Bruker Contour GT-K User manual

ContourGT-K
Optical Profiler
User Manual

Bruker Confidential Information
ContourGT-K User Manual
Original Instructions
Bruker Nano, Inc.
October 11, 2012

Bruker Confidential Information
Manufacturer Information
©2012, Bruker Nano, Inc.
All rights reserved
Printed in the United States of America
October 11, 2012
Copyright Notice
The reproduction, transmission, or use of this document or its contents is not permitted without
express written authority. Offenders will be liable for damages. All rights reserved.
Trademark Notice
Vision64™and ContourGT™are trademarks of Bruker Nano, Inc. Other brand or product names
may be trademarks of their respective companies.
Manufacturer Contact Information
Bruker Nano, Inc.
3400 East Britannia Drive, Suite 150
Tucson, Arizona 85706, USA
Phone: [phone] or (+01) 520-741-1044
Fax: [phone]
www.bruker-axs.com
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About this Manual
This manual provides instructions on the basic operation of your ContourGT-K series optical pro-
filer. It is intended to augment the extensive on-line help provided by the Vision64 software that is
used to control the system.
Installation, maintenance and information can be found in the “ContourGT-K Installation and
Maintenance Manual”.
General Conventions
Your system hardware operates with the Vision64 software application under Windows 7. You can
also run Vision64 independent of instrument hardware under Windows 7.
The Mouse
You can perform three basic actions with the buttons on your mouse: clicking, double-clicking,
and dragging. To click, press and release the mouse button. To double-click, press and release the
mouse button twice in rapid succession. To drag, press and hold down the mouse button while you
move the mouse across your desktop.
Menus
Menus are listings of commands or functions that are available to you at certain times. To open a
menu, position the mouse pointer over a menu bar title and click on it with the mouse. A menu
pops down from the menu bar. You can then select a command from the pop-down menu by clicking
on it.
In this manual, the commands you select from pop-down menus are displayed in the following
format: Hardware Measurement Options. The double arrow symbol indicates menu flow
as it cascades down from the menu title.
Shortcut Menus
Shortcut menus are available by clicking with the right mouse button on a plot. You can then select
options from the shortcut menu that appears.
Typeface Conventions
This manual uses typeface conventions that provide visual cues to help you more easily locate and
identify information.
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Typeface Conventions
boldface Menu titles, commands, icons, check box and button names are shown in
boldface type.
italic type Italic type indicates emphasis.
monospace type Code examples, commands and file or directory paths that you must type
exactly as they appear are shown in monospaced type.
Small Capitals Hardware placards and keyboard key labels are shown in Small Capitals for
example, Esc, Enter, Alt.
Blue Hyperlinks within this document.
Magenta Hyperlinks to websites.
WARNING
A ‘WARNING’ is used to emphasize any possibility of personal injury or equipment
damage.
Caution
A ‘Caution’ is used to emphasize that a possibility of data lost exists, or that you
must perform a specific action to ensure proper system operation.
Note A ‘Note’ contains particularly important information that may aid your under-
standing of the software, algorithms or system operation instructions.
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Contents
Manufacturer Information i
About this Manual ii
General Conventions ....................................... ii
Typeface Conventions ...................................... ii
List of Figures vi
List of Tables viii
1 System Overview 1
1.1 System Components .................................... 1
1.2 Safety Precautions ..................................... 2
1.3 Basic Measurement Modes ................................. 4
1.4 Software Control of the ContourGT-K .......................... 5
2 Basic Operations 8
2.1 Turning On the System & Starting the Vision64 Software ............... 8
2.2 Closing Vision64 & Turning Off the System ....................... 9
2.3 Using Vision64’s On-line Help ............................... 10
2.4 Using the Live Video tab ................................. 10
2.5 Illumination Control .................................... 11
2.6 Adjusting Focus ...................................... 12
2.7 Adjusting Lateral Sample Position ............................ 13
2.8 Adjusting Sample Tip and Tilt .............................. 14
2.9 Measurement Options ................................... 14
2.10 Objectives .......................................... 17
2.11 Performing a Measurement ................................ 17
3 Running the Sample Measurement Recipes 19
3.1 About the Example Recipe Files ............................. 19
3.2 Making a VSI Measurement of a Step .......................... 19
3.3 Making a PSI Measurement of a Mirror ......................... 22
4 Calibrating the ContourGT-K System 24
4.1 Scanner Calibration .................................... 24
4.2 Reference Surface Generation ............................... 26
4.3 Magnification Calibration ................................. 27
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Contents
5 Additional Resources 28
5.1 On-line Help ........................................ 28
5.2 Web Resources ....................................... 28
5.3 Advanced Training Opportunities ............................. 28
5.4 Application Support .................................... 28
A Hardware Support Programs 29
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List of Figures
1.1 ContourGT-K(with manual stage) .............................. 1
1.2 ContourGT-K(with automated stage) ............................ 1
1.3 System Components ...................................... 2
(a) Sample stage & manual stage controls ....................... 2
(b) Manual Focus Knob ................................. 2
(c) EMO Box ....................................... 2
(d) Measurement Objectives ............................... 2
(e) Operator Station ................................... 2
(f) Power Supply ..................................... 2
1.4 Windows task-bar showing Start button and ‘pinned’ Vision64 Shortcut ......... 6
1.5 Vision64 Workspace Layout .................................. 6
1.6 Vision64 Workspace Screen Shot ............................... 7
2.1 Vision64 splash-screen ..................................... 9
2.2 Live Video tab active in the Main Display Area .................... 11
2.3 Intensity Control ........................................ 12
(a) Intensity Control Bar ................................ 12
(b) Optimum ....................................... 12
(c) Too high ....................................... 12
(d) Too low ........................................ 12
2.4 Focus Adjustment Mechanisms ................................ 12
(a) Manual focus knob .................................. 12
(b) Motorized z-axis wheel ................................ 12
(c) Vision64 software ................................... 12
2.5 X/Y Adjustment ........................................ 14
(a) Manual X/Y adjustment .............................. 14
(b) Joystick for X/Y adjustment ............................ 14
(c) Vision64 software ................................... 14
2.6 Tip/tilt Control & Tilted Fringes ............................... 15
(a) Tip/tilt stage knobs ................................. 15
(b) High tilt ........................................ 15
(c) Medium tilt ...................................... 15
(d) Low tilt ........................................ 15
2.7 Measurement Parameters tab of the Measurement Options dialog ........ 16
2.8 Objective Mounting Methods ................................. 17
(a) Single Objective Adapters .............................. 17
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List of Figures
(b) Turrets ........................................ 17
3.1 Step Standard ......................................... 20
3.2 Open Recipe .......................................... 20
3.3 Main Display Area for Example VSI Measurement ................... 21
3.4 Main Display Area for Example PSI Measurement .................... 23
4.1 Step Standard ......................................... 24
4.2 Calibration dialog for Motor ................................. 25
4.3 Sequence of dialogs shown during motor calibration .................... 25
(a) Nominal ........................................ 25
(b) Fine Tuning ...................................... 25
(c) Confirmation ..................................... 25
4.4 Reference Surface Parameters ................................. 26
4.5 Reference Surface Parameters ................................. 26
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List of Tables
1.1 Labels use to Identify Residual Risks ............................. 3
2.1 Working Distances for Objectives ............................... 18
viii