Inficon Gemini MAG500 User manual

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Cold Cathode Gauge
Gemini MAG500, MAG504
Cold Cathode Pirani Gauge
Gemini MPG500, MPG504
Operating Manual
Incl. EU Declaration of Conformity

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Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
`
Model:
PN:
SN:
VDC W
INFICON AG, LI-9496 Balzers

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Validity
This document applies to products of the MAG50x and MPG50x
series:
3Mxx-xxx-0x0x
Emission current
Flange
0 Stainless steel
0 High current
1 Low current
6 DN 25 ISO-KF
7 DN 40 ISO-KF
8 DN 40 CF-R
Q DN 40 CF-F
Measurement system 0 Standard
3 Ceramic coated
0 FCC, 8-pin
0D-Sub, 9-pin
Type A Inverted Magnetron
B Inverted Magnetron Pirani
N 1.5 ... 8.5 V
P 1.398 ... 8.598 V
Q 0.667 ... 10 V
Receptacle
Measurement
range
Ionization chamber
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to the product with FCC receptacle and
vacuum connection DN 25 ISO-KF. They apply to the other
products by analogy.
We reserve the right to make technical changes without prior
notice.

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Intended Use
Gemini MAG500, MAG504
The Cold Cathode Gauges Gemini MAG500 and MAG504 have
been designed for vacuum measurement of gases in the
pressure range of 1×10-9 … 1×10-2 mbar.
Gauges with gauge identification can be operated in connection
with an INFICON Vacuum Gauge Controller of the VGC40x /
VGC50x series.
Gemini MPG500, MPG504
The Cold Cathode Gauges Gemini MPG500 and MPG504 have
been designed for vacuum measurement of gases in the
pressure range of 1×10-9 … 1000 mbar.
They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
Gauges with gauge identification can be operated in connection
with an INFICON Vacuum Gauge Controller of the VGC40x /
VGC50x series.
Functional Principle
Gemini MAG500, MAG504
The gauge functions with a cold cathode ionization measure-
ment circuit (according to the inverted magnetron principle).
Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.

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Gemini MPG500, MPG504
The gauge consists of two separate measuring systems (the
Pirani and the cold cathode system according to the inverted
magnetron principle). They are combined in such a way that for
the user, they behave like one measuring system.
Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.
Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons (MPG gauges only)
1× Operating Manual German
1× Operating Manual English

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Contents
Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Scope of Delivery 5
1Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2Technical Data 10
2.1 Measuring Signal vs. Pressure 15
2.2 Gas Type Dependence MAG50x 18
2.3 Gas Type Dependence MPG50x 20
3Installation 23
3.1 Vacuum Connection 23
3.2 Power Connection 27
3.2.1 FCC 68, 8-pin Connector 28
3.2.2 D-Sub, 9-pin Connector 29
4Operation 30
4.1 Status Indication MAG 30
4.2 Status Indication MPG 31
4.3 Put MAG50x Into Operation 32
4.4 Put MPG50x Into Operation 32
4.5 Gas Type Dependence 33
4.6 Ignition Delay 33
4.7 Contamination 34
5Deinstallation 36

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6Maintenance, Repair 38
6.1 Adjusting the Gauge 38
6.2 Cleaning the Gauge / Replacing Parts 40
6.2.1 Troubleshooting (measuring chamber) 41
6.2.2 Replacing Ionization Chamber and Ignition Aid 43
6.2.3 Replacing Measuring Chamber 45
6.3 Troubleshooting 48
7Returning the Product 51
8Disposal 52
9Options 53
10 Accessories 53
11 Spare Parts 53
11.1 Ignition aid for MAG50x and MPG50x 53
11.2 Ionization Chamber for MAG50x and MPG50x 54
11.3 Measuring Chamber Cpl. (Spare Sensor) 54
11.3.1 Measuring Chamber Cpl. for MAG500 54
11.3.2 Measuring Chamber Cpl. for MAG504 55
11.3.3 Measuring Chamber Cpl. for MPG500 55
11.3.4 Measuring Chamber Cpl. for MPG504 55
Literature 56
ETL Certification 56
EU Declaration of Conformity 57
For cross-references within this document, the symbol (→XY)
is used, for cross-references to further documents, listed under
literature, the symbol (→[Z]).

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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Symbol printed on the product nameplate: Consultation
of operating manual required
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

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1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product (MPG50x
only: Pirani filament 120 °C).
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. ionization chamber, ignition aid, Pirani
filament (MPG50x)), are not covered by the warranty.

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2 Technical Data
Measurement range (air, N2)
MAG
MPG
1×10-9 … 1×10-2 mbar
1×10-9 … 1000 mbar
Accuracy MAG (N2)
1×10-8 … 1×10-2 mbar 30% of reading
Accuracy MPG (N2)
1×10-8 … 100 mbar
100 … 1000 mbar
30% of reading
50% of reading
Repeatability (N2)
MAG, 1×10-8 … 1×10-2 mbar
MPG, 1×10-8 … 100 mbar
5% of reading
5% of reading
Gas type dependence
MAG
MPG
→18
→20
Voltage range (analog output) 0 … +10.5 V
Measurement range
3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P
+1.5 … +8.5 V (dc)
+0.667 … +10 V (dc)
+1.398 … +8.6 V (dc)
Voltage vs. pressure
3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P
1 V/decade, logarithmic
1.33 V/decade, logarithmic
0.6 V/decade, logarithmic
Status signal 14.5 … 30 V (ignited)
Error signal
3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P
<+0.5 V
≤+0.3 V
+9.5 … +10.5 V
Output impedance 2 × 4.7 Ω, short-circuit proof
Load impedance ≥10 kΩ, short-circuit proof
Step response time
>1×10-6 mbar
1×10-6 … 1×10-8 mbar
pressure dependent
<100 ms
≈1 s

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Gauge identification
3MAx-xxx-0x0N 1)
3MAx-xxx-0x0Q
3MBx-xxx-0x0P
–
100 kΩreferenced to supply
common
85 kΩreferenced to supply
common
Status signal (digital output)
Current rating 100 mA
High voltage is ON +14.5 … +30 V (dc)
(depending on supply voltage)
High voltage is OFF 0 V (dc)
High voltage cut-in, low active, Pin 7 (digital input)
High voltage ON
High voltage OFF
<2.5 V (dc)
>4.0 V (dc)
High voltage cut-in, high active, Pin 8 (digital input)
High voltage ON
High voltage OFF
>11.0 V (dc)
< 5.0 V (dc)
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments, or control devices that conform
to the requirements of a grounded protective extra-
low voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused. 2)
1) Not suited for operation with a VGC40x / VGC50x controller.
2) INFICON controllers fulfill this requirement.

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Supply voltage
at the gauge 3)
+14.5 … +30 V (dc)
Ripple ≤1 V
pp
Power consumption ≤2 W
Fuse to be connected 2) ≤1 AT
High voltage in the measuring chamber
Ignition voltage
Operating voltage
≤4.5 kV
≤3.3 kV
Current in the measuring chamber
3Mxx-x0x-0x0x
3Mxx-x1x-0x0x
high current
low current
Electrical connection
3Mxx-xxx-000x
3Mxx-xxx-010x 1)
FCC 68, 8-pin
D-Sub, 9-pin
Sensor cable
FCC connector
D-Sub connector
8-pin, shielded
9-pin, shielded
Cable length (FCC only) ≤50 m (0.14 mm2/conductor)
Grounding concept →"Power Connection"
Vacuum connection – signal
common
connected via 10 kΩ
(potential difference ≤16 V)
Supply common – signal
common
conducted separately;
differential measurement is
recommended
3) The minimum voltage of the power supply unit must be increased
proportionally to the length of the sensor cable.

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Materials exposed to vacuum
Vacuum connection
Measuring chamber
stainless steel (1.4435)
stainless steel (1.4435)
Pirani filament (MPG50x) W
Feedthrough, MAG/MPG500
Isolation
Ring
Anode
Pin
glass, ceramic (Al2O3)
stainless steel (1.4435)
molybdenum
Ni alloy
Feedthrough, MAG/MPG504 ceramic coated
Ionization chamber stainless steel (1.4301, 1.4016)
Ignition aid stainless steel (1.4310)
Internal volume
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
DN 40 CF-R
≈19.9 cm3
≈20.9 cm3
≈25.2 cm3
≈25.6 cm3
Permissible pressure
(absolute)
10 bar, limited to inert gases
<55°C
Bursting pressure (absolute) >13 bar
Permissible temperatures
Operation
Pirani filament (MPG)
Bakeout
Storage
+5 °C … +55 °C
120 °C
≤150 °C 4)
–40 °C … +70 °C
Relative humidity for 30 days a
year
1×10-8 … 1×10-2 mbar
1×10-7 … 1×10-2 mbar
≤70% (non-condensing)
≤95% (non-condensing)
Mounting orientation any
Use indoors only, altitude up to
6000 m NN
Degree of protection IP 40
4) Without electronics unit.

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Weight
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F und CF-R
<280 g
<320 g
<570 g
Dimensions [mm]
DN 25 ISO-KF
15
79 60
DN 40 CF-R
23
DN 40 CF-F
23
DN 40 ISO-KF
17
DIA
ADJ
CAL
HV-ST
ST
E
C
A
02
4
6
8
FCC 68
8-pin
44
44
DIA
ADJ
CAL
HV-ST
ST
E
C
A
02
4
6
8
D-Sub
9-pin
44
44

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2.1 Measuring Signal vs. Pressure
Measurement range 1.5 … 8.5 V (3MAx-xxx-0x0N)
1E–01
1E+00
1E–06
1E–07
1E–08
1E–09
1E–10
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
sensor error
Pressure p
Measurement signal U [V]
1E–02
1E–03
1E–04
1E–05
underrange
Pa
mbar
torr
overrange
p = 10(U-c) ⇔U = c + log10 p
valid in the range 1×10-9 mbar < p < 1×10-2 mbar
7.5×10-10 Torr < p < 7.5 ×10-3 Torr
1×10-7 Pa < p < 1 Pa
mbar Pa Torr
c 10.5 8.5 10.625
where p pressure
U measurement signal
c constant (pressure unit dependent)

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Measurement range 0.667 … 10 V (3MAx-xxx-0x0Q)
1E–01
1E+00
1E–06
1E–07
1E–08
1E–09
1E–10
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
Pressure p
Measurement signal U [V]
1E–02
1E–03
1E–04
1E–05
Pa
mbar
torr
0.667
sensor error underrange
overrange
p = 100.75(U-c) ⇔U = c + 1.33 log p
valid in the range 1×10-9 mbar < p < 1×10-2 mbar
7.5×10-10 Torr < p < 7.5 ×10-3 Torr
1×10-7 Pa < p < 1 Pa
mbar Pa Torr
c 12.66 10 12.826
where p pressure
U measurement signal
c constant (pressure unit dependent)

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Measurement range 1.398 … 8.6 V (3MBx-xxx-0x0P)
1E+04
1E+02
1E+00
1E–02
1E–04
1E–06
1E–08
0.0 0.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5
Measurement signal U [V]
Pressure p
8.6
1.397
1E–09
sensor error
Pa
mbar
torr
1.217
underrange
overrange
p = 101.667U-d ⇔U = c + 0.6 log p
valid in the range 1×10-9 mbar < p < 1000 mbar
7.5×10-10 Torr < p < 750 Torr
1×10-7 Pa < p < 1×105Pa
mbar Pa Torr
c 6.798 5.598 6.873
d 11.33 9.333 11.46
where p pressure
U measurement signal
c, d constant (pressure unit dependent)

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2.2 Gas Type Dependence MAG50x
Indicated pressure (gauge calibrated for air)
4
2
10–3
8
6
4
2
10–4
8
6
4
2
10–5
8
6
4
2
10–6
8
6
4
2
10–7
10–7 246 10–6 246 10–5 246 10–4 246 10–3 246 10–2
Xe Kr
Air
O2
CO
N2H2Ne He
peff [mbar]
p [mbar]
Ar
Indication range below 10-5 mbar
In the range below 10-5 the pressure indication is linear. For
gases other than air, the pressure can be determined by means
of a simple conversion formula:
peff = K × indicated pressure

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where: Gas type K
Air (N2, O2,CO) 1.0
Xe 0.4
Kr 0.5
Ar 0.8
H
22.4
Ne 4.1
He 5.9
These conversion factors are average values.
A mixture of gases and vapors is often involved. In this
case, accurate determination is only possible with a
partial pressure measurement instrument, e.g. a
quadrupole mass spectrometer.

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2.3 Gas Type Dependence MPG50x
Indication range from 102… 10-2 mbar
(Pirani-only operation)
Indicated pressure (gauge calibrated for air)
p [mbar]
peff [mbar]
102
8
6
4
2
101
8
6
4
2
100
8
6
4
2
10–1
8
6
4
2
10–2
H2He Ne Air
N2
O2
CO
10–3 246 10–2 10–1 100101102
8 2 468 2 468 2 468 2 468
Water vapor
Indication range
above 10-2 mbar
Xe
Kr
Ar
CO2
Freon 12