LEYBOLD CERAVAC CTR 100 N User manual

1300544660_002_C1 11/2016 - © Leybold
CERAVAC®
Transmitter
CTR 100 N
Operating Manual 300544660_002_C1
Part Numbers:
230300V02
230301V02
230302V02
230303V02
230304V02
230305V02
230306V02
230307V02
230308V02
230309V02
230310V02
230311V02
230312V02
230313V02
230314V02
230315V02
230316V02
230317V02
230318V02
230319V02
230340V02

2300544660_002_C1 11/2016 - © Leybold
Contents
0Safety Information 3
0.1 Symbols used 3
0.2 Personnel Qualifications 3
0.3 General safety information 3
0.4 Liability and Warranty 5
1Unpacking 6
2Description 7
2.1 Technical Data 8
2.2 Available Configurations 9
2.3 Accessories 9
2.4 Dimensions 10
3Transmitter Installation (Mechanical) 10
3.1 Conforming utilization 11
3.2Non-conforming utilization 11
3.3 Process Compatibility 11
4Transmitter Installation (Electrical) 14
4.1 Input/Output Wiring 14
4.2 Electrical Connection Schematic 14
5Operations 16
5.1 Pressure Output 16
5.2 Analog Output 17
6Functions 20
6.1 Interface Connector 20
6.2 LED Status Indicator 20
6.3 Vacuum Zero Adjustment 20
7FAQ (Frequently Asked Questions) 21
8Trouble Shooting 23
9Declaration of Contamination 24
10 CE Declaration of Conformity 26
11 Notes 27
12 Sales and Service 28

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0Safety Information
0.1 Symbols used
The first two symbols identify other information in this manual that is essential or useful in achieving optimal
performance from the transmitter. The last symbol below is used throughout this manual to further define the safety
concerns associated with the product.
Calls attention to important procedures, practices, or conditions.
Refer to manual. Failure to read message could result in personal injury or serious damage to the equipment or
both.
0.2 Personnel Qualifications
0.3 General safety information
The safety instructions should always be followed during installation and operation of the transmitter.
Pass safety information to all users.
Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions between the materials and the process media.
Consider possible reactions (e.g. explosion) of the process media due to the heat generated by the
product.
Adhere to the applicable regulations and take the necessary precautions for all work you are going to do
and consider the safety instructions in this document.
Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the
relevant regulations and take the necessary precautions when handling contaminated parts.
Safety Precautions:
Failure to read message could result in damage to the equipment.
All work described in this document may only be carried out by persons who have suitable technical training and
the necessary experience or who have been instructed by the end-user of the product.
Explosive Environments.Do not use the transmitter in presence of flammable gases or other
explosive environments.
Corrosive Environments. The transmitter is intended for extended use in corrosive environments.
Refer to Chapter 3 Section 3.3.
Caution
Critical
Attention
Critical
!
!
!
Skilled personnel

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Service and Repair. Do not install substituted parts or perform any unauthorized modification to the
instrument. Return the instrument to a Leybold Calibration and Service Center for service to ensure
all of the safety features are maintained.
DANGER: Contaminated Parts
Contaminated parts can be detrimental to health and the environment. Before beginning to work,
find out whether any parts are contaminated. Adhere to the relevant regulations and take the
necessary precautions when handling contaminated parts.
DANGER: Overpressure in the vacuum system 2.5 bar < p < 5 bar
KF flange connections with elastomer seals (e.g. O-rings) cannot withstand pressure <2.5bar.
Process median can thus leak and possibly damage your health.
Safe Inlet Pressures. Never operate at pressures higher than the rated maximum pressure (refer
to maximum allowable pressure from Technical Data Chapter 2 section 2.1.
CE marking The transmitter complies with European standards for CE marking. Refer to
Declaration of Conformity in Chapter 10.
Caution: vacuum component
Dirt and damages impair the function of the vacuum component. When handling vacuum
components, take appropriate measures to ensure cleanliness and prevent damages.
Caution: Purge the instrument / dirt sensitive area
After installing the unit, or before removing it from a system, purge the unit completely with a clean,
dry gas to eliminate all traces of the previously used flow material.
This instrument must be purged under a ventilation hood and suitable personal protective
equipment must be worn for protection.
Critical
Attention
!
!
Attention
!
!
Critical
Caution
!
Critical
!
Critical

5300544660_002_C1 11/2016 - © Leybold
Electrical connections. The transmitter must be properly electrically connected in order to perform
according to the specifications. Output pins are not protected against wrong electrical connections.
Wrong electrical connections can cause permanent damage to the transmitter or interference to
measuring performance. Refer to Electrical connections in Chapter 4.
0.4 Liability and Warranty
Leybold assumes no liability and the warranty becomes null and void if the end-user or third parties
disregard the information in this document
use the product in a non-conforming manner
make any kind of interventions (modifications, alterations etc.) on the product
use the product with accessories not listed in the product documentation
The end-user assumes the responsibility in conjunction with the process media used. Transmitter failures due to
contamination are not covered by the warranty.
Caution
!
!

6300544660_002_C1 11/2016 - © Leybold
1Unpacking
Before unpacking your transmitter, check all surfaces of the packing material for shipping damage. Inspect for
visible damage. If found, notify the carrier immediately.
Please be sure that your transmitter package contains these items:
1 pcs. CTR CERAVAC Transmitter
1 pcs. English short form manual (P/N: 300544675_002_C1)
1 pcs. German short form manual (P/N: 300544675_001_C1)
1 pcs. Product Inspection and Test Report
1 pcs. User switch adjustment tool
If any items are missing, please contact Leybold.

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2Description
The vacuum transmitter offers a four (4) decade measurement range and the measurement is based on the
electrical capacitance between the diaphragm and a fixed electrode. Its output is the same regardless of the
process gas composition –gas correction factors are not needed.
It can be used in a variety of applications as a stand-alone unit or with a suitable controller unit. The CTR 100 N
transmitter’s primary communication method is its 0 –10 VDC analog output signal. This output can be interfaced
to external analog equipment for pressure readout or control. The transmitter also has a RS232 digital
communication interface for setup of transmitter parameters and to provide real time pressure measurement.
Please see RS232 Instruction Manual 300544665 for further details about this interface.
Sensor technology
The transmitter operates by measuring the electrical capacitance between a thin metal diaphragm and a patterned
electrode. When the process pressure changes, the diaphragm changes its position with respect to the electrode,
and that causes a change in electrical capacitance. That change in capacitance is directly proportional to the
change in pressure. Because the diaphragm position is not dependent on the gas type, the transmitter provides
the same output signal regardless of gas composition. The diaphragm and sensor is entirely composed of nickel
alloy, which makes it resistant to damage caused by corrosion or oxidation.
Applications
The transmitter can be used in many different vacuum applications within the semiconductor, analytical, and
coating industries:
General vacuum pressure measurement
Gas backfilling measurement and control
Thin film deposition processes such as evaporation, sputtering, and chemical vapour deposition (CVD).
Advanced materials processes, such as vacuum furnaces and ceramic sintering.
Vacuum degassing of solvents and oils.
Plasma and chemical cleaning.
Analytical instruments such as electron microscopes, thermal analyzers, and mass spectrometers.
Disposal (European Union only)
The transmitter is manufactured according to the RoHS directive.
For the benefit of the environment, at the end of life of the transmitter, it should not be disposed in
the normal unsorted waste stream. It should be deposited at an appropriate collection point or
facility to enable recovery or recycling.
Attention
!

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2.1 Technical Data
Full Scale Measuring Ranges: 1000, 100, 20, 10, 1, and 0.1 Torr
Accuracy (1) Ranges ≥ 1 Torr: 0.20% of reading.
0.1 Torr range: 0.50% of reading
Resolution(2) 0.003% of full scale
Supply Voltage: +14 to + 30 VDC; nominal 24VDC; 0.030A at 24VDC
Power consumption: < 1 Watt
Analog output: 0 –10.00 VDC
Response Time F.S Ranges ≥ 1 Torr, from 0% to 90% of F.S response
time is 40ms. For 0.1Torr F.S from 0% to 90%
response time is 80ms.
Sampling Rate For transmitters with ranges > 1 Torr (1.33 mbar), the
analog output signal is updated approximately
1000/sec. For transmitters with ranges ≤ 1 Torr (1.33
mbar), the analog output signal is updated
approximately 500 times/second
Materials exposed to vacuum: Inconel®and Incoloy®nickel alloys. KF and CF flanges
are made from 300-series stainless steel.
Internal volume: KF16 fitting 6.83 cm3
CF16 fitting 6.50 cm3
VCR8 fitting 6.05 cm3
No fitting 6.29 cm3
Housing material: ABS plastic, UL 94 V-0 rated, plated
Fitting material: Incoloy®(VCR fitting) or 300-series stainless steel (KF
and CF fittings)
Weight: KF16 fitting 550 g
CF 16 fitting 548 g
VCR8 fitting 579 g
No fitting 513 g
Operating temperature: 0° to 50° C (32° to 122° F)
Bake out temperature (Power off, fitting only): 50° C (122° F)
Humidity: 25 –95% Relative Humidity, non-condensing
Zero Temperature Coefficient: Ranges ≥ 10 Torr – 0.005% (50 ppm) full scale/°C
1 Torr –0.015% (150 ppm) full scale/°C
0.1 Torr –0.020% (200 ppm) full scale/°C
Span Temperature Coefficient: Ranges ≥ 1 Torr - 0.01% of reading/°C
0.1 Torr –0.03% of reading/°C
Burst pressure 5 times full scale or 90 psia, whichever is greater.
Overpressure Limit Without Damage 45 psia
(1) Accuracy specification includes non-linearity, hysteresis, and non-repeatability.
(2) Resolution specification is best obtainable under ideal laboratory conditions. Actual resolution in service may vary.
(3) The transmitter’s electronics are not sealed against entry of dust, rain, or snow, and therefore can be damaged by use outdoors

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2.2 Available Configurations
2.3 Accessories
Part
Part no.
Graphix One
230680V01
Graphix Two
230681V01
Graphix Three
230682V01
Cables Type C 5 Meter
12455
Cables Type C 10 Meter
230022
Cables Type C 15 Meter
12456
Cables Type C 20 Meter
12457
Cables Type C 30 Meter
12458

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2.4 Dimensions[mm]
P/N: 230300V02 to 230319V02,
230340V02
Flanges:
KF 16
CF 16
½” Tube
8 VCR
3Transmitter Installation (Mechanical)
Caution
!
!

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3.1 Conforming utilization
The transmitter is intended for measuring pressure.
The transmitters are intended for use in relatively clean environments.
The transmitter can only be used by persons who have suitable technical training and the necessary
experience or who have been instructed by the end-user of the product.
Always ensure that all vacuum sealing items and surfaces are clean, without damage and free of particles.
Use a cable with strain relief to ensure proper electrical connection and to reduce stress on the
connectors.
To comply with EN61326-1 immunity requirements, use a braided, shielded cable.
3.2 Non-conforming utilization
The transmitter cannot be used for measurements other than described in this manual.
The transmitters are not intended for use in dirty and corrosive environments.
Do not use the transmitter in presence of flammable gases or other explosive environments.
Only install original parts. Do not perform any unauthorized modification to the instrument.
The transmitter is not intended for use above maximum allowed pressure (refer Technical Data in Chapter
2).
3.3 Process Compatibility
The transmitter is intended for use in non-condensing process environments. The transmitter can be used in
corrosive environments (example: semiconductor processes) where aggressive gases like chlorine and fluorine are
used but users should expect drift and frequent zeroing in such applications. If the transmitter is located close to a
gas source connection like a flow controller or leak valve, the transmitter pressure measurement can be higher
than the actual chamber pressure. Conversely, location close to a pumping system connection can cause a lower
pressure measurement than actual chamber pressure.
Do not use or install the transmitter where the following conditions occur:
- Temperatures lower than 0 °C or higher than 50 °C.
- Explosive ambient environment around the transmitter.
- Direct sunlight or other heat sources, including heating, ventilation, and air conditioning outlets.
- Corrosive or condensable process gases or reaction products are likely to be present.
- Liquid condensation and/or liquid draining onto the transmitter’s housing.
- Dust contamination.

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Mounting Orientation
The transmitter and its sensor design can be mounted in any orientation without compromising accuracy or
lifetime, but operation with its inlet port facing upwards is not recommended due to the possibility of contaminants
falling into the port.
Zero Shift From Mounting Orientation
The CTR 100 N transmitters with measurement ranges higher than 1 Torr require little or no zero adjustment if they
are mounted horizontally on the customers system. However, transmitters with ranges of 1 Torr and less require
zero adjustment to compensate for the effects of gravity on the sensor diaphragm if they are mounted horizontally.
For example, for 0.1 Torr models, this shift represents up to 10% of the full-scale range, and thus is significant.
Devices with this range should be mounted vertically as originally calibrated. If this mounting orientation is not
possible, a correction factor must be applied to the transmitter’s output to obtain the correct pressure.
Span/ Accuracy Shift from Mounting Orientation
The CTR 100 N transmitters with measurement range 1 Torr or higher require little or no span adjustment if they
are mounted horizontally on the customer’s system. However, transmitters with ranges lower than 1 Torr will
experience a span shift due to the effects of gravity on the sensor diaphragm if they are mounted horizontally.
These transmitters would also see a degraded accuracy value.
Explosive Environments
The sensor is kept at ambient temperature and contains no heating elements, but the steady-state electronics
power draw can be up to 35 mA, which may exceed the self-ignition threshold for some gases and environments.
Ambient Temperature
The transmitter has an active sensor temperature compensation circuit that minimizes shifts in its output caused by
changes in ambient temperature. However, for best performance, avoid installation in areas where large
temperature gradients and direct cooling like an air-conditioning air stream or heating like a pump exhaust stream
may exist.
Operation in ambient temperatures below 0° C or above 50° C are not recommended since they may reduce the
lifetime of the transmitter’s electronic components.
Bakeout
Bakeout of the entire transmitter is not recommended, as the high temperatures may damage the electronics. The
transmitter’s fitting only – not including the inlet tube - may be baked to 50° C.
OK
OK
NOT OK
OK

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Contamination
As with any vacuum measurement device, locate and orient the transmitter where contamination is least likely to
enter the sensor. Contamination typically causes the zero position of the transmitter to drift away from its original
value, which causes the output to shift.
Liquid and/or Dust Entry
The transmitter’s housing and electrical connector are not sealed against entry of liquids or dust, and such entry
may cause damage to the electronics. Avoid mounting this product in locations where this could occur.
Vibrations and Instant Air Inrush
The sensor can be affected by mechanical vibrations transmitted from the process chamber and piping;
transmitters with ranges of 1 Torr and below are most affected by this condition. Suitable vibration damping is
strongly recommended to minimize this effect.
Sudden venting to atmospheric conditions or inrush of gases will not cause sensor damage unless the gas
pressure exceeds the maximum overpressure specification of the product. If the transmitter is exposed to a
pressure event that exceeds the maximum overpressure specification, its sensor may experience a permanent
span and calibration shift that cannot be reversed except by replacement of the sensor.
Vacuum connections
The transmitter is available with different types of vacuum fittings. When mounting the transmitter, always ensure
that all vacuum sealing items and surfaces are clean, without damage, and free of particles. Do not touch the
vacuum flange sealing surface.
If the transmitter is contaminated with a liquid like vacuum pump oil, the sensor element is likely
permanently damaged. The transmitter cannot be cleaned using solvents.
If the transmitter will be exposed to pressures above atmospheric pressure, make sure that proper
vacuum fittings are used. Ensure that the internal system pressure is at ambient pressure
conditions before opening the vacuum system and removing any connections.
Attention
!
!
Caution
!
!

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4Transmitter Installation (Electrical)
Use a cable with strain relief to ensure proper electrical connection and to reduce stress on the connectors.
The power supply input is +14 to +30 VDC, with a nominal supply voltage of 24 VDC. Damage may occur to the
circuitry if excessive voltage is applied, polarity reversed (beyond -60V), or if a wrong connection is made.
4.1 Input/Output Wiring
To comply with EN61326-1 immunity requirements, use a braided, shielded cable. Connect the braid to the metal
hoods at both ends of the cable with the end for power supply connected to earth ground.
4.2 Electrical Connection Schematic
Ensure a low impedance electrical connection between the transmitter body and the grounded
vacuum system to shield the sensor from external electromagnetic sources.
Ensure that the analog output is connected to floating input.
I/O Connector (15 pin)
15 pin male D-SUB
PIN
Description
1
Reserved
2
Analog signal output
3
Reserved
4
Reserved
5
Power return for +24VDC supply
6
Reserved
7
+24VDC input power
8
Reserved
9
Reserved
10
Transmitter identification
11
+24VDC input power (alt)
12
Analog signal return
13
RS232, TxD
14
RS232, RxD
15
Chassis ground
Attention
!
!

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1
3
4
8
9
13
14
10
2
12
11
5
6
15
7
Ident/ Remote Zero
TXD
RXD
Reserved
Signal Output
0.01uF
Signal Rtn
0.02uF
Power Rtn
15V
Power In
3
1
3
4
8
9
1
3
1
4
1
0
2
1
2
1
1
5
6
1
5
7
3
Shielded to
case
14 to 30V
Remote Zero Adjust
CTR100N Electrical Connection
V
+
-
Voltmeter
-
`
PC
2
3
5

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5Operations
5.1 Pressure Output
The transmitter can provide pressure measurement output as an analog voltage value or RS232 digital value. For
details about the digital interface please refer to RS232 Interface Manual 300544665 for additional information.
Resolution
The analog pressure output can provide resolution of pressure changes as low as 0.003% of the full-scale
measurement range under ideal conditions. However, in most industrial and non-metrology installations, the lowest
measurable pressure will be approximately 0.01% of the full-scale range, or 1 mV. This resolution is determined
by the transmitter’s resident noise level, the noise and ripple occurring on the input power supply to the transmitter,
shifts in ambient temperature around the transmitter, and several other factors.
Measuring Noise
External sources can interfere with the sensor signal and cause noise on the signal. The lowest measurement
ranges (below 1 Torr) are most sensitive to measuring noise due to low signal levels.
Closed-Loop Pressure Control
The transmitter’s output signal can be used as a reference for a closed-loop pressure control system. In such a
system, the analog or digital output of the transmitter is sent to a dedicated controller or control element, which
then compares the actual chamber pressure as read by the transmitter to an established set point. The controller
then decides based on its internal programming to either open or close the pressure-controlling element(s) to raise
or lower the chamber pressure to meet the set point.
Leybold recommends that the minimum control pressure using this transmitter should be 0.5% of the full-scale
measurement range or 50 mV if the analog output signal is used for this control circuit. Attempting to control
pressure below this minimum may result in less stable pressure control.
When designing external pressure control loops, make sure that external equipment like pumping
system is not damaged in case of power failure.
When designing pressure data collecting software and control loop using data from RS232
communications, make sure that the host software does not interpret a communication error as a
valid pressure value.
Caution
Caution
!
!
!
!

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5.2 Analog Output
The transmitter can provide pressure measurement output as an analog voltage value or RS232 digital value. For
details about the digital interface please refer to the RS232 Instruction Manual 300544665. The analog output is
linear with pressure as shown in the graph below.
P (Torr) = Pressure in Volts*Device Full Scale Range in Torr
10
P (mbar) = 1.3332*Pressure in Volts*Device Full Scale Range in Torr
10
P (Pascal) = 133.32*Pressure in Volts*Device Full Scale in Torr
10
Pressure Units Conversion
Transmitter Full-Scale
Range - Torr
mbar
Pascal
0.1
0.133322
13.33224
1
1.333224
133.3224
10
13.33224
1333.224
20
26.66447
2666.447
100
133.3224
13332.24
1000
1333.224
133322.4
0.00%
20.00%
40.00%
60.00%
80.00%
100.00%
0.00 2.00 4.00 6.00 8.00 10.00
Percentage of Full Scale
Output Voltage - VDC
CERAVAC Output vs. % Full Scale

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Zero Adjustment
Like all precision electromechanical measuring instruments, the transmitter requires periodic zeroing of its output to
provide the best possible measurement accuracy. Leybold recommends that the transmitter be zeroed upon initial
installation into the user’s process system to compensate for any drift that may have occurred during transportation
and installation. Subsequent zeroing frequency must be determined by the user according to each application, but
in general, more frequent zeroing should be expected if the transmitter is frequently exposed to atmospheric
pressure, or if it is used in an application where the best measurement repeatability is needed.
To zero the transmitter, the vacuum system must be pumped down to its lowest achievable vacuum pressure,
which ideally should be less than 0.01% of the transmitter’s full-scale measurement range. The table below
provides the recommended vacuum pressure needed for each available range.
Once the recommended zeroing pressure has been achieved, the zero pushbutton offers multiple adjustment
modes depending on the customer requirements. The first mode is to set the transducer’s output to zero. Briefly
press the ZERO button with a small diameter rod such as the User switch adjustment tool provided with each
device. The transducer’s output will shift to zero when this is done. The STATUS LED blinks until the adjustment is
completed. However, if no action is taken within 8 seconds of entering this mode, the STATUS LED stops blinking
and the transducer exits this mode.
Recommended Zeroing Pressure
Torr mbar Pascal
≤ 0.1 ≤ 0.132 ≤ 13.3
≤ 0.01 ≤ 0.013 ≤ 1.3
≤ 1x 10 -3 ≤ 1.3x 10-3 ≤ 0.13
≤ 1x 10 -4 ≤ 1.3x 10-4 ≤ 0.013
≤ 1x 10 -5 ≤ 1.3x 10-5 ≤ 1.3 x 10-3
Transmitter Full-Scale
Range - Torr
1000
100
10
1
0.1
Use care when activating the zero pushbutton. It can be easily damaged or even knocked off its
mounting on the electronics by excessive force. If this occurs, the transmitter electronics will not
operate correctly.
Caution
!
!

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Zero Adjustment with RAMP Function (Please contact DAKKS Lab through email)
This function allows the user to adjust the zero to a known reference pressure within the measurement range of the
transmitter. It also permits an offset of the calibration curve to either compensate for an offset in the system
measurement capability, or to obtain a slightly positive zero for an analog/digital converter that requires 0 –10
VDC input (i.e. controller does not accept negative input voltages). This offset cannot exceed 2% of the full-scale
range, i.e. (+ 0.2 VDC). To use this function:
1. Press and hold the ZERO button with the User switch adjustment tool provided. After 5 seconds, The
STATUS LED starts blinking and the zero value (starting at the current output value) will increase
continually until the button is released or the maximum permitted offset (maximum of 2% the transducer’s
full-scale range) is reached.
oTo make additional incremental adjustments in the same direction, either press and release (for
each incremental steps ) or press and hold the zero button within 3 secs after the ZERO button is
released, until desired output is reached. Note: Please allow about 1 sec for the output to settle
oIf direction needs to be changed at any time, release the ZERO button and wait 3 to 5 sec and
press again. Suggestion: After releasing the ZERO button count the Status LED blinking to four
(Status LED blinks once every sec) and press again.
2. To return to measurement mode, release the ZERO button for more than 5 seconds.
5.3 Transmitter Factory Default Reset
To reset all transmitter parameters, remove mains power from the device. Then press and hold the ZERO
pushbutton for at least 5 seconds while reconnecting the mains power to the transmitter. This will reset all
parameters in the transmitter’s memory back to the original default factory settings.

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6Functions
6.1 Interface Connector
The Interface Connector is used to connect the transmitter to mains power and to the planned display instrument.
It is a standard 15-pin male D-subminiature connector, and its pin assignments are listed in Chapter 4 section 4.2.
The required input power and analog output signal are described in the Chapter 2 under section 2.1 Technical
Data.
6.2 LED Status Indicator
The green LED status indicator has the following stages:
1. No indication Mains power not connected
2. Solid Normal operation, measurement mode
3. Blinking Other mode, error, or over/under-range
6.3 Vacuum Zero Adjustment
The zero pushbutton is used to zero the analog and digital outputs of the transmitter. It can be used for this
function at any pressure less than 20% of the transmitter’s full-scale measurement range. See Chapter 5
Operations under section 5.2 for further detailed information.
Interface Connector
Status LED
Zero
Pushbutton