LEYBOLD IONIVAC ITR 90 User manual

IONIVAC
ITR 90
ITR 90 P
Instruction Sheet KA09420_002_ CO
Incl. EU Declaration of Conformity
Part Numbers
120 90
120
91
120 92
120 94
230 030
230
031
Product Identification
In all communications with Leybold, please specify the
information given on the product nameplate. For convenient
reference transfer this information into the diagram below.
Leybold GmbH, 0-50968 KOln
Type:
No:
F-No:
!(E~I
v w
Validity
This document applies to products with the following part
numbers:
ITR
90 Without display:
120
90 (DN 25 ISO-KF)
120
92 (DN 40 CF-R)
ITR
90 With display
120
91 (DN 25 ISO-KF)
120 94
(DN 40 CF-R)
\TR 90 P (with Profibus intertace and switching functions)
230 030 (ON 25 /SO-KF)
230 031 (ON 40 CF-R)
The part number (No) can be taken from the product name
plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to the gauge with part number
120 90. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended use
The gauges ITR 90 and ITR 90 P have been designed for
vacuum measurement gases and gas mixtures in a pressure
range 5x10·
10
... 1000 mbar.
They must not be used for measuring flammable or
combustible gases in mixtures containing oxidants (e.g.
atmospheric oxygen) within the explosion range.
The gauges can be operated
in connection with the
COMBIV AC® IT23 or with another evaluation unit.
Functional Principle
Over the whole measurement range, the Hot Ion Cambi
Gauges have a continuous characteristic curve and its
measuring signal is output as logarithm of the pressure.
The gauge functions with a Bayard Alpert hot cathode
ionization measurement system (for p < 2.0x10·2 mbar) and a
Pirani measurement system (for p > 5.5x
10-
3 mbar).
In the
overlapping pressure range of 2.0x10-2
... 5.5x10·3 mbar a
mixed signal
of the two measurement systems is output. The
hot cathode is switched on by the Pirani measurement
system only below the switching threshold of 2.4x10·2 mbar
(to prevent filament burn-out). It
is switched off when the
pressure exceeds 3.2x
10-
2 mbar.
Trademark
COMBIVAC® Leybold G,bH
Caution
Information on correct handling or use. Disregard can
to malfunctions or minor equipment damage.
Personnel Qualifications
All work described in this document may only be carried
out by persons who have suitable technical training and
the necessary experience or who have been instructed by
end-user of the product.
General Safety Instructions
• Adhere to the applicable regulations and take the ne-
cessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the
process media due to the heat generated by the product.
• Adhere to the applicable regulations and take the ne-
cessary precautions for all work you are going to do and
consider the safety instructions
in this document.
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
Leybold assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information
in this document
• use the product
in a non-conforming manner
• make any kind
of changes (modifications, alterations etc.)
to the product
• use the product with accessories not listed
in the product
documentation.
The end-user assumes the responsibility
in conjunction with
the process media used.
Transmitter failures due to contamination or wear and tear as
well as expendable parts (e.g. filaments) are not covered by
the warranty.
nical Data
In some points, the technical data of ITR 90 P differ
from those of ITR
90, which are given below
(-+ "Technical Data" in m[1] and [2]).
Display range
(air, 02, CO, N2)
Measurement range
(air, 02, CO, N2)
Accuracy
Repeatability
Emission
Switching on threshold
Switching off threshold
Emission current
p
:5 7.2x10-6 mbar
7.2x10-6 mbar < p <
3.2x10·2 mbar
Degas
5x10·10 ... 1000 mbar
continuous
1x10-8 ... 10-
2 mbar
continuous
15% of reading
(after 5 min. stabilization)
5% of reading
after 5 min.
stabilizationL_
2.4x10·2 mbar
3.2x10-2 mbar
5 mA
25 µA
7.2x10·6 mbar
Current
(p < 7.2x10_,, mbar) =16 mA I =4.0 W
Control input signal OV / 24
V, PLC level,
high active
Duration <3 min, followed by
automatic stop
In degas mode, the ITR 90 keeps supplying measurement
values the tolerances of which can be higher than during
normal operation.
---------------
Output signal
(measuring signal)
Display range 0 ...
10V
0.774V ... 10V
(5x10·10 mbar ... 1000 mbar)
Relationship voltage-pressure logarithmic,
Error signal
Minimum loaded impedance
Gauge identification
0. 75 VI decade
<0.3
VI 0.5 V
10 kQ
--··-··-----··-··-····------
42 kQ between Pin 10 and
-----·---------- _. ___ Pin 5 (9!Jlll,e cable)_ __ .
RS232C interface
Baud rate
Data format
Signal level
Connector
9600 baud
binary data set
8 data bits
one stop-bit
no parity-bit
no handshake
=±8 V
---? Power connection
. Further information on the _RS232C interface -+ m J11
Display
Panel
Dimensions
Measurement units
LCD matrix, 32x16 pixels,
with background illumination
16.0 mm x 11.2 mm
mbar (default),
Torr,
Pa
Ch~g the measurement unit-+ mJ:cl _____ _
Supply
The gauge may only be connected to supply and
evaluation units that conform to the
requirements
of a grounded protective extra-low
voltage (PELV). The connection to the gauge
has to be fused
11
.
Voltage at gauge
Power consumption
Standard
Degas
Emissions start (200 ms)
Power consumption
~use nece~~a_ry~---··--·-
24 voe (20 ... 28 VDC)
(:5ripple 2 Vpp)
21
:50.5A
:50.8 A
:51.4 A
:516W
S:1.25 AT
11
Leybold controllers fulfill these requirements.
2) The minimum voltage
of the power supply must be increased
proportionally to the length of the measuring cable.

Electrical connection
Sensor cable
For analog values only
without degas-function
For analog values
with degas-function
All functions
incl. RS232C interface
Cable length (24 VDC)
For operation with RS232C
interface
Materials
on the vacuum
side
Housing, supports,
screens
Feedthrough
Isolator
Cathode
Cathode holder
Connection, D-Sub, 15-pin
4-pin plus screening
5-pin plus screening
7-pin plus screening
:535 m (4/5/?x0.25 mm2)
:550 m (4/5/7x0.34 mm')
:5100 m (4/5/7x1 .0 mm')
:530m
stainless steel
NiFe nickel plated
glass
lr,Y203
Mo
Pirani element W, Cu
Internal volume
120 90, 120
91, 230030 z24 cm
3
____ 12092,_12094, 230031 z34cm
3
__________________ _
Admissible temperatures
Storage
Operation
Bake out
Relative humidity
Year's mean
During 60 days
Use
.-1:.l'Qe of1:irotection
Dimensions
4-40UNC 28
Weight
120 90
120 91
230 030
-20 ... +70 °C
0 .. +50 °C
150 °C
(without electronics unit)
:565% (no condensation)
585% (no condensation)
indoors only atitude
up to
2000 m
IP30, ____ _
4-40UNC 28
12090, 12091 285g
12092, 12094 550g
230 030 430 g
--- 230 031 ________ 695 g -------- --------- _
Measuring signal vs. pressure
Pressure p [mbar)
4.0 5,0 6.0 7.0
Measuring signal U[V]
[VJ
[VJ
[VJ
p =i Q(U-7.75)/0.75+c
[mbar]
[Pa]
[Torr]
0
2
-0.125
where p
u
c
pressure
measuring signal
constant (pressure unit dependent)
Gas type dependence
For gases other than air, the pressure in the indication range
p <
10·
3 mbar can
be determined by a simple conversion:
Pett= K x pressure indicated
Gas type CalibrationGas ] Calibration
_
~y_pe --f-- factor C
He i 5.9
Ne i 4.1
Kr , 0.5
Ar 0.8
air, 02,
CO, N2
H,
Xe
1.0
2.4
0.4
~t,
!:Vacuum Connection
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum sys-
tem
is pressurized. Use the type clamps which
are suited to overpressure.
DANGER: protective ground
Incorrectly grounded products can
be extremely
hazardous
in the event of a fault.
The gauge must
be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements
of a protective
connection according to
EN 61010:
• CF connection fulfill this requirement
• For gauges with a
KF flange, use a conduc-
tive metallic clamping ring
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
& Caution
Caution: dirt sensitive area
Touching the product or parts thereof with one's
bare hands increases the desorption rate.
Always wear clean, lint-free gloves and use cle-
an tools when working in this area.
ll3J= The gauge may be mounted in any orientation. To
keep condensates and particles from getting into the
measuring chamber preferably choose a horizontal
to upright position and possibly use a seal with a
centering ring and filter.
The gauge is supplied with a built
in grid. For potentially con-
taminating applications and to protect the electrodes against
light and fast particles, installation of the optional baffle is
recommended(---) m[1]).
Remove the protective
lid and install the product at the
vacuum system.
Seal with centering ring
Keep the lid.
Seal with centering
ring and filter
Power connection
II:]f' The following information on the electrical con-
nection
as well as the wiring diagram applies to
ITR 90 only(---) W [1] and [2] for details on the
electrical connection and additional functions
of
ITR 90 P).
IIff Make sure the vacuum connection is properly made
(---) "Vacuum Connection").
0 If no connection cable is available, make one according
to the following diagram.
ITR90
-· I_____ _
TxD
RxD
Measuring
sign
a!
~4Di;
i-1 i v +
12 .I -
Degas 7
)1--i'-':-----
!i
8):j
5 ..
10 ~Identification
15
L------·- - ------------·J
Electrical connection
Pin 2 Signal output (measuring signal)
Pin 5 Supply common, GND
Pin 7 Degas
on, active high
Pin 8 Supply
Pin 10 Gauge identification
Pin 12 Signal common, GND
Pin 13 RS232C, TxD
Pin 14 RS232C, RxD
Pin 15 Shielding, housing, GND
Pins
1, 3, 4, 6, 9 and 11 are
not connected internally.
0 ...
+10V
+24 voe
+24 voe
gfl 1
15-M 8
D-Sub, 15 pins
female,
soldering side
11111111111111111111111111111111111111111111111111111111111111111111111111111111
kao9420.002.c0 (2016-10)
Original: German KA09420_001_CO (2016-10)

f} Connect the sensor cable to the gauge.
Secure the cable socket with the lock screws.
O Connect the sensor cable to the controller.
hen the voltage is supplied, the measuring signal is avail-
able between pins 2 and 12. (Relationship between measur-
ing signal and
pressure-> "Technical Data").
ITR 90 P can also be operated via the corresponding fieldbus
interface(-> m [1] and [2] for further details and functions).
Allow for a stabilizing time of~10 minutes. Once the gauge
has been switched on, permanently leave it
on irrespective of
the pressure.
Gas type dependence
The measurement value is gas dependent. The display ap-
plies to dry air, 02, CO, and N2. For other gases, it has to be
converted(-> "Technical data").
Adjusting the gauge
~ The adjustment of ITR 90 P (-> ru [1] and [2]) is
slightly different from the procedure for ITR 90,
which is described below.
The gauge is factory calibrated. If used under different cli-
matic conditions or
in a different position, through ageing or
contamination and after exchanging the sensor, the charac-
teristic curve can be offset and readjustment can become
necessary. Only the Pirani element can be adjusted and only
at atmosphere.
Readjustment becomes necessary if
• at atmosphere the output voltage
is <10 V or the display
reading is <atmosphere
• when ventilating the vacuum system, the output voltage
reaches 10 V before the measured pressure has reached
atmosphere.
0 Ifyou are using a seal with centering ring and filter,
check that they are clean or replace them if necessary.
Activate the gauge.
Operate the gauge for 10 minutes at atmos-
pheric pressure. If the gauge was operated
within loni range, a cooling-down time of ap-
prox.
30 minutes is to be expected (gauge
temperature = environmental temperature).
Adjusting the gauge
ITR
90 Without display
12090 12091
ITR 90 With display
120 92 120 94
Insert a pin (~01.3x50mm) through the opening
marked <FULL SCALE> and push the button inside for
at least 5 seconds.
Adjustment proceeds automatically
-1,j ;'::I;"';:'~'-: -1
. .i.1 . ..1, . ..1, . ..= 1·
• !'!
iT!l:::::r r!
Adjustment terminated
,------
-----~
Display
(Part numbers 120 91 and 120 94)
,-
Measurement 110
reading - ----i- i
I .:.
Measurement 1 1 ,
unit --- -~ :
11
PI !a: :•: p
Function
display
Error
display
L~11•n.111,111a ___ _J
(none)
E
[,
[I
I~
i
~-~I
Pirani operation
Emission 25
µA
Emission 5 mA
Degas
I
I
I
1000 mbar adjustment (Pirani)
I .
111111 i
MP.
---=---=--- -=-_/ __J
~~: no error
(green background illumination)
:::i Pirani sensor error
(red background illumination)
--------;
loni sensor error
(red background illumination)
=·:i.· I
0
•• u •
I I I 11 I HII I
I I I II II I I
11111 1111 1111 I I Ull 111
Internal data connection failure
(red background illumination)
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution: vacuum component
Dirt and damages impair the function
of the vac-
uum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
ffi Caution
Caution: dirt sensitive area
Touching the product or parts thereof with one's
bare hands increases the desorption rate.
Always wear clean, lint-free gloves and use cle-
an tools when working in this area.
Vent the vacuum system.
Turn the gauge off.
Loose the lock screws and unplug the sensor cable
(if you are using ITR
90 P unfasten and unplug the
interface cable
too(-> m [1] and [2]).
O Remove the gauge from the vacuum system.

tenance, Repair
~In case of severe contamination or a malfunction, the sensor
can be replaced(--; W [1]).
~ Transmitter failures due to contamination or wear
and tear
as well as expendable parts (e.g. filaments)
are not covered by the warranty.
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detri-
mental to health and environment.
Products returned to Leybold should preferably
be free of harmful substances. Adhere to the
forwarding regulations
of all involved countries
and forwarding companies and enclose a duly
completed declaration
of contamination ·i.
'I Form under www.ileybold.com
Products that are not clearly declared
as "free of harmful
substances" are decontaminated at the expense of the
customer.
Products not accompanied by a duly completed declaration
of contamination are returned to the sender at his own
expense.
Contaminated parts can
be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere.to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
WARNING: substances detrimental to the
environment
Products or parts thereof (mechanical and elec-
tric components, operating fluids etc.) can
be
detrimental to the environment.
Dispose
of such substances in accordance with
the relevant local regulations.
Separating the components
After disassembling the product, separate its components
according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must
be decontaminated in accord-
ance with the relevant national regulations, separated
according to their materials, and recycled.
• Other components
Such components must be separated according to their
materials and recycled.
Further Information
rn [1] www.leybold.com
Operating Manual
IONIVAC ITR 90, ITR
90 P
GA09420
_002
Leybold GmbH, D-50968 Kain
Q;l [2] www.leybold.com
Instruction Sheet
IONIVAC ITR 90 P
KA09421 002
Leybold GmbH, D-50968 Kain
W [3] www.leybold.com
Interface Manual
IONIVAC
SB09421 002
Leybold GmbH, D-50968 Kain
EU Declaration of Conformity
The manufacturer:
(Translation of original Declaration of Conformity)
Leybold GmbH
Bonner Strasse 498
D-50968 Kain
Germany
herewith declares that the products specified and listed below which we have placed
on the market, comply
with the applicable EU Directives. This declaration becomes invalid if modifications are made to the product
without agreement
of Leybold GmbH.
Product designation:
Type designation:
ITR90,
ITR90 P
ITR 200 S
ITR 200 SP
ITR200 SD
IONIVAC Transmitter
Part numbers:
12090, 12091, 12092, 12094
230030, 230031
230250,230251, 230254, 230255,230258
230252,230256
230253,230257
The products complies to the following Directives:
Electromagnetic Compatibility (2014/30/EU)
RoHS-Directive (2011/65/EU)
The following harmonized standards have been applied:
EN 61010-1 :2010
EN 61326-1:2013
Documentation officer:
Cologne, October 24, 2016
ppa.
Head
of Product Lines
Safety requirements for electrical equipment for measurement,
control, and laboratory use -Part 1: General requirements
Electrical equipment for measurement, control and laboratory use -
EMC requirements -Part 1: General requirements
Emissions: Group 1, Class B
Immunity: Industrial electromagnetic environment
Herbert Etges
T: [phone]
F: [phone]
[email protected]
Cologne, October 24, 2016
ppa.
Dr. Monika Mat!ern-Klosson
Head of Quality & Business Process Management
Headquarter
Leybold GmbH
Bonner Strasse 498
D-50968 Cologne
Tel.: [phone]
Fax: [phone]
[email protected]
www.leybold.com