Edwards nXLi Series User manual

Dry Vacuum Pumps
nXLi
INSTRUCTION MANUAL
A77010880_B Original instrucons
edwardsvacuum.com

Copyright noce
©Edwards Limited 2020. All rights reserved.
Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,
Burgess Hill, West Sussex RH15 9TW.
Disclaimer
The content of this manual may change from me to me without noce. We accept no
liability for any errors that may appear in this manual nor do we make any expressed or
implied warranes regarding the content. As far as praccal we have ensured that the
products have been designed and constructed to be safe and without risks when
properly installed and used in accordance with their operang instrucons.
We accept no liability for loss of prot, loss of market or any other indirect or
consequenal loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms and
condions of sale or negoated contract under which this document is supplied.
You must use this product as described in this manual. Read the manual before you
install, operate, or maintain the product.
Page 2

P20010162C
CE Declaration of Conformity
The following product
nXL110i 200 – 240 V 1 PH 50/60 HZ NW40/NW25 A77012320
nXL110i 200 – 240 V 1 PH 50/60 HZ NW50/NW25 A77012420
nXL200i 200 – 240 V 1 PH 50/60 HZ NW40/NW25 A77022320
nXL200i 200 – 240 V 1 PH 50/60 HZ NW50/NW25 A77022420
Is in conformity with the relevant requirements of European CE legislation:
2006/42/EC
Machinery directive
2014/35/EU
Low voltage directive (LVD) as applicable to electrical sub-assemblies
2014/30/EU
Electromagnetic compatibility (EMC) directive
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863
Based on the relevant requirements of harmonised standards:
EN 1012-2:1996 +A1:2009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
EN 61010-1:2010
Safety requirements for electrical equipment for measurement, control and laboratory
use. General requirements
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC requirements.
General requirements
Class A Emissions, Industrial Immunity
Documentation Officer:
Jelena Havelkova, Spielberk Office Centre, Holandska 10, Brno, 63900 Czech Republic,

: [phone],

: [email protected]
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 13th February 2020.
Ian Keech – VP Engineering
Scientific Vacuum Division
Burgess Hill
BK Kim – General Manager
Cheonan, Korea
Edwards Ltd
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK

This product has been manufactured under a quality management system certified to ISO 9001:2015
Additional Legislation and Compliance Information
EU EMC Directive: Class A Industrial equipment
Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to
radio reception in such environments.
EU RoHS Directive: Material Exemption Information
This product is compliant with the following Annex III Exemptions:
•6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight
•6(c) Copper alloy containing up to 4% lead by weight
•7(a) Lead in in high melting temperature type solder (i.e. lead based alloys containing 85% by weight or more lead)
•7(c) I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in
capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound
•7(c) II Lead in dielectric ceramic in capacitors for a rated voltage of 125 V AC or 250 V DC or higher
•8(b) Cadmium and its compounds in electrical contacts
•15 Lead in solders to complete a viable electrical connection between semiconductor die and carrier within
integrated circuit flip chip packages
•34 Lead in cermet-based trimmer potentiometer elements
EU REACH Regulation Compliance
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction to
ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
Article 33.1 Declaration
This product does contain Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the
2015 European Court of Justice ruling in case C-106/14.
•Cadmium (Cd) added to the Candidate List June 2013
As indicated by the applied RoHS exemption above, this substance is present in electronic componentry.
•Lead (Pb) added to the Candidate List June 2018
As indicated by the applied RoHS exemption(s) above this substance is present in certain aluminium/brass/steel/electrical
or electronic components.
ADDITIONAL INFORMATION
The products listed are also in scope for and comply with the requirements of the following:
Product is certified to
CSA-C22.2 No.61010-1-12
Safety requirements for electrical equipment for measurement, control and
laboratory use – Part 1: General requirements
Product conforms to
UL61010-1 3
rd
Edition
Safety requirements for electrical equipment for measurement, control and
laboratory use – Part 1: General requirements

This product has been manufactured under a quality management system certified to ISO 9001:2015
材料成分声明
China Material Content Declaration
有害物质
Hazardous Substances
部件名称
Part name
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls
(PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
机壳
Enclosure
X O O O O O
电机（泵和机械增压
泵）
Motors (pump and
mechanical booster)
X O O O O O
泵和增压泵
Pump and booster
X O O O O O
电子元件和控件
Electronics and
Controls
X O X O O O
冷却系统
Cooling system
X O O O O O
吹扫系统
Purge system
X O O O O O
机台接口
Tool Interface
X O O O O O
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 26572.
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T26572.

This page has been intentionally left blank.

Contents
1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1 Denion of Warnings and Cauons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.2 Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2. General descripon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.2 Pump controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.3 Interface control panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.4 Logic interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.5 Auto-run. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.6 Auxiliary connector socket. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.7 Pump controller conguraon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.1 Operang and storage condions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.2 Performance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.3 Materials exposed to gases. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
3.4 Purge gas specicaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.5 Electrical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4. Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
4.1 Installaon safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
4.2 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.3 Mechanical installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
4.4 Leak test the system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
4.5 Electrical installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
4.5.1 Connect the electrical supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.6 Connect the system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.6.1 Purge gas connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.6.2 Connecon for remote control and monitoring. . . . . . . . . . . . . . . . . 21
4.6.3 Connect the logic interface to the control equipment. . . . . . . . . . . . 21
4.7 Addional safety equipment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5. Commission the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
6. Operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.1 Operaon safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
6.2 Operaonal modes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
6.2.1 Manual control mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
6.2.2 Parallel and serial control mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Page 3

6.2.3 Auto-run. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
6.2.4 Digital operator control mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
6.3 Start the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
6.3.1 Start the pump with the digital operator. . . . . . . . . . . . . . . . . . . . . . 26
6.3.2 Transient overload protecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.3.3 Status indicators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.4 Shut down the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.5 Restart the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
7. Maintenance and service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
7.1 General maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
7.2 Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
7.2.1 Return the equipment or components for service . . . . . . . . . . . . . . 29
8. Fault nding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
8.1 The pump has failed to start or has stopped. . . . . . . . . . . . . . . . . . . . . . . . . . 31
8.2 The pump has failed to achieve the required performance. . . . . . . . . . . . . . 31
8.3 The pump is noisy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
8.4 The pumping speed is poor or pump down me is too long. . . . . . . . . . . . . 31
8.5 Alarm indicator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
9. Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
10. Disposal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
11. Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
11.1 Digital operator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
11.2 Electrical cables. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Page 4

List of Figures
Figure 1: nXLi. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Figure 2: Interface control panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Figure 3: Valve connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Figure 4: nXL110i Dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Figure 5: nXL200i Dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Figure 6: nXL110i Performance graph. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Figure 7: nXL200i Performance graph. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Figure 8: Logic interface connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Page 5

1. Safety and compliance
1.1 Denion of Warnings and Cauons
Important safety informaon is highlighted as WARNING and CAUTION instrucons. The
safety instrucons must be obeyed.
The use of WARNINGs and CAUTIONs is as follows:
WARNING:
Warnings are given where failure to observe the instrucon could result in minor
injury or death to people. The actual symbol shown varies according to the hazard.
CAUTION:
Cauons are given where failure to observe the instrucon could result in minor
injury or damage to the equipment, associated equipment or process.
1.2 Safety symbols
The safety symbols on the products shows the areas where care and aenon is
necessary.
The safety symbols that follow are used on the product or in the product
documentaon.
Warning/Cauon
An appropriate safety instrucon must be followed or cauon to a
potenal hazard exists.
Warning - Heavy object
Indicates the potenal hazard arising from a heavy object.
Warning - Dangerous voltage
Indicates hazards arising from dangerous voltages.
Warning - Hot surfaces
Indicates that the marked item may be hot and should not be touched
without taking precauons.
Warning - Protecve earth (ground)
Indicates that the equipment must be grounded.
Warning - Use protecve equipment
Indicates that appropriate protecve equipment must be used.
Page 6
A77010880_B - Safety and compliance

2. General descripon
2.1 Overview
WARNING: INCORRECT USE OF EQUIPMENT
Risk of injury or damage to equipment. Incorrect use of the equipment can cause
injury. The user is responsible for the safe operaon, installaon and monitoring of
the system.
The pump is connected by a cord. The pump is designed for use on clean duty
applicaons. The cord rangs are:
▪Voltage - 200 - 240 V
▪Frequency - 50 or 60 Hz
▪Current - 8.5 A
The pump is not designed for use with ammable, corrosive, toxic or other hazardous
gases. Gas or oxygen can mix in the pump system.
The compact dry-pumping system operates in steady-state gas load condions with an
inlet pressure from 1 ‑ 15 mbar. If the inlet pressure is more than 15 mbar for an
extended period, the pump controller reduces the motor speed. The motor speed is
increased when the pressure is reduced, or when the transient overload protecon has
recovered. Refer to Table: Performance data on page 13 for informaon on maximum
inlet pressure.
Refer to Figure: nXLi components on page 8. The system is supplied with a NW40 or
NW50 inlet port (item 3) and a NW25 exhaust port (item 2).
The pump mechanism is operated by a three‑phase electric motor. The pump controller
controls the motor.
The system is air cooled by a fan. The fan is installed between the pump controller and
the pump cartridge. The fan connues to operate for 5 minutes aer the pump is set to
o. The pump has a thermal protecon device that will stop the motor if a thermal
overload, for example in high ambient temperature occurs. You must restart the pump
aer it has cooled down.
The system has a purge gas connecon, if it is necessary to purge the system.
The pump is designed to remove the residual gases used in high vacuum systems. The
gases are:
▪Air
▪Carbon monoxide
▪Neon
▪Ethane
▪Nitrogen
▪Krypton
▪Argon
▪Helium
Page 7
A77010880_B - General descripon

▪ Butane
You can use the pump to pump oxygen and water vapour. The oxygen concentraon
must be less than 20% by volume. The water vapour must not condense in the pump.
To use the pump to remove a gas that is not listed, speak to the supplier for advice. If
you do not get advice before you remove an unlisted gas, your warranty could be invalid.
Do not use the pump for aggressive or corrosive gases.
Figure 1 nXLi
CS/1412/A
123
6
7
9
10
11
8
12
13
23
5
4
1. Dashboard or interface 2. Exhaust port
3. Inlet port 4. Levelling feet x 4
5. Castors x 4 6. Auxiliary connector
7. Auto-run switch 8. 15-way D-type connector
9. Mains circuit breaker 10. Mains connector port
11. Protecve earth stud 12. N2 purge port
13. Liing eye posions
1. Dashboard or interface 2. Exhaust port
3. Inlet port 4. Levelling feet x 4
5. Castors x 4 6. Auxiliary connector
7. Auto-run switch 8. 15-way D-type connector
9. Mains circuit breaker 10. Mains connector port
11. Protecve earth stud 12. N2 purge port
13. Liing eye posions
2.2 Pump controller
CAUTION: ELECTRICAL SUPPLY
Risk of damage to equipment. Do not disconnect the pump from the electrical supply
unl it has has fully stopped.
The pump controller contains the drive electronics to control the pump operaon.
The pump controller controls the supply of electric current to the motor for the
operang condions. This allows the pump to be connected to a single phase mains
supply.
The interface control panel is installed on the pump controller. The pump can be
operated:
Page 8
A77010880_B - General descripon

▪ manually, with the buons on the user interface control panel. Refer to Figure:
Interface control panel on page 9.
▪ remotely, with the serial communicaons or the digital and analogue process
control (parallel). The control is connected to the pump through the 15‑way D‑type
interface connector. Refer to Figure: nXLi components on page 8 and Connecon
for remote control and monitoring on page 21.
▪ through a digital operator available as an accessory. The digital operator is
connected to the pump through a digital‑operator connector‑socket on the
interface control panel. Refer to Figure: Interface control panel on page 9, item 10.
2.3 Interface control panel
Figure 2 Interface control panel
CS/1413/A
1 2 3 4 5 6 7 8 9 10
1. Run indicator LED 2. Start buon
3. Stop buon 4. Standby buon
5. Standby‑mode indicator LED 6. Power indicator LED
7. Auto-run status indicator LED 8. Remote indicator LED
9. Alarm indicator LED 10. Digital‑operator connecon‑socket
1. Run indicator LED 2. Start buon
3. Stop buon 4. Standby buon
5. Standby‑mode indicator LED 6. Power indicator LED
7. Auto-run status indicator LED 8. Remote indicator LED
9. Alarm indicator LED 10. Digital‑operator connecon‑socket
2.4 Logic interface
The logic interface is designed to support the serial control and the parallel control to
monitor and control through one connector.
The pump controller can be operated through the 15‑way D‑type logic interface
connector (refer to Figure: nXLi components on page 8, item 8). The signals on the logic
interface are:
▪control inputs: switch type and analogue signals that control the pump.
▪status outputs: to idenfy the status of the system.
2.5 Auto-run
The pump can be set to auto‑run. Use the auto-run switch at the rear of the pump
system to set auto-run to on. Refer to Figure: nXLi components on page 8, item 7.
Refer to Operaonal modes on page 24 for more informaon.
2.6 Auxiliary connector socket
An auxiliary control connecon on the rear panel controls an oponal inlet valve. This
inlet valve can be operated in parallel with the normal pump output signal. Refer to
Figure: nXLi components on page 8, item 6. The valve is usually closed and:
▪will open when the normal signal is acve (pump at speed)
Page 9
A77010880_B - General descripon

▪ will close when you select stop, or if there is a fault condion.
The reacon me will be in line with the valve selecon. The output signal is 24 V d.c.
Refer to Figure: Valve connector on page 10 for the polarity of the connector pins when
the connector is energized.
The auxiliary connector is regulated to 24 V d.c. to control the accessories. Refer to
Table: Auxiliary load currents on page 10, the output will shut down to protect the pump
controller.
Refer to Table: Recommended mang plugs on page 10 for the recommended mang
plugs.
Figure 3 Valve connector
Pin number Signal Polarity
1 0 V return Negave
2 Not connected -
3 Not connected -
4 Switched +24 V Posive
Table 1 Auxiliary load currents
Descripon Data
Connector plug Phoenix part number SACC-DSI-M 8FS-4CON-M12/0.5
Voltage output 24 V d.c. -25%, +10% (18 V d.c. to 26.4 V d.c.)
Current output 500 mA
Table 2 Recommended mang plugs
Mang connector plug Phoenix part number
Screw connecon, straight SACC-M 8MS-4CON-M-SW
Solder connecon, straight SACC-M 8MS-4CON-M
Screw connecon, right angle SACC-M 8MR-4CON-M-SW
Solder connecon, right angle SACC-M 8MR-4CON-M
2.7 Pump controller conguraon
You can use a separate system to congure the pump controller before you connect the
pump to the applicaon. All the conguraon sengs stored in the pump controller are
saved when the power to the pump is disconnected.
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A77010880_B - General descripon

You can congure the pump funconality for the applicaon. This allows the pump to
operate through a simple parallel interface system.
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A77010880_B - General descripon

3. Technical data
3.1 Operang and storage condions
Table 3 Operang and storage condions
Range Data
Ambient operang temperature range 5 °C to 40 °C
Ambient operang humidity range 10% to 90% RH (non‑condensing)
Maximum operang altude 2000 m
Ambient storage temperature range -30 °C to 70 °C
Polluon degree 2
Equipment type Indoor use
Enclosure protecon IP20
Note:
The nXLi pump-system is designed to meet the electrical safety creepage and clearance
requirements for 3000 m altude. For maximum thermal performance, de-rang is
required between 2000 m and 3000 m. Reduce the maximum operang ambient
temperature from 40 oC to 35 oC between 2000 m and 3000 m linearly. This de
‑ rang
meets the requirements of IEC 282 ‑ 1.2.
Table 4 Mechanical data
Parameter nXL110i nXL200i
Overall dimensions (L x W x H) 654 x 308 x 344 mm 704 x 308 x 343 mm
Maximum lt angle 25°
Nominal rotaonal speed 9000 rpm
Mass 78 kg 84 kg
Inlet connecon NW40 or NW50
Outlet connecon NW25
Figure 4 nXL110i Dimensions
440 (17.32)
344 (13.54)
100 (3.94)
244 (9.61)
654 (25.75)
243 (9.57)
320 (12.6)
308 (12.13)
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A77010880_B - Technical data

Figure 5 nXL200i Dimensions
440 (17.32)
344 (13.54)
150 (5.90)
294 (11.57)
704 (27.72)
243 (9.57)
320 (12.6)
308 (12.13)
3.2 Performance
Table 5 Performance data
Parameter Units nXL110i nXRL200i
Maximum pump speed* m3/hr 110 200
Maximum connuous inlet pressure at
40 °C ambient mbar 8
Maximum connuous inlet pressure at
30 °C ambient mbar 15
Maximum connuous exhaust pressure bar 0.4
Maximum inlet ow to pump down a
100 litre chamber from an atmospheric
pressure
slm 0 NA
Maximum inlet ow to pump down a
75 litre chamber from an atmospheric
pressure
slm 5 0
Maximum inlet ow to pump down a
50 litre chamber from an atmospheric
pressure
slm 25 20
Suck‑back protecon By exhaust valve
Leak ghtness (stac) mbar l/s-1 < 1 x 10-5
* Values for the maximum pumping speed are taken at a sea level. At level higher than
sea level, the pump performance can be aected and the rotaonal speed can drop
below the nominal value.
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A77010880_B - Technical data

Table 6 Sound data
Declared dual‑number noise‑emission values in accordance with ISO 4871
nXL100i nXL200i
Measured A‑weighted emission sound pressure level, LpA
at ulmate vacuum 1 m from the pump in free space
dB(A)
56.7 55.4
Uncertainty, KpA dB(A) 2.5
Values from ISO 3744: 2010
Figure 6 nXL110i Performance graph
0
0.2
0.4
0.6
0.8
1
1.2
1.4
1.6
1.8
2
0
20
40
60
80
100
120
10-3 10-2 10-1 1 101102103mbar
m3h-1
kW
1
2
3
nXL110i
1. nXL110i 2. nXL110i in transient overload protecon
3. Supply power (kW)
1. nXL110i 2. nXL110i in transient overload protecon
3. Supply power (kW)
Figure 7 nXL200i Performance graph
0
0.2
0.4
0.6
0.8
1
1.2
1.4
1.6
0
50
100
150
200
250
10-3 10-2 10-1 1 101102103mbar
m3h-1
kW
1
2
3
nXL200i
1. nXL200i 2. nXL200i in transient overload protecon
3. Supply power (kW)
1. nXL200i 2. nXL200i in transient overload protecon
3. Supply power (kW)
3.3 Materials exposed to gases
The materials and the components exposed to the gases in the pump are:
▪SG iron
▪Aluminium alloy
▪Steel
▪Fluoroelastomer (seals)
▪PTFE (seals)
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A77010880_B - Technical data

3.4 Purge gas specicaon
Table 7 Purge gas specicaon
Specicaon Reference data
Purge gas Dry air, nitrogen, argon or other inert
gases
Purge gas interface 8 mm tube compression ng
Maximum allowable purge gas supply
pressure
7 bar (gauge), 100 psig, 7 x 105 Pa
Minimum allowable purge gas supply
pressure
3 bar (gauge), 45 psig, 3 x 105 Pa
Minimum purity ISO 8573 solids class 1
Typical ow at 3 bar 4 slm
3.5 Electrical data
Table 8 Electrical rang for connuous operaon
Supply voltage (V a.c. rms) Phase Frequency (Hz) Input current (A
rms)
200 - 240 +/-10% Single 50 ‑ 60 8.5
Note:
In a transient overload condion the maximum overload current drawn by the pump is
10 amps. Refer to Transient overload protecon on page 27 for more informaon.
Page 15
A77010880_B - Technical data

4. Installaon
4.1 Installaon safety
CAUTION: SAFETY INSTRUCTIONS
Risk of injury or damage to equipment. Follow the safety instrucons and take note
of all appropriate precauons.
Possible hazards on the dry pumping system include electricity, process chemicals,
Fomblin® (PFPE) oil and nitrogen.
▪Refer to safety manual P40040100 for safety informaon for the specicaon,
design, operaon and maintenance of vacuum pumps and vacuum systems.
Contact us for the safety manual.
▪Contact us or the local service centre for installaon advice or assistance.
▪Do not remove the temporary covers from the system inlet and exhaust unl the
system is ready to connect.
▪ Do not operate the system unl the inlet and exhaust are connected to the
vacuum and the exhaust extracon system.
▪ If the pump is to replace an exisng pump system, we recommend that you vent
and purge the system. Vent and purge the system with nitrogen for minimum 15
minutes before you start the installaon. Refer to Purge gas specicaon on page
15.
▪ Isolate the other components in the process system from the electrical supply to
prevent accidental operaon.
▪Electrical and nitrogen supplies are possible hazards. Lockout and tagout the
supplies before you do maintenance.
▪ Obey all naonal and local rules and safety regulaons when you install the
system.
▪Tighten the cables, hoses and pipework during installaon to prevent a trip hazard.
▪Make sure that the installaon area is clean and free from debris and
contaminaon before you install the pump.
▪Make sure that all facilies given in this manual are available for the system to
perform correctly.
▪Make sure that the exhaust is connected to the correct treatment plant to prevent
the discharge of the exhaust to the atmosphere.
▪Make sure that the exhaust pipeline will not be blocked during operaon. If an
exhaust isolaon valve is used, make sure that the pump cannot be operated when
the valve is closed.
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A77010880_B - Installaon