Azbil SPG Series User manual

1
CP-SP-1400E
Sapphire Capacitance Diaphragm Gauge
Model SPG _ _
User’s Manual
Thank you for purchasing an Azbil Corporation product.
This manual contains information for ensuring the correct use
of this product. It also provides necessary information for in-
stallation, maintenance, and troubleshooting.
This manual should be read by those who design and main-
tain equipment that uses this product.
Be sure to keep this manual nearby for handy reference.
Please read “Terms and Conditions”from the following URL
before ordering and use.
https://www.azbil.com/products/factory/order.html
NOTICE
Be sure that the user receives this manual before the product
is used.
Copying or duplicating this user’s manual in part or in whole is
forbidden. The information and specifications in this manual
are subject to change without notice.
Considerable effort has been made to ensure that this manual
is free from inaccuracies and omissions. If you should find an
error or omission, please contact the azbil Group.
In no event is Azbil Corporation liable to anyone for any
indirect, special or consequential damages as a result of using
this product.
SAFETY PRECAUTIONS
Safety precautions are for ensuring safe and correct use of
this product, and for preventing injury to the operator and
other people or damage to property. You must observe these
safety precautions. Also, be sure to read and understand the
contents of this user’s manual.
lKey to symbols
WARNING
Warnings are indicated when mishandling this prod-
uct might result in death or serious injury to the user.
CAUTION
Cautions are indicated when mishandling this product
might result in minor injury to the user, or only physi-
cal damage to this product.
WARNING
The burst pressure is the pressure at which this device
will break. To avoid an accident, never apply pressure
exceeding the burst pressure.
Do not use this device in explosive atmospheres or
near flammable fluids or steam.
WARNING
Always use the specified fittings and gaskets. After
the piping work has been completed, check that there
are no gas leaks before operating the device.
The surface of this device is very hot while the power
is ON and for a while after the power has been turned
OFF. To avoid a burn, do not touch it during this pe-
riod. When removing this device, turn the power OFF
and allow sufficient time for it to cool. If there is a
chance that work personnel will come in contact with
this device after installation, take appropriate coun-
termeasures. (Self-heating models)
CAUTION
Use the device within the operating ranges recom-
mended in the specifications (temperature, humidity,
voltage, atmosphere, etc.).
Using it outside these ranges might cause fire or de-
vice failure.
When wiring the power for this device, be sure to in-
stall a master cut-off switch for the electrical power
within easy reach of the operator.
Wire the device properly according to the standards
given in this document, using the specified power
source and installation methods. Not doing so might
result in fire or device failure.
Do not allow wire or solder clippings, water, etc. to
enter the case of this device. They could cause fire or
device failure.
Do not the block ventilation holes. Doing so might
cause fire or device failure.
Use the relays in this device within the operating
ranges recommended in the specifications. Otherwise,
fire or device failure may result. If there is a possibility
that the device will be used in conditions that are out-
side the range of the specifications, take appropriate
countermeasures.
OVERVIEW
The device is a capacitance diaphragm vacuum gauge that uses a
sapphire capacitance pressure sensor to achieve high accuracy and
reliability, compact size, and light weight. Self-heating and non–self-
heating models are available. On self-heating models, the heating
temperature can be selected. The device is especially suited for use in
semiconductor manufacturing. It features the following:
• A single-crystal sapphire pressure sensing medium, offering excel-
lent corrosion resistance, ability to withstand high temperatures,
and excellent mechanical characteristics. The capacitive measure-
ment design provides high repeatability even when used in a high-
temperature environment.
• Small size and light weight, achieved by micromachining technology.
• Advanced signal processing technology, contributing to excellent
temperature characteristics and linearity of measurement.
• Microprocessor-based digital PID, providing fast warm-up time
and stable sensor temperature control. (Self-heating models)
• A wide range of supply power voltages.
• Easy zero point adjustment with automatic adjustment button or
up/down zero adjustment buttons.
• Model SLP-SP5 Smart Loader Package (sold separately), for easy
monitoring of the device and setting of its parameters from a PC.
• Equipped with three event relays. Relay settings can be changed eas-
ily with the Smart Loader Package (model SLP-SP5, sold separately).
• Conformity to EMC directives; CE-marked; compliance with
EN61326-1 and EN61326-2-3.
For information on the model SLP-SP5 Smart Loader Package,
refer to User’s Manual for Smart Loader Package Model SLP-SP5
for Sapphire Capacitance Diaphragm Gauge Model SPG _ _
(CP-UM-5499E).

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Model selection table
I II III IV V VI VII VIII
Example: SPG5AT11HD500500
Basic
model No Type Additional
function
Pressure
range
Self-heating
temperature Fitting Event 1
setting
Event 2
setting
SPG Sapphire capacitance diaphragm gauge
5 Standard model
6 Extra high-temperature model
7 Vacuum freeze-drying process model
8 High temperature heating model
A Standard model
B Atomic Layer Deposition (ALD) model
C ANTI-Deposition Model
_ _ _ Refer to the table on the left
R Without self-heating function
A 45°C
C 100°C
D 125°C
E 150°C
F 160°C
G 180°C
H 200°C
K 230°C
L 260°C
M 280°C
A 1/2inch gauge port
D 8VCR (female) equivalent (SUS316L with electrolytic grinding)
E NW16
H IDF 1.5S ferrule
J IDF 2S ferrule
P 1/2inch gauge port, with traceability certificate
S 8VCR (female) equivalent (SUS316L with electrolytic grinding), with
traceability certificate
T NW16, with traceability certificate
W IDF 1.5S ferrule, with traceability certificate
Y IDF 2S ferrule, with traceability certificate
*** **.*%FS Always OFF if“NNN”is specified.
*** **.*%FS Always OFF if“NNN” is specified.
Possible model No. combinations
IV: Pressure range
III I + II + III T1R T2R T2S T10 T20 T30 T11 T21 T31 T51 T12 T22 T13
I + II A B C P21 P2S P12 P22 P32 P13 P23 P33 P53 P14 P24 P15
SPG5   SPG5A  
SPG6  SPG5C         
SPG7 SPG6A  
SPG8 SPG6B      
SPG6C         
SPG7A        
SPG8A   
V: Self-heating temperature VI: Fitting
I + II + III R A C D E F G H K L M I + II + III A D E H J P S T W Y
SPG5A   SPG5A        
SPG5C **  SPG5C    
SPG6A  SPG6A        
SPG6B * SPG6B  
SPG6C *  SPG6C    
SPG7A SPG7A    
SPG8A    SPG8A  
*IV (pressure range) must be less than 100 Pa.
Note: If a model No. combination that is not listed as possible is needed, please contact the azbil Group.
Pressure
code
FS pressure ranges
(absolute pressure)
T1R 13.332 Pa
T2R 26.664 Pa
T2S 33.331 Pa
T10 133.32 Pa
T20 266.64 Pa
T30 399.96 Pa
T11 1333.2 Pa
T21 2666.4 Pa
T31 3999.6 Pa
T51 6666.1 Pa
T12 13332 Pa
T22 26664 Pa
T13 133.32 kPa
P21 20 Pa
P2S 25 Pa
P12 100 Pa
P22 200 Pa
P32 300 Pa
P13 1000 Pa
P23 2000 Pa
P33 3000 Pa
P53 5000 Pa
P14 10000 Pa
P24 20000 Pa
P15 100 kPa

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Part names
ev1 ev2 ev3
zero auto down up/
status
D-sub 15-pin connector (male)
Set screw (#4-40UNC)
Event relay LED
Status LED
Auto zero point
adjustment button
Zero point adjustment button (up)
Zero point adjustment button (down)
Loader jack
Smart Loader communication function
This device can be monitored and its parameters changed easily
from a PC using the model SLP-SP5 Smart Loader Package.
For more detail, refer to User’s Manual for Smart Loader
Package Model SLP-SP5 for Sapphire Capacitance Diaphragm
Gauge Model SPG _ _ (CP-UM-5499E).
Monitoring Pressure monitor
Model SPG_ _ internal status monitor
• Temperature of electronics circuit and of sensor head;
DC supply voltage
• Alarm status, failure status
Adjustment Bias compensation
Ratio compensation
Configuration 0 to 10V
output
settings
0V pressure for 0-10V output
10V pressure for 0-10V output
0-10V output value (abnormal status)
Conditions for 0-10V output (abnormal status)
Event
relay
settings
Always OFF.
Normal status: ON, Abnormal status: OFF.
Normal status: OFF, Abnormal status: ON.
Normal status: ON, Abnormal status: latch OFF.
Normal status: OFF, Abnormal status: latch ON.
Warm-up done: ON,
Warm-up in progress or abnormal status: OFF.
Warm-up done: OFF,
Warm-up in progress or abnormal status: ON.
Warm-up done: ON, In progress: OFF,
Abnormal status: OFF latch.
Warm-up done: OFF, In progress: ON,
Abnormal status: ON latch.
Pressure high limit (direct action)
Pressure low limit (direct action)
Pressure high limit (reverse action)
Pressure low limit (reverse action)
Deviation high/low limit (Direct action)
Deviation high/low limit (Reverse action)
1st order filter time constant
Instrumentation
check
0 to 10V output simulation
Event simulation
• Operation charts for pressure interlock of event relay
Hysteresis
Pressure high limit (Direct action)
Setpoint
Pressure0 FS
ON
OFF
Pressure low limit (Direct action)
Hysteresis
Setpoint
Pressure0 FS
ON
OFF
Pressure low limit (Reverse action)
Hysteresis
Setpoint
Pressure0 FS
ON
OFF
Deviation high/low limit (Reverse action)
Hysteresis
Hysteresis Hysteresis
Pressure high limit (Reverse action)
Setpoint
Pressure0 FS
ON
OFF
Deviation Deviation
Hysteresis Hysteresis
Setpoint
Pressure
0 FS
ON
OFF
Deviation Deviation
Deviation high/low limit (Direct action)
Setpoint
Pressure
0 FS
ON
OFF
INSTALLATION
WARNING
Always use the specified fittings and gaskets. After the
piping work has been completed, check that there are no
gas leaks before operating the device.
When installing models with a VCR fitting on the pipe,
tighten the nut by hand, and then tighten it with a
wrench an additional 1/8 turn for an SUS316 stainless
steel or nickel gasket, or 1/4 turn for a copper gasket.
Excessive tightening may damage the seal. When you
retighten the nut, always replace the gasket with new
one. Before starting installation work, refer to the user’s
manual provided by the fitting manufacturer for cautions
and the method of use. An incorrect pipe connection may
lead to gas leaks.
CAUTION
Use the device within the operating ranges recom-
mended in the specifications (for temperature, humidity,
voltage, atmosphere, etc.). Using it outside these ranges
might cause fire or device failure.
Installation locations
Do not install this product in a place with any of the following
characteristics:
• Temperature or humidity outside the specified high and low limits
• Corrosive gases such as sulfide gas
• Dust or soot
• Direct sunlight, wind, or rain
• Mechanical vibration or shock outside the range of the
specifications
• Proximity to high-voltage lines, welding machines, or other sources
of electrical noise
• Within 15 m of a high-voltage ignition device for a boiler, etc.
• Strong magnetic fields
• Explosive atmosphere, and near flammable fluids or steam.
Installation
When connecting this device to the piping, always use the specified
fittings and gaskets, and check for leaks after installation is complete.
There are no limitations on mounting angle. However, since a zero-
shift may occur at some angles, be sure to adjust the zero point after
installation.
Handling Precautions
• Vibration may move the device’s pressure-sensitive
diaphragm, causing the pressure reading to fluctuate.
Therefore, take appropriate measures so that this device is
not subject to vibration. In particular, guard against vibra-
tion that would move the device along its axis (e.g., up-and-
down vibration, if the device is mounted vertically).
• When installing, attach the fitting firmly, taking care not to
apply any force to the case. Application of force to the case
might break the device.
• This is a precision instrument. Do not drop it or bump it
against any object. Application of any shock to this device
might adversely affect its performance.
• The operating ambient temperature range varies depend-
ing on the presence or absence of cooling air. Install an ap-
propriate cooling fan as necessary.
Note
• This device was calibrated at the factory in a verti-
cal position. Shift of the zero point may have oc-
curred, depending on the mounting angle. In such
a case, accuracy can be recovered by adjusting the
zero point after installation. Vertical installation is
recommended to prevent contaminants from ac-
cumulating on the sensor unit.
8VCR継手

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WIRING
WARNING
The surface of this device is very hot while the power is ON
and for a while after the power has been turned OFF. To avoid
a burn, do not touch it during this period. When removing
this device, turn the power OFF and allow sufficient time for
it to cool. If there is a chance that work personnel will come
in contact with this device after installation, take appropriate
countermeasures. (Self-heating models)
CAUTION
Wire the device properly according to the standards given in
this document, using the specified power source and installa-
tion methods. Not doing so might result in fire or device failure.
Do not allow wire clippings, shavings, water, etc. to enter the
case of this device. They could cause fire or device failure.
When wiring the power for this device, be sure to install a
master cut-off switch for the electrical power within easy
reach of the operator.
Be sure to use a cable that adequately satisfies the require-
ments for operating ambient temperatures.
Wiring Precautions
• Before wiring, mounting, or removing the device, be sure to turn the
power OFF.
• Before starting the wiring work, check the model No. of this device and
the connector pin assignments (see page 4). Make sure that the wiring
is correct.
• Devices or systems to be connected to the device must have basic insu-
lation sufficient to withstand the maximum operating voltage levels of
the power supply and input/output components.
• Use a power supply suitable for instrumentation, and make sure that
noise does not adversely affect this device.
• Use a power supply with a rated current equal to or greater than the
maximum power current specified on p.6 of this document.
• Use shielded cables for the wiring.
• Be sure to connect a ground wire to the frame ground.
• Use a power supply, connectors, and cables with appropriate ratings for
voltage, current, etc. Make sure that the voltage at the connector of this
device is within the specified power voltage range.
• Take care not to wire incorrectly. Wrong wiring may cause device
failure.
• This device does not function for up to 10s after the power has been
turned on. Great care should be taken when the relay output from this
device is used as an interlock signal.
• Do not connect multiple Smart Loader cables connected to multiple
device units to one personal computer at the same time. The current
coming from other circuits might cause an output value indication
error to occur.
• Do not use excessive force to push in or pull out cables. Otherwise de-
vice failure may result.
WIRING
lConnector pin assignments (D-sub 15-pin)
Pin No. Name
1 Event relay 3 (COM)
2 Output (+)
3 Power supply (COM)*1*2
4 Event relay 2 (COM)
5 Power supply (−)*1
6 Event relay 3 (NO)
7 Power supply (+)
8 Event relay 3 (NC)
9 Event relay 2 (NO)
10 Event relay 2 (NC)
11 Event relay 1 (COM)
12 Output (COM)*2
13 Event relay 1 (NO)
14 Event relay 1 (NC)
15 FG*3
lExample of external connection
• ±15V DC (dual power supplies)
Power supply (+)
Power supply (COM)
Power supply (−)
15 V DC
15 V DC
7
3
5
• 24V DC (single power supply)
Output (+)
Output (COM)
Event
relay 1
Event
relay 2
Event
relay 3
FG
Connector hood
Load
Receiving instrument
2
12
13
11
8
1
6
10
4
9
14
15
Load
Shield
30 V DC
or less
Load
Load 30 V DC
or less
Load
Load 30 V DC
or less
Ground
Power supply (+)
Power supply (COM)
Power supply (−)
24 V DC
*1
7
3
5
*1 If using a single 24V DC input power supply, connect the power COM
to the power“–“.
*2 The power COM and output COM are internally connected. If using a
single 24V DC input power supply, do not connect the power COM
and output COM together. Also, take care to avoid any wrong wir-
ing that may cause a short circuit in other equipment. If the wiring is
connected incorrectly, current from the power supply will also flow
through the output line, and the voltage drop from wiring resistance
may cause a measurement error.
*3 The FG is electrically continuous with the case, but is insulated from
the power COM, output COM, and other terminals.
Note
• Event relay connection
NO
COM
NC
OFF
NO
COM
NC
ON
When the power supply is turned off the event relay is turned off.
ADJUSTMENT AND STARTUP
WARNING
The surface of this device is very hot while the power is ON
and for a while after the power has been turned OFF. To
avoid a burn, do not touch it during this period. (Self-heating
models)
CAUTION
Do not the block ventilation holes. Doing so might cause fire
or device failure.
Use the relays in this device within the operating ranges
recommended in the specifications. Otherwise, fire or device
failure may result. If there is a possibility that the device will
be used in conditions that are outside the range of the speci-
fications, take appropriate countermeasures.
Turning the power ON
Use this device after warm-up is complete, 1 hour or more after turning
the power ON.
• If warm-up is not finished, the status LED is orange.
• When warm-up is complete, the status LED turns green.
Handling Precautions
• This device does not satisfy specifications for accuracy during
the warm-up period after the power has been turned ON, be-
fore the self-heating temperature has stabilized. Always use this
device after warm-up is complete.
• If any problem with the operating environment (power voltage,
ambient temperature, etc.) is detected during the self-diagno-
sis of this device, the status LED starts to flash red. If this occurs,
turn off the power and check the instrumentation status.

5
• If any internal error is detected during the self-diagnosis of this
device, the status LED lights up red. If this occurs, turn off the
power and contact the azbil Group.
• Do not apply a pressure to this device that exceeds the mar-
ginal pressure. Doing so might cause device failure.
• Take appropriate measures so that no contaminant enters this de-
vice. Otherwise a measurement error or device failure might occur.
• Take appropriate measures so that no foreign matter flows into this
device. If it does, measurement error or device failure could result.
• For the pressure range characterized by molecular flow and
intermediate flow, if the self-heating temperature of this device
is different from the temperature inside the chamber to be
measured, a minute pressure difference occurs due to thermal
transpiration. To achieve especially accurate measurement, this
must be taken into account. Factory calibration of this device as-
sumes that no temperature difference exists. For details, refer to
T. Takaishi and Y. Sensui, Trans. Faraday Soc. 59 (1963) 2503.
• Do not press the zero point adjustment buttons with excessive
force. Doing so may damage the device.
Zero point adjustment
• Adjust the zero point before using this device. Zero point adjust-
ment should be done with a sufficient vacuum (1/20,000 or less of the
selected pressure range span), 1 hour or longer after the power was
turned on, after warm-up is complete.
• For accurate measurement, periodic adjustment of the zero point is
recommended.
• When the zero point is adjusted, the bias adjustment values inside the
device are updated. The updated bias adjustment value is added to the
pressure measurement, which is then output. The factory setting for the
bias adjustment value is 0.
Adjust the zero point in either of the two ways described below.
lAuto zero point adjustment
(1) Apply a vacuum with a pressure of 1/20,000 or less of the selected
pressure range.
(2) Keep the auto zero point adjustment button pressed for 3s. After
zero point adjustment:
• If the bias adjustment value is within ± 5%FS, the status LED
flashes green three times.
• If the bias adjustment value is between ±5 and ±20%FS, the sta-
tus LED flashes orange three times.
Handling Precautions
• Auto zero point adjustment cannot be done in the following
cases even if the button is pressed:
• Before warm-up is complete.
• If an error occurs.
• If the required bias adjustment value is beyond ±20%FS.
In these cases, the status LED flashes alternately red and orange
three times.
lManual zero point adjustment
(1) Apply a vacuum with a pressure of 1/20,000 or less of the selected
pressure range.
(2) The 0-10V output voltage changes when the up/down zero adjust-
ment button is pressed. Adjust the output voltage to 0.
When the button is pressed, the speed at which the 0-10V value
changes depends on how long the button is pressed. Keep it pressed for
a long time to do a quick rough adjustment. Afterwards, press it repeat-
edly for a short time to make fine adjustments.
• During adjustment using the up/down zero point button:
• If the bias adjustment value is within ±5%FS, the status LED flashes green.
• If the bias adjustment value is between ±5 and ±20%FS, the status
LED flashes orange.
• The status LED stops flashing about 3s after the up/down zero point
adjustment button is released, and the bias adjustment value is then set.
• Zero adjustment is restricted to the range in which the bias adjustment
value is ±20%FS. If the bias adjustment value reaches ±20%FS as the up/
down zero point adjustment button is pressed, the status LED flashes red.
Handling Precautions
• Manual zero point adjustment cannot be done in the following
cases even if the button is pressed:
• Before warm-up is complete.
• If an error occurs.
• If the pressure value exceeds the measurement range.
In these cases, the status LED flashes alternately red and orange
three times.
lResetting of bias adjustment value
To reset the bias adjustment value to its factory setting, keep the auto
zero point adjustment button pressed for 30s or longer. The zero point
is adjusted after 3s, and the bias value is reset after 30s. The status
LED then flashes alternately green and orange three times.
Status LED display operation
Status LED Status
Lit green Normal operation status (after warm-up)
Lit orange
Warm-up in progress (device temperature is not yet
stable)
Lit red Abnormal status (a problem with the device)
Flashing red
(0.3s,0.3s)
Abnormal status (operating environment problem,
such as excessive ambient temperature or wrong
power voltage)
3 green flashes
(0.3s,0.3s)
Automatic zero point adjustment (by pressing the
auto zero point adjustment button) is complete, and
the bias adjustment value is within ±5%FS.
3 orange flashes
(0.3s,0.3s)
Automatic zero point adjustment (by pressing the
auto zero point adjustment button) is complete. The
bias adjustment value is between ±5 and ± 20%FS.
Flashing green
(0.1s,0.1s)
The zero point is being adjusted with the up/down
zero point adjustment buttons. The bias adjustment
value is within ±5%FS.
Flashing orange
(0.1s,0.1s)
The zero point is being adjusted with the up/down
zero point adjustment buttons. The bias adjustment
value is between ±5 and ±20%FS.
Flashing red
(0.1s,0.1s)
During zero point adjustment with the up/down zero
point adjustment buttons, the bias adjustment value
reached the maximum adjustable range of ±20%FS.
Lit alternately
red and orange
3times (0.3s,0.3s)
The auto or up/down zero adjustment button
was pressed but conditions did not permit zero
adjustment.
Lit alternately
green and orange
3times (0.3s,0.3s)
The bias adjustment value has been reset.
Alternating green
and orange with occa-
sional red (1.9s,0.1s)
The event relay is latched.*1
Lit alternately
green and red.
(0.3s,0.3s)
Output is manually controlled.*2
Off The device is not powered up.
*1 Latching of the event relay must be set up with the Smart Loader (sold
separately).
*2 Output can be manually controlled with the Smart Loader (sold
separately).
MAINTENANCE AND TROUBLESHOOTING
Maintenance
lMaintenance and inspection
• Check that the status LED is green during operation.
• Check periodically that there are no leaks in the piping.
• Adjust the zero point periodically.
lCleaning
• Use a soft dry cloth.
• Do not use any organic solvent such as paint thinner or benzene.
lPart replacement
Do not disassemble the device or attempt to replace any of its parts.
Alarm displays and corrective actions
The following table shows the alarm displays and corrective actions to
take if there is a problem:
Status LED Status Possible Causes Action
Flashing
red
Alarm
•
Temperature of electronic circuits
• Temperature of sensor head
• Heater temperature error
• Self-heating control error
• Wrong supply power voltage
Turn off the power and
check the power voltage,
ambient temperature, and
other operating conditions.
Lit red Failure
•
Heater wire break
•
Memory failure
•
Electronic circuit failure
Turn off the power and con-
tact the azbil Group or your
dealer, agent, or salesperson.
The device needs to be re-
paired by Azbil Corporation.
Important notice: If you send this device to Azbil Corporation for repair, fill
out the Safety Sheet on page 8 and include it with the device.

6
Troubleshooting
Symptom Action
Status LED does
not light up
Check that the wiring is connected correctly.
Check that the power voltage and polarity are correct.
Output value
fluctuates
Check that the wiring is connected correctly.
Adjust the zero point.
DISPOSAL
When disposing of this device, dispose of it appropriately as indus-
trial waste in accordance with local regulations.
SPECIFICATIONS
Items Specifications
Pressure range As specified in the model selection table.
Self-heating
temperature
Accuracy Accuracy Pressure range Self-heating
temperature range
0.25%Reading 10Pa to 33.331Pa 45°C
0.5%Reading 80°C or more
0.25%Reading 100Pa to 133.32kPa No self-heating or
less than 160°C
0.5%Reading 160°C or more
Temperature co-
efficients zero
Temperature
coefficients zero
Pressure range Self-heating
temperature range
0.008%FS/°C 10Pa to 33.331Pa 45°C
0.016%FS/°C 80°C or more
0.008%FS/°C 100Pa to 133.32Pa No self-heating or
less than 160°C
0.016%FS/°C 160°C or more
0.004%FS/°C 200Pa to 133.32kPa No self-heating or
less than 160°C
0.008%FS/°C 160°C or more
Temperature
coefficients span
0.02%rdg./°C
Resolution 1/10000FS
Operating tem-
perature range
Model
SPG5 _/
SPG7 _
Models whose self-heating temperature is 80°C
or more: 10 to 45°C (Cooling air with a velocity of
0.5m/s or more is required at 35°C or more.)
Models whose self-heating temperature is 45°C:
10 to 40°C (Cooling air with a velocity of 0.5m/s or
more is required at 35°C or more.)
Non–self-heating models: 0 to 60°C
Model
SPG6 _
10 to 65°C (when mounted vertically),
10 to 70°C (when mounted horizontally)
(Cooling air with a velocity of 0.5m/s or more is re-
quired at 45°C or more.)
Model
SPG8 _
10 to 55°C (when mounted vertically),
10 to 60°C (when mounted horizontally)
(Cool air flow of at least 0.5 m/s is needed at 35°C
and higher for vertically mounted devices, or at
45°C and higher for horizontally mounted devices.)
Operating hu-
midity range
10 to 90%RH (without condensation)
Storage tem-
perature and
humidity range
−20 to +80°C, 10 to 95%RH (without condensation)
Response time
Model SPG_A: 35ms
Model SPG_B:
50 ms (models with pressure range of 1000 Pa
or more)
60 ms (models with pressure range of less than
1000 Pa)
Model SPG_C: 40ms (Models with pressure range of 100Pa
or more)
50ms (Models with pressure range of less than
100Pa)
Gas-contacting
materials
Sapphire, DSALOY (equivalent to Inconel), SUS316L
Internal capacity 4.6cm3: 1/2 inch gauge port fitting type
7cm3: 8 VCR fitting type
7cm3: NW16 fitting type
5cm3: IDF 1.5S 2S ferrule fitting type
Allowable
pressure*1
Model SPG5 _/SPG6 _/SPG8 _:
200kPaabs (Models with pressure range of 100kPa or more)
110kPaabs (Models with pressure range of less than 100kPa)
Model SPG7 _: 300 kPaabs
Marginal pressure*
2
300kPaabs
Items Specifications
Burst pressure*3700kPaabs
Input power
supply
Voltage range: ±15V DC ±10% (dual power supplies) or
24V DC ±10% (single power supply)
Allowable ripple voltage: 0.5Vp-p max.
Power
consumption/
power current
*4*5
Self-heating
temperature
Power consumption Power current
During
normal
operation
During
warm-up
±15V DC
supply
24V DC
supply
non-self-heat-
ing model
3W max. 3W max. 0.12A max. 0.14A max.
45°C 5W max. 8W max. 0.3A max. 0.4A max.
100°C 9W max. 13W max. 0.5A max. 0.7A max.
125°C 10W max. 14W max. 0.6A max. 0.7A max.
150°C 12W max. 16W max. 0.6A max. 0.8A max.
160°C 13W max. 17W max. 0.7A max. 0.8A max.
180°C 15W max. 19W max. 0.8A max. 0.9A max.
200°C 16W max. 23W max. 0.9A max. 1.1A max.
230°C 23W max. 32W max. 1.2A max. 1.5A max.
260°C 26W max. 36W max. 1.4A max. 1.7A max.
280°C 28W max. 39W max. 1.5A max. 1.9A max.
Output signal Signal voltage: 0 to 10V DC
Allowable load resistance: 10kΩ min.
Measurement output range: −0.5 to +11V DC*6
Output during warm-up or abnormal status: Output depends
on the measured pressure*7
I/O connector D-sub 15-pin connector (male), retaining screw #4-40UNC
Mass 450g: 1/2 inch gauge port fitting type
520g: 8 VCR fitting type
470g: NW16 fitting type
580 g: IDF 1.5S ferrule fitting type
650g: IDF 2S ferrule fitting type
Warm up time 30min (nominal), 1h max.
Zero point ad-
justable range
±20%FS
Fitting As specified in the model selection table.
Leak rate 1×10−10 Pa·m3/s or less: Models without ferrule connection
1×10−9 Pa·m3/s or less: Models with ferrule connection
Mounting angle Unrestricted*8
Allowable cable length 10m max.
Event relay
ratings
Number of relays: 3
Contact form: 1c (both NO and NC contacts)
Maximum load: 1A-30V DC resistance load
Minimum load: 10μA 10mV DC*10
Mechanical service life: 50 million cycles min.
Electrical service life: 100 thousand cycles min. (with 1A,
30V DC resistance load)
Certifications: UL, CSA
Event relay func-
tions default
setting*9
Event relay 1:
Pressure low limit (direct action)
Setting: value is assigned by model No.
Operating hysteresis: 0.5%FS
Always operates together with pressure during warm-up
or abnormal status.
Hysteresis
Setpoint
Pressure
0 FS
ON
OFF
Event relay 2:
Pressure low limit (direct action)
Setting: value is assigned by model No.
Operating hysteresis: 0.5%FS
Always operates together with pressure during warm-up
or abnormal status.
Hysteresis
Setpoint
Pressure
0 FS
ON
OFF
Event relay 3:
ON if warm-up complete and OFF if warm-up not com-
plete or if status abnormal
Event relay LED:
Green when event relay ON, off when event relay OFF
Standards
compliance
CE marked (EN 61326-1, EN61326-2-3 ) (For Use in Industrial Locations)
KC marking*11

7
Items Specifications
Accessories
(sold separately)
Model SLP-SP5 Smart Loader Package
*1 At the allowable pressure, the performance level of this unit can be
maintained. However, if the device is repeatedly subjected to the al-
lowable pressure, adjust the zero point periodically.
*2 At the marginal pressure, this unit will continue to function. If the
device is subjected to the marginal pressure, readjust the zero point.
If more accurate measurement is required, return the unit to Azbil
Corporation for calibration. If the marginal pressure is exceeded, the
proper operation of this unit can no longer be guaranteed. In this case,
replace the unit with a new one.
*3 The burst pressure is the pressure at which this device will break. To
avoid an accident, never apply pressure equaling or exceeding the
burst pressure.
*4 Use an appropriate power supply with a rated current exceeding the
max. power current value.
*5 PID control is used to regulate the temperature and keep the rate of
current supplied to the heater as constant as possible. Additionally, the
maximum power current is varied depending on the power voltage,
so that power consumption remains constant even during warm-up,
irrespective of the power voltage. (Self-heating models)
*6 Since a negative voltage is generated inside this unit, a negative volt-
age output is available even with only a single-output power supply.
*7 The conditions and voltage can be changed using the Smart Loader.
*8 This unit was calibrated at the factory in a vertical position. Shift of
the zero point may have occurred, depending on the mounting angle.
In such a case, accuracy can be recovered by adjusting the zero point
after installation. Vertical installation is recommended to prevent con-
taminants from accumulating on the sensor unit.
*9 The event relay functions can be changed using the Smart Loader.
*10 The minimum load specification is an estimate of the minimum load at
which the event relay is able to open and close. This value can vary de-
pending on the frequency of operation, environmental conditions, and
the expected reliability level. Before actual use, a check of the relay’s
operation using the actual load is recommended.
*11
基于SJ/T11364-2014
「电子电气产品有害物质限制使用标识要求」的表示式样
部件名称
有害物质
铅
(Pb)
汞
(Hg)
镉
(Cd)
六价铬
(Cr(VI))
多溴联苯
(PBB)
多溴二苯醚
(PBDE)
电路板组件 × ○ ○ ○ ○ ○
温度传感器组件 × ○ ○ ○ ○ ○
加热器组件 × ○ ○ ○ ○ ○
产品中有害物质的名称及含量
本表格依据SJ/T 11364 的规定编制。
○ : 表示该有害物质在该部件所有均质材料中的含量均在GB/T 26572规定的限量要求以下。
× : 表示该有害物质至少在该部件的某一均质材料中的含量超出GB/T 26572规定的限量要求
。
Export Control
Export Control & Compliance
Products in this Specification or User’s Manual (“Products“) are
subject to laws and regulations of Japan and any other applicable
jurisdiction with respect to export of the Products.
In order for Azbil Corporation to apply for the appropriate export
license in Japan, your cooperation may be asked for the provision
of details on end user, end use and any other related information.
Further, in case of export from Japan by an exporter (“Exporter”)
or re-export from any other countries, you are required to obtain
the appropriate export license from the government of Japan or
such other countries.
In addition, in case of re-export of the Products, any re-exporter
is required to obtain the prior consent of the Exporter.
External Dimensions
lModel SPG5 _/SPG7 _ Unit: mm
14.5
NW16 tting type
IDF 2S ferrule tting type
IDF 1.5S ferrule tting type
1/2 inch
gauge port tting type
（185.5）
13253.5
5
53.5
25.525.525.5
8 VCR tting type
60 ø
ø12.7
lModel SPG6 _
8 VCR tting type
NW16 tting type
1/2 inch
gauge port tting type
IDF 2S ferrule tting type
（185.5）
132
53.5
5
53.5
25.5 25.5
14.5
60 ø
ø12.7
lModel SPG8 _
ø12.7
60 ø
8 VCR tting type
（215.5）
162
53.5 2
5
14.5

8
1-12-2 Kawana, Fujisawa
Kanagawa 251-8522 Japan
URL: https://www.azbil.com
(11)
Specifications are subject to change without notice.
1st edition: July 2015 (F)
4th edition: Sep. 2019 (V)© 2015–2019 Azbil Corporation. All Rights Reserved.
IMPORTANT NOTE: If it is necessary to send this device back to Azbil Corporation for repair, photocopy the following Safety
Sheet, fill in the required items, and return the sheet with the unit.
The Safety Sheet is intended to ensure that the customer’s product is safe for repair personnel and for the environment.
Without this sheet, Azbil Corporation cannot start repair work. Please note that if the sheet is incomplete, Azbil Corporation
may request the customer to resubmit it.
Safety Sheet To use, photocopy this page.
To: Azbil Corporation
Statement by the End User (required prior to repair work)
I attest to the safety of this device based on the following evidence (check the applicable box):
Hazardous substances have been purged or flushed completely.
This device has been used only with clean, dry inert gas such as air, N2, Ar, and He.
Model number:
Date code:
Serial number:
Name:
Date:
Department:
Company:
Phone:
Approved by (supervisor):
Comments or supplementary information:
(Do not fill in - for Azbil Corporation internal use only)
Dealer/Agent/Salesperson Information
Date:
Name:
Company:
Department:
Phone:
Date:
Name:
Company:
Department:
Phone:
Important Notice
Depending upon the degree of contamination of the device, Azbil
Corporation reserves the right to refuse repair.
Handling of personal information
We will use your personal information provided to us by this sheet
only for the purposes of providing after-sales services to you.