AMT VAC COAT DTT User manual

DTT
Triple Source Thermal
Evaporation Coater
User Manual
For technical and applications advice plus online order for spares and consumables parts visit www.vaccoat.com

Vaccoat Co. | DTT Operating Manual
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Vaccoat Ltd. is the owner and manufacturer of DTT Thermal evaporator.
Vac Coat Ltd.
20, Dryden Rd., Harrow, HA3 7Jz, London/ UK
Tel: [phone]
Mon: [phone]
E-mail: [e-mail]
Web: www.vaccoat.com
For technical and applications advice plus online order for spares and consumables
parts visit www.vaccoat.com
Disclaimer
The components and packages described in this document are mutually compatible and guaranteed to
meet or exceed the published performance specifications. No performance guarantees, however, can
be given in circumstances where these component packages are used in conjunction with equipment
supplied by companies other than Vaccoat Ltd.

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This Operating Manual is divided up into the following major sections, each section
dealing with specific topics, as follows:
Section 1: Content
List of Figures
List of Tables
Section 2: Health and Safety
It is important for all firm's product, which describe very important issues in the field of safety.
Section 3: Introduction
Introduces this manual.
Section 4: Setup and Installation
Instructions on how this instrument should be installed and the connections which
should be made between the equipment items.
Section 5: Operation
Instructions on how to start-up and run the instrument.
Section 6: Maintenance
Section 7: Index

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1- Contents:
2- Health &Safety......................................................................................................................................6
2.1- Safety Policy.....................................................................................................................................6
2.2- Servicing...........................................................................................................................................7
2.2.1- Disclaimer.....................................................................................................................................7
2.2.2- Operators and Service Engineers..................................................................................................7
2.3- Hazard Signals and Signs..................................................................................................................7
2.3.1- Hazard Signal Words....................................................................................................................7
2.3.2- Hazard Labels Used on Equipment...............................................................................................8
2.4- Earth connection ...............................................................................................................................9
3. Introduction.........................................................................................................................................10
3.1- Mechanisms of sputtering deposition method.................................................................................11
3.4- Specifications..................................................................................................................................12
3.4.1- Advantages..................................................................................................................................13
3.4.2- Features.......................................................................................................................................13
3.4.3- The equipment inside the metal box ...........................................................................................14
3.4.4- The internal components of the glass chamber...........................................................................14
3.4.5- DC high voltage power supply....................................................................................................21
4- Set up and Installation.........................................................................................................................23
4.1- Required equipment for the device installation ..............................................................................23
4.2- Initial checkup after device collection ............................................................................................23
4.3- The connections..............................................................................................................................24
4.3.2- Electric Connection.....................................................................................................................25
4.3.3- Vacuum pump connection ..........................................................................................................26
4.3.4- The Connection of cooling system of cathodes and thickness gauges........................................26
5- Operation.............................................................................................................................................28
5.1- Device preparation before the setup................................................................................................28
5.2- Sputtering Deposition Manual........................................................................................................30
5.3- Picking Up the Sample....................................................................................................................41

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5.4- Device Setting.................................................................................................................................42
6- Maintenance........................................................................................................................................47
6-1 Target Installation and Replacement...............................................................................................47
6-2 Crystal Replacement.......................................................................................................................47
6-3 Cleaning the Device........................................................................................................................49
6-4 Transportation and Handling ..........................................................................................................50
6-5 Troubleshooting the DSR3..............................................................................................................51
6-5-1- Thickness gauge troubleshooting.....................................................................................................51
6-5-2- Leakage and Leakage Detection......................................................................................................53
7- Appendix 1..........................................................................................................................................56
List of Figures:
Figure 3-1: DTT Desktop Thermal Evaporator .......................................................................................... 10
Figure 3-2: Schematic of thermal evaporation deposition process............................................................. 11
Figure 3-3: The tray in the metal box ......................................................................................................... 14
Figure 3-4: Inside the vacuum chamber...................................................................................................... 15
Figure 3-5: Copper Electrodes................................................................................................................... 16
Figure 3-6: Feedthrough and thickness meter cooling system (Plastic blue hoses).................................... 17
Figure 3-7: Electronic Shutter..................................................................................................................... 18
Figure 3-8: Sample holder .........................................................................................................................18
Figure 3-9: Motorized sample holder......................................................................................................... 19
Figure 3-10: Turbo molecular pump inlet................................................................................................... 20
Figure 3-11: Pressure gauge inlet................................................................................................................21
Figure 3-12: High Current Power Supplies (Back view)............................................................................ 22
Figure 4-1: Side view of the DTT............................................................................................................... 25
Figure 4-2: Back Side view of DTT............................................................................................................ 26
Figure 4-3: Water filter for installing in the cooling system....................................................................... 27
Figure 4-4: Installed water filter on the system ..........................................................................................27
Figure 5-1: Main switch of the backing pump............................................................................................29
Figure 5-2: Power board .............................................................................................................................30
Figure 5-3: Start Page................................................................................................................................. 30
Figure 5-4: Main Page ................................................................................................................................32
Figure 5-5: Motorized page ........................................................................................................................32
Figure 5-6: Thickness gauge page .............................................................................................................. 34
Figure 5-7: Target set page.........................................................................................................................34

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Figure 5-8: Turbo Molecular pump page....................................................................................................35
Figure 5-9: Pressure Display in the main page ........................................................................................... 36
Figure 5-10: MFC (Mass Flow Control) Page............................................................................................ 37
Figure 5-11: Deposition mode setting section in main page....................................................................... 38
Figure 5-12: Thickness and pressure curves display...................................................................................39
Figure 5-13: The logger page...................................................................................................................... 40
Figure 5-14: Operational page.................................................................................................................... 41
Figure 5-15: Panel Page.............................................................................................................................. 42
Figure 5-16: History Page...........................................................................................................................43
Figure 5-17: Maintenance Page .................................................................................................................. 44
Figure 6-1: Door holder screw....................................................................................................................48
Figure 6-2: Small groove to replace the new crystal................................................................................... 48
Figure 6-3: Insertion of new crystal to the groove......................................................................................49
Figure 6-4: Connecting the alternative crystal to test the thickness meter..................................................52
Figure 6-5: Different parts of thickness gauge............................................................................................ 53
List of Tables:
Table 1: Hazard Labels and Their Definitions..............................................................................................8
Table 2: DTT Desktop Triple Source Thermal Evaporator Coater Specification.......................................12
Table 3: Adjustable Parameter in Touch Screen.........................................................................................28
Table 4: Setting Parameters ........................................................................................................................42
Table 5: NTC Section Parameters...............................................................................................................45
Table 6: The maintenance activities time and description..........................................................................47
Table 7: Troubleshooting table of DTT......................................................................................................51

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2- Health &Safety
The Vaccoat Company has provided maximum safety for its production systems and operators. It
is required to read the complete user instruction before starting to work with the device.
All service and repairs should only be performed by a qualified specialist. Vaccoat Company
will not be liable for any loss or damage caused by repairs and services performed by an
unauthorized or unqualified person.
Vaccoat Co. will not be responsible against loss or damage caused by incorrect use of the
equipment.
2.1- Safety Policy
This section contains important information relating to all health and safety aspects of the
equipment. As such it should be read, and understood, by all personnel using the
instrument whether as an operator or in a service capacity.
Vaccoat Co. is committed to providing a safe working environment for its
employees and those that use its equipment and conducts its business responsibly, and in
a manner designed to protect the health and safety of its customers and employees. It also seeks
to minimize any adverse effects that its activities may have on the environment.
The equipment has been designed as free-standing bench mounted instruments. Vaccoat Co.
cannot be held responsible for any damage, injury or consequential loss arising from the use of
its equipment for any other purposes, or any unauthorized modifications made to the equipment.
All service work carried out on the equipment should only be undertaken by suitably
qualified personnel. Vaccoat Co. is not liable for any damage, injury or
consequential loss resulting from servicing by unqualified personnel. Vaccoat Co. will also not

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be liable for damage, injury or consequential loss resulting from
incorrect operation of the instrument or modification of the instrument.
2.2- Servicing
2.2.1- Disclaimer
All service work on the equipment should be carried out by qualified personnel. Vaccoat Co.
cannot be liable for damage, injury or consequential loss resulting from servicing from
unqualified personnel. Vaccoat Co. will also not be liable for damage, injury or consequential
loss resulting from incorrect operation of the instrument or modification of the instrument.
2.2.2- Operators and Service Engineers
A normal operator of the equipment will not be trained in or qualified for service work on
the equipment and may cause a hazard to him/herself or others if such work is
attempted. Operators should therefore restrict themselves to the normal operation of the
equipment and not by removing covers from the electronic equipment or dismantling of the
instruments.
Service Engineers who are suitably trained to assess and isolate electrical, mechanical
and vacuum hazards should be the only personnel who access the equipment.
2.3- Hazard Signals and Signs
2.3.1- Hazard Signal Words
The standard five hazard signal words are defined as follows:

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oDANGER- imminently hazardous situation or unsafe practice that, if not
avoided, will result in death or severe injury.
oWARNING - potentially hazardous situation or unsafe practice that, if not
avoided, could result in death or severe injury.
oCAUTION - potentially hazardous situation or unsafe practice that, if not
avoided, may result in minor or moderate injury or damage to equipment.
2.3.2- Hazard Labels Used on Equipment
Several hazard symbols may be found on the equipment, they are shown in Table.1
with their meaning:
Table 1: Hazard Labels and Their Definitions
Sign Shape
Sign Name
Sign Definition
Electric Shock Risk
Imminently hazardous
situation or unsafe practice
that, if
not avoided, will result in
death or severe injury.
Warning
Potentially hazardous
situation or unsafe practice
that, if not
avoided, could result in death
or severe injury.

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Caution
Potentially hazardous
situation or unsafe practice
that, if not
avoided, may result in minor
or moderate injury or damage
to equipment.
2.4- Earth connection
The device must be connected to a plug with proper earth connection; this
would prevent electrocution of user in case of a short circuit in the
system. However, in the absence of proper earth connection, the thickness
gauges will not work properly.

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3. Introduction
The Triple Source Thermal Evaporation Coater device; DTT; is a deposition system with thermal
evaporation method in high vacuum, with glass cylindrical chamber and the turbo- molecular
pump. This device by having a suitable size and its preferences is capable to reach the desired
vacuum level in 10~15 minutes and depositing large group of materials, with the three thermal
sources (boat- basket).
The DTT with usage of three copper electrodes is able to fit in different size of boat and basket
and they are changeable easily. Therefore structuring the multilayer with three different materials
without having to break the vacuum and possibility of alloying is provided. The touch screen
control panel and user friendly software makes the user to reach the desired result with the
maximum time and energy saving.
Figure 3-1: DTT Desktop Thermal Evaporator

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3-1 Mechanisms of thermal evaporation deposition method
Thermal evaporation is a deposition method in a high vacuum condition with applying the
electrical current to vaporize the source material and deposition on the substrate based on the
pressure differentiation between the source and the sample holder. This method is one the most
common deposition method to create super thin layers. Chamber’s pressure and the boat’s
temperature are the parameters that need to be controlled in this process. In this method the
source material will be placed in the boat or filament made of resistant metals (Ta, Mo, or W).
The electric current by passing through the boat will make it hot and the source material will be
vaporized and depositing a thin layer on the substrate.
Figure 3-2: Schematic of thermal evaporation deposition process

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3-2 Specifications
Table 2: DTT Desktop Triple Source Thermal Evaporator Coater Specification
Dimension
650 Width x 500 Depth x 560 Height mm
Weight
60 Kg
Glass Chamber Dimension
Pyrex Cylinder Shape, Diameter 300mm,
Height 250mm, Thickness 7mm
Display Screen
7” Diagonal (16:9) 800x480 High Color-
Graphic TFT- LCD
User Interface
Color & Touch Screen
Data Transfer
USB Port –For Transferring the data and
graph to PC
Sample Holder Dimension
Square shape 40x40 mm
Chamber’s Base
Stainless Steel with Turbo Pump, Thickness
Gauge, Shutter, Pressure Gauge & Sample
Holder Inlet port
Chamber’s Door
Made of Aluminum
Boat/basket Size
50~90 mm length
Number of boat/basket
3 Pieces
Thickness Sensors
Number of Sensors
1 Piece
Specification
Crystal thickness gauge with sensors,
oscillator and the water circulated crystal
holder
Resolution
1 Angstrom
Accuracy
1 nanometer
Vacuum Equipment
Turbo Molecular Pump
Capacity 90 L/s , (Leybold)
Backing Pump
Two stage rotary pump 4m3/h
Pressure Gauge
Leybold (Ionivac model); Full Range
Final Vacuum
<5x10^-6 Torr
Process
Thermal Evaporation
Thermal Evaporation Coating based on Time
mode or Thickness mode
Service and other Information
High Current Power Supply
DC: 100 A, 25 V
Number of High Current Power Supply
2 pieces
Electric Feedthrough
4 pin
Electric High Current Feedthrough
100 A
Vent Valve
1x¼”, one for Ventilation
Mass Flow Controller(MFC)
0-100 sccm
Electronic Shutter
1 piece
Electrical Inlet
Inlet: 220v, 20A, 50Hz *

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* CAUTION: Single phase AC power with appropriate earth connection is required.
3-2-1 Advantages
1- Easy operation and fast preparation of system for deposition.
2- Controlling the layer thickness with high repeatability during the deposition.
3- Easy insertion and removal of samples.
4- The possibility of using different materials for the thermal evaporation purpose.
5- The ability of enabling the two power supply at the same time (optional).
6- Precise adjustment ability of pressure.
7- Reaching the right vacuum level to perform the deposition.
8- Ability to view graphs of pressure and thickness.
3-2-2 Features
Turbo-molecular pump (Made in Germany)
Rotary backing pump
Full-range vacuum gauge (Made in Germany)
Sample holder
Boat Selection
Crystal thickness sensors
High current power supply
Electronic shutter
DTT contain three main parts: High current power supply, metal boxes and the glass vacuum
chamber on the top.

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The electrical parts, electronic modules and turbo-molecular pump are inside the metal box. The
diaphragm backing pump is outside the machine.
3-2-3 The equipment inside the metal box
Inside the metal box, there is a tray (Figure 3-3), including electrical and electronic parts of the
device. The tray includes:
1- 24 V power Supply
2- Pressure Module
3- Relay & Motor Drive Module
4- MFC Module
5- Thickness Gauge Module
6- MFC (Mass Flow Controller)
Figure 3-3: The tray in the metal box
3-2-4 The internal components of the glass chamber
Figure 3-4 shows the internal components of the glass chamber. The base plate made of Stainless
Steel, and components such as pressure gauge, the turbo- molecular pump inlet are embedded
inside the chamber.

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1- Turbo inlet connection
2- 4 pin electrical feed through
3- Gas inlet
4- Pressure gauge connection
5- Copper electrode
6- Thickness gauge sensor
7- Rotational sample holder
8- Shutter
9- Air filter for the ventilation purpose
Figure 3-4: Inside the vacuum chamber

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To prevent the leakage, avoid any bumps or scrapes, especially in areas
where the glass chamber is connected to base and Aluminum door. Hitting
the edges of the glass will cause the leaks in that area.
i. Copper Electrode
This device is equipped to three separated copper electrodes to hold the boat for evaporation
purpose. The length of each one is adjustable from 50 to 90 mm.
Figure 3-5: Copper Electrodes
These electrodes should not have connection to each other or the steel
internal surface.
ii. Thermal sources (Boat/ Basket)
Selection of kind of the thermal sources is a very important item to reach the desired deposition.
Less thickness of the selected Boat or Basket leads to less required electrical current to
evaporation and thus less unwanted radiation heat.
NOTE:

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It’srecommendedthatusetheBoatswiththicknessoflessthan0.1mmandwidthoflessthan8
mm.
If the deposition time is less than 15 minutes and the power supply current is less than 40 Amp,
there is no need to cool the electric feedthroughs and so thickness meter. But for more time or
currents, it’srecommendedtocoolfeedthroughs and thickness meter (Figure 3-6).
Figure 3-6: Feedthrough and thickness meter cooling system (Plastic blue hoses)
For the first time using the cooling system, turn off the system and make
sure that there is no any water leakage inside the metal box (Figure 3-6).

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iii. Shutter
This device is equipped to an electronic shutter and its positioning can be controlled through the
touch screen control panel. The distance between the shutter and the substrate and the thermal
source is adjustable. For this purpose, the operator should opentheshutter’sconnectiontoshaft
and tight it back after the height adjustment.
Figure 3-7: Electronic Shutter
iv. Sample Holder
Figure 3-8 shows the sample holder. User is able to adjust the position of the sample holder in
three directions (X, Y and Z). Shape and the dimension of sample holder could be customized
based on the user requirements.
Figure 3-8: Sample holder

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In order to use of sample rotation during the deposition process, set the samples on the rotational
surface and fix them by the clasps. Fix the surface on the right place (Figure 3-9) and connect the
motor power cable. For setting the desired speed see the item No. 9 in part 5-2.
NOTE:
Inordertoincreasethemotorlifetime,it’srecommendedthatturn on sample rotation motor after
opening the shutter and after closing the shutter or finishing the deposition turn off it.
Figure 3-9: Motorized sample holder