 1: Content
List of Figures
List of Tables
Section 2: Health and Safety
It is important for all firm's product, which describe very important issues in the field of safety.
Section 3: Introduction
Introduces this manual.
Section 4: Setup and Installation
Instructions on how this instrument should be installed and the connections which
should be made between the equipment items.
Section 5: Operation
Instructions on how to start-up and run the instrument.
Section 6: Maintenance
Section 7: Index

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1- Contents:
2- Health &Safety......................................................................................................................................6
2.1- Safety Policy.....................................................................................................................................6
2.2- Servicing...........................................................................................................................................7
2.2.1- Disclaimer.....................................................................................................................................7
2.2.2- Operators and Service Engineers..................................................................................................7
2.3- Hazard Signals and Signs..................................................................................................................7
2.3.1- Hazard Signal Words....................................................................................................................7
2.3.2- Hazard Labels Used on Equipment...............................................................................................8
2.4- Earth connection ...............................................................................................................................9
3. Introduction.........................................................................................................................................10
3.1- Mechanisms of sputtering deposition method.................................................................................11
3.4- Specifications..................................................................................................................................12
3.4.1- Advantages..................................................................................................................................13
3.4.2- Features.......................................................................................................................................13
3.4.3- The equipment inside the metal box ...........................................................................................14
3.4.4- The internal components of the glass chamber...........................................................................14
3.4.5- DC high voltage power supply....................................................................................................21
4- Set up and Installation.........................................................................................................................23
4.1- Required equipment for the device installation ..............................................................................23
4.2- Initial checkup after device collection ............................................................................................23
4.3- The connections..............................................................................................................................24
4.3.2- Electric Connection.....................................................................................................................25
4.3.3- Vacuum pump connection ..........................................................................................................26
4.3.4- The Connection of cooling system of cathodes and thickness gauges........................................26
5- Operation.............................................................................................................................................28
5.1- Device preparation before the setup................................................................................................28
5.2- Sputtering Deposition Manual........................................................................................................30
5.3- Picking Up the Sample....................................................................................................................41

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5.4- Device Setting.................................................................................................................................42
6- Maintenance........................................................................................................................................47
6-1 Target Installation and Replacement...............................................................................................47
6-2 Crystal Replacement.......................................................................................................................47
6-3 Cleaning the Device........................................................................................................................49
6-4 Transportation and Handling ..........................................................................................................50
6-5 Troubleshooting the DSR3..............................................................................................................51
6-5-1- Thickness gauge troubleshooting.....................................................................................................51
6-5-2- Leakage and Leakage Detection......................................................................................................53
7- Appendix 1..........................................................................................................................................56
List of Figures:
Figure 3-1: DTT Desktop Thermal Evaporator .......................................................................................... 10
Figure 3-2: Schematic of thermal evaporation deposition process............................................................. 11
Figure 3-3: The tray in the metal box ......................................................................................................... 14
Figure 3-4: Inside the vacuum chamber...................................................................................................... 15
Figure 3-5: Copper Electrodes................................................................................................................... 16
Figure 3-6: Feedthrough and thickness meter cooling system (Plastic blue hoses).................................... 17
Figure 3-7: Electronic Shutter..................................................................................................................... 18
Figure 3-8: Sample holder .........................................................................................................................18
Figure 3-9: Motorized sample holder......................................................................................................... 19
Figure 3-10: Turbo molecular pump inlet................................................................................................... 20
Figure 3-11: Pressure gauge inlet................................................................................................................21
Figure 3-12: High Current Power Supplies (Back view)............................................................................ 22
Figure 4-1: Side view of the DTT............................................................................................................... 25
Figure 4-2: Back Side view of DTT............................................................................................................ 26
Figure 4-3: Water filter for installing in the cooling system....................................................................... 27
Figure 4-4: Installed water filter on the system ..........................................................................................27
Figure 5-1: Main switch of the backing pump............................................................................................29
Figure 5-2: Power board .............................................................................................................................30
Figure 5-3: Start Page................................................................................................................................. 30
Figure 5-4: Main Page ................................................................................................................................32
Figure 5-5: Motorized page ........................................................................................................................32
Figure 5-6: Thickness gauge page .............................................................................................................. 34
Figure 5-7: Target set page.........................................................................................................................34

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Figure 5-8: Turbo Molecular pump page....................................................................................................35
Figure 5-9: Pressure Display in the main page ........................................................................................... 36
Figure 5-10: MFC (Mass Flow Control) Page............................................................................................ 37
Figure 5-11: Deposition mode setting section in main page....................................................................... 38
Figure 5-12: Thickness and pressure curves display...................................................................................39
Figure 5-13: The logger page...................................................................................................................... 40
Figure 5-14: Operational page.................................................................................................................... 41
Figure 5-15: Panel Page.............................................................................................................................. 42
Figure 5-16: History Page...........................................................................................................................43
Figure 5-17: Maintenance Page .................................................................................................................. 44
Figure 6-1: Door holder screw....................................................................................................................48
Figure 6-2: Small groove to replace the new crystal................................................................................... 48
Figure 6-3: Insertion of new crystal to the groove......................................................................................49
Figure 6-4: Connecting the alternative crystal to test the thickness meter..................................................52
Figure 6-5: Different parts of thickness gauge............................................................................................ 53
List of Tables:
Table 1: Hazard Labels and Their Definitions..............................................................................................8
Table 2: DTT Desktop Triple Source Thermal Evaporator Coater Specification.......................................12
Table 3: Adjustable Parameter in Touch Screen.........................................................................................28
Table 4: Setting Parameters ........................................................................................................................42
Table 5: NTC Section Parameters...............................................................................................................45
Table 6: The maintenance activities time and description..........................................................................47
Table 7: Troubleshooting table of DTT......................................................................................................51

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2- Health &Safety
The Vaccoat Company has provided maximum safety for its production systems and operators. It
is required to read the complete user instruction before starting to work with the device.
All service and repairs should only be performed by a qualified specialist. Vaccoat Company
will not be liable for any loss or damage caused by repairs and services performed by an
unauthorized or unqualified person.
Vaccoat Co. will not be responsible against loss or damage caused by incorrect use of the
equipment.
2.1- Safety Policy
This section contains important information relating to all health and safety aspects of the
equipment. As such it should be read, and understood, by all personnel using the
instrument whether as an operator or in a service capacity.
Vaccoat Co. is committed to providing a safe working environment for its
employees and those that use its equipment and conducts its business responsibly, and in
a manner designed to protect the health and safety of its customers and employees. It also seeks
to minimize any adverse effects that its activities may have on the environment.
The equipment has been designed as free-standing bench mounted instruments. Vaccoat Co.
cannot be held responsible for any damage, injury or consequential loss arising from the use of
its equipment for any other purposes, or any unauthorized modifications made to the equipment.
All service work carried out on the equipment should only be undertaken by suitably
qualified personnel. Vaccoat Co. is not liable for any damage, injury or
consequential loss resulting from servicing by unqualified personnel. Vaccoat Co. will also not

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be liable for damage, injury or consequential loss resulting from
incorrect operation of the instrument or modification of the instrument.
2.2- Servicing
2.2.1- Disclaimer
All service work on the equipment should be carried out by qualified personnel. Vaccoat Co.
cannot be liable for damage, injury or consequential loss resulting from servicing from
unqualified personnel. Vaccoat Co. will also not be liable for damage, injury or consequential
loss resulting from incorrect operation of the instrument or modification of the instrument.
2.2.2- Operators and Service Engineers
A normal operator of the equipment will not be trained in or qualified for service work on
the equipment and may cause a hazard to him/herself or others if such work is
attempted. Operators should therefore restrict themselves to the normal operation of the
equipment and not by removing covers from the electronic equipment or dismantling of the
instruments.
Service Engineers who are suitably trained to assess and isolate electrical, mechanical
and vacuum hazards should be the only personnel who access the equipment.
2.3- Hazard Signals and Signs
2.3.1- Hazard Signal Words
The standard five hazard signal words are defined as follows:

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oDANGER- imminently hazardous situation or unsafe practice that, if not
avoided, will result in death or severe injury.
oWARNING - potentially hazardous situation or unsafe practice that, if not
avoided, could result in death or severe injury.
oCAUTION - potentially hazardous situation or unsafe practice that, if not
avoided, may result in minor or moderate injury or damage to equipment.
2.3.2- Hazard Labels Used on Equipment
Several hazard symbols may be found on the equipment, they are shown in Table.1
with their meaning:
Table 1: Hazard Labels and Their Definitions
Sign Shape
Sign Name
Sign Definition
Electric Shock Risk
Imminently hazardous
situation or unsafe practice
that, if
not avoided, will result in
death or severe injury.
Warning
Potentially hazardous
situation or unsafe practice
that, if not
avoided, could result in death
or severe injury.

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Caution
Potentially hazardous
situation or unsafe practice
that, if not
avoided, may result in minor
or moderate injury or damage
to equipment.
2.4- Earth connection
The device must be connected to a plug with proper earth connection; this
would prevent electrocution of user in case of a short circuit in the
system. However, in the absence of proper earth connection, the thickness
gauges will not work properly.