Inficon PCG550 User manual

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Pirani Capacitance Diaphragm
Gauge
PCG550
PCG552
PCG554
Operating Manual
Incl. EU Declaration of Conformity

2tina56e1-f (2015-09)
Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
Model:
PN:
SN:
V W; LPS
INFICON AG, LI-9496 Balzers

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Validity
This document applies to products of the PCG55x series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
3PCx-0xx-xxxx
Flange 1 DN 16 ISO-KF
2 DN 16 ISO-KF long tube
4 DN 16 CF-F
5 DN 16 CF-R long tube
6 DN 25 ISO-KF
D 4 VCR female
E 8 VCR female
F 1/8" NPT
K Flange 29×29 mm
M 4 VCR 90° female
N 7/16-20 UNF male
0 mbar
1 Torr
2 Pa
3 micron
Unit
1 Tungsten
2 Nickel
3 Ceramic coated
6 Tungsten, galvanically isolated
7 Nickel, galvanically isolated
8 Ceramic coated,
galvanically isolated
Filament

4tina56e1-f (2015-09)
3PCx-0xx-xxxx
Measuring
signal
Interface
*) Solid state relays
**) Mechanical relays
0 0.61 ... 10.23 V
1 1.2 ... 8.68 V
2 0.375 ... 5.659
3 1.57 ... 9.05 V
Receptacle
0 None (analoge)
1 DeviceNet
2 Profibus
8 EtherCAT
0 None
1 Display
2 2 switching functions *)
3 ATM sensor &
2 switching functions *)
4 Display & 2 switching functions *)
5 Display & ATM sensor &
2 switching functions *)
6 2 switching functions **)
7 ATM sensor &
2 switching functions **)
Display
Switching function
0 FCC
1 D-Sub, 9-pin
2 D-Sub, 15-pin HD
4D-Sub, 15-pin HD, RS485 INF
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with the DN 16 ISO-KF vacuum
connection and display. They apply to gauges with other vacuum
connections by analogy.
We reserve the right to make technical changes without prior
notice.

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Intended Use
The Pirani Capacitance Diaphragm Gauge PCG55x has been
designed for vacuum measurement of gases in the pressure
range of 5×10-5 … 1500 mbar.
It must not be used for measuring flammable or combustible
gases which react in air.
The gauge is intended for operation in connection with an
INFICON Vacuum Gauge Controller VCG401, 402, 403 or with
another suitable controller.
Functional Principle
The PCG gauge is a combination gauge consisting of a Pirani
sensor and a diaphragm capacitive sensor. Both sensors are
constantly active.
At low pressures, only the signal of the Pirani sensor is used for
pressure measurement; at high pressures, only the signal of the
diaphragm capacitive sensor. To determine the output signal in
the intermediate range, both signals are used proportionally to
the pressure.
Trademark
VCR®Swagelok Marketing Co.
Patents
EP 0689669 B1, 0689670 B1, 0658755 B1
US Patente 5608168, 4031997, 5583297
Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons
1× Operating Manual English
1× Operating Manual German

6tina56e1-f (2015-09)
Contents
Product Identification 2
Validity 3
Intended Use 5
Functional Principle 5
Trademark 5
Patents 5
Scope of Delivery 5
1Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2Technical Data 10
2.1 Output Signal vs. Pressure 19
2.2 Gas Type Dependence 24
3Installation 25
3.1 Vacuum Connection 25
3.2 Power Connection 28
3.2.1 FCC 68, 8-pin Connector 29
3.2.2 D-Sub, 9-pin Connector 30
3.2.3 D-Sub HD, 15-pin Connector 31
3.2.4 D-Sub HD, 15-pin, RS485 INF Connector 32
3.2.5 DeviceNet Connector 33
3.2.6 Profibus Connector 34
3.2.7 EtherCAT Connector 35
4Operation 36
4.1 Status Indication and Displays 36
4.2 Gas Type Dependence 40
4.3 Switching Functions SP1, SP2 40
4.4 ATM Setpoint 47
4.5 Diagnostic Port (RS232C Interface) 49
4.6 DeviceNet Operation 50
4.7 Profibus Operation 53
4.8 EtherCAT Operation 54

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5Deinstallation 55
6Maintenance, Repair 57
6.1 Adjusting the Gauge 57
6.2 Adjusting the Atmospheric Pressure Sensor 59
6.3 Troubleshooting 59
6.4 Replacing the Sensor 62
7Returning the Product 63
8Disposal 64
9Accessories 65
10 Spare Parts 66
Further Information 69
ETL Certification 70
EU Declaration of Conformity 71
For cross-references within this document, the symbol (→XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→[Z]).

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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

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1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. filament) are not covered by the warranty.

10 tina56e1-f (2015-09)
2 Technical Data
For further technical data for gauges with DeviceNet and
Profibus interface →[3], [4], [5], [6].
Measurement range 5×10-5 … 1500 mbar
Measurement principle
10 mbar … 1500 mbar diaphragm capacitive
sensor
1 … 10 mbar crossover range
5×10-5 … 1 mbar thermal conductance acc. to
Pirani
Accuracy (N2)
5×10-4 … 1×10-3 mbar
±50% of reading
1×10-3 … 100 mbar ±15% of reading
100 … 950 mbar ±5% of reading
950 … 1050 mbar ±2.5% of reading
Repeatability (N2)
1×10-3 … 1100 mbar
±2% of reading
Output signal (measurement signal)
Voltage range
3PCx-0xx-xxx0 0 … +10.23 V
3PCx-0xx-xxx1 0 … +8.68 V
3PCx-0xx-xxx2 0 … +5.659 V
3PCx-0xx-xxx3 0 … +9.05 V
Measurement range
3PCx-0xx-xxx0 +0.61 … +10.23 V
3PCx-0xx-xxx1 +1.2 … +8.68 V
3PCx-0xx-xxx2 +0.375 … +5.659 V
3PCx-0xx-xxx3 +1.57 … +9.05 V
Error signal 0 V (default)

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Voltage vs. pressure
3PCx-0xx-xxx0 1.286 V/decade, logarithmic
3PCx-0xx-xxx1 1 V/decade, logarithmic
3PCx-0xx-xxx3 1 V/decade, logarithmic
3PCx-0xx-xxx2 →21
Output impedance 2 × 4.7 Ω, short circuit-proof
Load impedance >10 kΩ
Response time <30 ms
Gauge identification
FCC 68 (+0.61 … +10.23 V)
71.5 kΩ
HV adjustment at <10-5 mbar
ATM adjustment at >100 mbar
Solid state relays switching functions SP1,
SP2, ATM
Setting range (N2) 5.0×10-5 … 1500 mbar
Hysteresis 1) 10% of threshold
Switching characteristics 1) Low Trip Point
Contact rating <30 V (ac) / (dc), ≤0.3 A
resistive
closed LED lit solid
open LED off
Switching time <30 ms
1)The hysteresis and the switching characteristics can be
programmed via the serial interface or the diagnostic port.

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Mechanical relays switching functions SP1,
SP2, ATM
Setting range (N2) 5.0×10-5 … 1500 mbar
Hysteresis 1) 10% of threshold
Switching characteristics 1) Low Trip Point
Type 1 floating contact (n.o.) per
switching function
Contact rating <30 V (ac) / (dc), ≤1 A
resistive
closed LED lit solid
open LED off
Switching time <30 ms
Diagnostic port Jack connector 2.5 mm,
3-pin
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments, or control devices that conform
to the requirements of a grounded protective extra-
low voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused. 2)
Supply voltage
at the gauge
Class 2 / LPS
+15 … +30 V (dc)
Ripple ≤1 V
pp
Power consumption
without fieldbus
DeviceNet
Profibus
≤2.5 W
≤3 W
≤3 W
Fuse to be connected 2) 1 AT
2) INFICON controllers fulfill this requirement.

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Electrical connection
3PCx-0xx-x0xx FCC 68
3PCx-0xx-x1xx D-Sub 9-pin, male
3PCx-0xx-x2xx D-Sub HD 15-pin, male
3PCx-0xx-x4xx D-Sub HD 15-pin, RS485
INF, male
Sensor cable shielded
0.14 mm2/conductor
Cable length
RS232C operation
≤100 m
≤30 m
Grounding concept →"Power Connection"
Vacuum connection to
signal common
connected via 10 kΩ
RS232C / RS485 interface
Transmission rate
Data format
57600 baud (default)
binary
8 data bits
one stop bit
no parity bit
no handshake
→"Power Connection"
For further information on the RS232C / RS485C interface
→[3].

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DeviceNet interface
Specification, data format,
communication protocol
→[7]
Interface, physical CAN bus
Data rate (adjustable via
<RATE> switch)
125 kBaud
250 kBaud
500 kBaud (default)
<P> (125 kBaud,
250 kBaud, 500 kBaud
programmable via
DeviceNet, →[4])
Node address (MAC ID)
(Adjustable via <ADDRESS>,
<MSD>, <LSD> switches)
0 … 63dec (63dec default)
<P> (0 … 63 programmable
via DeviceNet, →[4])
DeviceNet connector Micro-Style, 5-pin, male
Cable shielded, special DeviceNet
cable, 5 conductors
→33, →[8]
Cable length, system wiring according to DeviceNet
specifications, →[7], [8]
For further information on the DeviceNet interface →[4]
EtherCAT interface
Specification, data format,
communication protocol
→[11], [12]
Data rate 100 Mbps
Note address explicit device identification
EtherCAT connector 2×RJ45, 8-pin, socket
input and output
Cable 8-pin, shielded, Ethernet
Patch Cable (CAT5e quality
or higher)
Cable length ≤100 m
For further information on the EtherCAT interface →[6]

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Profibus interface
Specification, data format,
communication protocol
→[9]
Interface, physical RS485
Data rate ≤12 Mbaud (→[5])
Node address
Local
(Adjustable via hexadecimal
<ADDRESS>, <MSD>,
<LSD> switches)
Default setting
Via Profibus
(hexadecimal <ADDRESS>
switches set to >7Dhex
(>125dec)
00 … 7Dhex (0 … 125dec)
01hex
00 … 7Dhe
x
(0 … 125dec)
Profibus connection D-Sub, 9-pin, female
Cable shielded, special Profibus
cable, →34, →[10]
Cable length, system wiring according to Profibus speci-
fications, →[9], [10]
For further information on the Profibus interface →[5]
Materials exposed to vacuum
Vacuum connection
Filament
3PC1 / 6-0xx-xxxx
3PC2 / 7-0xx-xxxx
3PC3 / 8-0xx-xxxx
Feedthrough
Orifice 3)
Diaphragm
Further materials
stainless steel 1.4435
W
Ni
ceramic coated
glass
stainless steel
ceramic
Ni, NiFe, stainless steel
1.4301, SnAg
3) Only versions DN 16 ISO-KF and DN 16 CF-F.

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Internal volume
DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 16 CF-F
DN 16 CF-R, long tube
DN 25 ISO-KF
4 VCR®female
8 VCR®female
1/8" NPT
Flange 29×29 mm
4 VCR®90°, female
7/16-20 UNF
4.7 cm3
14.5 cm3
8 cm3
14 cm3
5.5 cm3
5.5 cm3
7 cm3
5.2 cm3
4.9 cm3
7.9 cm3
5.2 cm3
Permissible pressure (absolute) ≤5 bar
Bursting pressure (absolute) 10 bar
Permissible temperatures
Operation
Vacuum connection 4)
long tube
4)
Filament
Storage
+10 °C … +50 °C
≤80 °C
≤250 °C
<160 °C
–20 °C … +65 °C
Relative humidity
Year's mean
During 60 days
≤65% (no condensation)
≤85% (no condensation)
Mounting orientation any
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40
Weight
without fieldbus interface
with fieldbus interface
115 g …130 g
230 g … 250 g
4) For horizontal mounting orientation only. During bakeout,
measurement range, accuracy, and repeatability may deviate from
specifications.

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Dimensions [mm]
DN 16 ISO-KF
DN 16 ISO-KF long
130.8
14.5
1/8" NPT
36
21.531.5
24.4
36.5 34
79.5 ≈65
DN 16 CF-F
DN 16 CF-R long
130.2
30.9 42.7
46.3
4 VCR 8 VCR
45
28
DN 25 ISO-KF
29.2×29.2 mm
7/16-20 UNF
4-VCR 90°

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DeviceNet Profibus
67
56
LSDMSD
ADDRESS
SP1SP2
ST
I/O
DIA
ADJ
BUS RATE STATUS
NET MOD
10.8
4
26
08
EA
C
LSDMSD
ADDRESS
4
26
08
EA
C
BUS
SP1SP2
ST
I/O
DIA
ADJ
67
56
EtherCAT RS485
SP1SP2
ST
I/O
DIA
ADJ
24
0
6
8
A
E
x100 x10
24
0
6
8
A
Ex1
24
0
6
8
A
E
ERR RUN
LA LA
IN OUT
67
56
AE
62
LSDMSD
ADDRESS
RATE
SP1 SP2 ST
DIA
BUS
ADJ
321ON
AE
62
AE
62
67
56

tina56e1-f (2015-09) 19
2.1 Output Signal vs. Pressure
Measurement range 0.61 … 10.23 V
Output signal U [V]
Pressure p
0.0
0.61
3.02.52.01.51.0
0.5 4.03.5 5.04.5 6.05.5 7.06.5 8.07.5 9.08.5 10.09.5 10.5
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E+06
1E–05
Error
O
mbar
Pa
Torr
p = 100.778(U-c) ⇔U = c +1.286log10 p
valid in the range 5×10-5 mbar <p< 1500 mbar
U p c U p c
[V] [mbar] 6.143 [V] [micron] 2.448
[V] [µbar] 2.287 [V] [Pa] 3.572
[V] [Torr] 6.304 [V] [kPa] 7.429
[V] [mTorr] 2.448
where p pressure
U output signal
c constant (pressure unit dependent)

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Measurement range 1.2 … 8.68 V
Output signal U [V]
Pressure p
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5
8.68
2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0
1.2
Error
mbar
Pa
Torr
p = 10(U-c) ⇔U = c + log10 p
valid in the range 5×10-5 mbar <p< 1500 mbar
U p c U p c
[V] [mbar] 5.5 [V] [micron] 2.625
[V] [µbar] 2.5 [V] [Pa] 3.5
[V] [Torr] 5.625 [V] [kPa] 6.5
[V] [mTorr] 2.625
where p pressure
U output signal
c constant (pressure unit dependent)