Edwards EXTPX Series User manual

B760-60-880
Issue A Original
Instruction Manual
EXTPX Split Flow
Description Item Number
24 Volt EXT400/200PX Split flow compound Turbomolecular Vacuum Pump B760-61-991
24 Volt EXT400/200PX Split flow compound Turbomolecular Vacuum Pump B760-62-991
24 Volt EXT400/200/30iPX Split flow compound Interstage Turbomolecular Vacuum Pump B760-67-991
24 Volt EXT400/200/30iPX Split flow compound Cartridge Interstage Turbomolecular Vacuum Pump B760-53-991

Declaration
ofConformity
We, Edwards,
l"lanorRoyal,
Crawtey,
WestSussexRH109LW,UK
declareunderoursoteresponsibility
that theproduct(s)
DffPXCompoundTurbomotecutar
pump:
Dfi40020030iPXcartridge interstage 8760-53-991'
Dfi400200PX'optiport' 8760-61-991
ECT400200PX
'optiport' +end port 8760-62-991
Dff40020030iPXshort chamber+ end oott 8760-67-991
to which
thisdectardtionretatesisin conformitywith the fottowingstandard(s)or other
normative
document(s)
EN(|5O)12100-2:2003 Safetyofl,lachinery
-B6icConcepts,GeneratPrinciptesforDesign.
TechnicatPrincipats,
EN1012-2t1997 Compr6sorsandVacuum
pumps,
SafetyRequirements.VacuumPumps.
EN610'l0-1:2001t Safety
requirementsforetectricatequipment formeaiurementcontrotand
laboratoryuse.
EN6t326:1997 Eectricalequipmentformeasurement,controlandlaboratoryuse
(immunity, EICrequirements,
Cla5sBEmissions)
C22.2No61010.1-04F Safetyrequirementsforelectricat
equipmentiormeasurement,
Controtandtaboratoryuse,Part1:Generalrequirements
UL6101O-1
(2'd
Edition;# safetyrequirementsforetectricatequipmentformedurement,
Controtardtaboratoryuse,Part1!
Generat
requirements
' Thepumps
comptywith EN61010-1wheninstatledin accordancewith theinstruction
manuatsupplied
with thepump.
" 24VPumpsontycomptywith the CanadianStandardAuthorityandUnderwriteBlaboratory
whenusedwith D(DC24Vfamitv of controtlers.
following the provisions
of
2006t95tEC
2@4t't08tEc
98tX7tEC
Low
VottageDirective.
ElectrorEgnetic Compatibitity Directive
^,lachirErvDirective
zL?t<^ O.l€ >',r Z'cxlr
e.ca----t^', 9,)d,a\e59 a tLr.-
B,D,Brewster,
Technicalhlanager
&)rge5sHill PrducE Date and Place
This
product
hasbeenmanufactured
underaqualitysystem
registeredto|SO9W1
@o*,"Fttrt=.
c
-
s

Declaration
ofIncorporation
We, Edwards,
ManorRoyat,
Crdwtey,
WestSussexRH109LW,UK
declareunderoursoterGponsibititythat the madfne(s)
Description
EXT40020030iPXCartridgeinGrstage
Itemnumber
8760-53-991
towhichthisdectarationrelatesisintendedto beincorporatedinto otherequipmentandnot to
functionindependentty.Themachine(s)isin conformitywith the fottowingstandard(s)
orother
normative
document(5)
EN
(l5O)12100-2:
2003 Safetyof Machinery
- BasicConcepts,GeneralPrinciptesfor
Design.TechnicatPrincipals.
EN1012-2:1997 Compressorsand Vacuum
pumps.safety Requirements.Vacuum
PumDs.
EN61010-l:2001.
EN61326:1997
(immunity,
CtassBEmissions)
C22.2No61010.1-04 Safetyrequirementsfor electricalequipmentfor measurement,
Controtandlaboratory
use,Part1:Generalrequirements
Ut6101o-1
(2"d
Edition)' safetyrequirementsfor etectricatequipmentfor measurement,
Controtandlaboratory
use,Part
1:Generalrequirements
* Thepumps
comptywith EN61010-1wheninstatledin accordance
with tJleinstruction
manualsupptiedwith the pump.
' 24VPumpsontycomptywith theCanadianStandardAuthorityandunderwriteELabontory
when used
with ExDc 24Vfamity of controtleB.
Themachine(s)mustnot beputinto serviceuntit theequipmentinto which
it isincorporated
hasbeenbroughtinto conformitywith the fottowing
provisions
Safetyrequirementsfor electrical equipment for measurement
controlandlaboratoryuse.
EtectricaIequipmentfor measurement,controland[abordtoryuse
EMCrequirements.
Lo
,VottageDirective.
Etectromagnetic
compatibitityDirective
MachineryDirective
2-t++.'_ <) c-xG!=-,,- 2-c,-?
Go rz<<ZS9 At rL-
Dak ahd Place
2006t95tEC
20ut108tEc
98t17tEC
B.D.Brewster,TechnlcatManager
BurgessHittProduct5
This
product
hasbeenmonufoctured
underoquality|y6tem
registeredtolSOgNl
l?nwa,FrD=

This page has been intentionally left blank.

© Edwards Limited 2007. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
B760-60-880 Issue A
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
2 Technical data ....................................................................................3
2.1 General .................................................................................................................... 3
2.2 Pumping media ........................................................................................................... 5
2.3 Vent gas specification and vent control data ....................................................................... 7
2.4 Purge gas specification and data ...................................................................................... 7
2.5 Materials exposed to gases pumped .................................................................................. 7
3 Installation ....................................................................................... 13
3.1 Unpack and inspect .....................................................................................................13
3.2 Typical installation .....................................................................................................14
3.3 Connection to the vacuum system ...................................................................................16
3.3.1 Mechanical fixing .......................................................................................................16
3.3.2 Inlet screens .............................................................................................................16
3.3.3 Inlet connection and pump orientation .............................................................................17
3.3.4 Backing-port connection ...............................................................................................20
3.3.5 Booster port connection ...............................................................................................20
3.4 Vent options, vent-valve connection and control .................................................................20
3.5 Purge gas connection ...................................................................................................21
3.6 Electrical installation ..................................................................................................21
3.6.1 EXDC drive module .....................................................................................................22
3.6.2 TIC controller ............................................................................................................22
3.7 Cooling ...................................................................................................................22
3.7.1 Introduction .............................................................................................................22
3.7.2 Forced-air cooling ......................................................................................................22
3.7.3 Water-cooling ...........................................................................................................22
3.8 Magnetic fields ..........................................................................................................23
4 Operation ........................................................................................ 25
4.1 Start-up ..................................................................................................................25
4.2 Shut-down ................................................................................................................26
4.3 Safety interlocks and control system ................................................................................26
4.3.1 EXDC drive module .....................................................................................................26
4.3.2 TIC controller ............................................................................................................26
4.4 Bakeout ...................................................................................................................26
5 Maintenance ..................................................................................... 27
5.1 Introduction .............................................................................................................27
5.2 Bearing maintenance ...................................................................................................27
5.3 Rotor life .................................................................................................................27
5.4 Cleaning the pump ......................................................................................................27
5.5 Fault finding .............................................................................................................28
6 Storage and disposal ........................................................................... 31
6.1 Storage ...................................................................................................................31
6.2 Disposal ...................................................................................................................31
7 Service, spares and accessories .............................................................. 33
dcs/7784/01/08

B760-60-880 Issue A
Page ii © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
7.1 Introduction .............................................................................................................33
7.2 Service ....................................................................................................................33
7.3 Spares kits ...............................................................................................................33
7.3.1 Inlet screens .............................................................................................................33
7.3.2 Inlet strainer .............................................................................................................33
7.3.3 Inlet-flange seal .........................................................................................................33
7.4 Accessories ...............................................................................................................34
7.4.1 Installation ...............................................................................................................34
7.4.2 EXDC drive module .....................................................................................................34
7.4.3 TIC controller ............................................................................................................34
7.4.4 TAV vent-valve and vent port adaptor ..............................................................................34
7.4.5 VRX vent-restrictor .....................................................................................................35
7.4.6 PRX purge-restrictor ....................................................................................................35
7.4.7 ACX air-cooler ...........................................................................................................35
7.4.8 WCX water-cooler ......................................................................................................35
Index .............................................................................................. 37
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 Booster port performance with lines of constant backing pressure ............................................. 5
2 Dimensions of B76061991 EXT400/200PX split flow pump - large main and side ports (units in mm) ...... 8
3 Dimensions of B76062991 EXT400/200PX split flow pump -
large main and side ports plus end port (units in mm) ............................................................ 9
4 Dimensions of B76067991 EXT400/200/30iPX -
large side port and end port plus interstage port (units in mm) ................................................10
5 Dimensions of B76053991 EXT400/200/30iPX -
interstage cartridge pump with main, side ports plus interstage port (units in mm) ........................11
6 Schematic of a typical EXTPX split flow system ...................................................................15
7 Correct installation of inlet screen ..................................................................................17
8 Correct mounting attitude of the EXTPX split flow pump ........................................................19
9 Installation of optional accessories ..................................................................................36

© Edwards Limited 2007. All rights reserved. Page iii
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
B760-60-880 Issue A
Tables
Table Page
1 General data .............................................................................................................. 3
2 Technical data ........................................................................................................... 3
3 Vent gas and vent control data ........................................................................................ 7
4 Purge gas specification ................................................................................................. 7
5 List of items supplied ..................................................................................................13
6 Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve) ..............21
7 Water-cooling block supply requirements ..........................................................................23
8 Fault finding .............................................................................................................28
9 Spares kits ...............................................................................................................33
10 EXDC drive module .....................................................................................................34
11 TIC controller ............................................................................................................34
12 TAV vent-valve and vent port adaptor ..............................................................................34
13 VRX vent restrictor .....................................................................................................35
14 PRX purge restrictor ....................................................................................................35
15 ACX air-cooler ...........................................................................................................35
16 WCX water-cooler ......................................................................................................35
Associated publications
Publication title Publication number
EXDC Turbomolecular pump drive module D396-45-880
TIC (100 W and 200 W) manual D397-22-880
TIC range CD D397-00-879
EXT pump accessories manual B580-65-880

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B760-60-880 Issue A
Page iv © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.

© Edwards Limited 2007. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
B760-60-880 Issue A
1Introduction
1.1 Scope and definitions
This manual provides installation, operation, maintenance and storage instructions for the range of Edwards
EXT400/200PX and EXT400/200/30iPX split flow compound turbomolecular vacuum pumps, hereafter referred to as
EXTPX split flow pumps. Please read and follow all instructions in this manual.
The EXTPX split flow pump is designed for use with an Edwards 24 V EXDC160 drive module unless using Argon (please
refer to Section 2.2) when an EXDC80 drive module may be recommended. Read this manual and the instruction
manual supplied with your EXDC before you attempt to install or operate the equipment. The EXDC drive module
manual contains details of electrical installation.
Important safety information in this manual is highlighted as WARNING and CAUTION instructions; please obey these
instructions. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
In accordance with the recommendations of EN61010, the following warning symbols may appear on the pump or its
accessories:
The units used throughout this manual conform to the SI international system of units of measurement.
Also throughout this manual, wherever flow rates are specified, the abbreviation 'sccm' is used to mean standard
cm3min-1: this is a flow of 1 cm3min-1 at an ambient temperature of 0 °C and a pressure of 1013 mbar
(1.013 x 105Pa).
WARNING
Warnings are given where failure to observe the instruction could result in injury to or death of
people.
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Warning - hot surfaces.

B760-60-880 Issue A
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Edwards and the Edwards logo are trademarks of Edwards Limited.
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© Edwards Limited 2007. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
B760-60-880 Issue A
2Technicaldata
2.1 General
Table 1 - General data
General items Reference data
Performance Refer to Table 2
Dimensions Refer to Table 2 and Figure 2 to 5
Maximum inlet-flange temperature 70 °C
Maximum radial and axial magnetic field 3.5 mT
Installation category EN61010 part 1, Category 1
Pollution degree EN61010 part 1, Category 2
Table 2 - Technical data
Parameter EXTPX split flow pump Notes
Mass 12 kg or less Weight dependent on specific
variant.
Main inlet port Refer to Figure 2 to 5
Side inlet port Refer to Figure 2 to 5
Interstage port Refer to Figure 2 to 5
Booster port DN 25NW
Exhaust port DN 25NW
Vent port 1/8 inch BSPP
Purge port 1/8 inch BSPP
Peak end inlet pumping speed
N2320 l s-1 *
He 320 l s-1
H2280 l s-1
Peak main inlet pumping speed
N2310 l s-1 *
He 310 l s-1
H2270 l s-1
Peak side inlet pumping speed
N2200 l s-1 *
He 200 l s-1
H2150 l s-1
Peak interstage inlet pumping speed
N227 l s-1 *
He 27 l s-1
H227 l s-1

B760-60-880 Issue A
Page 4 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Peak booster port pumping speed N2
using XDS10 24 m3h-1 (6.7 l s-1)*
using RV12 26 m3h-1 (7.2 l s-1)
Peak compression ratio from the
backing-port to the main inlet
N2, He and H2
N2> 1 x 10 8
He 1 x 10 6
H22 x 10 5
Peak compression ratio from the side
inlet to the main inlet
N2, He and H2
N21 x 10 4
He 100
H235
Maximum booster port pressure- N24.5 mbar Air cooled at 25 °C ambient with
RV12 backing-pump (1400 sccm flow)
and with no flow through other inlet
ports, and no strainer fitted.
Maximum backing pressure- N217 mbar Air cooled at 25 °C ambient, with no
flow through other inlet ports.
Recommended backing-pump Application dependent Please consult Edwards.
Maximum single continuous
inlet pressure
Main inlet 1.2 x 10 -2 mbar Air at 35 °C ambient- with RV12
backing-pump.
Side inlet 4.1 x 10 -2 mbar
Interstage inlet (where fitted) 2.2 x 10 -1 mbar
Operating attitude Refer to Figure 8
Nominal rotational speed 60,000 rpm
Starting time to 90% speed
Using an EXDC 160 285 seconds With zero gas load, and XDS10 backing-pump.
Cooling method Forced air/ water-cooling Refer to Section 3.7.
Ambient air temperature
(forced air-cooling) 0- 35°C
Water-cooling supply temperature 10- 20°C
Noise level at 1 metre < 45 dBA
Recommended controller EXDC 160 W 24 V D396-46-000
Recommended controller (Argon) EXDC 80 24 V D396-45-000 also refer to
Section 2.2.
EXDC160 maximum VA output 250 VA
Quiescent power 25-40 W Power at ultimate pressure with
10-2 mbar backing pressure.
*All pumping speeds are peak values for a horizontal envelope pump without inlet screen. Inlet screens may
reduce performance by up to 15%. Actual pumping speed for different envelope variants will be dependent
on inlet geometry and flow distribution between ports.
Table 2 - Technical data (continued)
Parameter EXTPX split flow pump Notes

© Edwards Limited 2007. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
B760-60-880 Issue A
Figure 1 - Booster port performance with lines of constant backing pressure
*Power Limit Zone: The temperatures shown are pump local ambients. The tests were performed with a single
radial fan cooling the pump. If extra cooling is added, extra performance can be obtained. Exact limits will be
based on application requirements, cooling method and pump configuration; please consult Edwards to ensure
suitability. Also refer to Section 3.7 and 7.4 for cooling requirements and accessories.
2.2 Pumping media
WARNING
If pumping hazardous gases or vapours, the customer must observe the safety recommendations
of the supplier of the gas or vapour. Vent hazardous gases and gas mixtures safely. Do not expose
people to these gases.
WARNING
Do not pump explosive gas mixtures through the EXTPX split flow pump as the pump is not suitable
for this purpose.
WARNING
If pyrophoric gases are pumped then the customer must supply adequate dilution with an inert gas.
WARNING
It is the customers' responsibility to leak check their system to ensure that the process gases will
not escape to the atmosphere where this would cause a hazard.

B760-60-880 Issue A
Page 6 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
CAUTION
An EXDC160 drive module is recommended for most applications. However, when pumping high concentrations
of Argon (over 50% of gas mixture) an EXDC80 drive module is recommended to protect the pump against
overheating. If in any doubt, please contact your local Edwards Vacuum Representative.
CAUTION
Do not use the EXTPX split flow pump to pump particulates or condensable media. Deposition may occur within
the pump which will degrade pump performance and reduce the pump life.
CAUTION
Do not use the EXTPX split flow pump to pump gases containing more than 20% oxygen. If you do, the lubricant
will polymerise and the pump will fail prematurely.
Note: Concentrations of gases may be modified by the compression of the pump.
The pump is designed to pump the following residual gases normally used in high-vacuum systems:
You can use the pump to pump oxygen and water vapour, subject to the following conditions:
zOxygen - The oxygen concentration must be less than 20% by volume; also refer to Section 2.4.
zWater vapour - You must ensure that vapour does not condense inside the pump.
If you wish to pump a gas not in the list above, contact your supplier for advice. If you do not contact your supplier,
you may invalidate the warranty on the pump. The pump is not suitable for pumping aggressive or corrosive gases.
WARNING
Gases entering from different pump inlets may combine to cause dangerous mixtures.
zAir zNitrogen zCarbon Dioxide
zCarbon Monoxide zKrypton zHelium
zNeon zArgon zHydrogen
zEthane zPropane zButane
zMethane

© Edwards Limited 2007. All rights reserved. Page 7
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
B760-60-880 Issue A
2.3 Vent gas specification and vent control data
Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the
subsequent pump-down time. To reduce pump-down times you should vent the pump with dry, clean gases. Refer to
Table 3.
2.4 Purge gas specification and data
When purged with an inert gas, the pumps can be used to pump oxygen in concentrations above 20% by volume.
2.5 Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped: aluminium alloys, steels, stainless
steels, fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic
resin, and carbon-fibre reinforced epoxy resin.
Table 3 - Vent gas and vent control data
Vent items Reference data
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22°C
Maximum size of particulate 1 µm
Maximum concentration of oil 0.1 parts per million
Time for rotational speed to reduce to 50% ≥15 seconds
Maximum purge gas pressure < 0.5 bar gauge (7 psig, 0.5 x 105Pa gauge)*
*If you wish to use vent pressures in excess of this value, please consult Edwards.
Table 4 - Purge gas specification
Purge gas system items Reference data
Purge gas Dry nitrogen, argon or other inert gas
Maximum dew point at atmospheric pressure -22°C
Maximum size of particulate 1 µm
Maximum concentration of oil 0.1 parts per million
Allowable purge gas flow (when required) 20- 150 sccm (0.33- 2.5 mbar l s-1, 33- 250 Pa l s-1)
Recommended purge gas flow 25 sccm minimum (0.42 mbar l s-1, 42 pa l s-1)
Maximum allowable purge gas supply pressure 0.5 bar gauge (7 psig, 0.5 x 105Pa)*
*If you wish to use pressures in excess of this value, please consult Edwards.

B760-60-880 Issue A
Page 8 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Figure 2 - Dimensions of B76061991 EXT400/200PX split flow pump - large main and side ports (units in mm)
1. Fan-mounting holes
2. Base mounting holes (remove feet)
3. Purge port
4. Booster port
5. Backing-pump port
6. Earth screw
7. Electrical connector
8. Side port
9. Main port
10.Vent port

© Edwards Limited 2007. All rights reserved. Page 9
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
B760-60-880 Issue A
Figure 3 - Dimensions of B76062991 EXT400/200PX split flow pump - large main and side ports plus end port
(units in mm)
1. Fan-mounting holes
2. Base mounting holes (remove feet)
3. Purge port
4. Booster port
5. Backing-pump port
6. Earth screw
7. Electrical connector
8. Side port
9. Main port
10.Vent port
11.End port

B760-60-880 Issue A
Page 10 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Figure 4 - Dimensions of B76067991 EXT400/200/30iPX - large side port and end port plus interstage port
(units in mm)
1. Fan-mounting holes
2. Base mounting holes (remove feet)
3. Purge port
4. Booster port
5. Backing-pump port
6. Earth screw
7. Electrical connector
8. Interstage port
9. Side port
10.Vent port
11.End port

© Edwards Limited 2007. All rights reserved. Page 11
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
B760-60-880 Issue A
Figure 5 - Dimensions of B76053991 EXT400/200/30iPX - interstage cartridge pump with main, side ports plus
interstage port (units in mm)
1. Jacking point (M6 thread)
2. Purge port
3. Booster port
4. Backing-pump port
5. Earth screw
6. Electrical connector
7. Base mounting holes
8. Flange-mounting holes
9. Fan-mounting holes
10.Main port
11.Interstage port
12.Side port
13.Vent port

B760-60-880 Issue A
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