Azbil V8 User manual

Thank you for purchasing your Azbil
Corporation product.
This manual contains information for
ensuring the safe and correct use of
the product.
Those designing or maintaining
equipment that uses this product
should first read and understand
this manual. This manual contains
information not only for installation,
but also for maintenance,
troubleshooting, etc. Be sure to keep it
nearby for handy reference.
(Not for use in Japan) No. CP-SP-1471E
Sapphire Capacitance
Diaphragm Gauge
Model V8
User’s Manual
for EtherCAT
Communication Functions

NOTICE
Please make sure that this manual is available to the user of the product.
Unauthorized duplication of this user’s manual in part or in whole is
forbidden. The information and specifications in this manual are subject to
change without notice.
Considerable effort has been made to ensure that this manual is complete
and accurate, but if you should find an omission or error, please contact us.
In no event is Azbil Corporation liable to anyone for any indirect, special, or
consequential damages as a result of using this product.
© 2022 Azbil Corporation. All Rights Reserved.
EtherCAT® is a registered trademark and the patented technology is licensed from
Beckhoff Automation GmbH, Germany.

i
The safety precautions explained below aim to prevent injury to you and others, and to prevent property damage.
WARNING Warnings are indicated when mishandling this product may
result in death or serious injury.
CAUTION Cautions are indicated when mishandling this product may
result in minor injury or property damage only.
In describing the product, this manual uses the icons and conventions listed below.
Indicates that caution is required in handling.
The indicated action is prohibited.
Be sure to follow the indicated instructions.
Handling Precautions:
Information to be aware of when handling.
Note: Indicates information that may be useful.
: Indicates an item or page to which the user may refer.
Conventions Used in This Manual

ii
There are four different manuals related to model V8. Read them as necessary for your specific requirements.
If you do not have a manual you require, please contact us or one of our dealers.
Sapphire Capacitance Diaphragm Gauge Model V8 User’s Manual for
EtherCAT Communication Functions
Document No. CP-SP-1471E
This manual.
This manual provides information necessary for EtherCAT slave communication using
the model V8 sapphire capacitance diaphragm gauge. Be sure to read this manual when
using EtherCAT communication.
The manual covers the basics of communication, as well as object dictionaries,
exception status, and ESI files.
Sapphire Capacitance Diaphragm Gauge Integrated Model V8C
User’s Manual
Document No. CP-UM-5998JE
Sapphire Capacitance Diaphragm Gauge Separated Model V8S
User’s Manual
Document No. CP-UM-5999JE
Personnel in charge of the design and/or manufacture of equipment that uses
the model V8 sapphire capacitance diaphragm gauge should read this manual
thoroughly. The manual covers safety precautions, installation, wiring, and
primary specifications.
User’s Manual for Smart Loader Package Model SLP-V8 for Sapphire
Capacitance Diaphragm Gauge Model V8
Document No. CP-SP-1472E
This manual describes the software used on a personal computer to configure
the model V8 sapphire capacitance diaphragm gauge. Personnel in charge of
design and/or manufacturing of equipment that uses the V8 should read this
manual thoroughly.
This manual also describes the installation of the software on a personal
computer, the operation of the PC, various functions, and setup procedures.
The Role of This Manual

iii
EtherCat®is an Ethernet-based real-time fieldbus system proposed and developed by Beckhoff Automation GmbH,
Germany. Since it is based on the Ethernet protocol, general-purpose Ethernet cables can be used when setting up a
network.
EtherCAT Communication

iv
Conventions Used in This Manual
The Role of This Manual
EtherCAT Communication
Chapter 1. Overview 1-1
 The EtherCAT interface 1-1
 Definition of terms 1-1
 Appearance 1-2
 Connector pin assignment 1-3
 Cable and connection method 1-3
 LED indicator and switches 1-4
 Pressure value 1-6
 Trip point 1-6
 Event output 1-8
 PDO mapping 1-10
Chapter 2. Object Dictionary 2-1
 Communication Profile Objects (0x1000–0x1FFF) 2-3
 Sync Manager Parameter (0x1C32, 0x1C33) 2-5
 Manufacturer-Specific Profile Objects (0x2000–0x5FFF) 2-5
 Input Area (0x6000–0x6FFF) 2-11
 Output Area (0x7000–0x7FFF) 2-12
 Configuration Area (0x8000–0x8FFF) 2-12
 Information Area (0x9000–0x9FFF) 2-15
 Device Area (0xF000–0xFAFF) 2-16
 Manufacturer Error/Warning (0xF384.0x01, 0xF382.0x01) 2-20
 Device Command (0xFB00–0xFBFF) 2-23
 Zero point adjustment process 2-25
 Zero Adjust command operation 2-26
 Diagnosis History 2-27
 Other 2-29
Chapter 3. Exception Status 3-1
 Error 3-1
 Alarm 3-2
 Warning 3-2
 Info 3-4
Chapter 4. ESI File 4-1
Chapter 5. Troubleshooting 5-1
 Judgment based on the EtherCAT ERROR LED lighting 5-1
Contents

v
Appendix App.-1
 Reference materials App.-1
 EtherCAT terms App.-2

1-1
Chapter 1. Overview
 The EtherCAT interface
Item Description Notes
Communication
protocol
A special protocol for EtherCAT –
Communication
standards
IEC 61158-2 (Ed. 4.0)
IEC 61158-3/4/5/6-12 (Ed 1.0)
–
Data rate 100 Mbps –
Device identification
method
Explicit Device Identification is supported. Rotary switches for ID selector
Physical layer 100BASE-Tx (IEEE 802.3) –
Connector RJ-45 8-pin socket × 2
<IN> EtherCAT input
<OUT> EtherCAT output
–
Cable Sealed twisted pair (STP) cable with Cat. 5e or higher Either a straight cable or a crossover
cable can be used.
Cable length 30 m max. –
Applicable profile Semiconductor Device Profile –Part 1 Common
Device Profile
ETG.5003-1 S(R) V1.1.0
Semiconductor Device Profile –Part 2080
Specific Device Profile: Vacuum Pressure Gauge
ETG.5003.2080 S (R)
V1.3.0 | 1.5.0 (OD)
Mailbox (CoE) SDO data access with CoE is supported –
Synchronization mode FreeRun, SM synchronization Cycle: 0.27 ms
Topology Line, tree, star, daisy chain –
 Definition of terms
Term Description
Model with self-heating function The temperature of the gauge head is controlled.
Specify by model number.
Model without self-heating function The temperature of the gauge head is not controlled.
Specify by model number.
Model with variable self-heating
temperature
The temperature of the gauge head is controlled and the temperature setting
can be changed.
Specify by model number.
Smart Loader Package Software that runs on a PC and is necessary for monitoring the internal data
of this product and for configuring the settings
(model number: SLP-V8_ _ _ _ _ _)
Note
• EtherCAT terms (p. App.-2) (for terms related to EtherCAT)

1-2
Chapter 1. Overview
 Appearance
Separated model Integrated model
L/A
L/A
ID
10
2
1
12
3
4
5
6
7
8
9
11
13
14
15
10
12
2
1
3
4
5
6 7
9
8
11 13
14
No. Label Description
1 IN EtherCAT IN connector
2 OUT EtherCAT OUT connector
3 ID × 100 Rotary switches for ID selector ×100 (hex.)
4 ×10 Rotary switch for ID selector ×10 (hex.)
5 ×1 Rotary switch for ID selector ×1 (hex.)
6 L/A Link Activity EtherCAT IN
7 L/A Link Activity EtherCAT OUT
8 RUN EtherCAT status LED
9 ERR EtherCAT error LED
10 PWR Sensor cable connector
(power, analog output, relay output, DI)
11 EV1, EV2 Event relay output LED
12 EXT Loader jack
13 AUTO/DOWN/UP, AUTO/–ZERO+ Zero point adjustment button
14 STATE State LED
15 Gauge head Gauge head connector

1-3
Chapter 1. Overview
 Connector pin assignment
The network ports of this device are used as follows.
Pin No. Signal Description
1 TX +Transmitted data (+)
2 TX − Transmitted data (−)
3 RX +Received data (+)
4 – 75 Ω terminating resistor
connection
5 – 75 Ω terminating resistor
connection
6 RX − Received data (−)
7 – 75 Ω terminating resistor
connection
8 – 75 Ω terminating resistor
connection
 Cable and connection method
A shielded twisted pair (STP) cable of Cat. 5 or higher category can be used. Either
a straight cable or a crossover cable can be used.
Connect the network cable from the master device to the IN port (RJ connector) of
this device. Additionally, if this device has a slave on the downstream side, connect
the OUT port (RJ connector) of this device to the IN port of the slave device with a
network cable.
Handling Precautions
• Do not use the EtherCAT communication network for other Ethernet
communications.
Connector on this device

1-4
Chapter 1. Overview
 LED indicator and switches
z LED
LED Color LED state Description
RUN Green Off The device is in initialization (INIT) status or is not turned on.
Blinking Pre-operational status (PREOP)
Single flash Safe-operational status (SAFEOP)
Communication of cyclic data is in progress.
The input data (TxPDO) is valid, but the output data (RxPDO) is not output.
Note: Data sent from the master (RxPDO) will not be saved on the V8.
Flickering BOOT (Bootstrap status)
ERR Red Off An EtherCAT error has not occurred or the device is not turned on.
Blinking An EtherCAT error has occurred (incorrect setting).
Single flash An application error in the device has changed the requested EtherCAT
state.
Double flash Timeout of sync manager watchdog has occurred.
On
Lit when a PDI watchdog timeout has occurred.
Note that this functionality is not supported by this device.
STATE Green On Operating normally
Blinking Warning
Red On Error
Blinking Alarm
Orange On Heater warm-up in progress
Green/red/
orange
–Zero point adjustment in progress ( Sapphire Capacitance Diaphragm
Gauge Integrated Model V8C User’s Manual (CP-UM-5998JE) and
Sapphire Capacitance Diaphragm Gauge Separated Model V8S User’s
Manual (CP-UM-5999JE))
– Off Powered off
EV1, EV2 Green On Output from the corresponding event relay (1–2) is turned on.
Off Output from the corresponding event relay (1–2) is turned off.
EV1 and EV2 are lit
alternately
An initialization error has occurred, BOOT (Bootstrap status)
L/A Green Off The cable is not connected to the ports or the device is not turned on.
Flickering The cable is connected to the ports and the device is communicating.
On The cable is connected to the ports but there is currently no
communication activity.
RUN/ERR LED state definition ON/OFF duration
Blinking 200 ms ON, 200 ms OFF
Single flash 200 ms ON, 1000 ms OFF
Double flash 200 ms ON, 200 ms OFF, 200 ms ON, 1000 ms OFF
Flickering 50 ms ON, 50 ms OFF

1-5
Chapter 1. Overview
z Rotary switches for ID selector
To specify an EtherCAT device ID, use the three rotary switches with hexadecimal
symbols (0–F). The specified value is used as an Explicit Device Identification, as
defined in the EtherCAT specifications.
The switches with ×100, ×10, and ×10 labels correspond to the 3rd, 2nd, and 1st
digit of a hexadecimal number respectively.
The master device can obtain an ID by reading an Explicit Device Identification or
a station alias specified in the SII.
Ex.: If the rotary switches for ID selector are set as shown below, the device ID is
0x100 × 0xC + 0x10 × 0xC + 0x1 × 0xC = 0xCCC (3276 in decimal notation).

1-6
Chapter 1. Overview
 Pressure value
The pressure (“Value”) is calculated with the following formula, using the pre-
compensation pressure:
Pressure = GCS × (pre-compensation pressure + AZO) + OCS
The values of GCS, AZO, and OCS are determined by the following objects.
Term Name Index Subindex Access*1
Value Pressure 0x6000 0x11 RO
GCS Gain Customer Specified 0x8001 0x13 RW
AZO*2, 3 Accumulated Zero Offset 0x9000 0x01 RO
OCS Offset Customer Specified 0x8001 0x12 RW
*1. RO: read only, RW: read and write
*2. AZO is a read-only object for the zero point adjustment value, so data cannot be
directly written to it from EtherCAT.
*3. The value can be changed by pressing the zero point adjustment buttons. (
Sapphire Capacitance Diaphragm Gauge Integrated Model V8C User’s Manual (CP-UM-
5998JE) and Sapphire Capacitance Diaphragm Gauge Separated Model V8S User’s
Manual (CP-UM-5999JE))
 Trip point
Two trip points are provided by default, and up to four can be configured.
The behavior of trip points are shown below.
Measurement signal
High Trip PointHigh Trip Point
High Trip
Hysteresis
Low Trip
Hysteresis
Low Trip PointLow Trip Point
in-
active
in-
active
active active inactive
Time t
(Pressure p)
Trip points 1 and 2 are objects defined in ETG.5003.2080, Vacuum Pressure Gauge.
Trip points 3 and 4 are extended functions provided by this device, so they do not
support some of the functions found in trip points 1 and 2.

1-7
Chapter 1. Overview
The functions available for each trip point are indicated in the table below.
TPn means the number n trip point (n= 1, 2, 3, or 4).
✓: supported
– : not supported
Name TP1/TP2 TP3/TP4
High Trip Enable ✓
Low Trip Enable ✓ ✓
Polarity ✓ ✓
Override enable ✓–
Override High Trip ✓–
Override Low Trip ✓–
High Trip Point Limit ✓ ✓
Low Trip Point Limit ✓ ✓
High Trip Hysteresis ✓ ✓
Low Trip Hysteresis ✓ ✓
Note
• For assignment of objects, refer to Chapter 2. Object Dictionary.

1-8
Chapter 1. Overview
 Event output
This device has four (PhotoMOS) event output ports.
The following functions can be assigned to an event.
The polarity of the output can be changed.
Name Abbrev. Function selection
Event 1 EV1 • Outputs trip point (TP1)
• Outputs trip point (TP1) or warm-up*
Event 2 EV2 • Outputs trip point (TP2)
• Outputs trip point (TP2) or warm-up*
Event 3 EV3 • Outputs trip point (TP3)
• Outputs warm-up status
Event 4 EV4 • Outputs trip point (TP4)
• Outputs error or alarm status
• Outputs latched error or alarm status
* The function cannot be specified by EtherCAT communication. Use the Smart Loader
Package.
z Trip point output
Trip points can be assigned to event outputs.
Note
• Trip point (p. 1-6) (for details of trip points)
Function name Description Objects related to
settings
Outputs trip point (TP1) The result of OR (logical sum) operation of TP1 “High Trip Point
Limit: ON”and “Low Trip Point Limit: ON”is output.
0x800E
Outputs trip point (TP2) The result of OR operation of TP2“High Trip Point Limit: ON”and
“Low Trip Point Limit: ON”is output.
0x800F
Outputs trip point (TP3) The result of OR operation of TP3“High Trip Point Limit: ON”and
“Low Trip Point Limit: ON”is output.
0x4001
Outputs trip point (TP4) The result of OR operation of TP4“High Trip Point Limit: ON”and
“Low Trip Point Limit: ON”is output.
0x4002
The relationship between trip point output and event output is shown below.
Trip point output
Event output
Output polarity: positive Output polarity: negative
OFF Open Closed
ON Close Open

1-9
Chapter 1. Overview
z Warm-up status output
Warm-up completion status is output. The definition differs depending on the model.
Warm-up status output
Product
Model with self-heating function Model without self-heating
function
OFF Warm-up is not completed.* Always ON
ON Warm-up is completed.*
* Warm-up is complete when the following condition is met:
• The self-heating temperature is ±1 °C of the setting.
The relationship between warm-up status output and event output is shown below.
Warm-up status output
Event output
Output polarity: positive Output polarity: negative
OFF Open Close
ON Close Open
z Error/alarm status output
The error/alarm status is output.
Error/alarm status output Description
OFF An error or alarm has occurred.
ON No error or alarm has occurred.
The relationship between error/alarm status output and event output is shown below.
Error/alarm status output
Event output
Output polarity: positive Output polarity: negative
OFF Open Close
ON Close Open
z Latched error/alarm status output
Latched error/alarm status is output.
Latched error/
alarm status output
Description
OFF There is a latched error or alarm.
ON There is no latched error or alarm.
The relationship between latched error/alarm status output and event output is
shown below.
Latched error/
alarm status output
Event output
Output polarity: positive Output polarity: negative
OFF Open Close
ON Close Open

1-10
Chapter 1. Overview
 PDO mapping
The default TxPDO mapping is as follows.
PDO Index PDO
SubIndex
PDO Entry
Index
PDO Entry
Subindex
Data type Name
0x1A00 0x01 6001 0x01 BOOL Reading Valid*1
0x02 6001 0x02 BOOL Overrange Exceeded
0x03 6001 0x03 BOOL Underrange Exceeded
0x04 0000 0x00 Bit 5 (Padding bits)
0x05 6000 0x11 FLOAT Sensor Value*2
0x06 F641 0x01 UINT Trip Point Output All Instance
0x1BFE 0x01 F380 – USINT Active Exception Status
0x02 F641 0x01 UINT Trip Point Output All Instance
*1. The reading is valid if all of the following conditions are met:
• No error or alarm has occurred.
• The sensor value is within the accuracy-guaranteed range.
• The self-heating temperature is ±1 °C of the setting (this condition applies only to models with self-heating
function)
This is not affected by whether the trip point (TP) is valid or invalid.
*2. The sensor value is not guaranteed if reading validity is set to Invalid.
There is no default RxPDO mapping.
TxPDO: 16 entries max.
RxPDO: 4 entries max.
Handling Precautions
• Set the communication cycle of the master device to 200 µs or more. If it is set
to less than 200 µs, malfunction of the product may result.

2-1
Chapter 2. Object Dictionary
The general structure of the CoE object dictionary is as follows (all the index numbers in the following tables are in
hexadecimal notation).
Index Object dictionary areas
1000–1FFF Communication profile area
2000–5FFF Manufacturer-specific profile area
6000–6FFF Input area
7000–7FFF Output area
8000–8FFF Configuration area
9000–9FFF Information area
A000–AFFF Diagnosis area
B000–BFFF Service transfer area
C000–EFFF Reserved area
F000–FFFF Device area
Note
• For object dictionary (OD) specifications, refer to the following documents:
• ETG.1000.5 S (R) V1.0.4: EtherCAT Specification, Part 5
• ETG.5001.1 S (D) V0.9.0: Part 1: General MDP Device Model
• ETG.5003-1 S (R) V1.1.0: Semiconductor Device Profile, Part 1:
Common Device Profile
• ETG.5003.2080 S (R) V1.3.0 | 1.5.0 (OD): Part 2080: Specific Device
Profile: Vacuum Pressure Gauge
Handling Precautions
• Values written to the objects shown below will be valid immediately.
Index Name
8001 Configuration Capacitance Diaphragm
800E Configuration Trip Point 1
800F Configuration TripPoint 2
• Values written to the objects shown below will not be valid immediately.
To make the new settings valid, execute the Store Parameters Command
(0xFBF2).
Index Name
4000 Analog output Configuration
4001 Relay 3 configuration
4002 Relay4 configuration
4003 Misc.configuration
F840 Configuration Device

2-2
Chapter 2. Object Dictionary
• The value of an object with Access = RW and nv (nonvolatile) attributes can be
stored in nonvolatile memory (NVRAM). To do so, execute the Store Parameters
Command (0xFBF2). Note that, if the power is turned off or the setting is reset
without saving the value to NVRAM, a change in the value will be invalid (the
setting will revert to the previously stored value).
• Be sure to write a value within the setting range to an object. If a value outside
the range is written, operation will be unreliable. Also, a user parameter alarm
(A01) or user parameter warning (W01) may occur.
• If values are written simultaneously from EtherCAT and the Smart Loader
Package to the same object, the resulting setting will be uncertain, which
may cause unreliable operation of the product. Make sure that values are not
written simultaneously to the same object from EtherCAT and from the Smart
Loader Package.