
page 2 Contents
7Mounting axes......................................................................................................................... 31
7.1 Order of the axes and height compensation with spacers ....................................................31
7.2 Mounting a spacer.................................................................................................................................32
7.2.1 Threads for mounting spacers and axes................................................................................32
7.2.2 Replacing an axis with a spacer.................................................................................................32
7.3 Mounting axes ........................................................................................................................................33
7.3.1 Mounting an x- or y-axis on a spacer .....................................................................................34
7.3.2 Mounting a y-axis on an x-axis.................................................................................................. 35
7.3.3 Mounting a z-axis........................................................................................................................... 36
7.4 Connecting software-controlled axes ............................................................................................ 36
7.5 Mounting a rotating table ..................................................................................................................38
7.5.1 Removing the x-axis (if present)................................................................................................ 38
7.5.2 Mounting a wafer table ST3220/3270.....................................................................................40
7.5.3 Mounting a rotating sample table ST3230/3280................................................................ 41
7.6 Tilting Table PA3220............................................................................................................................. 44
7.6.1 Safety instructions for working with the Tilting Table ...................................................... 44
7.6.2 Weight and dimensions (not mounted)................................................................................. 45
7.6.3 Mounting the tilting table ...........................................................................................................45
7.7 PA3240 internal tilting table ..............................................................................................................47
7.7.1 Overview.............................................................................................................................................47
7.7.2 Note ..................................................................................................................................................... 47
7.7.3 Mounting ...........................................................................................................................................47
7.7.4 Connecting the tilting table........................................................................................................49
7.7.5 Centring the tilting table in the optical axis..........................................................................49
7.7.6 Levelling the tilting table .............................................................................................................50
7.7.7 Adjusting the height of the sample stage.............................................................................51
7.7.8 Fitting the holding clamps...........................................................................................................52
7.7.9 Fitting spacers for the protective glass...................................................................................52
7.7.10 Mounting the ST13 miniature sample table (optional) ....................................................53
8Manual single-dosing unit DS3200/3201 .................................................................... 55
8.1 Fitting a disposable syringe ...............................................................................................................55
8.2 Assembling the dosing unit to the DSA100.................................................................................56
8.3 Adjusting the dosing unit ...................................................................................................................57
9Software-controlled single-Dosing unit DS3210...................................................... 58
9.1 Mounting the dosing unit...................................................................................................................58
9.2 Fitting the syringe..................................................................................................................................59
9.3 Adjusting the dosing unit ...................................................................................................................60