LEYBOLD LEYSPEC view Series User manual

LEYSPEC Residual
Gas Analyzer (RGA)
Hardware Manual 300781172_002_C0
Part Numbers
220010V01
220011V01
220012V01
220013V01
220020V01
220021V01

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Contents
Page
0 Before using this instrument 5
0.1 Safety symbols 5
0.2 Safety precautions 5
1 Introduction 11
1.1 Compliance statements 11
2 Specifications and configurations 12
2.1 Technical data and specifications 12
2.2 Standard configuration 14
3 Buttons and connections 17
3.1 Front panel buttons and displays 17
3.2 Rear panel 18
3.3 EXT-I/O connector 19
3.4 DIP switch 20
4 Installation 22
4.1 Preparation 22
4.2 Installation 22
5 Turning on (supplying power) 28
6 Operation 29
6.1 Measurement with software (remote) 29
6.2 Measurement with the sensor unit (Local mode) 30
7 Front panel operation 31
7.1 Operating and error states 31
7.2 If pressure is lower than measurement range 32
7.3 If filament fault has occurred 32
7.4 If RF fault has occurred 33
7.5 If secondary electron multiplier (SEM) fault has occurred 33
7.6 If interlock signal is input and total pressure interlock in on 33
8 External inputs and outputs (I/O) 35
8.1 Pressure and error outputs 35
8.2 Interlock input 35
8.3 Analogue input 36
9 Cautions in operation 37
9.1 Operating pressure range 37
9.2 Degassing 37
9.3 Secondary electron multiplier (SEM) tube 37
9.4 Baking 39
9.5 Calibration 40
9.6 Converting to partial pressure 42
9.7 Storage 43
10 Options 44
10.1 AC adaptor 44
10.2 USB 3.0 wired LAN adaptor 47
10.3 Switching hub 47
11 Maintenance 51
11.1 Life expectancy of the ion source 51

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Contents
Page
11.2 Replace consumable components 51
11.3 Calibrate 57
11.4 Replacing the secondary electron multiplier (SEM) 71
11.5 Consumable parts list 71
11.6 List of Materials 72
12 Troubleshooting 75
13 Appendix 78
13.1 Theory of operation 78
13.2 Principles of operation 78
13.3 Handling of quadrupole spectrometer 81
13.4 Interpretation of measurement value 81
13.5 Peaks of major residual gases 83
13.6 Setting the IP address of the sensor unit 84
13.7 Set up the RGA PC network 86
14 Return the equipment or components for service 91

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Before using this instrument
0 Before using this instrument
Upon receipt of this product, make sure that the model is the same as you ordered
and there is no damage during shipment.
0.1 Safety symbols
Important safety information is highlighted as WARNING and CAUTION instructions;
these instructions must be obeyed.
The use of Warnings and Cautions is defined below.
0.2 Safety precautions
Before using the Residual Gas Analyzer, read this manual and the following safety
precautions. Leybold is not liable for any accidents, damages or injuries caused by
negligence of these safety precautions.
WARNING:
Read this instruction manual before installing, operating, inspecting, or servicing
this product to familiarize yourself with safety precautions, specifications and
operations.
CAUTION:
No part of this manual shall be copied for a third party without consent by Leybold
in writing.
WARNING:
Warnings are given where failure to observe the instruction could result in injury or
death to people. The actual symbol shown varies according to the hazard.
CAUTION:
Cautions are given where failure to obey the instruction could result in damage to
the equipment, associated equipment or process.
NOTICE:
Emphasizes additional application information and other useful information
provided within these operating instructions.

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Before using this instrument
0.2.1 Analyzer tube and sensor unit
WARNING:
Risk of burns. Read this manual before replacing the ion source of the analyzer
tube and the secondary electron multiplier (SEM) tube. Before replacement,
make sure that the filament is turned off and the ion source has cooled down
because the ion source is very hot immediately after use.
WARNING:
If the analyzer tube or its components have been used in an environment that
can be hazardous to the human health, dispose of them using an accredited
disposal service.
WARNING:
Risk of fire or explosion. The analyzer tube contains a hot cathode (about 1400
°C). If the gas to be introduced into the analyzer tube is combustible or
inflammable, check its limit density and the amount of gas before use.
WARNING:
Risk of burns. The surroundings of the ion source are hot during operation
because of the hot cathode element. You can be burned if you touch immediately
after turning it off. Allow the heaters and pipes to cool to a safe temperature. Do
not touch the intermediate pipe during operation or immediately after shut-down
because it can be heated to a high temperature by the hot cathode.
WARNING:
Do not disassemble the analyzer tube, sensor unit and cable.
WARNING:
Do not modify the analyzer tube, sensor unit or cable. If modified, any operation
and performance are not guaranteed. It could also cause fire or electric shock.
WARNING:
Connect the product to A-class grounding to prevent electrical leakage.
WARNING:
For safety reason, do not touch the metal parts of a terminal, which could be
energized with a voltage. Touching the metal parts could cause electric shock.

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Before using this instrument
WARNING:
Before turning on power, make sure that the operating voltage and supply
voltage are the same. If incorrect power is applied, damage or fire could result.
WARNING:
Whenever replacing a fuse, turn off the power. If a fuse is replaced with power
turned on, you can receive an electric shock.
WARNING:
Risk of fire. The specified fuses protect this equipment against fire. Only use the
specified fuses and never short circuit the fuse holder.
WARNING:
If the product is damaged, turn off power immediately. Continued use can result in
fire or electric shock.
WARNING:
If the product is overheated or produces smoke or an unusual smell, turn off the
power immediately. Continued use can result in fire or electric shock.
WARNING:
Do not use this product in a place where it can be splashed with water. If it is
splashed, failure, electrical leakage or fire could result.
WARNING:
If the unit malfunctions, the pressure output may be incorrect. If such a failure could
cause injury to people or damage equipment, install a suitable control system to
indicate the failure and, if necessary, to close down the process system.
WARNING:
When using an EXT I/O connector, make sure that there is no error in the wiring. If
you use this product with incorrect wiring the product can be damaged.
WARNING:
Before you switch on the power, make sure that the sensor unit and analyzer tube
are correctly connected. If power is turned on without connecting the analyzer
tube, components could be damaged.

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Before using this instrument
CAUTION:
There is a discharge fan at the top and a blow fan on the side (opposite the LED
display) to cool the sensor unit interior. Provide a space of 100 mm or more on all
sides. If the air vent is blocked, heat will build up in the unit which could be a cause
of failure.
CAUTION:
Keep the product free from vibration or impact. It could damage the product.
CAUTION:
Aluminium electrolytic capacitors are used for the electric circuit in the sensor unit.
Generally, the life expectancy of the aluminium electrolytic capacity is limited and
the higher the surrounding temperature, the shorter the life. We recommend that
you replace the aluminium electrolytic capacitors once every three years or during
repair and overhaul to prevent this product from being damaged.
CAUTION:
If a foreign object like a metal or combustible object is admitted into the sensor
unit, you must remove it. Continuing to use the product with a foreign object inside
can cause it to fail.
CAUTION:
Use this product within the scope of specifications. Use outside the scope of this
manual will void the warranty.
CAUTION:
Items in the consumable parts list are not covered under the warranty.
CAUTION:
Risk of damage. Sensitive equipment. Do not allow any shock impacts to this
product.
CAUTION:
When returning the product, repack it as originally shipped from the factory. If it is
shipped without packing, it could be damaged.
WARNING:
When disposing of this product, dispose of it according to your local government
regulations. If the analyzer tube or its parts were used in an environment that can
affect the human health or the environment, dispose of them through an approved
method.

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Before using this instrument
14.2.2 For AC adaptor
CAUTION:
Risk of filament burnout or unknown states. If the PC software crashes, switch off
the sensor unit and restart the software immediately to avoid leaving the analyzer
tube in an unknown state.
CAUTION:
Keep the product free from vibration or impact from its surrounding. It could
damage the product.
CAUTION:
If there is the isolation valve for this product, turn off the filament and stop
measurement. If the filament is kept on in vacuum for an extended time, the ion
source and electrode in the analyzer tube could be contaminated or insulation
failure could occur.
WARNING:
Risk of electric shock. When installing and removing this product or its parts, make
sure the power to the sensor unit is off. Contact with a terminal when power is on
could cause electric shock. The secondary electron multiplier (SEM) terminal is
energized with a voltage of -0.5 kV to -3 kV when the SEM is turned on.
WARNING:
Do not disassemble the AC adaptor.
WARNING:
Do not modify the AC adaptor. If modified, any operation and performance are not
guaranteed. It could be a cause of fire or electric shock.
WARNING:
Connect the product to A-class grounding to prevent electrical leakage.
WARNING:
Before turning on power, make sure that the operating voltage and supply voltage
are the same. If incorrect power is applied, damage or fire could result.

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Before using this instrument
WARNING:
Use a correctly rated plug to connect to the mains power. Incorrect usage could
lead to damage or fire.
WARNING:
If the AC adaptor fails, immediately turn off the power. Otherwise, fire or electric
shock can result.
WARNING:
If the AC adaptor is overheated, gives out smoke or an unusual smell, immediately
turn off the power. Otherwise, fire or electric shock could result if it is kept using.
WARNING:
Do not use the AC adaptor in a place where it may be splashed with water. If the
adaptor is splashed with water, failure, electric leak or fire can result.
CAUTION:
Use this AC adaptor within the scope of specifications.
CAUTION:
Repack this AC adaptor as originally shipped from the factory. If it is shipped
without packing, it could be damaged.
CAUTION:
When disposing this AC adaptor, dispose it according to your local government
regulations. If the analyzer tube or its parts were used in an environment that can
affect the human body, dispose of them through an approved method.

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Introduction
1 Introduction
The Leybold range of Residual Gas Analyzers include:
1. LEYSPEC view models
Application: Residual gas analysis and leak test of sputtering system, vacuum
evaporation system, and so forth.
2. LEYSPEC ultra models
Application: R&D, residual gas analysis and leak test of sputtering systems,
vacuum coaters and others.
Features of the range include:
Small installation space because the control power supply and the analyzer
tube are directly connected to the transducer
Measurement values shown on the sensor unit
Leak test and impurity monitoring operated with only two buttons.
Dedicated PC software for data analysis
Connection to the PC by Ethernet with up to 16 connections per PC
This manual describes the following models:
LEYSPEC view100, LEYSPEC view100S, LEYSPEC view200, LEYSPEC
view200S
LEYSPEC ultra 200S, LEYSPEC ultra 300S
1.1 Compliance statements
This product contains Lead (Pb), included in the EU REACH Candidate List of
Substances of Very High Concern, in the circuit board, chassis and connector.
This product is EU RoHS compliant with Annex III material exemptions for Lead (Pb).

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Specifications and configurations
2 Specifications and configurations
2.1 Technical data and specifications
Series LEYSPEC view LEYSPEC ultra
Model LEYSPEC
view100
LEYSPEC
view100S
LEYSPEC
view200
LEYSPEC
view200S
LEYSPEC
ultra 200S
LEYSPEC
ultra 300S
Mass Number Range (amu) 1 - 100 1 - 200 1 - 300
Resolution (M/∆M) M/ΔM=1M (10% P.H.)
Mass Spectrometer Quadrupole type (QMS)
Detector FC FC/SEM FC FC/SEM FC/SEM FC/SEM
Sensitivity (A/mbar) 1e-5 400*1e-5 400‡FC:2.5e-4A
@1.0mA
SEM:400‡
FC:2.0e-4A
@1.0mA
SEM:400‡
Minimum detectable partial
pressure (mbar)
e-10 e-14 e-10 e-14 FC: e-12 order
SEM: e-11 order
Max. operating pressure
(mbar)
1e-4
Total pressure
measurement
Yes
Total pressure
measurement range
1e-4 - e-7 mbar order
Linearity (mbar) -
Ion source B-A type with total pressure measurement function
Filament Ir/Y2O3
Ionization voltage (eV) 50 25 - 70
Emission current (mA) 0.5 0.05/0.5/1.0§
Degassing Electron bombard 330 V, 5 mA
Voltage applied to SEM (kV) - -1.0 to -3.0 - -1.0 to -3.0 -1.0 to -3.0
Max. baking temperature
(when sensor unit is
connected)
120 °C 250 °C‡
Max. baking temperature
(when sensor unit is
disconnected)
250 °C 300 °C
Power requirements (V) 24 V d.c. ±10%
Power consumption (W) 50 W
Ripple & noise (Vp-p) Less 240 mV
Rush current†8.5 (room temperature 25 °C at cold start)
Power connector MSTB2.5V/3-GF-5.08
External I/O connector#D-SUB 15-pin (M2.6 screw)
Communication connector RJ45 female
Fuse 6.3 A
Weight (analyzer tube) (kg) 0.55 0.64 0.55 0.64 0.81
Weight (sensor unit) (kg) 2.1 (without SEM)
2.2(with SEM)
2.4
IP protection class IP30 (sensor unit)

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Specifications and configurations
Operating temperature
rangeØ
10 - 40 °C
Operating humidity range
††
15 - 80% (not condensing)
Communication cable Cat5e (Straight, with shield, maximum length = 100 m
Communication spec¤Ethernet (TCP/IP ver4)
*Sensitivity when the SEM voltage is set at -3 kV. Normally, use at 500 mA/mbar or less
§The initial value is 0.5 mA.
‡Under standard operating condition (Temperature: 10 - 40 °C. Humidity: 15 - 80%), maximum baking temperature
when the sensor unit is connected is 200 °C. For higher temperature baking between 200 and 250 °C, make sure
to maintain surrounding temperature less than 25 °C and humidity at
15 - 80%. If the temperature and/or humidity of the sensor unit increases, the resolution will change and the mass
number will change. Adjust resolution and calibrate the mass number when temperature and humidity are stable.
†A power thermistor is used to prevent surge currents. Wait until the sensor unit cools before turning on power
again.
#Analogue inputs and partial pressure/total pressure set-points are effective when dedicated software is used for
connection. START input is effective in the local mode.
ØIf the temperature and/or humidity change, resolution will change and the mass number will change. Adjust
resolution and calibrate mass number when temperature and humidity are stable.
¤TCP / IP communication can be used only with on wired connection with a Windows PC with dedicated software
installed. Only Windows PC devices are supported.
Series LEYSPEC view LEYSPEC ultra
Model LEYSPEC
view100
LEYSPEC
view100S
LEYSPEC
view200
LEYSPEC
view200S
LEYSPEC
ultra 200S
LEYSPEC
ultra 300S

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Specifications and configurations
2.2 Standard configuration
2.2.1 LEYSPEC view models
Fig. 2.1 LEYSPEC view dimensions
Item Quantity
Sensor unit 1
Sensor tube 1
Software and instruction manual CD 1
AC/DC adaptor 1
LAN cable 1

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Specifications and configurations
2.2.2 LEYSPEC ultra models
Fig. 2.2 LEYSPEC ultra dimensions
2.2.3 LEYSPEC view100/LEYSPEC view200 (with analyzer tube)
Fig. 2.3 LEYSPEC view100/LEYSPEC view200 (with analyzer tube) dimensions

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Specifications and configurations
2.2.4 LEYSPEC view100S/LEYSPEC view200S (with analyzer tube)
Fig. 2.4 LEYSPEC view100S/LEYSPEC view200S (with analyzer tube) dimensions
2.2.5 LEYSPEC ultra 200S/LEYSPEC ultra 300S (with analyzer tube)
Fig. 2.5 LEYSPEC ultra 200S/LEYSPEC ultra 300S (with analyzer tube) dimensions

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Buttons and connections
3 Buttons and connections
3.1 Front panel buttons and displays
Fig. 3.1 Front panel
Item Description
1 Analyzer tube connector For connection to the analyzer tube.
2 Measurement value/fault display Shows measured partial pressure value. For
faults, displays the error code.
3 Gas species/total pressure display
LED
Displays the gas species and total pressure
being measured.
4 POWER POWER LED (green) comes on when power
is applied.
SEM Secondary Electron Multiplier (SEM) LED
(green) comes on when SEM is used.
ERROR ERROR LED (red) comes on if a fault occurs.
5 Gas species/total pressure
selection button (CH)
Select the gas species you want to measure
or total pressure. The orange LED shows the
current selection.
6 Measurement start button (START) Starts measurement. The upper orange LED
indicates that measurement has started.
7 Measurement value units display
LED
The unit of measured partial pressure. For
O2/N2the display shows a percentage (%).

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Buttons and connections
3.2 Rear panel
Fig. 3.2 Rear panel
Ethernet communication connector provides a wired connection for a Windows
PC with dedicated software installed. Only Windows PCs are supported.
Item Description
1 Power fuse holder (FUSE) Over-current protection (Time lag type 6.3
A).
2 Rotary switch for regulating tuning
voltage (TUNING)
Regulates RF voltage tuning with the
analyzer tube.
3 Tuning voltage check terminal (+, -) Terminal for checking RF voltage tuning with
the analyzer tube.
4 Power inlet connector (POWER IN) Power cable connector (includes ground).
5 Resolution adjustment
potentiometers (RESOLUTION L, H)
L: Adjusts the resolution of the low mass
number.
H: Adjusts the resolution of the high mass
number.
6 External input/output connector (EXT-
I/O)
Signal I/O connector (D-sub 15-pin male).
7 Initial setting DIP switch (CONFIG) DIP switch for SEM selection, IP address
setting, the unit address setting and local/
remote selection.
8 Ethernet connector (LAN) RJ45 connector (8-pole 8-wire) for
connecting the LAN cable.

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Buttons and connections
3.3 EXT-I/O connector
Fig. 3.3 I/O pin connector assignment
Digital output common is pin 8.
Digital input common is pin 13.
in the signal identification shows that the signal is LOW (short, negative
logic).
Total pressure set-point output, partial pressure abnormal output and partial
pressure alarm output of terminals 5-7 are effective only when software is
connected.
START input of terminal 11 is effective only in the local mode.
To connect another recorder or device in parallel with the RGA's analogue input,
use a resistor (input impedance) of about 100 kΩin series with the RGA analogue
input line (terminal numbers: 1 and 2). Analogue input impedance of the RGA is
about 50kΩwhen power is on. When the power supply is switched to OFF, the
input impedance is undefined (several Ω) because power is not supplied to the
input operational amplifier. If another recorder is connected in parallel with the
RGA's analogue input, the input voltage to that recorder may fluctuate due to this
undefined impedance.
Terminal
No. Signal identification Termina l No. Signal identification
1 Analogue input 1 (INPUT) 9 A-GND (INPUT)
2 Analogue input 2 (INPUT) 10 A-GND (INPUT)
3 11 START input ON/OFF (INPUT)
4 Error output OK/NG (OUTPUT) 12 Interlock ON/OFF (INPUT)
5 Total pressure (TP) set-point
output ON/OFF (OUTPUT)
13 INPUT COM (INPUT)
6 Partial pressure abnormal
output ON/OFF (OUTPUT)
14
7 Partial pressure alarm output
ON/OFF (OUTPUT)
15
8 OUTPUT-COM (OUTPUT)

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Buttons and connections
3.4 DIP switch
The DIP switch configures the sensor unit. Switches 2 and 4 can be changed with
the power on, after making other changes, reset the sensor unit power supply for
those changes to take effect.
Fig. 3.4 DIP switch setting
(0: OFF, 1: ON)
The following tables show the factory default switch settings (multiple sensor unit
option excluded).
Item Description
Initial setting DIP
switch (CONFIG)
1 To change IP address between "Fixed IP address" or
"Automatic IP address".
ON = automatic
OFF = fixed
2 Can be changed with power on and measurement stopped.
To select between secondary electron multiplier (SEM) or
Faraday Cup (FC).
ON = SEM
OFF = FC
3Notused.
4 Can be changed with power on and measurement stopped.
To set local and remote operation.
ON = Local mode (control panel operation only)
OFF = Remote mode (PC operation)
5 To set the sensor address for this RGA unit. See the table
below for switch settings.
6
7
8
Address S5 S6 S7 S8 Address S5 S6 S7 S8
1 00019 1001
2 001010 1010
3 001111 1011
4 010012 1100
5 010113 1101
6 011014 1110
7 011115 1111
8 100016 0000
As viewed from the connector panel front.
The figure indicates the factory setting of the
model with a SEM such as LEYSPEC view100S
or LEYSPEC ultra 300S.