Edwards STP-XA4503 Series User manual

MT-67E-101-B
Model name Voltage
STP-XA4503 series 200 - 240 Va.c.
STP Series Turbomolecular Pumps
STP-XA4503 Series
Pump Specific Information
Instruction Manual (B)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Supplied with STP pump
Instruction Manual (B):
(This Instruction Manual)
STP pump specific information
Supplied with STP pump
Instruction Manual (C): STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.

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The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
STP Pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link (except for SCU-750)
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

STP-XA4503 Series Turbomolecular Pump
Aug. 08 i Issue 1-b
PAGE
i
CONTENTS
Section Title Page
1 TECHNICAL DATA 1
1.1 Applicable pump specifications 1
1.1.1 STP pump specifications 2
1.1.2 Condition for the water-cooling unit 3
1.2 External appearance of the STP pump 4
1.3 Label affixing positions 6
1.4 Accessories 7
2 HOW TO SECURE THE STP PUMP 9
3 TEMPERATURE MANAGEMENT SYSTEM (TMS) 13
3.1 Configuration of the STP pump with the TMS 13
3.2 TMS connection cable 14
3.3 TMS heater 15
3.4 TMS valve 15
3.5 TMS sensor cable 15
3.6 Installation of the TMS unit 16
3.6.1 Connecting the TMS connection cable to the STP control unit 16
3.6.2 Connecting the pump and cables 16
3.6.3 Connecting TMS connection cable to STP pump 16
3.7 Condition for the TMS unit 17
3.8 Accessories 17

STP-XA4503 Series Turbomolecular Pump
Aug. 08 ii Issue 1-b
PAGE
ii ILLUSTRATIONS
Figure Title Page
1 STP-XA4503 series: VG300/ISO320F 4
2 STP-XA4503 series: VG350 5
3 Label Affixing Positions for the STP pump 6
4 Methods of securing the STP pump 10
5 Shape of reduced diameter shank bolts 11
6 Configuration of the TMS 13
7 External view of TMS connection cable 14
8 TMS sensor cable 15
TABLES
Table Title Page
1 Tightening torque of bolt 9
2 Maximum torque predicted and recommended securing bolt
for inlet port flange 10

STP-XA4503 Series Turbomolecular Pump
Aug. 08 1 Issue 1-b
TECHNICAL DATA
1
1 TECHNICAL DATA
1.1 Applicable pump specifications
Model Name Specification Applicable Control unit*1
STP-XA4503 series Extreme Advanced throughput type SCU-1500/SCU-1400
*1 Applicable control unit: There are different performance specifications between SCU-1500 and SCU-1400.
Refer to Section 1.1.1, "STP pump specifications" for the differences.
Naming convention:
•"C" following a pump model name indicates a corrosion resistant*2 type (e.g. STP-XA4503C).
•"CV" indicates an enhanced corrosion resistant type with TMS*3 (e.g. STP-XA4503CV).
*2 Corrosion resistant: STP pump with anti-corrosive treatment.
*3 Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the
temperature with the thermistor in the base of the turbomolecular pump, and
performing the TMS valve and base heater ON/OFF control.

STP-XA4503 Series Turbomolecular Pump
Aug. 08 2 Issue 1-b
TECHNICAL DATA
PAG
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2
1
1.1.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item XA4503 series
Inlet port flange VG300 ISO320F VG350Flange size
Outlet port flange KF40 KF40 KF40
Pumping speed N2L/s 3800 4000 4300
H2L/s 2500 2500 2500
Compression ratio N2>108
H2>6×103
Ultimate pressure Pa 10-7 order [after baking]
Allowable backing pressure Pa (Torr) 266 (2): Water cooling/TMS unit used
Flow rate of purge gas <N2> Pa·m3/s (SCCM) 8.4×10-2 (50)
Rated speed rpm 24,000
Backup rotational speed*1 rpm Approximately 6,000
Starting time*2 min 12: with SCU-1500
13: with SCU-1400
Stopping time*2 min 12: with SCU-1500
16: with SCU-1400
Noise dB <50 (at 24,000 rpm)
Temperature Management System (TMS) Available
Baking temperature °C <120
Lubricating oil Not necessary
Installation position Free
Cooling method Water cooling
Mass*3 kg 105 97
Ambient temperature range °C 0 to 40
Storage temperature range °C -25 to 55
Applicable Control unit SCU-1500/SCU-1400
*1 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*2 Time varies depending on the control unit used.
*3 Mass is a value of state that the only standard accessory was installed (except the optional accessory).

STP-XA4503 Series Turbomolecular Pump
Aug. 08 3 Issue 1-b
TECHNICAL DATA
1
Maximum gas flow-rate *3
Condition Maximum gas flow-rate *3
TMS SCU-1500 SCU-1400
Gas
Yes/No Set point
Cooling water Purge gas N2
gas flow rate Pa･m3/s
(SCCM)
Pa･m3/s
(SCCM)
No - 3.63
(2150)
3.38
(2000)
Ar
Yes 70°C 2.36
(1400)
2.36
(1400)
No - 4.73
(2800)
4.22
(2500)
N2
Yes 70°C
Temperature:
5 to 25 °C
Flow rate:
3 L/min
8.4×10-2 Pa･m3/s
(50 SCCM)
4.22
(2500)
3.88
(2300)
*3 The maximum gas flow-rate is applicable under conditions that N2or Ar gas is vacuumed continuously and the backing
backing-pump (pumping speed: 10,000 L/min) is used. It is changed depending on condition. For example, when the gas is
exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.
1.1.2 Condition for the water-cooling unit
Specification
Item
Without TMS With TMS
Port type Rc 1/4 (Female) *1
Flow rate L/min 3 3
Water temperature °C 5 to 25
Water pressure MPa (kgf/cm2) 0.3 (3)
*1 Standard type

STP-XA4503 Series Turbomolecular Pump
Aug. 08 4 Issue 1-b
TECHNICAL DATA
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4
1
1.2 External appearance of the STP pump
φA
φ420
φ395
φH
J
φ235
≧370
(11)
187
（12）
22.5ﾟ
22.5ﾟ
(10)
(8) (9)
22.5ﾟ
22.5ﾟ
55ﾟ
45ﾟ
225.5
（13）
φ182
1
Ａ(6) *1
(5)
(4)
(7)
E
D
C
(45)
K (2)
L (3)
G
F
B
I (1)
12-φ15
15ﾟ
30ﾟ
φ370
15ﾟ
30ﾟ
φ395
12-φ14
VG300 ISO320F
Figure 1 - STP-XA4503 series: VG300/ISO320F
No. Item Description
1 Center of gravity
2 Height of the purge port
3 Height of water cooling port
4 TMS sensor
5 Screw hole of legs 4-M16 depth 33
6 TMS heater*1 Built-in
7 TMS heater cover
8 Outlet port flange KF40
9 Purge port KF10
10 Cooling water port 2-Rc*21/4
11 Bending dimension of the
STP connection cable
12 Screw hole for legs 8-M16 depth 24
13 Viewed from arrow A
Inlet
port
flange
VG300 ISO320F
φA 400 425
B 18 20
C 465 455.5
D 420 410.5
E 388.5 379.5
F 131 121.5
G 56 44.5
φH 343 370
I 224 217
J 332.5 323
K 390.5 381.5
L 398 389.5
*1 TMS used only
*2 ISO

STP-XA4503 Series Turbomolecular Pump
Aug. 08 5 Issue 1-b
TECHNICAL DATA
1
12-φ15
φ420
15ﾟ
30ﾟ
φ182
1
Ａ
(5)
φ235
≧370
(11)
187
(12)
22.5ﾟ
22.5ﾟ
(10)
(8) (9)
(13)
18
φ420
φ395
340.5 (2）
348 (3）
φ450
VG350
282.5
22.5ﾟ
22.5ﾟ
55ﾟ
45ﾟ
225.5
(7)
(6) *1
(4)
338.5
370
415
(45)
63
200 (1)
Figure 2 - STP-XA4503 series: VG350
No. Item Description
1 Center of gravity
2 Height of the purge port
3 Height of water cooling port
4 TMS sensor
5 Screw hole of legs 4-M16 depth 33
6 TMS heater*1 Built-in
7 TMS heater cover
8 Outlet port flange KF40
9 Purge port KF10
10 Cooling water port 2-Rc*21/4
11 Bending dimension of the
STP connection cable
12 Screw hole for legs 8-M16 depth 24
13 Viewed from arrow A
*1 TMS used only
*2 ISO

STP-XA4503 Series Turbomolecular Pump
Aug. 08 6 Issue 1-b
TECHNICAL DATA
PAG
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6
1
1.3 Label affixing positions
Refer to the Instruction Manual (A) for the details of the labels 1 to 7.
Figure 3 - Label Affixing Positions for the STP pump
1 STP pump installation warning label
2 Hot surface warning label
3 Heavy product caution label
4 Connector caution label
5 STP pump/control unit caution label
6 TMS heater caution label
7 Rotational direction instruction label
8 Name plate
9 Company logo
10 Parts number
4
9
8
5
7
10
2
6
1
3

STP-XA4503 Series Turbomolecular Pump
Aug. 08 7 Issue 1-b
TECHNICAL DATA
1
1.4 Accessories
Item Q’ty Remarks
Inlet port cover 1
Outlet port cover 1
STP connector cover 1
Blank flange for purge port 1 KF10
Clamping ring for purge port 1 KF10
O-ring washer for purge port 1 KF10
Leg 4
Instruction Manual (B) 1 This manual

STP-XA4503 Series Turbomolecular Pump
Aug. 08 8 Issue 1-b
TECHNICAL DATA
PAG
E
8
1
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STP-XA4503 Series Turbomolecular Pump
Aug. 08 9 Issue 1-b
HOW TO SECURE THE STP PUMP
2
2 HOW TO SECURE THE STP PUMP
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
Secure the STP pump to the vacuum equipment according to the method specified in this manual.
The generated torque during a pump failure is called "Destructive torque". Design and secure the
mounting for the STP pump so that it can withstand the maximum rotational torque. Refer to Table 2
for torque in pump abnormality.
Bolt size Tightening torque (Nm)
M8 12
M10 24
M12 42
Table 1 - Tightening torque of bolt
When making the legs to secure the base, make them shorter than the ones attached to the STP
pump. Use a material that has a tensile strength of 600N/mm2or more.
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more.
Note: When using any securing method other than that specified in this manual, contact Edwards.

STP-XA4503 Series Turbomolecular Pump
Aug. 08 10 Issue 1-b
HOW TO SECURE THE STP PUMP
2
The generated destructive torque depends on the presence of a torque reduction mechanism that
can be built into the flange, according to the pump model and flange type. This mechanism, shown in
Figure 5, is designed to absorb energy and also buffer the destructive torque.
There are two installation methods for the pump, as shown in Figure 4. Make sure to secure the inlet
port flange of the pump with the recommended bolts, as described in Figure 5 and Table 2, according
to the installation method used.
Note that special washers will be required if the pump includes the inlet torque reduction mechanism.
The washer shape is shown in Figure 5.
Pump model STP-XA4503 series
Flange type VG300/ISO320F/VG350
Toque reduction
mechanism Equipped (optional) Not Equipped
(standard)
Destructive Torque
[kNm] 53.7 68.8
Base (4 positions)
securing No Yes No Yes
Shape Standard Standard Standard Standard
Material*1 Carbon steel
Alloyed steel
Carbon steel
Alloyed steel
Carbon steel
Alloyed steel
Stainless
steel
Strength*1 12.9 or more 12.9 or more 12.9 or more 70 or more
Recommended
bolt
Special
washer Figure 5 Figure 5 Not necessary
Not
necessary
*1 Refer to ISO898-1 (JISB 1051), ISO3506 (JISB 1054).
Table 2 - Maximum torque predicted and recommended securing bolt for inlet port flange
(A) When the base is not secured (B) When the base is secured
1. Recommended fitting bolt for flange
2. Secure the base
Figure 4 - Methods of securing the STP pump
1
2

STP-XA4503 Series Turbomolecular Pump
Aug. 08 11 Issue 1-b
HOW TO SECURE THE STP PUMP
2
CAUTION
Install the flange securing bolts in the proper position with the special square washer shown in
Figure 5. Failure to do so may cause abnormal operation of the torque reduction mechanism and
damage the pump.
CAUTION
When any internal abnormality/error results in high rotational torque, causing the torque reduction
mechanism to operate, the pump may rotate a maximum of 5 degrees around the rotor rotation at
axis.
A
2.5
*1 VG300/VG350: A=18, ISO320F: A=20
1. Vacuum equipment
2. Inlet port flange
3. Washer
4. Torque reduction mechanism
Figure 5 - Shape of reduced diameter shank bolts
1
2
43
*1

STP-XA4503 Series Turbomolecular Pump
Aug. 08 12 Issue 1-b
HOW TO SECURE THE STP PUMP
2
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STP-XA4503 Series Turbomolecular Pump
Aug. 08 13 Issue 1-b
TEMPERATURE MANAGEMENT SYSTEM
3
3 TEMPERATURE MANAGEMENT SYSTEM (TMS)
WARNING
The STP pump operates at high temperatures while the Temperature Management
System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral
equipment while TMS unit are in operation. Operators can burn hands. Moreover,
NEVER remove the TMS cover while the Temperature Management System (TMS)
unit is in operation. Doing so may result in electric shock or burnt hands.
The Temperature Management System (TMS) maintains the temperature of the turbomolecular pump
by monitoring the temperature with temperature sensor in the base of the turbomolecular pump, and
performing the TMS valve and TMS heater ON/OFF control.
3.1 Configuration of the STP pump with the TMS
1. STP control unit 6. TMS valve
2. STP connection cable 7. TMS sensor cable
3. TMS heater (Built-in) 8. TMS connection cable
4. STP pump 9. Power cable
5. TMS heater cover
Figure 6 - Configuration of the TMS
Note: The shape of each part is an example. It varies according to specifications.
1
4
7
2
8
9
6
35

STP-XA4503 Series Turbomolecular Pump
Aug. 08 14 Issue 1-b
TEMPERATURE MANAGEMENT SYSTEM
3
3.2 TMS connection cable
The components of the TMS connection cables are as follows: (see Figure 7)
Item Description Function
1 Connector X5A For the STP control unit
2 CON1 HEATER OUT connector For the TMS heater
3 CON2 COOLING VALVE OUT connector For the TMS valve
4 CON3 TC IN connector For the TMS sensor cable
φ10
98
φ31
200
65.3
100
150 32
φ12
49
φ21.5
17
18
21.7
Figure 7 - External view of TMS connection cable
Note: The shape of the TMS connection cable is an example. It varies according to specifications.
2
1
3
4