Edwards STP-301 Series User manual

MT-21E-101-C
STP Series Turbomolecular Pumps
STP-301/451 Series
Pump Specific Information
Instruction Manual (B)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Instruction Manual
(B)
:
(This Instruction Manual)
STP
p
ump specific information
Instruction Manual (C): STP control unit Instruction Manual
Copyright 2015 Edwards Japan Limited. All rights reserved. Printed in Japan.

This product has been manufactured under a quality management system certified to ISO 9001:2008
Declaration of Conformity
We,
Manufacture: Edwards Japan Limited
1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan
EU Representative: Edwards Limited
Manor Royal, Crawley, West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to
assemble the technical file, that the product(s)
Product Name: Turbomolecular pump
Model Number: STP-301/451 series
to which this declaration relates is in conformity with the following standard(s) or other normative
document(s)
EN1012-2:1996, A1:2009 Compressors and Vacuum Pumps.
Safety Requirements. Vacuum Pumps
EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use.
EMC requirements. General requirements
(Immunity: Industrial locations, Emission: Class A)
EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards.
Immunity for industrial environments
EN55011:2009, A1:2010 Industrial, scientific and medical equipment - Radio-frequency
disturbance characteristics (Group1, Class A)
EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic
Products with respect to the Restriction of Hazardous Substances
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2014/35/EU Low Voltage Directive
2014/30/EU Electromagnetic Compatibility (EMC) Directive
2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive
* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not
legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
VI-DOC-21-103
M
anufacture:
Y
uji Kato, TMP Technical Senior Manager
,
Edwards Japan Limited
5
th
Aug
ust
. 201
5
,
Yachiyo
Date and Place
EU representative:
Ian Stones
,
Director of
Technology, Edwards Limited
6
th
Aug
ust
. 20
1
5
, Burgess Hill
Date and Place

The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
Introduction
Installation of the STP pump
Installation of the STP control unit
Operation
Safety functions
Maintenance and inspection
Storage and disposal
Service, Spares and accessories
Instruction Manual (B)
STP Pump specific information:
Technical data
How to Secure the STP pump
Instruction Manual (C)
STP control unit Instruction Manual:
Introduction
Technical data
Installation
Operation
Maintenance
Storage, transportation and disposal
Service, spares, and accessories
Keep the manuals in an easily accessible location.

This page intentionally blank.

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page i
PAGE
i
CONTENTS
Section Title Page
1 TECHNICAL DATA 1
1.1 Applicable pump specifications 1
1.1.1 STP pump specifications 2
1.1.2 Condition for the water-cooling unit 3
1.2 External appearance of the STP pump 4
1.3 Label affixing positions 7
1.4 Accessories 8
2 HOW TO SECURE THE STP PUMP 9
2.1 When securing the inlet port with bolts 10
2.2 When securing the inlet port flange with claw clamps 12
2.3 When installing the damper in the inlet port flange 13
2.4 Cooling the STP Pump 14
2.4.1 Installation of air cooling unit 14

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page ii
PAGE
ii ILLUSTRATIONS
Figure Title Page
1 External appearance of STP-301/451 series
(Non-corrosion resistant type) 4
2 External appearance of STP-301/451 series
(Corrosion resistant type) 5
3 External appearance of STP-301/451 series
(with water cooling unit) 6
4 Label affixing positions for the STP pump 7
5 Example of securing the STP pump
(when securing the inlet port with bolts) 11
6 Example of securing the STP pump
(when securing the inlet port flange with claw clamps) 12
7 Example of securing the STP pump
(when installing the damper in the inlet port flange) 13
8 Air cooling unit and baking heater 15
TABLES
Table Title Page
1 Tightening torque of bolt 9
2 Maximum torque predicted
and recommended securing bolt for inlet port flange 10
3 Number of claw clamps for flange size 12

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 1
TECHNICAL DATA
1
1 TECHNICAL DATA
1.1 Applicable pump specifications
Model Name Specification Applicable Control unit
STP-301/451 series High-vacuum type SCU-350 series
Naming convention:
"C" following a pump model name indicates a corrosion resistant*1 type (e.g. STP-301C).
"C1" following a pump model name indicates a corrosion resistant*1 type with water cooling unit
(e.g. STP-301C1).
"H" following a pump model name indicates the pump used in combination with SCU-350H or
SCU350HA (e.g. STP-301H)
"-U" following a pump model name indicates a UL61010-1 listed model (e.g. STP-301-U).
*1 Corrosion resistant: STP pump with anti-corrosive treatment.

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 2
TECHNICAL DATA
PAG
E
2
1
1.1.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item STP-301 series STP-451 series
Flange size Inlet port flange ICF152/VG100/ISO100 ICF203/VG150/ISO160
Outlet port flange KF25 KF25
Pumping speed N2L/s 300 480
He L/s 280 460
H2L/s 300 460
Compression ratio N2 >108
He 5×105
H2 2×104
Ultimate pressure Non-corrosion
resistant type Pa (Torr)
10-8 (10-10) : ICF flange
6.5×10-6 (5×10-8) : VG/ISO flange
Corrosion
resistant type Pa (Torr)
10-7 (10-9) : ICF flange
6.5×10-6 (5×10-8) : VG/ISO flange
Maximum working pressure*1Pa (Torr) 6.7×10-2 (5×10-4): Natural air-cooling
Allowable backing pressure*1Pa (Torr) 13 (0.1): Natural air-cooling
Flow rate of purge gas <N2> Pa·m3/s (SCCM) 1.7×10-2 (10): Corrosion resistant type only
Rated speed rpm 25,000 to 48,000
Backup rotational speed*2 rpm Approximately 15,000
Starting time min 3
Stopping time min 5
Vibration μm 0-p < 0.01 (at 48,000 rpm)
Noise dB <50 (at 48,000 rpm)
Temperature Management System (TMS) N/A
Baking temperature °C <120
Lubricating oil Not necessary
Installation position Free
Cooling method Natural air cooling (Water cooling, Air cooling:
At baking and gas pumping)
Recommended backing-pump L/min 240
Mass*3kg 11 12
Ambient temperature range °C 0 to 40

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 3
TECHNICAL DATA
1
Item STP-301 series STP-451 series
Storage temperature range °C -25 to 55
Pollution degree 2
Installation category
Ⅱ
Applicable Control unit SCU-350 series
*1 The pressure is applicable under conditions that N2or other similar gas is vacuumed and the backing-pump (pumping
speed: 1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be
exhausted. Consult Edwards about conditions.
*2 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*3 Mass is a value of state that the only standard accessory was installed (except the optional accessory).
1.1.2 Condition for the water-cooling unit
The water-cooling unit is an optional accessory.
Item Specification
Port type Rc 1/4 (Female) *1
Flow rate L/min 2
Water temperature °C 5 to 25
Water pressure MPa (kgf/cm2) 0.3 (3)
*1 Standard type

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 4
TECHNICAL DATA
PAG
E
4
1
1.2 External appearance of the STP pump
No. Item Description
STP-301 series STP-451 series
ICF152 VG100 ISO100 ICF203 VG150 ISO160
1 Inlet port flange
φA
152 185 130 203 235 180
2 Bending dimension of
the STP connection
cable
B 230 230 230 200 200 200
C 171 171 171 141 141 141
3 Screw hole of legs 8-M8 D 21 12 12 22 12 12
depth 16
4 Outlet port flange KF25
5 Screw hole for earth M4
6 STP connector
7 Viewed from arrow A
Figure 1 - External appearance of STP-301/451 series (Non-corrosion resistant type)

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 5
TECHNICAL DATA
1
No. Item Description
STP-301 series STP-451 series
ICF152 VG100 ISO100 ICF203 VG150 ISO160
1 Inlet port flange
φA
152 185 130 203 235 180
2 Bending dimension of
the STP connection
cable
B 230 230 230 200 200 200
C 171 171 171 141 141 141
3 Screw hole of legs 8-M8 D 21 12 12 22 12 12
depth 16
4 Outlet port flange KF25
5 Screw hole for earth M4
6 STP connector
7 Purge port KF10
8 Viewed from arrow A
Figure 2 - External appearance of STP-301/451 series (Corrosion resistant type)

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 6
TECHNICAL DATA
PAG
E
6
1
No. Item Description
STP-301 series STP-451 series
ICF152 VG100 ISO100 ICF203 VG150 ISO160
1 Inlet port flange
φA
152 185 130 203 235 180
2 Bending dimension of
the STP connection
cable
B 240 240 240 210 210 210
C 171 171 171 141 141 141
3 Screw hole of legs 8-M8 E 226 226 226 196 196 196
depth 16
4 Outlet port flange KF25
5 Screw hole for earth M4
6 STP connector
7 Purge port KF10
8 Cooling water port 2-Rc1/4
9 Viewed from arrow A
Figure 3 - External appearance of STP-301/451 series (with water cooling unit)

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 7
TECHNICAL DATA
1
1.3 Label affixing positions
Refer to the Instruction Manual (A) for the details of the labels 1 to 4.
1 STP pump installation warning label
2 Connector caution label
3 STP pump/control unit caution label
4 Rotational direction instruction label
5 Name plate
6 Parts number
7 Company logo
Figure 4 - Label affixing positions for the STP pump
5
1
2
7
6
4
3

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 8
TECHNICAL DATA
PAG
E
8
1
1.4 Accessories
Item Q’ty Remarks
Primary power cable *1 1 With a single-side connector
STP connection cable *1 1 With both-side connectors
Inlet port cover 1
Outlet port cover 1
STP connector cover 1
Blank flange for purge port 1 KF10 (only for corrosion resistant type)
Clamping ring for purge port 1 KF10 (only for corrosion resistant type)
O-ring washer for purge port 1 KF10 (only for corrosion resistant type)
Instruction Manual (B) 1 This manual
*1 Standard cable length is 3 m.

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 9
HOW TO SECURE THE STP PUMP
2
2 HOW TO SECURE THE STP PUMP
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
The method of securing the STP pump will depend on the installation requirements. Secure the STP
pump to the vacuum equipment as follows:
Design and secure the mounting for the STP pump so that it can withstand the maximum rotational
torque. Refer to Table 2 for torque in pump abnormality.
In some cases, the damper and the claw clamper securing cannot be used.
This will depend on the type of STP pump. Refer to Table 1 for torque tightening the bolts used.
Bolt size Tightening torque (Nm)
M8 12
M10 24
M12 42
Table 1 - Tightening torque of bolt
When making the legs to secure the base, make them shorter than the ones attached to the STP
pump. Use a material that has a tensile strength of 600 N/mm2or more.
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more.
Note: When using any securing method other than that specified in this manual, contact Edwards.
Damper
Yes
No
With bolts
With claw clamps
Secure the inlet port
Refer to
Section
2.1
Refer to
Section
2.2
Refer to
Section
2.3

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 10
HOW TO SECURE THE STP PUMP
2
2.1 When securing the inlet port with bolts
Refer to Table 2 for maximum predicted torque in any pump abnormality and for the recommended
type of securing bolt for inlet port flange.
Secure the inlet port flange with the correct size bolts as specified in the Inlet Port Flange Standard.
Secure the base with either the 8 screws for legs or the 8 attached legs. Ensure instructions with
regard to legs and bolts for securing the base are adhered to page 9. Make sure that the
recommended securing bolt is the correct one depending on the method of securing the base.
Pump mode STP-301 series
Flange type VG100 ISO100F*2 ICF152
Torque in pump abnormality
[Nm] 3.8×1031.5×1043.8×103
Base (8 positions) securing No Yes No Yes No Yes
Recommended
securing bolt
for flange
Shape Standard Standard Standard Standard Standard Standard
Size M10 M10 M8 M8 M8 M8
Q’ty 8 8 8 8 16 16
Material*1Stainless steel
Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel
Strength*170 or more 70 or more 70 or more 70 or more 70 or more 70 or more
Pump mode STP-451 series
Type of flange VG150 ISO160F*2 ICF203
Torque in pump abnormality
[Nm] 3.8×1033.8×1033.8×103
Base (8 positions) securing No Yes No Yes No Yes
Recommended
securing bolt
for flange
Shape
Standard Standard Standard Standard Standard Standard
Size M10 M10 M10 M10 M8 M8
Q’ty 8 8 8 8 20 20
Material*1Stainless steel
Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel
Strength*170 or more 70 or more 70 or more 70 or more 70 or more 70 or more
*1 Refer to ISO898-1 (JISB 1051), ISO3506 (JISB 1054) and AMS6419 (Aerospace Material Specification).
*2 Maximum predicted torque of ISO flange type pump is the same as that of ISO_F flange type pump.
Table 2 - Maximum torque predicted and recommended securing bolt for inlet port flange

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 11
HOW TO SECURE THE STP PUMP
2
(A) When the base is not secured (B) When the base is secured
1. Recommended fitting bolt for flange
2. Secure the base
Figure 5 - Example of securing the STP pump (when securing the inlet port with bolts)
1
2

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 12
HOW TO SECURE THE STP PUMP
2
2.2 When securing the inlet port flange with claw clamps
Refer to Table 2 for rotational torque.
When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot
withstand the maximum rotational torque generated by the worst-case failure. To make the vacuum
equipment withstand abnormal torque, secure the base with either the 8 screws for legs or the 8
attached legs. Ensure instructions with regard to legs and bolts for securing the base are adhered to
page 9.
For the claw clamp-type, use the required number of claw clamps as specified in Table 3. Position
the claw clamps evenly on the circumference.
Flange size Number of claw clamps
ISO 160 or less 4 or more
ISO 200 to 250 6 or more
ISO 320 or more 8 or more
Table 3 - Number of claw clamps for flange size
1. Vacuum equipment
2. Claw clamps
3. Secure the base
Figure 6 - Example of securing the STP pump
(when securing the inlet port flange with claw clamps)
1
2
3

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 13
HOW TO SECURE THE STP PUMP
2
2.3 When installing the damper in the inlet port flange
CAUTION
Use a damper only at the vertically upright position.
CAUTION
DO NOT remove the bolts and nuts attached to reinforce the damper.
Refer to Table 2 for rotational torque.
When using a damper, secure the base with either the 8 screws for legs or the 8 attached legs.
Ensure instructions with regard to legs and bolts for securing the base are adhered to page 9.
When the base cannot be secured because of the equipment design, install the pump with a torque
restraint like the one shown in Figure 7 (B).
(A) When securing the base (B) When installing not to rotate
1. Damper
2. Secure the base
3. Hole to prevent from rotating
4. Leg
Figure 7 - Example of securing the STP pump (when installing the damper in the inlet port flange)
1
2
3
4

STP-301/451 Series Turbomolecular Pump
MT-21E-101-C
Page 14
HOW TO SECURE THE STP PUMP
2
2.4 Cooling the STP Pump
There are two methods for cooling: Water cooling and Air cooling. When performing baking, cool the
STP pump. Also, when pumping gases, cool the STP pump as well. Select the best method which
fits your vacuum equipment.
Refer to STP pump Generic Instruction Manual (A) for water cooling and baking method.
2.4.1 Installation of air cooling unit
When water cooling is not available, use an air cooling unit (optional accessory). Attach the air
cooling unit using 4 screws at screw holes for legs (8-M8, depth 16 mm). (For the positions of the
screw holes for legs, see "External Appearance of the STP Pump")
WARNING
Since the air cooling unit is attached using 4 screw holes for legs, the base for
securing the STP pump cannot be installed using screw holes for legs.
When using the air cooling unit, design your vacuum equipment so that the STP
pump installing flange at the vacuum equipment side can withstand the torque
generated by the abnormal STP pump.
CAUTION
Check the rated voltage of the air cooling unit before use.
CAUTION
Procure a breaker or fuses for the air cooling unit (remote terminal block TB1 incorporates fuses).
CAUTION
When connecting the power for the air cooling unit to the remote terminal block (I/O TB1), attach a
metallic cover or a similar part to the terminal block to ensure the safety.
CAUTION
DO NOT apply excessive force to the cable for the air cooling unit.
Follow the steps below to run the STP pump associated with the air cooling unit (read through
Section 4.5, "Remote operation" in STP Control Unit Instruction Manual (C), then operate them.)
1. Connect the power cable of the air cooling unit between "I/O TB1 FAN OUT Terminals (3)-(4)".
2. Input the power supply for the air cooling unit between "I/O TB1 AC. POWER IN Terminals (1)-
(2)".
3. The air cooling unit functions under the "ACCELERATION" or "NORMAL OPERATION" state.
4. The air cooling unit stops when the STP pump stops.