Inficon Transpector XPR 3+ User manual

Transpector XPR 3+
OPERATING MANUAL
Gas Analysis System
PN 074-687-P1A
C
over
P
age
®

Declaration Of Conformity
Page 1

Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
INFICON®, Transpector® and FabGuard® are registered trademarks of INFICON GmbH.
Windows®, and Microsoft® are registered trademarks of Microsoft Corporation.
All other brand names, product names or trademarks belong to their respective holders.
Software Copyrights
This product contains embedded software protected under the following copyrights:
Copyright INFICON Inc.
Disclaimer
The information contained in this Operating Manual is believed to be accurate and
reliable. However, INFICON assumes no responsibility for its use and shall not be liable
for any special, incidental, or consequential damages related to the use of this product.
Due to our continuing program of product improvements, specifications are subject to
change without notice.
Copyright
©2017 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

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Transpector XPR 3+ Operating Manual
Table Of Contents
Trademarks
Software Copyrights
Disclaimer
Copyright
Chapter 1
Getting Started
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2 Using This Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2.1 Note and Hint Paragraphs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2.2 Warning and Caution Paragraphs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.3 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.3.1 Returning Transpector XPR 3+ to INFICON . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.4 Quick Start . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.5 Purpose of Transpector XPR 3+ Gas Analysis System . . . . . . . . . . . . . . . . 1-3
1.6 General Description of Transpector XPR 3+
Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.7 Specifications for Transpector XPR 3+ Gas Analysis System . . . . . . . . . . . 1-4
1.8 Supplied Items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.9 Physical Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.9.1 Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.9.2 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.9.3 Mounting Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.9.4 Ventilation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.9.5 Maintenance Access . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.10 Electrical Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.10.1 Required Supply Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.10.2 Current Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.10.3 Electrical Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.11 Overvoltage Category . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.12 Required Vacuum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.13 Environmental Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.13.1 Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.13.2 Altitude Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.13.3 Pollution Degree. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.13.4 Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

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Transpector XPR 3+ Operating Manual
1.13.5 Humidity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.14 Computer System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.15 Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.16 Hardware Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.16.1 Avoiding Process Metal Deposition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.16.2 Installing the Isolation Valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
1.16.3 Mounting the Pirani Interlock Weldment Assembly . . . . . . . . . . . . . . . . . . 1-17
1.16.4 Mounting the Pirani Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18
1.16.5 Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19
1.16.6 Electronics Module Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-22
1.16.7 Initial Start-up Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23
1.16.8 Installing Ethernet Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23
1.16.9 Connecting the 24 V(dc) Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-24
1.16.10 Connecting the Pirani Interlock Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-24
1.16.11 Attaching Heating Jackets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-25
1.17 Input/Output (I/O) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-25
1.17.1 Two Digital Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-26
1.17.2 One Status Relay Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-26
1.17.3 One Analog Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28
Chapter 2
Connecting Transpector XPR 3+
2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 General Networking Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2.1 IP Addresses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2.2 Subnetworking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.3 Transpector XPR 3+ IP Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.3.1 Changing Transpector XPR 3+ IP Address . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.4 Connecting Transpector XPR 3+ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
2.4.1 Connecting a Single Transpector XPR 3+ . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.4.2 Installing Multiple Transpector XPR 3+ Sensors . . . . . . . . . . . . . . . . . . . . 2-11
Chapter 3
How The Instrument Works
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.3 Patents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.4 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.4.1 The Ion Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
3.4.2 The Quadrupole Mass Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.4.3 The Ion Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

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Transpector XPR 3+ Operating Manual
3.5 Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.6 The Zero Blast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
3.7 High Pressure Effects. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Chapter 4
Applications Guide
4.1 How to Interpret the Result. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.1 Qualitative Interpretation of Mass Spectra . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.1.2 Quantitative Interpretation of Mass Spectra
(Calculating Partial Pressures). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.1.3 Additional Information for Interpreting Mass Spectra . . . . . . . . . . . . . . . . . 4-15
Chapter 5
Transpector XPR 3+ Operation and Best Known Methods
5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Precautions for Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.3 Pirani Interlock Protection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.4 FabGuard Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.4.1 Transpector XPR 3+ Configuration— I/O Tab . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.4.2 Transpector XPR 3+ BKM for Pirani Interlock Operation . . . . . . . . . . . . . . . 5-6
5.5 Using Transpector XPR 3+ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
5.5.1 Leak Detection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
5.5.2 Recipe Generation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
5.5.3 Mass Scale Tuning. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
5.5.4 Transpector XPR 3+ Filament . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
5.5.5 High Pressure Electron Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Chapter 6
Transpector XPR 3+ Low Pressure EM
6.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.2 Transpector XPR 3+ Filament Caution . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.3 Electron Multiplier Caution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.4 Quick Start . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
6.5 Purpose of the Transpector XPR 3+ Low Pressure EM Option
Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
6.6 General Description of Transpector XPR 3+ Low Pressure EM
Option Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
6.7 Specifications for Transpector XPR 3+ Low Pressure EM Option
Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
6.8 Supplied Items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
6.9 XPR 3+ Low Pressure EM Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
6.10 XPR 3+ Low Pressure EM Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

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Transpector XPR 3+ Operating Manual
Chapter 7
Maintenance
7.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 Safety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2.1 Toxic Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2.2 Radiation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2.3 Electrical Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.3 General Instructions For All Repair Procedures . . . . . . . . . . . . . . . . . . . . . . 7-2
7.4 Maintenance Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
7.4.1 Bakeout of Quadrupole. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
7.4.2 Spare Heating Jacket Part Numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
7.5 Repair Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
7.5.1 Tools Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
7.5.2 How to Determine if a Filament Kit Replacement is Required . . . . . . . . . . . 7-5
7.5.3 Filament Kit Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
7.5.4 How to Determine the Condition of the Ion Source . . . . . . . . . . . . . . . . . . . 7-7
7.6 Mass Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9
7.6.1 Mass Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9
7.7 Pirani Interlock Adjustment Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10
7.7.1 INFICON PSG500 Adjustment Instructions . . . . . . . . . . . . . . . . . . . . . . . . 7-10
Chapter 8
Diagnosing Problems
8.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.2 Symptom-Cause-Remedy Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.3 Communication Problems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6
Chapter 9
Bibliography
Chapter 10
Glossary
Chapter 11
Transpector XPR 3+ Accessories and Spare Parts
11.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1
11.2 Transpector XPR 3+ Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1
11.3 Transpector XPR 3+ Spare Parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
11.3.1 Preventative Maintenance Parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
11.3.2 Replacement Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2

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Transpector XPR 3+ Operating Manual
Chapter 12
Specifications
12.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1
12.2 Mass Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1
12.3 Detector Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1
12.4 Resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1
12.5 Temperature Coefficient. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1
12.6 Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2
12.7 Minimum Detectable Partial Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2
12.8 Maximum Operating Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2
12.9 Maximum Sensor Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . 12-2
12.10 Maximum Bakeout Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3
12.11 Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3
12.12 Power Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3
12.13 Ethernet Communication Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3
12.14 Relay Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3
12.15 Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3
12.16 Indicators (Green) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3
Chapter 13
Supplied Items
13.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-1
13.1.1 Ship Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-1
13.1.2 Electronics Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-2
13.1.3 Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-2
13.1.4 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-3
13.1.5 Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-3
13.1.6 Heating Jacket System (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-3
13.1.7 Interlock Kit (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-3
13.1.8 Angle Valve (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13-4
Index

1 - 1
Transpector XPR 3+ Operating Manual
Chapter 1
Getting Started
1.1 Introduction
Transpector XPR 3+ Gas Analysis System is a quadrupole-based mass
spectrometer Residual Gas Analysis (RGA) instrument designed for use in high
vacuum environments, up to 20 mTorr, for monitoring trace contaminants and
process gases. Transpector XPR 3+ runs with the Windows® operating system
using a member of the FabGuard® suite of programs.
This chapter provides an overview of Transpector XPR 3+ Gas Analysis System.
Topics include:
the purpose of Transpector XPR 3+
specifications
a list of supplied items
installation instructions
customer support contact information.
Software information can be found either in the FabGuard Explorer Operating
Manual (PN 074-528-P1) or in the FabGuard help files (for all other FabGuard
programs).
1.2 Using This Manual
Please read this Operating Manual before operating Transpector XPR 3+.
1.2.1 Note and Hint Paragraphs
NOTE: This is a note paragraph. Notes provide additional information about the
current topic.
HINT: This is a hint paragraph. Hints provide insight into product usage.

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Transpector XPR 3+ Operating Manual
1.2.2 Warning and Caution Paragraphs
The following Caution and Warning paragraphs are used to alert the reader of
actions which may cause either damage to the instrument or bodily injury.
CAUTION
This is an example of a Caution paragraph. It cautions
against actions which may cause an instrument
malfunction or the loss of data.
WARNING
This is an example of a General Warning paragraph. It
warns against actions which may cause bodily injury.
WARNING - Risk Of Electric Shock
This is an example of a Electrical Warning paragraph. It
warns of the presence of electrical voltages which may
cause bodily injury.
1.3 How To Contact Customer Support
Worldwide customer support information is available under Contact >> Support
Worldwide at www.inficon.com:
Sales and Customer Service
Technical Support
Repair Service
If you are experiencing a problem with Transpector XPR 3+, please have the
following information readily available:
the Transpector XPR 3+ serial number
a description of the problem
an explanation of any corrective action already attempted
the exact wording of any error messages

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Transpector XPR 3+ Operating Manual
1.3.1 Returning Transpector XPR 3+ to INFICON
Do not return any component of Transpector XPR 3+ to INFICON before speaking
with a Customer Support Representative and obtaining a Return Material
Authorization (RMA) number. Transpector XPR 3+ will not be serviced without an
RMA number.
Prior to being given an RMA number, a Declaration Of Contamination (DOC) form
may need to be completed if the sensor has been exposed to process materials.
DOC forms must be approved by INFICON before an RMA number is issued.
INFICON may require that the sensor be sent to a designated decontamination
facility, not to the factory.
1.4 Quick Start
Read this Operating Manual in full prior to operating Transpector XPR 3+. Then,
follow the steps below to quickly start using Transpector XPR 3+.
1Ensure that all supplied items have been received. See Chapter 13,
Supplied Items.
2Install the hardware. See section 1.16, Hardware Installation, on page 1-8.
3Install the communication cable. See section 1.16.8, Installing Ethernet
Communications, on page 1-23.
4Install the software. Refer to the FabGuard Explorer Operating Manual for
information on installing the software.
NOTE: Transpector XPR 3+ requires FabGuard version 17.04.00 or higher for
operation.
1.5 Purpose of Transpector XPR 3+ Gas Analysis System
Transpector XPR 3+ Gas Analysis System is a quadrupole-based residual gas
analyzer that operates at Physical Vapor Deposition (PVD) process pressures and
has an Electron Multiplier that can operate at 20 mTorr operating pressures. The
miniature quadrupole sensor analyzes gases by:
ionizing some of the gas molecules
separating the ions by their mass-to-charge ratio
measuring the quantity of ions at each mass
The masses, unique for each substance, allow the identification of the gas
molecules from which the ions were created. The magnitudes of these signals are
used to determine the partial pressures (amounts) of the respective gases.
Transpector XPR 3+ measures major components and impurities in a process with
a 10 ppm detection limit.

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Transpector XPR 3+ Operating Manual
Transpector XPR 3+ is an important aid in the efficient use of a high-vacuum
system, detecting leaks, and contaminants. It can indicate the partial pressures of
gases in processes occurring within a vacuum or other vessel, and therefore, can
be used to investigate the nature of a process or monitor process conditions.
1.6 General Description of Transpector XPR 3+
Gas Analysis System
Transpector XPR 3+ Gas Analysis System is comprised of three parts:
Sensor
The sensor, which functions only in a high-vacuum environment with pressures
below 2x10-2 Torr (2.66 x 10-2 mbar) [2.66 Pascals].
The sensor itself is comprised of three components:
the ion source (ionizer)
the quadrupole mass filter
the ion detector
The sensor is mounted on an electrical feedthrough flange, which is bolted to
the vacuum chamber where the gas analysis measurements are made.
Electronics Module
The electronics module controls the sensor and communicates to the operating
computer. The electronics module and sensor are sold matched in sets. The
electronics module attaches to and is supported by the sensor.
Software
The software controls the electronics module and displays the data
from the sensor.
1.7 Specifications for Transpector XPR 3+ Gas Analysis System
See Chapter 12 for Transpector XPR 3+ Gas Analysis System specifications.
1.8 Supplied Items
See Chapter 13 for items that are packaged with Transpector XPR 3+
Gas Analysis System.

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Transpector XPR 3+ Operating Manual
1.9 Physical Requirements
The following sections show the physical dimensions, weight, mounting
requirements, ventilation requirements, and the perimeter required for
maintenance access for Transpector XPR 3+.
1.9.1 Physical Dimensions
Figure 1-2 shows the overall physical dimensions of Transpector XPR 3+ in inches
[millimeters].
Figure 1-1 Sensor dimensions
Figure 1-2 Physical dimensions of Transpector XPR 3+

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Transpector XPR 3+ Operating Manual
1.9.2 Weight
Transpector XPR 3+ electronics module weighs 1.62 kg (3.58 lbs).
1.9.3 Mounting Requirements
The sensor is mounted to a high-vacuum chamber with a standard 2.75 in.
(69.9 mm) O.D. ConFlat flange.
The electronics module attaches to and is supported by the sensor.
Transpector XPR 3+ can be mounted in any position. See section 1.16.5, Sensor
Installation, on page 1-19 for information on installing Transpector XPR 3+ system.
1.9.4 Ventilation Requirements
At least 25.4 mm (1 in.) of open space around the Transpector XPR 3+ electronics
module must be maintained for proper ventilation.
1.9.5 Maintenance Access
Easy access to Transpector XPR 3+ should be maintained for installation and
maintenance activities.
1.10 Electrical Power Requirements
Transpector XPR 3+ must be connected to a source of power as specified in the
following sections.
1.10.1 Required Supply Voltage
20 to 30 V(dc), 24 V(dc) typical
1.10.2 Current Rating
1.25 A maximum
1.10.3 Electrical Connection
Latching, 4-pin DIN connector, internally isolated from system ground.
See Figure 1-3.

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Transpector XPR 3+ Operating Manual
Figure 1-3 Transpector XPR 3+ connections
1.11 Overvoltage Category
Overvoltage Category II (per EN61010-1)
1.12 Required Vacuum
Transpector XPR 3+: < 2.0x10-2 Torr (2.66x10-2 mbar) [2.66 Pascals]
1.13 Environmental Requirements
The following paragraphs explain the use, altitude range, humidity, pollution
degree, and operating temperature for Transpector XPR 3+.
1.13.1 Use
Transpector XPR 3+ is designed for indoor use only.
1.13.2 Altitude Range
Transpector XPR 3+ can be used up to a maximum altitude range of
2000 m (6561 ft.).
1.13.3 Pollution Degree
Pollution Degree 2 (per EN61010-1)
Electrical Connection

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Transpector XPR 3+ Operating Manual
1.13.4 Operating Temperature
Transpector XPR 3+ is designed to operate within a temperature range of
5°C to 50°C (41°F to 122°F).
1.13.5 Humidity
Transpector XPR 3+ is designed to operate in an environment with up to
98% relative humidity.
1.14 Computer System Requirements
Refer to the FabGuard Explorer Operating Manual (PN 074-528-P1) for computer
system requirements.
1.15 Software Installation
Refer to the FabGuard Explorer Operating Manual (PN 074-528-P1) for information
on installing the software and setting up the protocols necessary to ensure proper
software operation.
1.16 Hardware Installation
The following steps must be performed to install Transpector XPR 3+
Gas Analysis System.
1If the optional Isolation Valve option was purchased with the
Transpector XPR 3+ install the Isolation Valve, see section 1.16.2 on page
1-11.
2If the optional Pirani Gauge Interlock was purchased with the
Transpector XPR 3+ mount the Pirani Interlock Weldment Assembly, see
section 1.16.3 on page 1-17.
3If the optional Pirani Gauge Interlock was purchased with the
Transpector XPR 3+ mount the Pirani Gauge, see section 1.16.4 on page
1-18.
4Install the Transpector XPR 3+ Sensor, see section 1.16.5 on page 1-19.
5Install the Transpector Electronics Module, see section 1.16.6 on page 1-22.
6Install the Communications cables, see section 1.16.8 on page 1-23.
7Install the 24 V DC Power Supply, see section 1.16.9 on page 1-24.
8If the optional Pirani Gauge Interlock was purchased with the
Transpector XPR 3+ install the Transpector XPR 3+ Interlock Cable, see
section 1.16.10 on page 1-24.

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Transpector XPR 3+ Operating Manual
9If the optional Pirani Gauge Interlock and/or the optional Isolation Valve were
purchased with the Transpector XPR 3+ attach the Heating Jackets, see
section 1.16.11 on page 1-25
10 Install the Software.
1.16.1 Avoiding Process Metal Deposition
CAUTION
Conductive deposits on the ceramic ion source plate
from the process can cause electrical short circuits and
a general failure of Transpector XPR 3+. The use of a 90o
valve between the process and the sensor will alleviate
this condition. The installation of a 90o valve is described
in ConFlat Flanges.
The sensor is installed on a vacuum system with a 2.75 in. DN40 ConFlat flange.
ConFlat flanges, and similar compatible types made by other manufacturers, are
used for attaching devices to ports on high vacuum systems. If there are no
concerns with the installation of this type of flange, proceed to section 1.16.5.1,
Attaching the Sensor to the Vacuum Chamber, on page 1-19.
NOTE: If the system does not have a port with a compatible mating flange, an
adapter will be necessary.
To install these flanges without leaks, follow proper operating procedures. These
flanges are sealed with a metal gasket and can be heated for bakeout to
temperatures of up to 200°C. For bakeout temperatures when a sensor is installed,
see Table 1-1 on page 1-21.
1.16.1.1 Assembling ConFlat Flanges
To assemble a pair of ConFlat flanges:
1Wipe the sealing areas of the flanges with a laboratory towel using a clean
solvent, such as water free alcohol. These areas must be clean and free of
particulate matter.
CAUTION
Do not touch any surface on the gasket and flange faces
with bare fingers. If it is necessary to touch any of these
parts, always wear clean linen, nylon, powder free latex
or vinyl laboratory gloves.

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Transpector XPR 3+ Operating Manual
2Install the copper gasket between the two flanges. (See Figure 1-4.) Always
use a new gasket. Do not attempt to use gaskets more than once.
Figure 1-4 Gasket and flange assembly
3Bring the two flanges together making sure that the gasket fits in the recess in
both flanges. Flange faces should be parallel. If the gasket is properly seated, it
should not be possible to slide the two flanges laterally with respect to each other.
4Install supplied silver-coated stainless steel bolts in the bolt holes of the flanges
and finger-tighten.
NOTE: If the factory-supplied silver-coated stainless steel hardware is not
used and the flanges are going to be baked, coat the bolt threads with
an anti-seize compound (FelPro® C 100 or equivalent).
CAUTION
Do not get any of the anti-seize compound on the gaskets
or vacuum parts of the flange.
5After the bolts have been finger-tightened and the flange faces are parallel,
tighten the bolts gradually and evenly in a star pattern until the flange faces are
brought into even contact with each other.
Flange
Flange
Copper Gasket

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Transpector XPR 3+ Operating Manual
1.16.2 Installing the Isolation Valve
Transpector XPR 3+ should be installed on a 90° high-conductance isolation valve
(1.5 in. [38 mm] outer diameter) mounted on the process chamber. This prevents
line-of-sight deposits, from the plasma, from reaching the Transpector XPR 3+
Sensor. (See Figure 1-5.) The isolation valve may be provided by the user, or
purchased from INFICON (see below). The isolation valve must be bakeable and
needs to be fitted with a heating jacket designed for baking the valve.
1½" Right Angle Valve Hand Operated with Heating Jacket:
IPN 914-024-G1
1½" Right Angle Valve Air Operated with 24 V(dc) Solenoid and
Heating Jacket: IPN 961-025-G1
Valve Heating Jacket (150 °C; 120/230 V(ac) Operation):
IPN 914-407-P1
Figure 1-5 Typical Connection of a Transpector XPR 3+ to the process chamber
1.16.2.1 Notes for Air Operated Valve
The INFICON supplied air operated valve is a 1/8 in. ported, 3-way, single solenoid,
2-position spring return, Normally Open (NO) or Normally Closed (NC), general
purpose air valve. It is configured for 2-way, NC use, whereby the EXH port is
plugged and the air supply (60 - 100 psig) must be connected to the port
labeled IN. (See Figure 1-6.)
WARNING
The air pressure supplied to the valve must not exceed
100 psig.
Tool Interlock Weldment
IPN 914-416-G1
16.71 in. (42.5 cm)
Pirani Gauge
8.3 in.
(21 cm)
7.2 in.
(18 cm)
Transpector XPR 3+
8.0 in.
(20.4 cm)
The 90° Isolation Valve is
located between the Tool
Chamber and Transpector XPR 3+.
IPN 918-401-P1
Manual
Air Operated
Heating Jackets

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Transpector XPR 3+ Operating Manual
CAUTION
The air pressure supplied to the valve must be at least
60 psig.
Figure 1-6 INFICON supplied air valve
1.16.2.2 Port Identification for 2-Way, Normally Closed Use
See Figure 1-7.
IN . . . . . . . . . . . . . . . . . . . . . . . . . . . Pressure supply port
OUT . . . . . . . . . . . . . . . . . . . . . . . . . Delivery port to valve
EXH . . . . . . . . . . . . . . . . . . . . . . . . . Exhaust port, plugged
Figure 1-7 Port identification
EXH IN
OUT
IN
OUT
EXH
2 WAY NORMALLY CLOSED
PLUGGED
INLET
AIR