Kofloc 8700 Series User manual

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Thermal Mass Flow Meter / Controller
MODEL 8700 SERIES
INSTRUCTION MANUAL

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Please read this manual thoroughly prior to installing and using the product. This
way it is possible to ensure the performance and safety of the product and prevent
possible accidents and damage to the product due to incorrect use.
When the product has failed or is considered to require readjustment, please
contact our sales office. Our experienced technical staff will give you appropriate
advice. Please follow the instructions given.
Please note that if you repair modify the product yourself, not only serious
accidents may occur, but our warranty will become void.
The contents of the manual are subject to change without notice for improvement.
Prior to shipment, every care has been taken in preparing this manual not to
mention the product itself, but if you notice any imperfections, errors or omission,
please contact KOFLOC.
<< Prior to use >> and << Precautions for use >>
Various alert symbols and signal words are used in this manual and attached to the
product to ensure correct use of the product and to prevent possible personal injury or
loss of life and property damage. The symbols and meanings of the signal words are as
follows:
Ignoring this symbol and handling the product
incorrectly will immediately result in loss of life or
serious injury.
Ignoring this symbol and handling the product
incorrectly may result in loss of life or serious injury.
Ignoring this symbol and handling the product
incorrectly may result in personal injury or damage to
property.
DANGER
WARNING
CAUTION

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Table of Contents
Page
1. Foreword 4
2. Precautions for Use 4
3. Overview and Configuration of the Product 6
4. Standard Specifications 7
5. Special Functions 9
6. Installation 10
7. Connector and Pin Assignment 12
8. Preparation Prior to Use 14
9. Nomenclature and Functions of the Indicator 15
10. Nomenclature and Functions of the Main Unit 16
11. Basic Operation of the Indicator 17
12. Changing Over the Operation Modes 20
13. Applied Operating Procedure 21
14. List of Function Setting Modes 25
15. Alarm Codes and Corrective Actions 29
16. Troubleshooting and Precautions for Servicing 30
17. After-Sales Service 32
18. Product Warranty 32
19. External View 33

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1. Foreword
Thank you for your selection of the mass flow meter controller Model 8700 Series. Prior to using
your new equipment, please read this manual thoroughly to ensure it is used in the correct way.
2. Precautions for Use
(1) Peripheral Equipment to Connect
① The connector pin assignment of Model 8700 Series is different from that of
Model 8500 Series and D8500 Series. For details, refer to 7. Connector and Pin
Assignment.
② Model 8700 Series allows the use of the same AC adapter as that for Model 8500
Series and D8500 Series. (The outside of the jack is +24 V.)
③ Check to see if the voltage (24 VDC), polarity and current capacity (0.3A or over)
of the power supply are correct.
④ Check to see if the analog set input is the signal within the allowable input range.
The allowable maximum input voltage is10 V and the allowable maximum input
current is 30 mA.
⑤ When the analog flow rate output signal is to be used, make sure that the proof
pressure on the input equipment side is sufficient. The output may possibly be in
a range of -1 to 7 V in the case of voltage and 0 to 26 mA in the case of current.
(2) Items to Check about the Product
Do the specifications shown on the label match your order?
(The ordered product has been assembled and adjusted one by one according to the
specifications. The ID plate attached to the back of the case shows the gases to use,
flow rate and other specifications. Check to see if they comply with your order
specifications.)
① MODEL 8700MC - 0
8700MC：Controller 0：Integrated indicator type
8700MM：Meter S1：Separate indicator type 1 m
8750MC：Controller S3：Separate indicator type 3 m
8750MM：Meter S5：Separate indicator type 5 m
② Fluid name
③ Flow rate calibration temperature
SCCM = ml min at 0℃ : 1 atm
SLM = l min at 0℃ : 1 atm
NCCM = ml min at 20℃ : 1 atm
NLM = l min at 20℃ : 1 atm
※ ”SCCM” stands for Standard Cubic Centimeter per Minute and normally refers to the
state at 0℃, but there are many industries where the normal state is at 20℃.
KOFLOC indicates the units of flow rate together with the calibration
temperature and atmosphere.

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If the calibration temperature is different, the actual flow rate will become
different largely. Always check it prior to use.
④ Presence of the serial No.
(3) Precautions for Transportation
Wherever possible, transport the product in the condition in which it has been received from
KOFLOC to the installation site in order to prevent damage due to accidents during
transportation
(4) Precautions for Storage of the Product
If the product is not put in use for a long time after it was received, unexpected troubles may
occur.
When it is expected that the product will be kept in storage for a long time, take the following
precautions:
・Store the product in the package in which it was received from KOFLOC, wherever possible.
・Store the product in a place described below:
① A place free of rain and water.
② A place free of vibration and impact.
③ A place of normal temperature and normal humidity (around 25℃, 65%).
④ A place free of dust.
⑤ A place free of corrosive gases.
⑥ A place free of a strong electric magnetic field.
・To store the product that has been used, purge it with clean air or N2 so that measuring gas
will not remain in the flow meter.
Cover the inlet and outlet sides (joints) of measuring gas with caps to prevent intrusion of dust
and dirt.

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3. Overview and Configuration of the Product
(1) Overview of the product
Model 8700 Series is a gas flow control measuring equipment with an integrated flow
sensor developed based on the principle of the thermal flow sensor, flow control valve
(controller type) and indicator.
8700 Series has the following functions and features:
・Normally closed type. (Controller type)
・A large flow rate realized by a small body by employing a high-lift actuator.
(Controller type)
・An indicator is installed and can be operated with a single 24 VDC power supply only.
・Both of digital control (indicator, communications, contact) and control by analog signals
are possible. (Voltage signal: 0 – 5 V or current signal: 4 – 20 mA)
(2) Configuration
Model 8700 Series is configured with a sensor, bypass, electric circuit and valve (controller
type only) as shown below.
Indicator
Proportional
control circuit
Bridge circuit
Amplific
ation
operation circuit
Sensor
Gas IN
Bypass
Gas OUT
Valve

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4. Standard Specifications
Item Specifications
Model Name 8700 MC MM 8750MC MM
F.S. flow rate (N
2
) 10SCCM～20SLM 20SLM～100SLM
Specifiable gas N
2
, Air , O
2
, CO
2
, Ar , H
2
, He , etc.
Sensor type Thermal winding sensor
Valve actuator※1 Solenoid normally closed type
Control
Control range※2
2～100% F.S. 5～100％F.S.
Response 2 sec Max. （0→98%） 3 sec Max. （0→98%）
Accuracy
Accuracy ±1.0 % F.S.（25℃） ±1.5 % F.S.（25℃）
Repeatability ±0.5 % F.S.
Pressure
Proof pressure 1 MPa (G)
Operating
pressure 500kPa (G) Max.
Operating
differential
pressure※1
50～300kPa（F.S.≦5SLM）
100～300kPa（F.S. > 5SLM）
150～300kPa（F.S.≦50SLM）
200～300kPa（F.S. >50SLM）
Pressure
characteristic 0.3% F.S. 100 kPa
Temperature
Working
temperature
5～45℃
Temperature
characteristic
0.1％F.S. ℃ 0.2%F.S. ℃
Humidity
Allowable
operating
humidity
10 – 90 % (no condensation)
Flow rate setting
※1※3
Digital
①Indicator ② Communications
③ Event input selection
Analog Standard: 0 – 5 V (Input impedance 100 kΩ min.)
Selection: 4 – 20 mA (Input impedance approx. 250 Ω)
Flow rate output
※3 Analog Standard: 0 – 5 V (External load resistance 250 kΩ min.)
Selection: 4 – 20 mA (External load resistance approx. 300 Ω max.)
Display Method 7-segment LED, 4 digits
Other
input output
functions
Event input 5 contacts
Alarm output 1x NPN open collector output Max 35V : 50mA
Event output 2x NPN open collector output Max 35V : 50mA

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Power supply
Rating 24 VDC, power consumption 300 mA max.
Allowable volta
ge
range
DC22.5V～25.2V
Installation posture Any posture
Materials of parts in contact with gas
SUS316 , SUS316L , SUS430 , Fluor rubber ,
PTFE , Chloroprene rubber (Optional)
Joint Rc1 4 Rc3 8 (Optional：1 4SWL,1 8SWL,1 4VCR, 3 8SWL)
Weight Integrated type approx. 1200 g
separate type approx. 1400 g
Integrated type approx. 1500 g
separate type approx. 1700 g
※1 Applicable to the controller only.
※2 Measuring range in the case of the meter.
※3 The analog input output is changeable on the indicator.

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5 . Special Functions
(1) Indicator function
・Indication: 7-segment LED, 4 digits
・Indication update cycle: Selected from 50 msec , 100 msec , 200 msec, 500 msec and 1000
msec time
・Status indicator lamp: Green 7 pieces Red 1 pieces
・Key switch: 6 pieces
(2) Integration function
※To make setting about integration, refer to 13. Applied Operating Procedure.
①Maximum integrated flow rate
Maximum 12-digit integration measurement is possible.
For details, refer to 11. Basic Operation of the Indicator.
②Integration timing
An instantaneous flow rate value is added every one second.
③Power failure measure
The integrated flow rate is stored held every one minute and as soon as the power is
recovered, integration will restart. When this happens, the integrated flow rate for one
minute maximum from the storage to the power failure is lost.
(3) Upper lower limit flow rate alarm allowable range (OK judgment) function
※To use this function, refer to 13. Applied Operating Procedure.
① When the instantaneous flow rate value is above the upper limit alarm value or below
the lower limit alarm value, the ALM LED lights and the alarm output is turned on.
② When the instantaneous flow rate value is between the lower limit alarm value and the
upper limit alarm value, the OK LED lights.
(4) Zero adjust and auto zero functions
① Zero adjust function
Pressing the yellow [ZERO] adjust switch on the side face of the main unit corrects the
zero point.
② Auto zero function
When the operation mode is the fully closed state or when the set flow rate is 0 and the
instantaneous flow rate value is 2% of the full scale or less, the zero point is
automatically corrected.
※Refer to “D-08” and “D-09” in 14. List of Functions Setting Modes.

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6 . Installation
(1) Installation place
①This equipment is designed for indoor use.
Never install the equipment in a place where it is likely to be wetted by water or rain. The
equipment may fail. Install the equipment in a place where sufficient ventilation is provided
and changes in humidity are minimal.
②Install the equipment in a place free of vibration and impact.
③Do not use the equipment under direct sunlight or at high temperature humidity.
④Install the equipment in a place free of dust.
⑤Install the equipment in a place free of corrosive gases.
⑥Install the equipment in a place free of a strong electric magnetic field.
⑦Install the equipment in a place where ambient temperature is 15 to 35℃.
The use of the equipment in a condition deviating from the conditions described in the
specifications is a cause of failure.
When installing the mass flow unit, noise generating sources in the
vicinity of installation, environment filled with moisture and dust and very
hot, corrosive gas ambient must be avoided. Such conditions are causes of
serious failure.
(2) Installation method
Install the equipment using the threaded holes (M4) on the bottom of the body.
For installation hole dimensions, refer to 19. External View on page 33.
(3) Installation posture
The basic installation posture is horizontal. If the equipment is to be installed vertically,
warm up the equipment fully and conduct the zero point adjustment.
Determine the direction of gas inlet and outlet as indicated by the arrows on the ID plate.
CAUTION

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(4) Piping and filters
When using commercially available pipes and joints for piping, make sure that they have
been cleaned completely or they are clean.
Install a line filter (finer than 100 µm) on the inlet side of gas. A standard filter has been
installed on the inlet side of the equipment, but if a large amount of impurities sticks to it,
gas will not flow smoothly, disabling accurate measurement and control.
In particular, when using air from a compressor or blower, a large amount of oil mist or
water droplets may be produced. Install an oil filter or water-removing filter before the
equipment.
Never wash the piping system after the mass flow unit has been installed.
Such a practice may cause serious failure.
Check to see if the connections of gas piping are not leaking. If such a
check is omitted and unsafe gas is used, serious accidents may occur.
Give careful attention to piping after the unit also to ensure that water
droplets condensed within the piping will not enter the unit due to
counterflow.
Make sure that the installation direction (gas flow direction) is correct.
Due to the characteristics of the mass flow controller, if counterflow
occurs, the fully opening action may occur even if controlled.
The valve of Model 8700 Series Controller Type is intended for precise
control and is different from valves designed for complete shutoff.
Where complete shutoff is required, install a valve dedicated to shutoff in
the upstream or downstream.
(5) Wiring
Connect wires referring to 7. Connector and Pin Assignment.
Use the included dedicated connector. Firmly insert the connector to the designated place.
CAUTION
WARNING
CAUTION
CAUTION
CAUTION

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7 . Connector and Pin Assignment
(1) Connector
Connector type : D-sub half-pitch connector, 20 pins
Main unit connector : DX10M-20S (Hirose-made)
Recommended matching connector : DX40M-20P (Hirose-made)
Cover : DX30M-20-CV (Hirose-made)
(2) Pin assignment
Pin No. Signal Name Remarks
1 Power supply GND It is recommended to connect both of two to prevent a voltage
drop.
2 Power supply GND
3 Flow rate setting input GND
COM to all signal inputs & outputs.
4 Power supply 24VDC It is recommended to connect both of two to prevent a voltage
drop.
5 Power supply 24VDC
6 Flow rate setting input
*1
0 - 5 V 4 - 20 mA
7 Flow rate output
*2
0 - 5 V 4 - 20 mA
8 Operation mode input 5V：FULL OPEN S.GND：CLOSE OPEN：CONTROL
9 5V output (≒5V) Valve motion mode input only.
10 ALARM output
NPN open collector output (Max. spec.: 35 V, 50 mA)
11 EVENT output 1
12 EVENT output 2
13 Flow rate setting pattern 1
changeover input
ON when short circuited to signal input output GND
14 Flow rate setting pattern 2
changeover input
15 Flow rate setting pattern 3
changeover input
16 Flow rate setting pattern 4
changeover input
17 Flow rate setting pattern 5
changeover input
18 TR+
RS485 communications
19 TR-
20 TR COM
＊1: Input impedance Voltage input: approx. 100 kΩ min, current input: approx. 250 Ω
＊2: Load resistance Voltage output: 250 kΩ min, current output: 300 Ω max.

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Do not connect different power supplies to the power input terminals of
the above connector and the pin jack power terminals simultaneously.
Such a practice may cause a fire or damage to the equipment.
DANGER

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8. Preparation Prior to Use
(1) Warming up
In the state that no gas pressure is being applied to inlet side of the main unit (a pressure
difference between the inlet side and the outlet side is completely zero), turn on the power.
When the operation mode is “fully open” or “control,” warm up the equipment for 15 minute
or longer under the condition of “fully open” or “set flow rate zero.”
If the equipment is operated without warming up, its accuracy will deteriorate.
(2) Zero point adjustment
This equipment has the zero adjust function.
Pressing the [ZERO] switch on the side of the main unit corrects deviation of the zero point.
This step is not needed when the auto zero function is active.
(3) Introducing gas
After confirming the type of gas to use and making sure that the supply pressure is correct,
supply gas.
Then the equipment is ready for control.
・Is the pressure of supply gas within the working pressure range?
・When a highly reactive gas is used, check to see if the piping has been purged with N2.
(4) Charging gas
To use a gas other than air, purge is necessary until the inside of the equipment and piping
has been filled with gas.
In the case of the controller type, take such a measure as setting the operation mode to
“fully open.”

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①
②
③④
⑤
⑥
⑦
⑧
⑨
⑩
⑮
⑪ ⑫ ⑬
⑭
9. Nomenclature and Functions of the Indicator
① DISP key (DISPLAY)
Used to switch over the indication of the instantaneous flow rate, set flow rate, integrated
flow rate, etc.
② ▲ key (UP)
Increments the indicated value when setting a flow rate and various functions.
③ ▼ key (DOWN)
Decrements the indicated value when setting a flow rate and various functions.
④ key (Digit)
Used to select a digit of the indicated value to change when setting a flow rate and various
functions.
⑤ RUN key
Used to change over the operation mode between “fully closed” “control” “fully opened.”
⑥ ENT key (ENTER)
Used to accept a changed value when setting a flow rate and various functions.
Also used to reset the integrated flow rate.
⑦ SV lamp (Set Value)
Lights when a set flow rate is being indicated.
⑧ PV lamp (Process Value)
Lights when an instantaneous flow rate is being indicated.
⑨ TF lamp (Total Flow)
Lights when an integrated flow rate is being indicated.

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⑩ IF lamp
Lights in the function setting mode.
⑪ OK lamp
Lights when an instantaneous flow rate is within the set flow rate ± allowable range.
⑫ ALM lamp (ALARM)
Lights when an alarm has occurred.
⑬ OUT1 lamp (Event 1 output)
Lights when the event output 1 is on.
⑭ OUT2 lamp (Event 2 output)
Lights when the event output 2 is on.
⑮ 7-segment LED, 4 digits
Indicates various flow rates and function set modes.
10. Nomenclature and Functions of the Main Unit
≪Side view of the main unit≫
※Never peel off the protective seal on the right side of the main unit. Such action will void the product warranty.
① [ZERO] adjust switch
Pressing this switch adjusts the zero point.
② Jack for AC adapter
Connect the dedicated AC adapter: PSK-85CE.
③ Connector
Used for RS 485 communications and various
inputs outputs.

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11 . Basic Operation of the Indicator
(1) Changing over the indication of the instantaneous flow rate, set flow rate and integrated
flow rate
Power on
↓ ▼ key+ENT key held pressed
Status of lamps on the indicator
①
Instant. flow indication
⑧Function set mode
（[PV] and [SV] lamps on)
↓DISP key DISP key
② SP No. set
[SV] lamp on
↓DISP key
③
Set flow indication
[SV] lamp on
↓DISP key
④
Lower of integ. flow indication
[SV] lamp on
↓DISP key
⑤
Mid of integ. flow indication
Not shown when the upper
[SV] lamp on
↓DISP key
or mid & upper values of the integrated
⑥
Upper of integ. flow indication
flow rate value are zero.
[SV] lamp on
DISP key
① Instantaneous flow rate indication
The present flow rate is indicated.
The unit of indication is based on the ordered scaling (ex. 1.000 in the case of 1 SLM).
When the operation mode is changed, the operation mode is indicated for a certain
time.
② SP No. set(Controller type only)
This equipment can hold six SPs (set points) maximum.
※When the SP No. is being shown, if no key is operated for 10 seconds, the indication
will automatically change to the instantaneous flow rate.

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③ Set flow rate indication(Controller type only)
Determine a flow rate to control with this equipment.
When the [ENT] key is pressed while this set flow rate is being indicated (“VL” lamp
lit), the figure on the left end (most significant) flashes.
Go to the digit of the set value to change with the [ ] key and change the figure with
the [▲ ▼] keys.
・Order of movement of the flashing digit (change digit) with [ ] key
Auto addition subtraction function
When the [▲] key or [▼] key is pressed and held, the auto addition subtraction mode
is set and addition subtraction is done continuously every 0.5 second.
Determination of a numeric value
After getting a desired numeric value by the above operation, press the [ENT] key.
The flashing will stop and the set value will be indicated.
When the [ENT] key is pressed, the change will become valid and the set value will be
saved.
・Precautions for operation
※If the [DISP] key is pressed without pressing the [ENT] key (flashing state), the
indication will change to the instantaneous flow rate.
In this state, since the [ENT] key has not been pressed, the numeric value will not
be changed and the value before the changing operation will remain.
※When the set flow rate is being indicated, if no key is operated for 10 seconds, the
indication will automatically change to the instantaneous flow rate.
Fourth
Third
Se
cond
First

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④ to ⑥ Integrated flow rate indication
・The integrated value is indicated by 12 digits maximum of;
0 – 9 9 9, 9 9 9, 9 9 9, 9 9 9
Upper Middle Lower
For this reason, a value is divided to 4 digits each and indicated three times.
・Resetting the integrated flow rate
When an integrated value is being indicated (“TF” lamp lit), pressing and holding the
[ENT] key for 3 seconds or longer resets the value to zero.
⑧ Function set mode
・Used to change the settings of various modes on the indicator.
For specific description, refer to 14. List of Function Setting Modes on page 25.

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12. Changing Over the Operation Modes
The valve has three operation modes; “control mode,” “fully closed mode” and “fully
opened mode.” When the equipment is shipped, it is in the control mode. It can be forced
to the “fully closed mode” (valve fully closed) or “fully opened mode” (valve fully opened).
Each time the [RUN] key is pressed, the mode is changed over between “control” and
“fully closed” alternately as shown below. To change the control mode to the fully opened
mode, press and hold the [RUN] key for 2 seconds or longer.
Control mode
[RUN] key (less than [RUN] key
2 sec) (less than 2 sec)
Fully closed mode [RUN] key (2 sec or longer)
[RUN] key (less than [RUN] key
2 sec) (2 sec or longer)
Fully opened mode
◎ Indication of the operation modes
The operation modes are indicated on the indicator as shown below:
Operation Mode Indication Remarks
Fully closed 0FF After 0FF is shown for 10 seconds, instantaneous flow
rate is indicated.
Control 0N After 0N is shown for 1 second, instantaneous flow rate
is indicated.
Fully opened FULL After FULL is shown for 1 second, instantaneous flow
rate is indicated.