Edwards STP-XF813 Series User manual

MT-00E-1C1-D
STP Series Turbomolecular Pumps
Generic Instruction Manual
Instruction Manual (A)
STP pump consists of the four-volumed Instruction Manuals.
Instruction Manual (A):
(This Instruction Manual)
STP pump generic Instruction Manual
Instruction Manual (B):
STP pump specific information
Instruction Manual (C):
STP control unit Instruction Manual
Instruction Manual (D):
STC-U eTMS unit for Turbomolecular Pump
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
D
Applicable Models:
◼STP-XF813/XF1313 series
2023.08

The description of this product consists of the four-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
•STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
•STP pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System (TMS)
Instruction Manual (C)
•STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link(except for SCU-350 series)
•EdCentra (for SCU-801/1601 series only)
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Instruction Manual (D)
•STC-U eTMS unit for Turbomolecular Pump:
•Introduction
•Technical data
•Installation
•Operation
•Maintenance and inspection
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page i
PAGE
i
CONTENTS
Section Title Page
1INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Electromagnetic compatibility 2
1.3 Limited warranty 2
1.3.1 Item warranted 2
1.3.2 Disclaimer 3
1.3.3 Spare parts 3
1.4 Precautions for safe operation of the STP pump 4
1.4.1 Usable gases 4
1.5 Maintenance and inspection precautions 5
1.6 Labels 5
1.7 Operation principle of the STP pump 9
1.8 Temperature management system 10
1.9 Name of the STP pump 11
2INSTALLATION OF THE STP PUMP 13
2.1 Precautions before installation 13
2.1.1 Operating environment 13
2.1.2 Installation area 15
2.1.3 Bench 16
2.2 Unpacking 17
2.2.1 Unpacking the STP pump 17
2.3 How to install the STP pump 20
2.3.1 Cleaning the seal 22
2.3.2 STP pump installation positions 23
2.3.3 Secure the STP pump 24
2.3.4 Precautions of vacuum piping 24
2.3.5 Vacuum piping method 25
2.3.6 Connecting the purge port 26
2.3.7 Connecting the water cooling pipe 26
2.3.8 Attaching a baking heater 27
2.3.9 Installation of the air cooling unit 27
2.3.10 Installation of the TMS unit 27
3INSTALLATION OF THE STP CONTROL UNIT 29
3.1 STP control unit 29
3.1.1 SCU-350 series 29
3.1.2 SCU-800/801 30
3.1.3 SCU-1600/1601 31
3.2 Cable connection 32
3.2.1 STP connection cable 32
3.2.2 Power cable 33
3.3 How to connect the cables 34

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page ii
PAGE
ii
CONTENTS (CONTINUED)
Section Title Page
4OPERATION 37
4.1 Before starting the STP pump 37
4.1.1 Tuning 37
4.1.2 Operation of vacuum system 38
4.2 Pump operation 38
4.2.1 LED indication during operation 38
4.2.2 Starting the STP pump after a safety function operates 39
4.3 Gas pumping, cooling and baking the STP pump 39
4.3.1 Gas pumping 39
4.3.2 How to introduce a purge gas 40
4.4 Cooling the STP pump 40
4.4.1 Water-cooling method 40
4.4.2 Air-cooling method 41
4.5 Baking the STP pump 41
4.6 How to use the TMS unit 42
4.6.1 Parameter set mode 42
4.6.2 Starting/stopping the TMS unit 42
4.6.3 Temperature control 42
5SAFETY FUNCTIONS 43
5.1 Safety functions 43
5.1.1 Power failure 43
5.1.2 Operation after a power recovery 43
5.1.3 Abnormal state of magnetic bearing 44
5.1.4 Excessive vibration 44
5.1.5 Motor driver overload 44
5.1.6 Overheating inside the STP pump 44
5.1.7 Overheating inside the STP control unit 45
5.1.8 Overspeed 45
5.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 45
5.1.10 Failure of the air-cooling fan
(for SCU-800/801, SCU-1600/1601) 45
6MAINTENANCE AND INSPECTION 47
6.1 Maintenance and inspection 47
6.2 Cleaning 48
6.3 Inspecting the deposit 48
6.4 Maintenance 49
6.4.1 Recommended overhaul intervals 49
6.4.2 Standard replacement parts 49
6.4.3 Recommended maintenance intervals for main parts 50
6.5 Transporting for repair or overhaul 51

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page iii
PAGE
iii
CONTENTS (CONTINUED)
Section Title Page
7STORAGE AND DISPOSAL 53
7.1 Storage of the STP pump 53
7.2 Disposal 54
8SERVICE, SPARES AND ACCESSORIES 55
8.1 Introduction 55
8.2 Service 55
8.3 Spares 55
8.4 Accessories 56

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page iv
PAGE
iv
ILLUSTRATIONS
Figure Title Page
1 STP pump installation warning label 5
2 Hot surface warning label 5
3 Heavy product caution label 6
4 Connector caution label 6
5 Caution label 6
6 TMS heater caution label 7
7 Rotation instruction label 7
8 Prohibition of gripping and pulling label 7
9 Water cooling pipe connection caution label 8
10 Overhaul enlightenment label 8
11 Cross sectional view of the STP pump 9
12 Configuration of the STP pump (typical pump model) 11
13 Example of lifting the STP pump 17
14 Example of lifting the STP pump (horizontal positioning) 18
15 Jack-up the STP pump 18
16 STP pump with eyebolts 19
17 Installation of the STP pump to the vacuum equipment 21
18 STP pump installation positions 23
19 Positions of the outlet port on the horizontally
or slanted installed STP pump 23
20 Positions of the cooling water port and baking heater 26
21 SCU-350 series 29
22 SCU-800 30
23 SCU-801 30
24 SCU-1600 31
25 SCU-1601 31
26 SCU-350 series STP connection cable 32
27 SCU-800/801 STP connection cable 32
28 SCU-1600/1601 STP connection cable 32
29 SCU-350 series power cable 33
30 SCU-800/801 power cable 33
31 SCU-1600/1601 power cable 33

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 1
INTRODUCTION
1
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards
Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). In this manual, the
control unit for the turbomolecular pump is referred to as the "STP control unit". You must use the
STP pump as specified in this manual otherwise the protection provided by the equipment may be
impaired.
Important safety information is highlighted as WARNING and CAUTION instructions; these
instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of
measurement; US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the STP Pump and Instruction Manual:
Warning -This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
Warning - Hot surface
This symbol denotes the risk of burns.
Warning - Heavy object
This symbol denotes the risk of low back pain and fall.

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 2
INTRODUCTION
1
Warning - Hazardous Voltage
This symbol denotes the risk of electrical shock.
Protective earth (ground).
Connect the ground wire to this terminal to prevent electric shock.
Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
displayed on the LCD of the STP control unit. Note that the words "WARNING" and
"CAUTION" displayed on the LCD indicate the need for overhaul of the pump or precautions
during the operation. They do not have the same meaning as the much more serious
symbols for "WARNING" and "CAUTION" used in the instruction manual.
1.2 Electromagnetic compatibility
•This product is a Class A product according to EN61326-1 (Group 1, Class A product according to
EN55011) and intended to be used in an industrial electromagnetic environment defined by
EN61326-1.
This means that this product does not generate and/or use intentionally radio-frequency energy, in
the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment of
material or inspection / analysis purpose and that it is suitable for use in all establishments other
than domestic and those directly connected to a low voltage power supply network which supplies
buildings used for domestic purposes.
•This product may have potential difficulties in ensuring electromagnetic compatibility in other than
industrial environments, due to conducted as well as radiated disturbances.
•This product must not be used in residential areas because it may cause interference if used in
residential areas.
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
The warranty period is stated in the Edwards Terms and Condition of Supply of Goods and Services,
or during the period specified in the agreement made by and between the customer and Edwards.
1.3.1 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the
product free of charge. The costs for repair or replacement of the product after the warranty
period has passed will be at your own charge.

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 3
INTRODUCTION
1
1.3.2 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (particular gases, strong magnetic field and the radiation are added to the product).
7. Defect resulting from deposit.
8. Water cooling system defect resulting from water quality used.
9. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
10. Deterioration in the external because of use (discoloration, scratches and so forth).
11. Product damage occurred during transport or other factors not attributable to Edwards.
12. Product breakage or damage due to natural disasters, fire or other external factors.
13. Deterioration in the basic performance due to the use of the product beyond limits of the use.
14. Any direct, incidental or consequential damage resulting from the use of the product.
15. When continuously operated without overhaul after the WARNING indication ("WARNING"
message) on the LCD.
16. Overhaul and replacement of maintenance parts.
1.3.3 Spare parts
•Touch down bearing.
(Touch down bearing should be replaced at Edwards, contact Edwards).
•Heater

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 4
INTRODUCTION
1
1.4 Precautions for safe operation of the STP pump
1.4.1 Usable gases
1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards.
•Gases including alkaline metals except Li gas.
•Gases including Ga, Hg, In, or Sn.
•HBr gas.
2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
and a safety advice of gas supplier.
WARNING
Warn of the danger of the gas with the warning label when the use gas is hazardous
WARNING chemical material.
WARNING
Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
CAUTION
NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
corrode the STP pump and damage it.
CAUTION
Introduce a dry N2gas (purge gas) to protect the inside of the STP pump when using reactive or
corrosive gas, gas including hydrogen. The use of these gases may result in product damage.
CAUTION
Cool the STP pump to prevent the STP pump from overheating when pumping gases.

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 5
INTRODUCTION
1
1.5 Maintenance and inspection precautions
Perform any maintenance or inspection of the STP pump under the condition that no power is
applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 6,
"MAINTENANCE AND INSPECTION".
1.6 Labels
The following labels are affixed to the STP pump. Read the contents of the labels before operation.
1. STP pump installation warning label
This label describes installation of the STP pump. Install the STP pump according to the
precautions. Install the STP pump according to the precautions of Section 2, "INSTALLATION
OF THE STP PUMP".
Figure 1 - STP pump installation warning label
2. Hot surface warning label
This label instructs operators so as not to touch the hot surface of the STP pump and the TMS
unit.
The TMS unit specification may lead to a considerable rise in temperatures outside the STP
pump. (only with TMS unit)
Figure 2 - Hot surface warning label

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 6
INTRODUCTION
1
3. Heavy product caution label
This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of
Section 2.2, "Unpacking" so as not to cause any accident during handling.
Figure 3 - Heavy product caution label
4. Connector caution label
This label describes lock of the connector. This label instructs operators to prevent the
connectors from being disconnected while the STP pump is in operation.
Figure 4 - Connector caution label
5. STP pump/control unit caution label
This label describes precautions for operating the STP pump. Follow these precautions.
Figure 5 - Caution label

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 7
INTRODUCTION
1
6. TMS heater caution label
This label instructs operators so as not to remove the TMS heater from the STP pump. (only
with TMS unit)
Figure 6 - TMS heater caution label
7. Rotational direction instruction label
This label describes the rotational direction of the STP pump. The STP pump rotates in this
direction.
Figure 7 - Rotation instruction label
8. Prohibition of gripping and pulling label
This label describes operators so as not to grip a pipe and move a pump. This label instructs
operators so as not grip the pipe so that water leak does not occur from the water-cooling pipe
fitting part.
Figure 8 - Prohibition of gripping and pulling label

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 8
INTRODUCTION
1
9. Water cooling pipe connection caution label
This label describes installation of the water cooling pipe. Connect the water cooling pipe
according to the precautions.
Figure 9 - Water cooling pipe connection caution label
10. Overhaul warning label
This label is for regular overhaul. Perform overhaul according to the Instruction Manual.
Figure 10 - Overhaul enlightenment label

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 9
INTRODUCTION
1
1.7 Operation principle of the STP pump
The STP series pump is a series of a magnetically-levitated turbomolecular pumps, each with the
following features:
•Oil free
•Low vibration
•High reliability
7
65
4
2
1
3
1.
Rotor blade
5.
Axial sensor
2.
Stator blade
6.
Axial electromagnet
3.
Radial sensor
7.
Touch down bearing
4.
Radial electromagnet
Figure 11 - Cross sectional view of the STP pump

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 10
INTRODUCTION
1
The STP pump (Figure 11) is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high speed rotation of the rotor.
The rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the
STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings.
The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the
radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor (3)
and radial electromagnet (4). A pair of axial direction active magnetic bearings consists of axial
sensor (5) and axial electromagnet (6) to support the rotor in the axial direction. Because the rotor is
supported without mechanical contact, it can rotate at low vibration.
There is less heat generated from magnetic bearings because there is no friction. Therefore, the STP
pump requires no cooling. However, the STP pump does require water-cooling or air-cooling during
baking and gas pumping. Taking into consideration an unexpected failure of magnetic bearings,
touch down bearings (7) coated with solid lubrication have been installed. They do not contact with
the rotor during the rated operation.
A radial sensor, an axial sensor, a rotation sensor and a temperature sensor always monitor the
magnetic bearing as well as the rotor. If an abnormality/error occurs, the rotor will stop.
1.8 Temperature management system
The Temperature Management System (TMS) maintains the temperature of the turbomolecular
pump by monitoring the temperature using a thermistor in the base of the turbomolecular pump, and
performing the TMS valve and base heater ON/OFF control.

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 11
INTRODUCTION
1
1.9 Name of the STP pump
1.
Inlet port flange
4.
Outlet port flange
2.
TMS sensor connector
5.
STP connector
3.
Cooling water port
6.
Purge port
Figure 12 - Configuration of the STP pump (typical pump model)

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 12
INTRODUCTION
1
Item
Description
Function
1
Inlet port flange
Connected to the vacuum equipment (at the high vacuum
side).
2
TMS sensor connector*1*2
A temperature sensor is attached for use with the TMS unit
only.
3
Cooling water port*3
(water cooling unit)
Connected to the STP pump cooling water pipe. This port is
used when water cooling the STP pump or using the TMS
unit.
4
Outlet port flange
Connected to the inlet port side of the backing-pump.
5
STP connector
Connected to the STP connection cable.
6
Purge port*4
Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gas, gas including hydrogen.
The STP pump in Figure 12 is a typical pump model. Refer to the STP Pump Instruction Manual (B).
*1 Depending upon the pump model, the TMS unit (optional accessory) is not available. Refer to the STP Pump Instruction
Manual (B) for more detailed information.
*2 Depending upon the pump model, the TMS sensor is built in the STP pump. Refer to the STP Pump Instruction Manual (B)
for more detailed information.
*3 Depending upon the pump model, the STP pump is not equipped with water cooling unit. Refer to the STP Pump
Instruction Manual (B) for more detailed information.
*4 Depending upon the pump model, the STP pump is not equipped with a purge port. Refer to the STP Pump Instruction
Manual (B) for more detailed information.

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 13
INSTALLATION OF THE STP PUMP
2
2 INSTALLATION OF THE STP PUMP
2.1 Precautions before installation
2.1.1 Operating environment
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to
the Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep
MSDS and a safety advice of gas supplier.
WARNING
Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gases. Dilute the gas to be used with the inert gas controlled
if necessary. And, take measures according to MSDS to prevent an accident caused
by exhaust gas.
CAUTION
If the STP pump is to be used in an area with radiation, contact Edwards.
CAUTION
Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards:
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine
system gases.

STP Series Turbomolecular Pump
MT-00E-1C1-D
Page 14
INSTALLATION OF THE STP PUMP
2
The STP pump should be installed in an area which meets the following requirements:
Ambient temperature
0 to 40 °C (32 to 104 °F)
Ambient relative humidity
30 to 95 % (no dew condensing)
Environment
•An area free of externally applied mechanical shock.
•A place free of a heat source (Keep clear of the heat
source or attach a thermal shield plate).
•A place free of a strong magnetic field (Range: up to 15
mT (150 G) in the axial direction, and up to 3 mT (30 G) in
the radial direction with respect to the rotational axis of
the STP pump).
•A place free of a strong electric field.
•A place free of exposure to radiation.
•No discharge of high voltage (more than 500 V) (If more
than 500 V is discharged, contact Edwards).
•A place at an altitude of 2,000 m or less.
•A place indoors.
•Pollution degree: 2
•Installation category: Ⅱ
•Others: An area free of exposure to direct sunlight, high
humidity, dust, salty air, dripping water, explosive or
flammable gas, corrosive gas, excessive vibration and
sources of electric noise.
STP pump installation
equipment conditions
Install the STP pump securely so that foreign materials
cannot fall into the STP pump (Ex.: Si wafers or samples
are positioned above the STP pump) (To prevent foreign
materials from falling into the STP pump, design a shield
plate with large conductance).
Install the STP pump so that the inlet flange of the STP
pump not to be exposed to heat source. (Install the heat
shield plate so as to prevent the effect by radiation heat)
Good example:
Heat shield plate
Bad example:
None