Azbil mF MVF Series User manual

MVF Series
Micro Flow Vortex Gas Flowmeter
User's Manual
No. CP-SP-1190E
Thank you for purchasing an MVF Series
flowmeter.
This manual contains information for
ensuring the correct use of the MVF
Series flowmeter. It also provides nec-
essary information for installation,
maintenance, and troubleshooting.
This manual should be read by those
who design and maintain equipment
that uses the MVF Series flowmeter. Be
sure to keep this manual nearby for
handy reference.
TM

This product has been designed, developed and manufactured for general-purpose
application in machinery and equipment.
Accordingly, when used in applications outlined below, special care should be taken to
implement a fail-safe and/or redundant design concept as well as a periodic
maintenance program.
•Safety devices for plant worker protection
•Start/stop control devices for transportation and material handling machines
•Aeronautical/aerospace machines
•Control devices for nuclear reactors
Never use this product in applications where human safety may be put at risk.
RESTRICTIONS ON USE
µFTM and Micro FlowTM are trademarks of Yamatake Corporation in Japan.
NOTICE
©2005 Yamatake Corporation ALL RIGHTS RESERVED
Be sure that the user receives this manual before the product is used.
Copying or duplicating this user’s manual in part or in whole is forbid-
den. The information and specifications in this manual are subject to
change without notice.
Considerable effort has been made to ensure that this manual is free
from inaccuracies and omissions. If you should find an error or omis-
sion, please contact Yamatake Corporation.
In no event is Yamatake Corporation liable to anyone for any indirect,
special or consequential damages as a result of using this product.

■About Icons
The safety precautions described in this manual are indicated by various icons.
Please be sure you read and understand the icons and their meanings described
below before reading the rest of the manual.
Safety precautions are intended to ensure the safe and correct use of this prod-
uct, to prevent injury to the operator and others, and to prevent damage to proper-
ty. Be sure to observe these safety precautions.
■Examples
i
Tr iangles warn the user of a possible danger that may be caused by
wrongful operation or misuse of this product. These icons graphically
represent the actual danger. (The example on the left warns the user of
the danger of electric shock.)
White circles with a diagonal bar notify the user that specific actions are
prohibited to prevent possible danger. These icons graphically represent
the actual prohibited action. (The example on the left notifies the user
that disassembly is prohibited.)
Filled-in black circles instruct the user to carry out a specific obligatory
action to prevent possible danger. These icons graphically represent the
actual action to be carried out. (The example on the left instructs the user
to remove the plug from the outlet.)
SAFETY PRECAUTIONS
WARNING Warnings are indicated when mishandling this product might result in death or serious injury.
CAUTION Cautions are indicated when mishandling this product might result in minor injury to the user, or only physical
damage to the product.

ii
WARNING
If this device is used with flammable gases such as natural gas,
propane or butane, mount it on the upstream side of the safety shutoff
valve.
When air gets in the pipe and an explosive mixture is produced, and if a
sensor should make a spark due to lightning or other reasons, the mix-
ture may explode inside the pipe.
The mass of this device is 7 to 23kg according to the model number.
Ensure to take complete precautions and care while handling for trans-
portation or installation. For safe handling, two or more persons are
required while handling this device.
Accidental dropping of the device on the foot might cause injury.
Do not hold the device by the converter alone. Doing so might damage
the device, or the pipe connector section may drop off.
Do not use this device or its installed pipes as a scaffolding.
Doing so might damage the device or the pipe, or might cause physical
injury.
Do not disassemble this device.
If it is disassembled when pressure remains in the pipes, the device
could be damaged or someone could be injured by flying parts.
CAUTION
Be sure that the operating gas temperature does not fall below -15°C.
Using the gas below -15°C, the O-ring might crack and cause gas leak-
age.
Prevent foreign matter from entering the device.
If the rust, water droplet, oil mist or dust in the piping flows into the
device, measurement error might occur and result in damaging the
device.
If there is a possibility that any foreign matter flows into the device,
provide a filter, strainer or mist trap capable of eliminating more than
1µm foreign matter at the upstream, and periodically inspect and
replace the filter.
If this device is used for monitoring flowrate of the burner, consider the
piping instrumentation lest the backfire damage this device.
When connecting the load to the output terminals, do not exceed the
rated value shown in the specifications.
Doing so might cause the damage of this device.

iii
CAUTION
This device is a precision instrument. Do not drop it or subject it to
shock. Doing so might damage the device.
When connecting flanges, tighten with the specified torque.
Otherwise gas could leak from the pipe, causing injury.
When mounting the device, firmly fasten to prevent vibration.
Do not peel off the pipe connector port seals until immediately before
you connect the piping. Doing so might allow foreign objects to enter
the connector port and cause defective operation.
Do not flush when the device is mounted in the pipe.
Doing so might cause damage due to entry of foreign matter and cause
faulty operation or errors in measurement.
Before wiring, be sure to turn the power OFF.
Before supplying power, be sure to check that there is no wiring error. A
wiring error might damage the device or cause a dangerous condition.
Do not use this device outside of the operating pressure range. Also,
do not subject this device to a pressure above the pressure resistance.
Doing so might damage this device.

Organization of This User's Manual
iv
This manual is organized as follows:
Chapter 1. INTRODUCTION
This chapter describes features on this device.
Chapter 2. NAMES AND FUNCTIONS OF PARTS
This chapter describes the NAMES AND FUNCTIONS OF PARTS on this device.
Chapter 3. INSTALLATION, MOUNTING, WIRING
This chapter describes installation, mounting and wiring on this device.
Chapter 4. TROUBLESHOOTING
This chapter describes how to investigate and remedy trouble that may occur dur-
ing operation of this device.
Chapter 5. SPECIFICATIONS
This chapter describes the specifications and external dimensions of this device.
Conventions Used in This Manual
The following conventions are used in this manual:
Handling Precautions:
Handling Precautions indicate items that the user should pay attention to
when handling the MVF Series.
Note:Notes indicate information that might benefit the user.
:This indicates the item or page that the user is requested to refer to.
(1), (2), (3): Numbers within parentheses indicate steps in a sequence or parts of an
explanation.
AL01:This indicates 7-segment indication on the display.
1000.0

Contents
v
SAFETY PRECAUTIONS
Organization of This User's Manual
Conventions Used in This Manual
Chapter 1. INTRODUCTION
■Introduction •••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••1
■Features •••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••1
■System ••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••1
■Model selection table ••••••••••••••••••••••••••••••••••••••••••••••••••••2
Chapter 2. NAMES AND FUNCTIONS OF PARTS
■Body •••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••3
■Display ••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••4
Chapter 3. INSTALLATION, MOUNTING, WIRING
■Installation ••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••6
■Precautions for piping installation ••••••••••••••••••••••••••••••••••••••6
■Piping work ••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••9
■Wiring ••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••••11
Chapter 4. TROUBLESHOOTING
■Nothing on display •••••••••••••••••••••••••••••••••••••••••••••••••••••15
■Error message (faulty operation) •••••••••••••••••••••••••••••••••••••••15
■Alarm display ••••••••••••••••••••••••••••••••••••••••••••••••••••••••••16
Chapter 5. SPECIFICATIONS
■Specifications ••••••••••••••••••••••••••••••••••••••••••••••••••••••••••17
■Specifying accuracy •••••••••••••••••••••••••••••••••••••••••••••••••••18
■Tables for specifying volumetric flow rate accuracy (in air) ••••••••••••21
■Tables for accuracy after temperature and pressure •••••••••••••••••••22
compensation (in air)
■Pressure loss ••••••••••••••••••••••••••••••••••••••••••••••••••••••••••24
■External dimensions •••••••••••••••••••••••••••••••••••••••••••••••••••25

Chapter 1. INTRODUCTION
■Introduction
The MVF Series Micro Flow Vortex Gas Flowmeter (hereafter called "the device"
or "the MVF") is a thermal vortex gas flowmeter featuring a wide measurement
range. It uses the Yamatake-designed Micro Flow sensor (or "µF sensor") as a vor-
tex generator.
■Features
•35% more of the MVF's component materials are available for re-use or recy-
cling, as compared with the conventional CMK model.
•Temperature and pressure compensation functions are integrated into the MVF.
Since expensive temperature and pressure compensation devices are not
required, a large cost reduction can be expected.
•This device incorporates a µF (Micro Flow) sensor a mere 1.7mm square and
0.5mm thick, made possible by silicon micro-machining and thin-film technolo-
gies. By using this high-sensitivity, high-speed sensor to detect vortex frequen-
cy, measurement rangeability of 100:1 has been achieved.
• The entire MVF is provided with wide range of functions to meet various appli-
cations needs: LCD display function, analog output (4 to 20mA), integrating
calculation, display and integral pulse output (open collector).
Also, an RS-485 communications function is provided as a standard feature, so
a large amount of instrumentation cost reduction can be achieved when data is
uploaded.
■System
LOADER
power
SD
RD
SD
RD
HOSTCMCCMCLOCAL
CMCADDRESS
HOSTCMC
B.RATE
ERR
RESET
CMC10
11
12
13
14
15
Communications (RS-485)
CMC10L
PLC
Smart terminal
EST-Z series
Pulse output
4 to 20mA
instantaneous flow rate
output
Controller
SDC series etc.
MVF
RS-232C
Personal computer etc.
Pulse counter
PCG13
1

2
■Model selection table
The following shows the model Nos. for this flowmeter:
*1: If the gas type is oxygen, be sure to specify oil free treatment.
*2: Flow and mounting directions
Flow direction: Horizontal (left to right)
Converter on top Converter on bottom
Flow direction: Vertical (down to up)
Converter on left
Flow direction: Vertical (up to down)
Converter on left
Flow direction: Horizontal (right to left)
Converter on top Converter on bottom
Flow
direction
Flow
direction
Flow
direction
Flow
direction
Flow
direction
Flow
direction
Code: 0 Code: 1 Code: 2 Code: 3
Code: 4 Code: 5
Basic Pipe Model Material Connecti- Gas Output Power Commu- Flow and moun- Option 1 Option 2 Appended Descripton
model No. size type on method type nication ting direction
MVF Micro Flow Vortex Flowmeter
050 Pipe size 50A (2B)
080 Pipe size 80A (3B)
100 Pipe size 100A (4B)
150 Pipe size 150A (6B)
0With temperature/pressure compensation
function
LWithout pressure compensation but with
temperature compensation
SMaterial SUS304
UJIS/ANSI wafer
NAir, Nitrogen, Algon
SOxygen (Be sure to specify code "1" in the
opiton 1 gas-contacting parts treated to be oil
free) *1
CCarbondioxide
GNatural gas (LNG base), Methane
PPropane
BButane
04to 20mAdc output + Integration pulse output
1Power 24Vdc
1RS-485 Communication (EST, WEB100,
CMC10G communication)
0Horizontal (Flow direction:left to right)
Converter on top *2
1 Horizodntal (Flow direction:left to right)
Converter on bottom *2
2Horizontal (Flow direction:right to left)
Converter on top *2
3Horizontal (Flow direction:right to left)
Converter on bottom *2
4Vertical (Flow direction:down to up)
Converter on left *2
5Vertical (Flow direction:up to down)
Converter on left *2
0Option 1 none
1Gas-contacting parts treated to be oil free
(Necessary if gas type is oxygen) *1
0Option 2 none
0Product version
Chapter 1. INTRODUCTION

Chapter 2. NAMES AND FUNCTIONS OF PARTS
■Body
Display
Used for the display of instantaneous flow rate, integrated flow rate, and
alarm status and error of this device. For details of the display, refer to;
■Display (on next page).
Label
Indicates model number, range, and pulse rate. Check that they are the
same as the specifications ordered.
Converter
Calculates temperature, pressure, etc.
Wiring connection port
There are 2 wiring connection ports. Used for connecting an electric wiring
conduit and mounting the included waterproof gland.
Terminal block
Used for wiring a power supply to the device, for 4-20mAdc output, inte-
grated pulse output and communications.
Gauge pressure sensor
Detects pressure.
µF Sensor
Detects vortex frequency and temperature.
Pipe connector
Wafer connection. Pipes are connected by sandwiching the pipe connector
between flanges.
Vortex generator
Generates vortex.
AA
Display
Vortex generator
Wiring connection port
Gauge pressure sensor
Te r minal block
Pipe connector (wafer)
Converter
Label
µF sensor
Flow direction
A-A cross-section of flow passage
µF sensor
Te r minal housing cover
3

4
■Display
Reset switch
This switch resets the integrated (cumulative) value. When this reset switch
is pressed for 3 seconds, the integrated value is reset to 0.
Upper 7-segment display
Displays instantaneous flow rate.
(Example: 10000.0m3/h)
Lower 7-segment display
Displays integrated flow rate.
(Example: MVF050 1000000.0 m3
MVF080/100/150 10000000 m3)
Station address setting switch
This switch sets the station address for the device.
For setup details, refer to;
MVF Series Communications Functions (CP-SP-1183E).
Communications parameters switch
This switch sets the communications parameters for the device.
For setup details, refer to;
MVF Series Communications Functions (CP-SP-1183E).
Loader jack
The loader jack is used by the manufacturer when servicing the device.
Please do not try to use it.
E
D
C
B
A
9
1
8
7
F
6
5
4
3
2
0
mkgCF
m/h
m/min
OVER setting
SCFM kg/h
3
3
3
O
N
1 2 3 4 5 6 7 8
Reset switch
Loader jack
Station address setting switch
Communications parameters switch
7-segment display upper
7-segment display lower
Chapter 2. NAMES AND FUNCTIONS OF PARTS
CAUTION
Before pressing the reset switch, touch a metal surface such as the housing
of the device to discharge static electricity.

Chapter 3. INSTALLATION, MOUNTING, WIRING
Handling Precautions
•When connecting to the pipe, be sure to check that there is no inclination
of pipes nor any pipe center line misalignment, and then install the
device. Doing so might cause leakage.
•When mounting the device, firmly fasten to prevent vibration.
•The communication line must be separated from power lines, and do not
lay in the same conduit.
Doing so might cause faulty operation.
5
CAUTION
Prevent foreign matter from entering the device.
If the rust, water droplet, oil mist or dust in the piping flows into the
device, measurement error might occur and result in damaging the
device.
If there is a possibility that any foreign matter flows into the device,
provide a filter, strainer or mist trap capable of eliminating more than
1µm foreign matter at the upstream, and periodically inspect and
replace the filter.
This device is a precision instrument. Do not drop it nor subject it to
shock. Doing so might damage the device.
When mounting the device, firmly fasten to prevent vibration.
WARNING
If this device is used with flammable gases such as natural gas,
propane or butane, mount it on the upstream side of the safety shutoff
valve.
When air gets in the pipe and an explosive mixture is produced, and if a
sensor should make a spark due to lightning or other reasons, the
mixture may explode inside the pipe.
The mass of this device is 7 to 23kg according to the model number.
Ensure to take complete precautions and care while handling for
transportation or installation. For safe handling, two or more persons
are required while handling this device.
Accidental dropping of the device on the foot might cause injury.
Do not hold the device by the converter alone. Doing so might damage
the device, or the pipe connector section may drop off.
Do not use this device or its installed pipes as a scaffolding.
Doing so might damage the device or the pipe, or might cause physical
injury.
Do not disassemble this device.
If it is disassembled when pressure remains in the pipes, the device
could be damaged or someone could be injured by flying parts.

6
■Installation
Avoid mounting this device in the following locations:
• Locations whose ambient temperature falls below -15˚C and rises above +60˚C
• Locations whose ambient humidity exceeds 90%RH
• Locations subject to sudden changes in temperature and condensation
• Locations be filled with corrosive gases and flammable gases
•Locations where there are lots of conductive substances (e.g. dust, salt or iron
dust), or organic solvents
• Locations subject to vibration or shock
• Locations subject to splashing by fluids (e.g. oil, chemicals.)
• Locations where strong magnetic or electrical fields are generated
Handling Precautions
•Although this device can be installed outdoors, if it is installed at the loca-
tions subject to direct sunlight, be sure to provide a sunshade.
Doing so might cause faulty operation.
■Precautions for piping installation
• When this device is installed, be sure to provide the bypass piping as shown
below.
Also, for the valves before and after this device, use a ball valve like as having
the structure which does not disturb the gas flow.
Bypass piping valve
Upstream side
valve
Downstream side
valve
MVF
Chapter 3. INSTALLATION, MOUNTING, WIRING

7
• Provide a straight pipe section in upstream side and downstream side of the
installation location.
Refer to the drawings below for the length of upstream pipe section. D indicates
the connecting port size. Secure the length of more than 5D for the downstream
pipe section.
• If the oil, water or dust is contained in a fluid, install a device to remove them.
If the oil, water or dust is contained in a fluid, they might cause measurement
error or faulty operation.
Note
•Remove the water using a dryer so that it does not cause dew condensation in
the pipe.
•Use a dust-eliminating filter of less than 1µm mesh.
•Use an oil-eliminating mist separator with the eliminating capability of resid-
ual oil density less than 0.01mg/m3.
Pipe with three-
dimensional double
90°bend
Pipe with single-plane
double 90°bend
Pipe with 90°bend
Enlarging pipe
Reducing pipe
Type of Installation
Flow direction
10D min. 5D min.
10D min. 5D min.
10D min. 5D min.
10D min.
20D min.
5D min.
5D min.
Flow direction
Flow direction
Flow direction
Flow direction
Chapter 3. INSTALLATION, MOUNTING, WIRING

8
• Do not install at a location receiving the influence of pulsating flow.
Handling Precautions
•Do not install this device at the location near the exit of compressor. At
the location near the exit of compressor the strong pulsating flow is
caused and there might be a dispersing of iron powder depending on
the compressor type, there is a possibility of causing faulty operation.
As shown in the above figure, provide the devices eliminating the for-
eign matters such as oil, water and iron powder, and install a receiver
tank as the measures against pulsating flow ; at the upstream of MVF
series.
•Take effective countermeasures in case of installation near a pump or
roots blower. If this device is installed near a pump or roots blower, it
may be affected by a pulsating flow. Install a volume tank or pulsation-
damping device (muffler) between the pump or roots blower and this
device to suppress the influence of pulsation as much as possible.
•If the device is installed downstream of branched piping, it may detect
reverse flow rate. Be sure to take countermeasures as illustrated
below.
Example: In this application, Line A is operating but B is stopped.
Although the flow rate of B is essentially zero as detected
by the MVF in B, the MVF might count and integrate a false
flow rate caused by the influence of the flow in Line A.
Countermeasure 1
Install a valve on the upstream side of the MVFs if there is
an unused line, to eliminate the influence of flow in the
other line.
Countermeasure 2.
Design the system so that other devices do not receive the
output (4 to 20mA pulse) from the MVF on the unused line.
Line A
Valve Valve
Line B
MVF MVF
Line A operating
Flow path
Line B stopped
MVF MVF
Due to the influence of flow in Line A,
a false flow is detected in B.
Filter Dryer Receiver
tank
MVF
Compressor Compressor
(screw type, etc.)
MVF
Chapter 3. INSTALLATION, MOUNTING, WIRING

9
■Piping work
Handling Precautions
•When connecting to piping, be sure to check before installation that there
is no inclination or displacement of the pipes. Failure to do so might
cause leakage or measurement error.
•Be sure to flush (cleaning the inside of pipe) before installation this
device to eliminate any foreign matter which might exist inside the pipe.
•When installing, pay special attention to the flow direction.
To mount this device, sandwich it between two pipe flanges (wafer mounting).
Note that spacers should be used to prevent displacement during mounting. The
use of spacers enables proper alignment of the piping and this device. Be sure to
use the spacers.
Flowdirection
Flange
Flange
(Example: MVF100)
Gasket
Gasket
spacers
Chapter 3. INSTALLATION, MOUNTING, WIRING
WARNING
The mass of this device is 7 to 23kg according to the model number.
Ensure to take complete precautions and care while handling for
transportation or installation. For safe handling, two or more persons
are required while handling this device.
Accidental dropping of the device on the foot might cause injury.
CAUTION
Do not flush when the device is mounted in the pipe.
Doing so might cause damage due to entry of foreign matter and cause
faulty operation or errors in measurement.
When connecting flanges, tighten with the specified torque.
Otherwise gas could leak from the pipe, causing injury.

10
●Flange shape
Use a flange which can secure a large contacting area with a gasket.
●Flange connection
Tighten the flange with bolts.
Tightening torque differs by pipe size. Tighten at a torque that is within the range
specified in the table below.
(The value in parentheses
indicates the reference value.)
Handling Precautions
•Tighten bolts so that they are uniformly tightened. If leakage does not
stop after tightening bolts, gradually tighten the bolts more a little at a
time.
•Tighten bolts within the specified tightening torque.
Otherwise, the bolts may be damaged.
•Do not forcibly insert into the narrow space between the flange faces.
Doing so might cause leakage or damage.
•Six of the 8 bolts on MVF080/100/150 models require the use of a
spacer to ensure that the are correctly aligned around the pipe
connection unit (wafer) and that they match up properly with the holes
in the pipe flanges.
●Diameter of gasket
A gasket is required for flange connection.
Refer to the table below for the inside diameter of gasket.
Handling Precautions
•If the inside diameter of the gasket is too small, it might disturb the flow
straightening condition inside of this device and cause inaccuracies.
•If the inside diameter is too large, it might cause leakage.
Good example Bad example
Flange
Welded
portion
Pipe
Welded
portion
gasket (As the contacting area
with a gasket is small,
there is a fear of leakage.)
Chapter 3. INSTALLATION, MOUNTING, WIRING
Pipe size Torque Unit : N • m(kgf • cm)
50A 37 to 47 (378 to 480)
80A 26 to 36 (265 to 367)
100A 32 to 42 (327 to 429)
150A 64 to 74 (653 to 755)
Pipe size Inside diameter of gasket
(Reference value)
50A 61mm
80A 90mm
100A 115mm
150A 167mm

11
■Wiring
Handling Precautions
•Be sure to separate the communications wires from power lines, which
should not be laid in the same electrical conduit.
There are two wiring methods, direct cable lead-out and use of an electrical wiring
conduit.
When installing the device outdoors, be sure to use a conduit.
●Tools required
Phillips-head screwdriver, adjustable wrench (spanner)
●Procedure for direct cable lead-out
(1) Select a wiring connection port.
Handling Precautions
•There are 2 wiring connection ports. One port has a red cap and the
other has a plug. Decide whether to use one port or 2 ports depending
on the number of cables or desired separation of signal wires.
(2) Remove the red cap from the wiring connection port. When leading out the
wiring from two ports, remove the plug also.
Chapter 3. INSTALLATION, MOUNTING, WIRING
CAUTION
When connecting the load to the output terminals, do not exceed the
rated value shown in the specifications.
Doing to do so might cause the damage of this device.
Before wiring, be sure to turn the power OFF.
Before supplying power, be sure to check that there is no wiring error. A
wiring error might damage the device or cause a dangerous condition.
Red cap
Plug

12
(3) Remove the terminal cover.
(4) Put the packing on the supplied waterproof gland.
(5) Pass the cable through the waterproof gland, and mount the waterproof gland
in the wiring connection port.
Handling Precautions
•Never remove the packing from the waterproof gland.
•Use a cable that is 6 to 12mm in diamater.
(6) Connect the wiring to the terminal block.
(7) Put the terminal cover back in place.
●Procedure for using an electrical wiring conduit
The wiring connection port thread is G1/2.
(1) Select a wiring connection port.
Handling Precautions
•There are 2 wiring connection ports. One port has a red cap and the
other has a plug. Decide whether to use one port or 2 ports depending
on the number of cables or desired separation of signal wires.
Chapter 3. INSTALLATION, MOUNTING, WIRING