Keithley 6517B User manual

A GREATER MEASURE OF CONFIDENCE
Model 6517B Electrometer
User’s Manual
6517B-900-01 Rev. A / June 2008
www.keithley.com
A GREATER MEASURE OF CONFIDENCE
Model 6517B Electrometer
User’s Manual
6517B-900-01 Rev. A / June 2008
6517B-900-01 (A - June 2008).qxp 6/12/08 9:08 AM Page 1
99 Washington Street
Melrose, MA 02176
Phone [phone]
Toll Free 1-800-517-8431
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3/07
WARRANTY
Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of
one (1) year from date of shipment.
Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables,
software, rechargeable batteries, diskettes, and documentation.
During the warranty period, Keithley Instruments will, at its option, either repair or replace any product that proves
to be defective.
To exercise this warranty, write or call your local Keithley Instruments representative, or contact
Keithley Instruments headquarters in Cleveland, Ohio. You will be given prompt assistance and return instructions.
Send the product, transportation prepaid, to the indicated service facility. Repairs will be made and the product
returned, transportation prepaid. Repaired or replaced products are warranted for the balance of the original
warranty period, or at least 90 days.
LIMITATION OF WARRANTY
This warranty does not apply to defects resulting from product modification without Keithley Instruments’ express
written consent, or misuse of any product or part. This warranty also does not apply to fuses, software,
non-rechargeablebatteries, damage from battery leakage, or problems arising from normal wear or failure to follow
instructions.
THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES
PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.
NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY
DIRECT, INDIRECT, SPECIAL, INCIDENTAL, OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE
OF ITS INSTRUMENTS AND SOFTWARE, EVEN IF KEITHLEY INSTRUMENTS, INC. HAS BEEN ADVISED IN
ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT
ARE NOT LIMITED TO: COST OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF
INJURY TO ANY PERSON, OR DAMAGE TO PROPERTY.
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Model 6517B
Electrometer
User’s Manual
Any unauthorized reproduction, photocopy, oruse the information herein, in whole or in part, without the prior written
approval of Keithley Instruments, Inc. is strictly prohibited.
TSP, TSP-Link, and TSP-Net are trademarks of Keithley Instruments, Inc.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand names are trademarks or registered trademarks of their respective holders.
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Safety Precautions
11/07
The following safety precautions should be observed before using this product and any associated instrumentation. Although some
instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may
be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer
to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument.
They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or
replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the
operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service
personnel may perform installation and service procedures.
Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and Measurement
Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and
data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient
over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC
mains connections. Assume all measurement, control, and data I/O connections are forconnection to Category Isources unless otherwise
marked or described in the user documentation.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak,
or 60VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are
prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact.
Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of
operating at or above 1000V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER
connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current
and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
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When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power
disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers,
installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.
The instrument and accessories must be used in accordance with its specifications and operating instructions, or the safety of the
equipment may be impaired.
Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating information,
and as shown on the instrument or test fixture panels, or switching card.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid
interlock.
If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation.
The symbol on an instrument indicates that the user should refer to the operating instructions located in the user documentation.
The symbol on an instrument shows that it can source or measure 1000V or more, including the combined effect of normal and
common mode voltages. Use standard safety precautions to avoid personal contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly
disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the
associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the
warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits - including the power transformer, test leads,
and input jacks - must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if
the rating and type are the same. Other components that are not safety-related may be purchased from other suppliers as long as they
are equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to maintain
accuracy and functionality oftheproduct). Ifyou areunsure abouttheapplicability of a replacement component, call aKeithley Instruments
office for information.
To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner
directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis
(e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the
board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.
!
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Section Topic Page
1 Introduction............................................................................................. 1-1
Overview..................................................................................................... 1-2
Capabilities and features overview....................................................... 1-2
Options and accessories...................................................................... 1-3
Specifications....................................................................................... 1-5
Unpacking and inspection........................................................................... 1-5
Inspection for damage.......................................................................... 1-5
Handling precautions ........................................................................... 1-5
Shipment contents ............................................................................... 1-5
Documentation..................................................................................... 1-5
Repacking for shipment........................................................................ 1-6
2 Getting Started ....................................................................................... 2-1
Introduction................................................................................................. 2-2
Front and rear panel familiarization............................................................ 2-2
Front panel summary ........................................................................... 2-2
Rear panel summary............................................................................ 2-4
Power-up .................................................................................................... 2-6
Line power connection......................................................................... 2-6
Power-up procedure............................................................................. 2-6
Display........................................................................................................ 2-6
Primary display line.............................................................................. 2-6
Secondary display line ......................................................................... 2-7
Bench defaults............................................................................................ 2-7
Restoring bench defaults...................................................................... 2-7
Function default settings...................................................................... 2-7
3 Basic Measurements ............................................................................ 3-1
Introduction................................................................................................. 3-2
Changing functions..................................................................................... 3-2
Voltage measurements............................................................................... 3-2
Guarding .............................................................................................. 3-3
Current measurements............................................................................... 3-4
Resistance measurements......................................................................... 3-5
Auto V-Source...................................................................................... 3-6
Amps Rel.............................................................................................. 3-6
Resistivity measurements........................................................................... 3-7
Charge measurements............................................................................... 3-9
Auto discharge ................................................................................... 3-10
Temperature and humidity measurements ............................................... 3-10
Connections....................................................................................... 3-10
Measurement control ......................................................................... 3-11
Temperature units............................................................................... 3-11
Display reading options...................................................................... 3-12
4 Measurement Options.......................................................................... 4-1
Introduction................................................................................................. 4-3
Multiple displays ......................................................................................... 4-3
Menus......................................................................................................... 4-5
Navigating menus ................................................................................ 4-6
Table of Contents
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Table of Contents Model 6517B Electrometer User’s Manual
ii 6517B-900-01 Rev. A / Jun 2008
Section Topic Page
Voltage source ............................................................................................ 4-7
Connections.......................................................................................... 4-7
Basic operation..................................................................................... 4-9
Configuring V-Source ........................................................................... 4-9
Relative....................................................................................................... 4-9
Configuring rel .................................................................................... 4-10
Zero check ................................................................................................ 4-10
Zero correct............................................................................................... 4-10
Triggering .................................................................................................. 4-10
Idle...................................................................................................... 4-11
Control sources .................................................................................. 4-12
Device action...................................................................................... 4-12
Output trigger...................................................................................... 4-12
Counters............................................................................................. 4-12
Bench default setup............................................................................ 4-12
Speed........................................................................................................ 4-13
Configuring speed .............................................................................. 4-13
Resolution................................................................................................. 4-13
Configuring resolution......................................................................... 4-13
Filter.......................................................................................................... 4-13
Filter types.......................................................................................... 4-14
Filter modes........................................................................................ 4-14
Median filter........................................................................................ 4-14
Configuring filters................................................................................ 4-15
Buffer (data store)..................................................................................... 4-15
Storing readings.................................................................................. 4-15
Math.......................................................................................................... 4-16
Selecting and configuring math .......................................................... 4-17
Enabling math..................................................................................... 4-18
Additional math operations................................................................. 4-18
Test sequences......................................................................................... 4-19
Configuring test sequences................................................................ 4-19
Connections........................................................................................ 4-20
Running a test .................................................................................... 4-21
Internal scanning....................................................................................... 4-21
Configure internal scanner ................................................................. 4-21
Perform the scan ................................................................................ 4-21
Close/open channels.......................................................................... 4-22
External scanning...................................................................................... 4-22
Trigger connections ............................................................................ 4-23
Configure external channels............................................................... 4-23
Perform the scan ................................................................................ 4-23
5 Remote Operation.................................................................................. 5-1
Overview..................................................................................................... 5-2
Software support......................................................................................... 5-2
LabView driver...................................................................................... 5-2
Remote interfaces....................................................................................... 5-2
IEEE-488 bus ....................................................................................... 5-2
RS-232 interface................................................................................... 5-3
Common commands................................................................................... 5-5
SCPI commands......................................................................................... 5-5
SCPI command syntax......................................................................... 5-6
SCPI signal-oriented commands.......................................................... 5-8
SCPI subsystem commands ................................................................ 5-8
Program examples.................................................................................... 5-13
Changing function and range ............................................................. 5-13
One-shot triggering............................................................................. 5-14
Continuous triggering #1 .................................................................... 5-15
Continuous triggering #2 .................................................................... 5-15
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Model 6517B Electrometer User’s Manual Table of Contents
6517B-900-01 Rev. A / Jun 2008 iii
Section Topic Page
Generating SRQ on buffer full ............................................................ 5-16
Storing readings in the buffer.............................................................. 5-17
Taking readings with the scanner card............................................... 5-18
Test sequence: Staircase sweep ........................................................ 5-19
Index ............................................................................................................................ I-1
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iv 6517B-900-01 Rev. A / Jun 2008
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Section Figure Title Page
2 Figure 2-1 Model 6517B front panel................................................................ 2-2
2 Figure 2-2 Model 6517B rear panel ................................................................ 2-4
3 Figure 3-1 Voltage measurements.................................................................. 3-3
3 Figure 3-2 Current measurements.................................................................. 3-4
3 Figure 3-3 Resistance measurements ............................................................ 3-6
3 Figure 3-4 Resistivity measurements.............................................................. 3-9
3 Figure 3-5 Charge measurements................................................................ 3-10
3 Figure 3-6 External temperature and humidity measurements..................... 3-11
4 Figure 4-1 Main menu display......................................................................... 4-5
4 Figure 4-2 Independent V-Source connections............................................... 4-8
4 Figure 4-3 FVMI connections.......................................................................... 4-8
4 Figure 4-4 Basic trigger model (simplified).................................................... 4-11
4 Figure 4-5 Advanced trigger model (simplified) ............................................ 4-11
4 Figure 4-6 Filter response/noise window ...................................................... 4-14
4 Figure 4-7 Combining math calculations....................................................... 4-18
4 Figure 4-8 Typical FVMI connections............................................................ 4-20
4 Figure 4-9 Trigger connections using trigger link.......................................... 4-23
5 Figure 5-1 IEEE-488 connections................................................................... 5-3
5 Figure 5-2 Hierarchy of the example SENSe1 commands ............................. 5-6
List of Figures
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List of Figures Model 6517B Electrometer User’s Manual
vi 6517B-900-01 Rev. A / Jun 2008
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Section Table Title Page
4 Table 4-1 Multiple displays by function.......................................................... 4-3
4 Table 4-2 Main menu summary..................................................................... 4-5
4 Table 4-3 Configuration settings for each measurement function ................. 4-6
4 Table 4-4 Configuration settings for instrument operations........................... 4-6
4 Table 4-5 Menu summary.............................................................................. 4-7
List of Tables
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List of Tables Model 6517B Electrometer User’s Manual
viii 6517B-900-01 Rev. A / Jun 2008
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Section 1
Introduction
In this section:
Topic Page
Overview ................................................................................................. 1-2
Capabilities and features overview ................................................. 1-2
Options and accessories................................................................. 1-3
Specifications.................................................................................. 1-5
Unpacking and inspection....................................................................... 1-5
Inspection for damage .................................................................... 1-5
Handling precautions ...................................................................... 1-5
Shipment contents .......................................................................... 1-5
Repacking for shipment .................................................................. 1-6
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1-2 Return to Section Topics 6517B-900-01 Rev. A / Jun 2008
Section 1: Introduction Model 6517B Electrometer User’s Manual
Overview
This section contains general information about the Keithley Instruments Model 6517B
Electrometer.
If you have any questions after reviewing this information, please contact your local Keithley
Instruments representative or call one of our applications engineers at 1-888-KEITHLEY
(1-888-534-8453) within the U.S. and Canada. You can also contact us through our website at
www.keithley.com.
Capabilities and features overview
The Model 6517B is a 6½-digit electrometer/high-resistance test and measurement system with
the following measurement capabilities:
• DC voltage measurements from 1μV to 210V.
• DC current measurements from 10aA to 21mA.
• Charge measurements from 10fC to 2.1μC.
• Resistance measurements from 10Ωto 210PΩ.
• Surface resistivity measurements.
• Volume resistivity measurements.
• External temperature measurements from -25°C to 150°C using the supplied Model
6517-TP thermocouple.
• Relative humidity measurements (0 to 100%) using the optional Model 6517-RH probe.
Some additional capabilities of the Model 6517B include:
• Built-in V-Source. The 100V range provides up to ±100V at 10mA, while the 1000V range
provides up to ±1000V at 1mA.
• Data storage (50,000 points).
• Single button zeroing (REL).
• Built-in math functions.
• Filtering, averaging, and median.
• Built-in test sequences.
• Remote operation using the IEEE-488 (GPIB) bus or the RS-232 interface.
• Scan (measure) channels of an external scanner.
• Scan (measure) channels of an internal scanner card (for example, Keithley Instruments
Model 6521 or Model 6522) installed in the option slot.
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Model 6517B Electrometer User’s Manual Section 1: Introduction
Options and accessories
The following options and accessories are available from Keithley Instruments for use with the
Model 6517B Electrometer:
NOTE Check the Keithley Instruments website (www.keithley.com) for additional options and
accessories that may have been added to the Keithley Instruments product line for use
with the Model 6517B Electrometer.
Cables and adapters
Model 237-ALG-2 Triax Cable: This is a 2-meter (6.6ft) low-noise triax cable terminated with a
3-slot male triax connector on one end and 3 alligator clips on the other.
Model 237-BNC-TRX Adapter: This is a male BNC to 3-lug female triax adapter (guard
disconnected). It is used to terminate a triax cable with a BNC plug. Suitable for use with the Model
6517B V-Source in high voltage applications.
Model 237-TRX-T Adapter: This is a 3-slot male to dual 3-lug female triax tee adapter for use with
7078-TRX triax cables. Suitable for use with the Model 6517B V-Source in high voltage
applications.
Model 237-TRX-TBC Connector: This is a 3-lug female triax bulkhead connector with cap for
assembly of custom panels and interface connections. Suitable for use with the Model 6517B
V-Source in high voltage applications.
Model 6517B-ILC-3 Interlock Cable: This is a 3 meter (6.6 ft) cable terminated with a 4 pin
Phoenix connector on one end and a 4 pin Switchcraft connector on the other end.
Model 7078-TRX-BNC Adapter: This is a 3-slot male triax to female BNC adapter. This adapter
lets you connect a BNC cable to the triax input of the Model 6517B. Suitable for use with the Model
6517B in high voltage applications.
Models 7078-TRX-3, 7078-TRX-10 and 7078-TRX-20 Triax Cables: These are low noise triax
cables terminated at both ends with 3-slot male triax connectors. The Model 7078-TRX-3 is 3ftft
(0.9m) in length,the Model 7078-TRX-10 is 10ft (3m) in length, and the Model 7078-TRX-20 is 20ft
(6m) in length.
Model 7078-TRX-TBC Connector: This is a 3-lug female triax bulkhead connector with cap for
assembly of custom panels and interface connections. Suitable for use with the Model 6517B
V-Source in high voltage applications.
Models 7007-1 and 7007-2 Shielded IEEE-488 Cables: Connect the Model 6517B to the
IEEE-488 bus using shielded cables and connectors to reduce electromagnetic interference (EMI).
The Model 7007-1 is one meter long; the Model 7007-2 is two meters long.
Models 8501-1 and 8501-2 Trigger Link Cables: Connect the Model 6517B to other instruments
with Trigger Link connectors (for example, Model 7001 Switch System). The Model 8501-1 is one
meter long; the Model 8501-2 is two meters long.
Model 8502 Trigger Link Adapter: Allows you to connect the Trigger Link of the Model 6517B to
instruments that use the standard BNC (In/Out) external triggering technique.
Model 8606 High Performance Probe Tip Kit: Consists of two spade lugs, two alligator clips, and
two spring hook test probes (the spade lugs and alligator clips are rated at 30V RMS, 42.4V peak;
the test probes are rated at 1000V). These components are designed to be used with high
performance test leads terminated with banana plugs, such as the Model 8607 High Performance
Banana Cables.
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1-4 Return to Section Topics 6517B-900-01 Rev. A / Jun 2008
Section 1: Introduction Model 6517B Electrometer User’s Manual
Model 8607 High Performance Banana Cables: Consists of two high voltage (1000V) banana
cables. The cables are terminated with banana plugs that have retractable sheaths.
CS-751 Barrel Adapter: This is a barrel adapter that allows you to connect two triax cables
together. Both ends of the adapter are terminated with 3-lug female triax connectors.
Case and rack mount kits
Model 1050 Padded Carrying Case: A carrying case for a Model 6517B. Includes handles and
shoulder strap.
Model 4299-1 Single Fixed Rack Mount Kit: Mounts a single Model 6517B in a standard 19-inch
rack.
Model 4299-2 Side-by-side Rack Mount Kit: Mounts two instruments side-by-side in a standard
19-inch rack.
Model 4288-4 Side-by-side Rack Mount Kit: Mounts a Model 6517B and a 5.25-inch instrument
side-by-side in a standard 19-inch rack.
Probes
Model 6517-RH Humidity Probe with Cable: This sensor allows the Model 6517B to make
relative humidity measurements (0 to 100%). Also included is an extension cable (part number
CA-129-1).
Model 6517-TP Thermocouple with Leads: This type K thermocouple sensor allows the Model
6517B to make external temperature measurements from –190°C to 1350°C.
Scanner cards
Model 6521 Low Current Scanner Card: This 10-channel low current scanner card is terminated
with BNC connectors and plugs into the option slot of the Model 6517B.
Model 6522 Low Current/Low Voltage Scanner Card: This 10-channel low current/low voltage
scanner card is terminated with triax connectors and plugs into the option slot of the Model 6517B.
Test fixture
Model 8009 Resistivity Test Fixture: This is a guarded test fixture for measuring volume and
surface resistivities. It can accommodate sheet samples 64 to 102mm (2-1/2 to 4 in.) in diameter
and up to 3.175mm (1/8 in.) thick.
Software
Model 6524 Hi-R Software Package: Designed to aid in making more repeatable high resistance/
resistivity measurements. Four windows-driven programs increase measurement precision, ease
download and analysis of Hi-R data, and allow cross-correlation of environmental factors.
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6517B-900-01 Rev. A / Jun 2008 Return to Section Topics 1-5
Model 6517B Electrometer User’s Manual Section 1: Introduction
Specifications
Full Model 6517B specifications are included in the Model 6517B Reference Manual, Appendix A.
Check the Keithley Instruments website at www.keithley.com for the latest updates to the
specifications.
Unpacking and inspection
Inspection for damage
The Model 6517B was carefully inspected electrically and mechanically before shipment. After
unpacking all items from the shipping carton, check for any obvious signs of physical damage that
may have occurred during transit (there may be a protective film over the display lens, which can
be removed). Report any damage to the shipping agent immediately. Save the original packing
carton for possible future shipment. Before removing the Model 6517B from the anti-static bag,
observe the following handling precautions.
Handling precautions
• Always grasp the Model 6517B by the covers.
• After removing the Model 6517B from its anti-static bag, inspect it for any obvious signs
of physical damage; report any such damage to the shipping agent immediately.
• When the Model 6517B is not installed and connected, keep the unit in its anti-static
bag and store it in the original packing carton.
Shipment contents
The following items are included with every Model 6517B order:
• Model 6517B Electrometer with line cord
• Protective Triax Shield/Cap (CAP-28-1)
• 237-ALG-2 Triax Cable terminated with alligator clips on one end
• Accessories as ordered
• Certificate of calibration
• CD containing complete documentation and required software
Documentation
A CD-ROM containing this User’s Manual, a Reference Manual, and required software is included
with each Model 6517B. Check the Keithley Instruments website at www.keithley.com for the latest
versions of the manuals. The latest manuals can be downloaded (in PDF format) from the website.
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