Kofloc 3810DSII User manual

MJ400173C1
Mass Flow Meter with indicator
MODEL 3810DSⅡ
Instruction Manual

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Please read this manual thoroughly prior to installing and using the product.
This way it is possible to ensure the performance and safety of the product and
prevent possible accidents and damage to the product due to incorrect use.
When the product has failed or is considered to require readjustment, please
contact our sales office or the dealer which you purchased the product from. Our
experienced technical staff will give you appropriate advice. Please follow the in-
structions given.
Please note that if you repair/modify the product yourself, not only serious ac-
cidents may occur, but our warranty will become void.
The contents of the manual are subject to change without notice for improve-
ment. Prior to shipment, every care has been taken in preparing this manual
not to mention the product itself, but if you notice any imperfections, errors or
omission, please contact our sales office or the dealer.
<< Prior to use >> and << Precautions for use >>
Various alert symbols and signal words are used in this manual and attached
to the product to ensure correct use of the product and to prevent possible per-
sonal injury or loss of life and property damage. The symbols and meanings of
the signal words are as follows:
Ignoring this symbol and handling the product incor-
rectly will immediately result in loss of life or serious
injury.
Ignoring this symbol and handling the product incor-
rectly may result in loss of life or serious injury.
Ignoring this symbol and handling the product incor-
rectly may result in personal injury or damage to
property.
WARNING
DANGER
CAUTION

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Table of Contents
1. Foreword ・・・・・・・・・・・・・・・・・・・・・・・・・・ 3
2. Precautions for Handling ・・・・・・・・・・・・・・・・・・・ 3
3. Overview ・・・・・・・・・・・・・・・・・・・・・・・・・・ 4
4. Specifications ・・・・・・・・・・・・・・・・・・・・・・・・ 6
5. Nomenclature ・・・・・・・・・・・・・・・・・・・・・・・・ 7
6. Installation ・・・・・・・・・・・・・・・・・・・・・・・・・ 8
7. Operation ・・・・・・・・・・・・・・・・・・・・・・・・・ 11
8. Troubleshooting ・・・・・・・・・・・・・・・・・・・・・・・ 23
9. Warranty ・・・・・・・・・・・・・・・・・・・・・・・・・・ 25

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1. Foreword
Thank you for your selection of the mass flow meter MODEL3810DSⅡ. Prior to using your new
equipment, please read this manual thoroughly to ensure it is used in a safe manner.
2. Precautions for Handling
2-1 Checking the ID plate
All the products have been assembled and adjusted one by one and the gas to use, flow rate and
other data are shown on the ID plate attached to the back of the case. Check the ID plate and
make sure these specifications meet your order.
Check items:
①Model
②Flow rate
SCCM = ml/min at 0℃:1 atm (101.3kPa)
SLM = l/min at 0℃:1 atm (101.3kPa)
NCCM = ml/min at 20℃:1 atm (101.3kPa)
NLM = l/min at 20℃:1 atm (101.3kPa)
＊The normal state for the units of flow rate is as a rule 0℃and 1 atm. However, in order
to meet the customer’s request that the normal state be 20℃and 1 atm, KOFLOC indi-
cates the units of flow rate together with the calibrating temperature and atmosphere.
Ex.: SLM( 0℃, 1 atm)・・・・・・ 0℃and 1 atm to be normal state
SLM( 20℃, 1 atm) ・・・・20℃and 1 atm to be normal state
③Name of fluid
④Presence of the serial No.
2-2 Precautions for transportation
Wherever possible, transport the product to the installation site in the condition received from
KOFLOC in order to prevent damage due to accidents during transportation.
2-3 Precautions for storage
If the product is not put in use for a long time after it was received, unexpected troubles may oc-
cur. When it is expected that the product will be kept in storage for a long time, take the following
precautions:
1) Store the product in the package in which it was received from KOFLOC, wherever possible.
2) Store the product in a place described below:
①A place free of rain and water.
②A place free of vibration and impact.
③A place of normal temperature and normal humidity (around 25℃, 65%).
④A place free of dust.
⑤A place free of corrosive gases.
⑥A place free of a strong electric/magnetic field.

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3) To store the product that has been used, purge with clean air or N2so that measuring gas
will not remain in the flow meter.
Cover the inlet and outlet of measuring gas with caps to prevent intrusion of dust and dirt.
3. Overview
MODEL 3810DSⅡis a mass flow meter equipped with an indicator that employs a proven flow
sensor. It has a function to indicate the integrated flow rate, in addition to the existing instantane-
ous flow rate indication.
As with the conventional model 3810DS, a type with a flow sensor and precision needle valve in
one unit is also available.
・The employment of a precision needle valve enables minute flow control and monitoring.
・Flow monitoring alarm 2 points output. (2 points each for any flow rate value: 1 point only when
integrating pulse output is used.)
・Instantaneous flow rate : analog output. (Voltage 1 –5 V or current 4 –20 mA), integrated flow
rate : pulse output installed.
・Compact and light weight.
・The flow meter is equipped with an indicator and can start measurement of flow rates as soon
as a 24 VDC power supply is connected.
(“Mass flow”enables direct reading of flow rates without a need of troublesome flow rate com-
pensation calculation by temperature/pressure.)
3-1 Principle of operation
The flow detect sensor is designed with heating wire (resistance wire) wound around the outside
of 2 point of the metallic capillary.
When a gas flows through the capillary, it takes heat from the resistance wire in the upstream
to cause its temperature to drop. The heat in the upstream is transferred to the downstream, caus-
ing a deviation in the resistance value. A difference in temperature in these two places is propor-
tional to the flow rate of gas. The difference in the resistance value caused by this temperature dif-
ference is converted to an electric signal to indicate a flow rate.
The installation of a bypass capillary to bypass the flow to the sensor pipe restricts the flow of
gas to the sensor to enable the use in a wide range of flow rates.
The detected flow rate is indicated on the indicator and output as an electric signal from the ter-
minals.
CAUTION: Do not use the meter for measurement and various control by use of measured values
by allowing a flow exceeding the full scale (specification). The flow exceeding the full scale
will cause a saturated inversion phenomenon, which may cause a problem in measuring
flow rates.
＊Saturated inversion phenomenon
When an amount exceeding the full scale is allowed to flow to a heat sensor, the amount of
preheating of the sensor heater will be exceeded at a certain flow point, causing a saturated
phenomenon. If a much larger amount is let flow further, an inversion phenomenon occurs
that the flow rate indicated value decreases in inverse proportion to the flow rate.

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飽和反転現象
CAUTION: When a gas not listed in the specifications is let flow or when the thermal mass flow
meter calibrated with one type of gas is used for other gases, the indicated value and the
actual flow rate are different.
For example, if He is let flow to the meter that has been calibrated with N2, the actual flow
rate is larger than the indicated flow rate by approx. 1.43 times.
Please keep this fact in mind and when you let a gas not listed in the specificaitons flow,
please contact us for conversin factor values used for converting indicated flow rates into
actual flow rates.
流量
表示流量
表示上限
反転現象
フルスケール
流量
0
Indicated
flow rate
Indication
upper limit
Full scale flow rate
Flow rate
Inversion phenomenon
Saturated inversion phenomenon

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4. Specifications
3810DSⅡ－0 / V－I / V
Flow range (N2 conversion)
F.S.10SCCM －20SLM
F.S.30－100SLM
Accuracy
±2％F.S. (25℃normal)
±3％F.S. (25℃normal)
Operating temperature
0－50℃
Temp. change effect
±0.20%F.S. / ℃（15－35℃）
Operating humidity
30－80％RH (no condensation)
Operating pressure range＊1
0.0－0.5MPa（G）
Pressure resistance
1.0MPa（G）
Joint
Rc1/4
Materials of parts in con-
tact with gases
SUS303、SUS304、SUS316L、Teflon, Viton
Required power
24 VDC（±5%）
Max. power consumption
Approx. 3VA
Data backup
Holding of set data, etc.
Flow rate indication
Indicator
4-digit 7-segment LED (Zero blanking)
Instantaneous flow
rate indication up-
date cycle
0.4s、0.8s (selectable)
Low cut function
Indication of a value below 1% F.S. settable to “0”
Indication range
When the low cut function is not used; from approx. -10% F.S.
to approx. 110％F.S. (indication limiter flashing)
Integrated flow rate
indication range ＊2
8-digit indication (Max. 99,999,999, indication limiter flash-
ing)
The units of indication are the same as the instantaneous flow rate.
External output
Number of outputs
2 points (Each output selected and set to instantaneous flow
rate upper limit, lower limit, upper/lower limit or integrated
flow rate reach. 1 point may be integrating pulse.)
Inversion of outputs is possible.
Output judgment
Output after comparison judgment held for 1.6 sec.
Output timing
Synchronized with indication sampling
Output method
NPN open collector (Max. rating: 30 VDC, 50 mA)
Integrating pulse out-
put rate
10％F.S. / pulse, pulse width: approx. 50ms
Alarm indication
LED lamps (AL1, AL2) turning on
Analog output ＊3
4 –20mA (250Ωor below) or 1 –5V (10kΩor over)
Others
Zero offset function, CE compliance
Weight
Approx. 400g
Needle valve part (3810DSⅡ－V－I / V)
Flow adjust knob turning
Approx. 12 turns
Materials of parts in contact
with gases
SUS303、SUS316、Teflon, Viton
＊1．The operating pressure does not guarantee the pressure gives the flow rate in the
specifications.
＊2．The indication of integrated flow rates is for reference. It is held when the power is
turned off.
＊3．The analog output has been set to your order.

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5. Nomenclature
Wiring
Product side connector: Hirose Electric HR10A‐7R‐6P
Matching connector: Hirose Electric HR10A‐7P‐6S（AWG30 –26）
Signal table
Pin No.
Signal Name
Description
1
+24V
Power input +24 VDC
2
P_COM
Power input, analog output COM
3
AL1
Alarm output 1 or integrating pulse
output
4
AL2
Alarm output 2
5
AL_COM
Alarm output COM
6
A_OUT
Analog output
Cover
Needle valve (3810DSⅡ-V only)
Body
Piping connection
Connector
Indicator panel

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6. Installation
6-1 Installation place
①This equipment is designed for indoor use.
Never install the equipment in a place where it is likely to be wetted by water or rain. The
quipment may fail. Install the quipment in a place where sufficient ventilation is provided
and changes in temperature and humidity are minimal.
②Install the equipment in a place free of vibration and impact.
③Do not use the equipment under direct sunlight or at high temperature/humidity.
④Install the equipment in a place free of dust.
⑤Install the equipment in a place free of corrosive gases.
⑥Install the equipment in a place free of a strong electric/magnetic field.
⑦After installation, be sure to conduct leak test on piping.
⑧Install the equipment in a place where the operating temperature is 15 to 35℃.
The use of the equipment in a condition deviating from the conditions described in the
specifications is a cause of failure.
When installing the mass flow meter, noise generating sources in the
vicinity of installation, environment filled with moisture and dust and
very hot, corrosive gas ambient must be avoided. Such conditions are
causes of serious failure.
6-2 Installation method
Install the meter using the threaded holes (M3) on the bottom of the body.
Bottom of body (3810DSⅡ－0)
6-3 Installation posture
The basic installation posture is horizontal. If the meter is to be installed vertically, conduct
sufficient warmup run and zero point adjustment.
Determine the inlet and outlet of gas piping as indicated by the arrows on the indicator panel.
CAUTION

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6-4 Piping and filter
When using commercially available pipes and joints for piping, be sure that they have been
cleaned completely or they are clean.
Install a line filter (finer than 100 m) on the inlet side of gas. A standard filter has been
installed on the inlet side of the meter, but if a large amount of impurities sticks to it, gas will
not flow smoothly, disabling accurate measurement and control.
In particular, when using air from a compressor or blower, a large amout of oil mist and
water droplets may be produced. Install an oil filter and water-removing filter before the
meter.
Never wash the piping system after the mass flow meter has been in-
stalled. Such a practice may cause serious failure.
Check to see if the connections of gas piping are not leaking. If such a
check is omitted and unsafe gas is used, serious accidents may occur.
Give careful consideration to piping after the meter also to ensure that
water droplets condensed within the piping will not enter the equipment
due to counterflow.
CAUTION
CAUTION
WARNING

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6-5 Wiring
Connect wiring referring to the diagram below.
Use connectors dedicated for connection. Firmly insert connectors to the designated places.
Wiring
Product side connector: Hirose Electric HR10A‐7R‐6P
Matching connector: Hirose Electric HR10A‐7P‐6S（AWG30 –26）
Signal table
Pin No.
Signal Name
Description
1
+24V
Power input +24 VDC
2
P_COM
Power input, analog output COM
3
AL1
Alarm output 1 or integrating pulse output
4
AL2
Alarm output 2
5
AL_COM
Alarm output COM
6
A_OUT
Analog output
Load
Load
Load
max.

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7. Operation
7-1 Warming-up
Warm up the equipment at least 30 minutes after it was powered on.
7-2 Operating procedure
・Indicator panel
・Indicator
Indicates an instantaneous flow rate or integrated flow rate. When lower 4 digits of the inte-
grated flow rate are indicated, the decimal point is shown.
The decimal point is not shown for upper 4 digits.
During setting, the mode No. or set value is shown here.
・Alarm lamps
When the alarm output 1 is on, “AL1”lights and when the alarm output 2 is on, “AL2”lights.
・Flow rate indicating lamps
When an instantaneous flow rate is indicated, “IF”lights on and when an integrated flow rate
is indicated, “TF”lights on.
・Mode key [M]
Measurement: When this key is pressed and held for approx. 2 seconds, the meter will enter
the setting mode.
Setting: Switches over the modes.
When the key is pressed and held for approx. 2 seconds, the set value will be registered
and the flow rate will be indicated.
CAUTION: If the power is turned off during setting, the set value will not be registered.
・Shift key [＞]
Measurement: Switches over the flow rates to indicate.
Indication is switched over in the order of instantaneous flow rate →integrated flow
rate (upper 4 digits) →integrated flow rate (lower 4 digits) →instantaneous flow
rate.
The integrated flow rate (upper 4 digits) will not be indicated when the integrated
flow rate value has not reached the upper 4 digits.
Setting: Moves the flashing digit to right.
Flow rate indicating lamps
Mode key
Alarm lamps
Indicator
Up key
Shift key

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・Up key [∧]
Measurement: When an instantaneous flow rate is being indicated, pressing and holding this
key for approx. 2 seconds sets up the zero adjustment mode.
When an integrated flow rate is being indicated, pressing and holding this key
for approx. 2 seconds sets up the integrated flow rate reset mode.
Setting: Increments the value of the flashing digit. (0 after 9)
CAUTION: This meter has been adjusted in the flow rate in the factory and adjustment data
has been stored in an F-RAM. Please keep in mind that if several keys on the indicator
panel are pressed and held simultaneously when turning on the power, the indicator
shows the mode where the stored data will be rewritten. When the meter has entered this
mode, turn off the power. If rewrite has not been enabled yet, the data may be recovered.
If the data has been rewritten, it is necessary to correct the data.
7-3 Zero adjustment (Zero offset)
With an instantaneous flow rate being indicated, stop the flow of gas completely. In this state,
press and hold the up key [△] for approx. 2 seconds. Then the indicator will show Zero. Next,
pressing the mode key [M] once shows AJST. When AJST is being shown, pressing the shift
key [＞] causes AJST to flash. When the key is pressed and held for approx. 2 seconds, “0”will
be shown and the zero adjustment will be completed.
(If flickering of a figure near 0 is annoying, select the low cut function. The indication of a fig-
ure below 1% F.S. is cut.)
To reset the zero offset function, while ZEro is being shown, press the mode key [M] twice to
show rSET. Press and hold the shift key [＞] for approx. 2 seconds to reset the zero offset func-
tion.
CAUTION: If the indicated value is largely different from the zero point set in the factory, the
zero adjustment is not possible. In this case, please contact our sales office or the dealer.
Zero offsetting Zero offset resetting
After flashing,
Pressed & held
Pressed & held
Pressed & held
Pressed & held
Pressed twice
zero adjustment reset
After flashing,
zero adjustment complete

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＊1. If the value deviates from zero more than 5% F.S., nothing is shown and the zero adjustment cannot be executed.
Transition of modes when instantaneous flow rate is being indicated
7-4 Flow rate indication
①Switching over flow rates to indicate
Each time the shift key [＞] on the flow rate indicator panel is pressed, indication is switched
over in the order of instantaneous flow rate →integrated flow rate (upper 4 digits) →integrated
flow rate (lower 4 digits). The integrated flow rate (upper 4 digits) will not be indicated, how-
ever, when the integrated flow rate value has not reached the upper 4 digits. When an instanta-
neous flow rate is being indicated, the “IF”LED lights and when an integrated flow rate is being
indicated, the “TF”LED lights.
②Units of flow rate
The units of integrated flow rates are the specification units from which “time”has been re-
moved. When the unit of the instantaneous flow rate in the specification is “SLM”, the unit of
the integrated flow rate is “SL”and when the unit of the instantaneous flow rate is “SCCM”, the
unit of the integrated flow rate is “Scc”.
Switchover of flow rate indication
③Integrated flow rate resetting
Pressed & held
Pressed
& held
Zero adjustment reset executed
(During resetting: LED flashes)
Pressed & held
Zero adjustment executed
(During adjustment: LED flashes)
Upper 4 digits indicated
Integrated flow rate
Upper 4 digits not reached
Integrated flow rate
Upper 4 digits reached
Lower 4 digits indicated
Lower 4 digits indicated

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In the state of integrated flow rate indication setting, press and hold the up key [△] for ap-
prox. 2 seconds. Then the indicator will show Intg. Next, pressing the mode key [M] once shows
rSEt. When rSEt is being shown, pressing and holding the shift key [＞] causes rSEt to flash.
When the key is pressed and held for approx. 2 seconds, the integrated flow rate value will be re-
set.
Integrated flow rate resetting
Transition of modes when integrated flow rate is being indicated
Pressed & held
Pressed & held
After flashing,
integrated flow rate reset
Pressed & held
Pressed & held
Zero adjustment executed
(During adjustment: LED flashes)

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7-5 Parameter setting
When an instantaneous flow rate/integrated flow rate is being indicated, pressing and holding
the mode key [M] for approx. 2 seconds sets the parameter setting mode. Each time the mode key
[M] is pressed, the indication changes in the order of mode No. →set value →mode No. →set
value. To change the set value, change the digits with the shift key [＞] and change the figures
with the up key [△].
After setting a parameter, pressing and holding the mode key [M] for approx. 2 seconds regis-
ters the set value and returns the mode to the flow rate indication mode.
CAUTION: After setting a parameter, if you do not return to the flow rate indication mode by
pressing and holding the mode key [M], the set value will not be registered.
①Default values
Mode No.
Default Value
Set Item
ABCD
A
B
C
D
F－00
ｘ.
ｘ
ｘ
ｘ
Indication of max. value (unchangeable)
P－00
－
0
－
－
Instantaneous flow rate indication update cycle
－
－
0
－
Low cut function selection
－
－
－
0
Integrated flow rate hold selection
P－10
0
AL1 output selection
0
AL1 output inversion selection
0
AL1 instantaneous flow rate alarm output motion selec-
tion
P－11
9
9
9
9
AL1 instantaneous flow rate upper limit preset setting
P－12
0
0
0
0
AL1 instantaneous flow rate lower limit preset setting
P－13
9
9
9
9
AL1 integrated flow rate reach preset setting upper 4 dig-
its
9
9
9
9
AL1 integrated flow rate reach preset setting lower 4 dig-
its
P－20
0
AL2 output selection
0
AL2 output inversion selection
0
AL2 instantaneous flow rate alarm output motion selec-
tion
P－21
9
9
9
9
AL2 instantaneous flow rate upper limit preset setting
P－22
0
0
0
0
AL2 instantaneous flow rate lower limit preset setting
P－23
9
9
9
9
AL2 integrated flow rate reach preset setting upper 4 dig-
its
9
9
9
9
AL2 integrated flow rate reach preset setting lower 4 dig-
its

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Setting mode No. and description of set values
Mode No.
Indication of max. value (Full scale)
F－00
ABCD
1. 000
[Max. value]
The value of the full scale is indicated.
Unchangeable.
Mode No.
Instantaneous flow rate indication update cycle, low cut function, integrated flow
rate value hold setting
P－00
ABCD
000
│││
││└→ Integrated flow rate value hold setting 0: Not used, 1: Used
│└―-→Low cut function selection 0: Not used, 1: Used
└―――→ Instantaneous flow rate indication update cycle 0: 0.4 s, 1: 0.8 s
[Instantaneous flow rate indication update cycle]
Input signals are measured during the period set here and an average value is
calculated. Therefore, the indication is averaged and updated at the set cycle.
[Low cut function selection]
Select either use or nonuse of the low cut function.
Used: Instantaneous flow rates below 1% F.S. are indicated as 0.
Negative values are also indicated as 0.
Not used: Instantaneous flow rates below 1% F.S. are indicated. Negative val-
ues are also indicated.
[Integrated flow rate value hold setting]
Select either use or nonuse of integrated flow rate value hold setting.
Used: The integrated flow rate value is held after the power is turned off.
The integrated flow rate value hold cycle is 1 minute.
Not used: The integrated flow rate value is reset when the power is turned off.

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Mode No.
Alarm output 1 motion function selection and output setting (OUT1)
P－10
ABCD
000
│││
││└→ Alarm output motion function setting
｜｜0: Steady judgment output
｜｜1: Output non-judgment, judgment prohibit time output
｜｜
｜└──→ Output inversion setting
｜0: Normal output 1: Inverted output
│
└────→ Output 1 setting
0: No
1: Instantaneous flow rate upper limit
2: Instantaneous flow rate lower limit
3: Instantaneous flow rate upper/lower limit
4: Integrated flow rate reach
5: Integrating pulse
[Alarm output]
The function works according to results of comparison between the indicated value
and the preset value.
[Output setting]
Set a condition for alarm output. The normal output has been set and then if the alarm
output condition is set, the AL1 LED lights and the alarm output 1 is outputted. The
upper limit, lower limit and upper/lower limit alarms are output when each condi-
tion is met for 1.6 seconds continuously and when each condition is not met for 1.6
seconds continuously, they are reset.
0: No
The alarm mode is not used.
1: Instantaneous flow rate upper limit output
Output when “instantaneous flow rate value ≧P-11 upper limit preset value”.
2: Instantaneous flow rate lower limit output
Output when “instantaneous flow rate value ≦P-12 lower limit preset value”.
3: Instantaneous flow rate upper/lower limit output
Output when “instantaneous flow rate value ≧P-11 upper limit preset value”
or “instantaneous flow rate value ≦P-12 lower limit preset value”.
＊The alarm is constantly output when “P-11 upper limit preset value ≦P-12
lower limit preset value”is set.
4: Integrated flow rate reach
Output when “integrated flow rate value ≧P-13 upper limit preset value”.
5: Integrating pulse
Pulses of approx. 50 ms are output every 10% F.S. of the integrated flow rate
value.

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[Output inversion setting]
Set the output of alarm output 1.
0: Normal
Output by the condition set in [Output setting].
1: Inverted
Reverse motion of the above.
CAUTION: The lighting of the LED on the indicator panel will not be inverted.
[Alarm output motion function]
Select the overall motion of alarm outputs.
0: Steady judgment output
The indicated value and the preset value are always compared and the alarm is
output according to the results.
1: Output non-judgment, judgment prohibit time output
Except for the following case, the indicated value and the preset value are com-
pared and the alarm is output according to the results.
Output non-judgment: When the input voltage is below 1% F.S., the alarm out-
put is not judged.
Judgment prohibit time: The function works after the input voltage exceeds 1%
F.S. and the output judgment is prohibited for 15 seconds.
Alarm output timing chart

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<Output non-judgment, judgment prohibit time output>
[Alarm output judgment prohibit time]: The function works when the flow rate changes from
the state below 1% F.S. (indication 0) to the state above 1% F.S. and for a duration of 15 seconds,
the output judgment is prohibited.
[Alarm output state judgment time]: For a duration of 1.6 seconds after the alarm output ex-
ceeded the set value or returned to within the rage, the alarm output state is judged.
Mode No.
Alarm output 1: Instantaneous flow rate upper limit preset (when instantaneous
flow rate upper limit, upper/lower limit output set)
P－11
ABCD
9999
└――――┘
│
└→ Setting of output 1 preset value: 0000 –9999
＊Output according to results of comparison with a 4-digit value.
<Caution>
Not indicated depending on setting of P-10.
1.6 sec: Alarm output state judgment time
15 sec: Output judgment prohibit time
(Works after output flow rate 1% is
exceeded)
Alarm output
(Upper limit)
Indication 0
(Flow rate out-
put below 1％)
(When power is
turned on)
Alarm output
preset
Indication
Alarm output
(Lower limit)
Output
non-judge
(below 1%)
Output
judge pro-
hibit for
15 sec.
1.6 sec.
(Time)