Edwards STP Series User manual

MT-50E-101-A
Model name Voltage
STP-F2203 series 200 - 240 Va.c.
STP Series Turbomolecular Pumps
STP-F2203 Series
Pump Specific Information
Instruction Manual (B)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Supplied with STP pump
Instruction Manual (B):
(This Instruction Manual)
STP pump specific information
Supplied with STP pump
Instruction Manual (C): STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.

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The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
STP Pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link (except for SCU-750)
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

STP-F2203 Series Turbomolecular Pump
July 08 i Issue 1-a
PAGE
i
CONTENTS
Section Title Page
1 TECHNICAL DATA 1
1.1 Applicable pump specifications 1
1.1.1 STP pump specifications 2
1.1.2 Condition for the water-cooling unit 3
1.2 External appearance of the STP pump 3
1.3 Label affixing positions 6
1.4 Accessories 7
2 HOW TO SECURE THE STP PUMP 9
2.1 When securing the inlet port with bolts 9
3 TEMPERATURE MANAGEMENT SYSTEM (TMS) 13
3.1 Configuration of the STP pump with the TMS 13
3.2 TMS Connection cable 14
3.3 TMS heater 15
3.4 TMS valve 15
3.5 TMS sensor cable 15
3.6 Installation of the TMS unit 16
3.6.1 Connecting the TMS connection cable to the STP control unit 16
3.6.2 Connecting the pump and cables 16
3.6.3 Connecting TMS connection cable to STP pump 16
3.7 Condition for the TMS unit 17
3.8 Accessories 17

STP-F2203 Series Turbomolecular Pump
July 08 ii Issue 1-a
PAGE
ii ILLUSTRATIONS
Figure Title Page
1 STP-F2203 series: VG250/ISO250F 4
2 STP-F2203 series (with TMS unit): VG250/ISO250F 5
3 Label affixing positions for the STP pump 6
4 Example of securing the STP pump
(when securing the inlet port with bolts) 10
5 Shape of reduced diameter shank bolts 11
6 Bolt position for securing the flange (ISO250F) 12
7 Configuration of the STP pump with the TMS 13
8 External view of TMS connection cable 14
9 TMS sensor cable 15
TABLES
Table Title Page
1 Tightening torque of bolt 9
2 Maximum torque predicted and recommended securing bolt
for inlet port flange 10
3 Shape of reduced diameter shank bolts 11

STP-F2203 Series Turbomolecular Pump
July 08 1 Issue 1-a
TECHNICAL DATA
1
1 TECHNICAL DATA
1.1 Applicable pump specifications
Model Name Specification Applicable Control unit*1
STP-F2203 series High-flow type SCU-1500/SCU-1400
*1 Applicable control unit: There are different performance specifications between SCU-1500 and SCU-1400.
Refer to Section 1.1.1, "STP pump specifications" for the differences.
Naming convention:
•"C" following a pump model name indicates a corrosion resistant*2 type (e.g. STP-F2203C).
•"CV" indicates an enhanced corrosion resistant type with TMS*3 (e.g. STP-F2203CV).
*2 Corrosion resistant: STP pump with anti-corrosive treatment.
*3 Temperature Management System: TMS unit (optional accessory) maintains the temperature at the base of the
turbomolecular pump by monitoring the temperature with the temperature sensor in the
base of the turbomolecular pump, and performing the TMS valve and base heater
ON/OFF control.

STP-F2203 Series Turbomolecular Pump
July 08 2 Issue 1-a
TECHNICAL DATA
PAG
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2
1
1.1.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item F2203 series
Inlet port flange VG250/ISO250FFlange size
Outlet port flange KF40
N2L/s 2200Pumping speed
H2L/s 1200
N2>108Compression ratio
H2>103
Ultimate pressure Pa (Torr) 10-6 (10-8) order [after baking]
Allowable backing pressure*1 Pa (Torr) 500 (4): Water cooling/TMS unit used
Flow rate of purge gas <N2> Pa·m3/s (SCCM) 3.4×10-2 to 8.4×10-2 (20 to 50)
Rated speed rpm 27,000
Backup rotational speed*2 rpm Approximately 6,000
Starting time*3 min 7: with SCU-1500
8: with SCU-1400
Stopping time*3 min 8: with SCU-1500
10: with SCU-1400
Noise dB <50 (at 27,000r pm)
Temperature Management System (TMS) Available
Baking temperature °C <120
Lubricating oil Not necessary
Installation position Free
Cooling method Water cooling
Recommended backing-pump L/min >1,300
Mass*4 kg 61
Ambient temperature range °C 0 to 40
Storage temperature range °C -25 to 55
Applicable Control unit SCU-1500/SCU-1400
*1 The pressure is applicable under conditions that N2or other similar gas is vacuumed and the backing-pump (pumping
speed: 1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be
exhausted. Consult Edwards about conditions.
*2 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*3 Time varies depending on the control unit used.

STP-F2203 Series Turbomolecular Pump
July 08 3 Issue 1-a
TECHNICAL DATA
1
*4 Mass is a value of state that the only standard accessory was installed (except the optional accessory).
Maximum gas flow-rate *5
Condition Maximum gas flow-rate *5
TMS SCU-1500 SCU-1400
Gas
Yes/No Set point
Cooling water Purge gas N2
gas flow rate Pa･m3/s
(SCCM)
Pa･m3/s
(SCCM)
No - 10 (6000) 8.5 (5000)
N2
Yes 75°C 4.6 (2700) 4.6 (2700)
No - 4.7 (2800) 4.7 (2800)
Ar
Yes 75°C
Temperature:
5 to 25 °C
Flow rate:
2 L/min
3.4×10-2 to
8.4×10-2
(20 to 50)
1.4 (800) 1.4 (800)
*5 The maximum gas flow-rate is applicable under conditions that N2or Ar gas is vacuumed continuously and the backing
backing-pump (pumping speed: 6,500 L/min) is used. It is changed depending on condition. For example, when the gas is
exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.
1.1.2 Condition for the water-cooling unit
Item Specification
Port type Rc 1/4 (Female) *1
Flow rate L/min 2
Water temperature °C 5 to 25
Water pressure MPa (kgf/cm2) 0.3 (3)
*1 Standard type
1.2 External appearance of the STP pump
See the next page.

STP-F2203 Series Turbomolecular Pump
July 08 4 Issue 1-a
TECHNICAL DATA
PAG
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4
1
φ207
φA
φ289
φ296
φ341
G
(3) I
F
Ａ
(8)
φ235
(4)
(6)
(7)
(5)
22.5ﾟ
C
154
(2)
(1)
E
D
90ﾟ
B
H
176
20
20ﾟ
20ﾟ
45ﾟ
45ﾟ
Figure 1 - STP-F2203 series: VG250/ISO250F
No. Item Description
1 Screw hole for legs 4-M16 depth 30
2 Screw hole of legs 4-M16 depth 32
3 Height of the purge port
4 Cooling water port 2-Rc*11/4
5 STP cable connector
6 Outlet port flange KF40
7 Purge port KF10
8 Viewed from arrow A
Inlet
port
flange
VG250 ISO250F
φA 350 335
B 18 20
C 431 457
D 414 440
E 406 432
F 372 398
G 138 164
H 295 321
I 376 402
*1 ISO

STP-F2203 Series Turbomolecular Pump
July 08 5 Issue 1-a
TECHNICAL DATA
1
φ207
φA
φ289
φ296
φ341
G
(3) H
E
Ａ
φ235
22.5ﾟ
C
20 20
230
154
45ﾟ
45ﾟ
30ﾟ
I
D
90ﾟ
196
B
F
176
(8)
(7)
(9)
(10)
(11)
(4)
(5)
(6)
(2)
(1)
Figure 2 - STP-F2203 series (with TMS unit): VG250/ISO250F
No. Item Description
1 Screw hole for legs 4-M16 depth 30
2 Screw hole of legs 4-M16 depth 32
3 Height of the purge port
4 TMS heater
5 TMS sensor
6 TMS valve cable
7 STP cable connector
8 Cooling water port 2-Rc*11/4
9 Outlet port flange KF40
10 Purge port KF10
11 Viewed from arrow A
Inlet
port
flange
VG250 ISO250F
φA 350 335
B 18 20
C 431 457
D 414 440
E 372 398
F 295 321
G 138 164
H 376 402
I 406 432
*1 ISO

STP-F2203 Series Turbomolecular Pump
July 08 6 Issue 1-a
TECHNICAL DATA
PAG
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6
1
1.3 Label affixing positions
Refer to the Instruction Manual (A) for the details of the labels 1 to 7.
Figure 3 - Label affixing positions for the STP pump
1 STP pump installation warning label
2 Hot surface warning label
3 Heavy product caution label
4 Connector caution label
5 STP pump/control unit caution label
6 TMS heater surface caution label
7 Rotational direction instruction label
8 Name plate
9 Company logo
2
5
9
83
7
1
4
10
6

STP-F2203 Series Turbomolecular Pump
July 08 7 Issue 1-a
TECHNICAL DATA
1
1.4 Accessories
Item Q’ty Remarks
Inlet port cover 1
Outlet port cover 1
STP connector cover 1
Blank flange for purge port 1 KF10
Clamping ring for purge port 1 KF10
O-ring washer for purge port 1 KF10
Leg 4
Instruction Manual (B) 1 This manual

STP-F2203 Series Turbomolecular Pump
July 08 8 Issue 1-a
TECHNICAL DATA
PAG
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8
1
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STP-F2203 Series Turbomolecular Pump
July 08 9 Issue 1-a
HOW TO SECURE THE STP PUMP
2
2 HOW TO SECURE THE STP PUMP
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
The method of securing the STP pump will depend on the installation requirements. Secure the STP
pump to the vacuum equipment as follows:
Design and secure the mounting for the STP pump so that it can withstand the maximum rotational
torque. Refer to Table 2 for torque in pump abnormality.
Bolt size Tightening torque (Nm)
M10 24
M12 42
Table 1 - Tightening torque of bolt
When making the legs to secure the base, make them shorter than the ones attached to the STP
pump. Use a material that has a tensile strength of 600N/mm2or more.
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more.
Note: When using any securing method other than that specified in this manual, contact Edwards.
2.1 When securing the inlet port with bolts
There are two installation methods of the STP pump as shown in Figure 4. Refer to Table 2 for the
recommended each of bolts for each method.
Reduced diameter shank bolt (R.D.S.B.) is a fixed bolt which smoothed the threaded portion against
the vacuum equipment, and improved strength more than standard bolts.
Figure 5 illustrates the shape of the R.D.S.B.
A torque reduction mechanism against the occurrence of maximum torque is installed in the fitting
bolt holes on the ISO250F inlet port flange as shown in Figure 6. Be sure to secure the inlet port
flange to the equipment with the recommended bolts and the supplied special washers described in
Table 2. The shape of the special washer is shown Figure 6.

STP-F2203 Series Turbomolecular Pump
July 08 10 Issue 1-a
HOW TO SECURE THE STP PUMP
2
Pump model STP-F2203 series
Flange type VG250 ISO250F*1
Torque in pump abnormality
[Nm] 7.6×1046.5×104
Base (4 positions) securing No Yes No Yes
Shape R.D.S.B.*3 Standard R.D.S.B.*3 R.D.S.B.*3
Material*2 Carbon steel
Alloyed steel
Carbon steel
Alloyed steel
Carbon steel
Alloyed steel
Carbon steel
Alloyed steel
Strength*2 12.9 or more 12.9 or more Equivalent to
AMS 6419
Equivalent to
AMS 6419
Type Standard Standard Figure 6 Figure 6
Recommended
securing bolt
for flange
Special
washer Steel Stainless steel
*1 Torque reduction mechanism with O-ring groove
*2 Refer to ISO898-1 (JISB 1051), ISO3506 (JISB 1054) and AMS6419 (Aerospace Material Specification).
*3 Refer to Figure 5 for the Shape of Reduced Diameter Shank Bolts. (R.D.S.B.)
Table 2 - Maximum torque predicted and recommended securing bolt for inlet port flange
(A) When the base is not secured (B) When the base is secured
1. Recommended fitting bolt for flange
2. Secure the base
Figure 4 - Example of securing the STP pump (when securing the inlet port with bolts)
1
2

STP-F2203 Series Turbomolecular Pump
July 08 11 Issue 1-a
HOW TO SECURE THE STP PUMP
2
Refer to Figure 5 for the shape of Reduced Diameter Shank Bolts. (R.D.S.B.)
1. Inlet port flange
2. Vacuum equipment
3. Washer
Figure 5 - Shape of reduced diameter shank bolts
Use Table 3 in conjunction with Figure 5. Ensure that the surface of the levelled and smoothed area
(expressed by "D" in Figure 5) is free of crack, depression, and other damages.
Flange type Bolt size T A G D R
VG250 M12 2.5 mm 18 mm 9.4 mm or
more
ISO250F M10 2 mm
20 mm
3 mm
7.9 mm or
more
1 mm or
more
Table 3 - Shape of reduced diameter shank bolts
G
D
A
T
R
1
2
3

STP-F2203 Series Turbomolecular Pump
July 08 12 Issue 1-a
HOW TO SECURE THE STP PUMP
2
CAUTION
Install the flange securing bolts in the proper position with the special square washer shown in
Figure 6. Failure to do so may cause abnormal operation of the torque reduction mechanism and
damage the pump.
CAUTION
When any internal abnormality/error results in high rotational torque, causing the torque reduction
mechanism to operate, the pump may rotate a maximum of 5 degrees around the rotor rotation at
axis.
1. Vacuum equipment
2. Inlet port flange
3. Special washer
4. Bolt for securing pump (Stud bolt)
5. Torque reduction mechanism
6. Bolt position
Figure 6 - Bolt position for securing the flange (ISO250F)
1
2
3
4
5
6

STP-F2203 Series Turbomolecular Pump
July 08 13 Issue 1-a
TEMPERATURE MANAGEMENT SYSTEM
3
3 TEMPERATURE MANAGEMENT SYSTEM (TMS)
WARNING
The STP pump operates at high temperatures while the Temperature Management
System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral
equipment while TMS unit are in operation. Operators can burn hands.
The Temperature Management System (TMS) maintains the temperature of the turbomolecular pump
by monitoring the temperature with temperature sensor in the base of the turbomolecular pump, and
performing the TMS valve and TMS heater ON/OFF control.
3.1 Configuration of the STP pump with the TMS
1. STP control unit 5. TMS valve
2. STP connection cable 6. TMS sensor cable
3. TMS heater (Built-in) 7. TMS connection cable
4. STP pump 8. Power cable
Figure 7 - Configuration of the STP pump with the TMS
Note: The shape of each part is an example. It varies according to specifications.
1
4
2
7
8
5
3
6

STP-F2203 Series Turbomolecular Pump
July 08 14 Issue 1-a
TEMPERATURE MANAGEMENT SYSTEM
3
3.2 TMS Connection cable
The components of the TMS connection cables are as follows: (see Figure 8)
Item Description Function
1 Connector X5A For the STP control unit
2 CON1 HEATER OUT connector For the TMS heater
3 CON2 COOLING VALVE OUT connector For the TMS valve
4 CON3 TC IN connector For the TMS sensor cable
φ10
98
φ31
200
65.3
100
150 32
φ12
49
φ21.5
17
18
21.7
Figure 8 - External view of TMS connection cable
Note: The shape of the TMS connection cable is an example. It varies according to specifications.
2
1
3
4