Inficon Modul1000 User manual

OPERATING MANUAL
jinb80en1-j (1501) Translation of the original manual
Catalog-No.
550-300A
550-310A
550-330A
from software version V1.75
Modul1000
Modular Leak Detector

0-2
jinb80en1-j Operating Manual(1501)
Legal notice
INFICON GmbH
Bonner Straße 498
50968 Cologne
Germany
Copyright©2010 INFICON GmbH, Cologne. This document may only be reproduced
in any form with the permission of INFICON GmbH, Cologne.

Content 1-1
jinb80e1-h Operating Manual(1501)
Content
1 Operating instructions 1-5
1.1 How to use this manual 1-5
1.2 Warning and danger symbols 1-5
1.3 Graphic conventions 1-6
1.4 Definition of Terms 1-6
2 Important safety instructions 2-1
2.1 Intended use 2-1
2.2 User requirements 2-1
2.3 Restrictions of use 2-2
2.4 Hazards in the event of intended use 2-2
3 Description of equipment 3-1
3.1 The housing 3-1
3.2 Interfaces 3-3
3.3 Operating options 3-3
3.3.1 Desktop operation 3-4
3.3.2 Installation in switch cabinet 3-4
3.3.3 Remote control RC1000 3-5
3.4 Scope of delivery 3-6
3.5 Accessories 3-6
3.5.1 Sniffer line SL200 3-6
3.5.2 Test chamber TC1000 3-6
3.5.3 Set of male connectors for Interfaces 3-7
4 Installation 4-1
4.1 Mechanical Installation 4-1
4.2 Electrical installation 4-1
4.2.1 Mains socket 4-1
4.2.2 Electrical interfaces 4-2
4.2.3 Vacuum connections 4-6
5 Working Modes 5-1
5.1 Vacuum 5-1
5.2 Partial Flow Mode 5-2
5.3 Auto Leak Test 5-3
5.3.1 Auto Leak Test Settings 5-3
5.4 Commander mode 5-4
5.4.1 Design of a leak detector system 5-5
5.4.2 Test sequence of events 5-6
5.5 Sniff mode tips 5-8

1-2 Content
jinb80e1-h Operating Manual(1501)
6 Operation 6-1
6.1 Switching ON 6-1
6.2 Status LED 6-1
6.3 Control 6-2
6.4 Control commands 6-3
6.5 Display 6-6
6.6 Calibration in Vacuum mode 6-9
6.7 Calibration in Sniff mode 6-10
6.8 Calibration in Auto Leak Test 6-11
6.9 Calibration in Commander mode 6-11
6.10 Machine factor 6-12
6.11 Menu structure 6-13
6.12 Explanation of Menu Items 6-15
6.12.1 Main menu  Return 6-15
6.12.2 Main menu  View 6-15
6.12.3 Main menu  Mode 6-16
6.12.4 Main menu  Trigger & Alarms 6-16
6.12.5 Main Menu  Calibration (CAL) Mode Vacuum 6-18
6.12.6 Main menu  Settings 6-20
6.12.6.1 Main menu  Settings  Vacuum settings 6-20
6.12.6.2 Main menu  Settings  Zero & Background 6-23
6.12.6.3 Main menu  Settings  Mass 6-23
6.12.6.4 Main menu  Settings  Interfaces 6-23
6.12.6.5 Main menu  Settings  Miscellaneous 6-26
6.12.6.6 Main menu  Settings  Load/Save Parameters 6-27
6.12.6.7 Main menu  Settings  Monitoring 6-28
6.12.7 Main menu  Info 6-30
6.12.8 Main menu  Access Control 6-31
7 Maintenance tasks 7-1
7.1 Maintenance and service at INFICON 7-1
7.2 General Maintenance Instructions 7-1
7.3 Maintenance schedule 7-3
7.4 Maintenance intervals 7-3
7.5 Description of the maintenance work 7-5
7.5.1 Opening of the Device 7-6
7.6 TMH 071 Replace the Lubricant Reservoir 7-7
7.7 Fuse replacement 7-10
7.7.1 Overview on Electrical Fuses 7-10
7.7.2 Replace mains fuse 7-11
7.7.3 Replace fuses on interface board 7-12
7.8 Replacing of parameter memory (I•STICK) 7-13
7.9 Replace Vent Filter 7-14
8 Transport and disposal 8-1
8.1 Transporting after Contamination 8-1

Content 1-3
jinb80e1-h Operating Manual(1501)
8.2 Disposal 8-2
9 Technical Data 9-1
9.1 Technical data of components 9-1
9.1.1 Power supply 9-1
9.1.2 Weight / dimensions 9-1
9.1.3 Characteristics 9-1
9.1.4 Environmental Conditions 9-2
9.2 Control via the PLC inputs and outputs 9-3
9.2.1 PLC inputs 9-3
9.2.2 PLC Outputs 9-6
9.3 The digital valve outputs 9-9
9.4 Analogue Output 9-10
9.4.1 Configuration of the analogue outputs 9-10
9.5 Pin Assignments 9-13
9.5.1 PLC IN / AUDIO 9-13
9.5.2 PLC OUT 9-15
9.5.3 Pressure Gauge 9-16
9.5.4 Valves 9-19
9.5.5 Recorder 9-21
9.6 Installation diagram of the control unit for rackinstallation 9-22
9.7 Commander mode 9-23
9.8 CE-Certificate 9-24
10 Error Messages and Warnings 10-1
11 Ordering Information 11-1
11.1 Service Centres World Wide 11-3
INDEX 11-5

1-4 Content
jinb80e1-h Operating Manual(1501)

Operating instructions 1-5
jinb80e1-h Operating Manual(1501)
1Operatinginstructions
1.1 How to use this manual
•ReadthismanualbeforeusingModul1000.
•Keepthemanualsothatyou can use it anytime.
•Enclosetheoperatingmanualifthedevice is ever passed on to third parties.
1.2 Warning and danger symbols
STOP Danger
This symbol refers to an immediate hazard, which may result in fatal or serious
injuries (crippling).
Warning
This symbol refers to a possibly hazardous situation, which may result in fatal or
serious injuries.
Caution
This symbol refers to a possibly hazardous situation, which may result in slight
injuries.
This symbol is also used to alert you to the risk of material or environmental
damage.

1-6 Operating instructions
jinb80e1-h Operating Manual(1501)
1.3 Graphic conventions
Notice: Points to very useful pieces of information.
1Points to an operation that you have to perform.
Points to the result of an operation you accomplished.
Points to the button you have to press.
• Shows a listing.
1.4 Definition of Terms
Autotune / Mass alignment
The Modul1000 adjusts its tuning voltage to determine the optimal voltage for peak
efficiency.
Autoranging
The range of the pre-amplifier is selected automatically. The Autoranging feature of
the Modul1000 covers the entire range or leak rates depending on the selected oper-
ating mode. Vacuum mode or Sniff mode Not only the leak rate signal, but also the
pressure in the test sample (inlet pressure PE) and the fore-vacuum pressure (PV)
are used for control purposes.
Auto zero
Determination and automatic adaptation of the helium background in the Vacuum
mode. Through this function, the internal zero level of the instrument is determined
which is then subtracted from the current leak rate signal. This function is run during
the calibration process or when operating the start push-button, provided the
Modul1000 has been running previously for at least 20 seconds in the Standby or
Vent mode. If the helium background previously suppressed should drop, the zero
level will be adapted automatically.
Fore pressure
Fore pressure between turbo pump and fore pressure pump.
Internal helium background
The existing helium partial pressure in the measurement system. The level of the
internal helium background is measured in the Stand-by mode and subtracted from
the measured signal. (see above: Auto zero)

Operating instructions 1-7
jinb80e1-h Operating Manual(1501)
Minimum detectable leak rate
The smallest leak rate the Modul1000 is able to detect. 
(5x10-12 mbar l/s).
Menu
The menu allows the user to program the Modul1000 according to the requirements.
The menu has a tree structure.
As-delivered condition
The default settings of the Modul1000 are as delivered by the factory.
Standby
The Modul1000 is ready for operation.
MEASURE
MEASURE mode is when the Modul1000 has achieved a pressure better than the
crossover and the unit is sampling the gas load for helium leak rate.

1-8 Operating instructions
jinb80e1-h Operating Manual(1501)

Important safety instructions 2-1
jinb80e1-h Operating Manual(1501)
2Importantsafetyinstructions
2.1 Intended use
The Modul1000 is intended to be used for the leak test under vacuum. With the
sniffer version of Modul1000 (Catalogue-No. 550-310), it is also possible to locate
leaks in the test sample.
The Modul1000 may only be used for leak tests with helium and hydrogen. It may
only be used in dry rooms and on dry surfaces.
Only use INFICON accessories.
The intended use includes:
• the compliance with the technical data and the ambient conditions,
•theuseofstandardandoriginalaccessories,
•considerationofthisdocumentation and the observation of the included
instructions and directives.
2.2 User requirements
The Modul1000 must only be connected and operated by properly trained staff.
• Get used to the functioning of the device. Only connect and operate the device
after reading and understanding the manual.
•Consultlocal,State,andnationalagencies regarding specific requirements and
regulations.
•Addressanyfurthersafety,operationand/ormaintenancequestionstoour
nearest office.

2-2 Important safety instructions
jinb80e1-h Operating Manual(1501)
2.3 Restrictions of use
2.4 Hazards in the event of intended use
Before installing the Modul1000, carefully read all safety instructions and make sure
that you have properly understood them.
Danger
STOP Danger
Danger of fatal injuries due to explosion.
Switch on and operate the Modul1000 only outside of explosive areas.
STOP Danger
Risk of dangerous gases.
The device is not suitable for caustic, toxic and explosive substances. 
Only use this device for detecting harmless substances.
STOP Danger
Danger of fatal injuries due to explosion.
When explosive gases are used as test gas, the gas container could explode.
Avoid flames and sparks, keep ignition sources far away from the device.
STOP Danger
Danger of fatal injuries due to electric shock.
Keep the sniffer tip away from live parts.
STOP Danger
Danger of fatal injuries due to electric shock!
Connect the Modul1000 properly with the 3-core power cable and then connect the
PE-line to earth.

Important safety instructions 2-3
jinb80e1-h Operating Manual(1501)
STOP Danger
Danger of fatal injuries due to electric shock!
Disconnect the Modul1000 from the power supply before the you open it.
STOP Danger
Risk of injury and contamination caused by toxic gases.
Only use the Modul1000 for detecting harmless substances.
The device is not suitable for toxic, caustic, micro-biologic, explosive, radioactive or
other hazardous substances.
Contact the manufacturer if you plan to use the device for such substances.
STOP Danger
Danger of fatal injuries due to implosion.
Components which are not pressure-resistant, can burst cause through implosion.
Only connect containers and parts to the inlet flange of Modul1000 which are suit-
able for vacuum.
STOP Danger
Danger of fatal injuries due to strong permanent magnets.
Magnets can impact the functioning of pacemakers.
If you wear a pacemaker, keep away from the device as far as it is specified in the
manufacturer's instructions.

2-4 Important safety instructions
jinb80e1-h Operating Manual(1501)
Warning
Warning
Risk of injuries through rotating parts
Before a transport leave the Modul1000 switched off for at least 20 minutes.
Warning
Danger of injury through dropping devices.
Two people should carry the Modul1000 or use a lifting device.
Warning
Back injury through heavy loads.
Two people should carry the Modul1000 or use a lifting device.
Warning
Injury to health due to emissions and fumes of oil-sealed pumps.
Before it is operated in closed rooms, the oil sealed fore-pressure pump, if used,
has to be connected to an exhaust gas pipe.
Warning
Danger of fatal injuries due to electric shock!
Only operate the Modul1000 in buildings and on dry surfaces.
Warning
Risk of injury due to sucking inlet flange
If the vacuum function of the Modul1000 is activated, body parts which are close to
the inlet flange can be sucked in.
Keep your body away from the inlet flange.

Important safety instructions 2-5
jinb80e1-h Operating Manual(1501)
Notice: Such a problem could occur,
•whenthedevicehasvisibledamages,
•whenliquidhaspenetratedintothedevice,
• when the device does not operate any more,
• after long storage time under unfavourable conditions,
• after strong transport conditions
Warning
Supposed risk
If it can be supposed that safe operation is not ensured any more, the device must
be switched off and must be secured against accidental switching on.
If this happens, contact the INFICON service people.

2-6 Important safety instructions
jinb80e1-h Operating Manual(1501)
Caution
Caution
The Modul1000 is destructed by aggressive substances.
Avoid contact to bases, acids, solvents and do not expose it to extreme climatic
conditions.
Caution
The Modul1000 may be damaged by improper transport conditions.
Only use this device for detecting helium and hydrogen.
Use a filter in the inlet of the Modul1000 to avoid dirt from getting into the vacuum
system.
Caution
The electronic system of the Modul1000 may be damaged by the wrong supply
voltage.
Check, if the local power supply voltage complies with the required supply voltage
of the device.
Caution
The electronic system of the Modul1000 may be damaged by too high voltages.
The digital inputs are designed for maximum 30 V.
Caution
The electronic system of the Modul1000 may be damaged by too high electric
loads.
The relay outputs should be connected to maximum 60V DC or 25 V AC / 1A at
ohmic load. The semiconductor outputs should only be connected to 30V / 1A.
Caution
The electronic system of the Modul1000 can be destroyed when devices are
connected to the Modul1000 whose electronic circuitry is not safely separated from
the mains.
Only connect devices to the Modul1000 whose connections are safely separated
from the power system.

Important safety instructions 2-7
jinb80e1-h Operating Manual(1501)
Caution
The turbo-molecular pump may be damaged by jerky movements.
During operation, move the Modul1000 only carefully and smoothly.
Caution
Risk of damage.
The Modul1000 may be damaged by excess heat.
Pay attention to the serve messages and replace the dirty air filters.
Caution
Risk of damage.
The Modul1000 can overheat and fail when the openings are plugged.
Provide for free openings for air inlet and outlet.
Caution
The Modul1000 can be damaged when liquid gets into it.
If liquid has entered the Modul1000, do not switch it on and contact the INFICON-
Service.
Caution
The Modul1000 may be damaged by being stored in unfavourable conditions (too
damp, too hot, too cold, too high above sea level) for months or years. (refer to
Technical Data!)
If the Modul1000 has been stored under such conditions, leave it switched off and
contact the INFICON Service Department.
Caution
Risk of damage.
The Modul1000 may be damaged by improper transport conditions.
Always transport the Modul1000 in its original packaging.

2-8 Important safety instructions
jinb80e1-h Operating Manual(1501)

Description of equipment 3-1
jinb80e1-h Operating Manual(1501)
3Descriptionofequipment
The Modul1000 is a helium leak detector which has been designed to be installed in
leak test work stations or integrated machines.
The analysis system with turbo-molecularpump and a complete control unit are inte-
grated in a compact housing. Depending on the set operating mode, the Modul1000
can execute overriding control functions in a leak test system.
Multiple signal and status outputs allow the universal integration in existing or new
system versions.
The operating parameters set by the user are stored in a separate memory module
(I•STICK) which can be withdrawn easily.
All device configurations and the necessary maintenance works can be performed
without opening the device.
To generate the fore-vacuum required for the operation of the turbo-molecular pump,
as well as for evacuation of the connected test sample, a fore-vacuum pump with a
pumping speed of >2 m³/h has to be connected. It must be able to generate a final
pressure of <1x10-2 mbar.
3.1 The housing
Fig. 3-1 Left side view and front view.
Item Description Item Description
1Inlet flange DN25 KF 6air filter
2Loudspeaker / Air inlet Mains fuses
3Openings for unlocking 7Connection DN25 KF for
the cover Backing Pump
4Recess handles 8Vent connection FESTO coupling
5Status LED Hose 8 mm
1
2
3
4
5
6
7
8

3-2 Description of equipment
jinb80e1-h Operating Manual(1501)
Fig. 3-2 Right side view and back view
Item Description Item Description
3Openings for unlocking 9Mains socket with main switch and
the cover Mains fuses
4Recess handles 10 Connection DN25 KF for
5Status LED Fore-vacuum pump or sniffer line
6air filter 11 Electrical interfaces
Fig. 3-3 Cut-out in the bottom side of Modul1000
Item Description
1Connection for the fore-vacuum pump (screwed flange)
9
10
11
6
5
4
3