LEYBOLD IONIVAC Series User manual

IONIVAC
ITR 90
ITR 90 P
Operating Manual GA09420_002_C0
Part Numbers
120 90
120 91
120 92
120 94
230 030
230 031

General Information
2GA09420_002_C0 – (2016-10) – Leybold
Product Identification
In all communications with Leybold, please specify the information on the product
nameplate. For convenient reference copy that information into the space provided
below.
Validity
This document applies to products with the following part numbers:
ITR 90 (without display)
120 90 (vacuum connection DN 25 ISO-KF)
120 92 (vacuum connection DN 40 CF-R)
ITR 90 (with display)
120 91 (vacuum connection DN 25 ISO-KF)
120 94 (vacuum connection DN 40 CF-R)
ITR 90 P (with Profibus interface and switching functions)
230030 (vacuum connection DN 25 ISO-KF)
230031 (vacuum connection DN 40 CF-R)
The part number (No.) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this docu-
ment correspond to the KF vacuum connection. They apply to other
vacuum connections by analogy.
All ITR 90 versions are shipped with an instruction sheet (→[1]). ITR 90 P
comes with a supplementary instruction sheet describing the fieldbus interfaces
and the switching functions (→[2]).
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
Intended Use
The ITR 90 transmitters have been designed for vacuum measurement of gases
and gas mixtures in a pressure range of 5×10-10 … 1000 mbar.
They must not be used for measuring flammable or combustible gases in mixtures
containing oxidants (e.g. atmospheric oxygen) within the explosion range.
The transmitters can be operated in connection with a Leybold controller or with
other control devices.

General Information
GA09420_002_C0 – (2016-10) – Leybold 3
Functional Principle
Over the whole measuring range, the transmitters has a continuous characteristic
curve and its measuring signal is output as logarithm of the pressure.
The transmitters functions with a Bayard-Alpert hot cathode ionization measure-
ment system (p < 2.0×10-2 mbar) and a Pirani measurement system
(p > 5.5×10-3 mbar). In the overlapping pressure range of
2.0×10-2 … 5.5×10-3 mbar, a mixed signal of the two measurement systems is
output. The hot cathode is switched on by the Pirani measurement system only
below the switching threshold of 2.4×10-2 mbar (to prevent filament burn-out). It is
switched off when the pressure exceeds 3.2×10-2 mbar.

Contents
4GA09420_002_C0 – (2016-10) – Leybold
Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 3
1Safety 5
1.1 Symbols Used 5
1.2 Personnel Qualifications 5
1.3 General Safety Instructions 6
1.4 Liability and Warranty 6
2Technical Data 7
3Installation 12
3.1 Vacuum Connection 12
3.1.1 Making the Flange Connection 13
3.1.2 Removing and Installing the Electronics Unit 14
3.1.3 Using the Optional Baffle 15
3.2 Electrical Connection 17
3.2.1 Use With Leybold Transmitter Controllers 17
3.2.2 Use With Other Controllers 18
3.2.3 Using the Optional Power Supply (With RS232C Line) 23
4Operation 25
4.1 Measuring Principle, Measuring Behavior 25
4.2 Operational Principle of the Transmitter 27
4.3 Putting the Transmitter Into Operation 27
4.4 Degas 27
4.5 Display 28
4.6 RS232C Interface 29
4.6.1 Description of the Functions 29
4.7 Profibus Interface (ITR 90 P) 32
4.7.1 Description of the Functions 32
4.7.2 Operating Parameters 33
4.8 Switching Functions (ITR 90 P) 34
4.8.1 Setting the Switching Functions 34
5Deinstallation 36
6Maintenance, Repair 37
6.1 Maintenance 37
6.1.1 Cleaning the Transmitter 37
6.2 Adjusting the Transmitter 37
6.2.1 Adjustment at Atmospheric Pressure 37
6.2.2 Zero Point Adjustment 39
6.3 What to Do in Case of Problems 39
6.4 Replacing the Sensor 41
7Options 43
8Spare Parts 43
9Storage 43
10 Returning the Product 44
11 Disposal 44
Appendix 45
A: Relationship Output Signal – Pressure 45
B: Gas Type Dependence 46
C: Literature 48
Declaration of Contamination 49
For cross-references within this document, the symbol (→XY) is used, for cross-
references to further documents, listed under literature, the symbol (→[Z]).

Safety
GA09420_002_C0 – (2016-10) – Leybold 5
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or mi-
nor equipment damage.
Notice
Hint, recommendation
The result is O.K.
The result is not as expected
Optical inspection
Waiting time, reaction time
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.

Safety
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1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→10) and the process
media.
Consider possible reactions (e.g. explosion) of the process media due to the
heat generated by the product.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Leybold assumes no liability and the warranty becomes null and void if the end-
user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories not listed in the corresponding product docu-
mentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Transmitter failures due to contamination or wear and tear as well as
expendable parts (filaments) are not covered by the warranty.

Technical Data
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2 Technical Data
Measurement
Display range (air, O2, CO, N2,) 5×10-10 … 1000 mbar, continuous
Measuring range (air, O2, CO, N2,) 1×10-8 … 10-2 mbar, continuous
Accuracy 15% of reading
(after 5 min stabilization)
Repeatability 5% of reading
(after 5 min stabilization)
Gas type dependence →Appendix B
Emission
Switching on threshold
Switching off threshold
2.4×10-2 mbar
3.2×10-2 mbar
Emission current
p ≤7.2×10-6 mbar
7.2×10-6 mbar <p <3.2×10-2 mbar
5 mA
25 µA
Emission current switching
25 µA 5 mA
5 mA 25 µA
7.2×10-6 mbar
3.2×10-5 mbar
Degas
Degas emission current
(p <7.2×10-6 mbar)
≈16 mA (Pde
g
as ≈4 W)
Control input signal 0 V/+24 VDC, active high
(control via RS232 →29)
Duration max. 3 min, followed by automatic stop
In degas mode, ITR 90 transmitters keep supplying measurement values, however
their tolerances may be higher than during normal operation.
Output signal
Output signal (measuring signal) 0 … +10 V
Display range 0.774 V … +10 V
(5×10-10 mbar … 1000 mbar)
Relationship voltage-pressure logarithmic, 0.75 V/decade
(→Appendix A)
Error signal <0.3 V/0.5 V (→39)
Minimum load impedance 10 kΩ
Display (120 91 and 120 94)
Display panel
Dimensions
Pressure units (pressure p)
LCD matrix, 32×16 pixels,
with background illumination
16.0 mm × 11.2 mm
mbar (default), Torr, Pa
(selecting the pressure unit →29)

Technical Data
8GA09420_002_C0 – (2016-10) – Leybold
Power supply
DANGER
The transmitter must only be connected to power supplies, instru-
ments or control devices that conform to the requirements of a
grounded extra-low voltage (PELV). The connection to the transmitter
has to be fused (Leybold controllers fulfill these requirements).
Operating voltage at the
IONIVAC ITR 90
+24 VDC (20 … 28 VDC) 1)
ripple max. 2 V
pp
Power consumption
Standard
Degas
Emission start (<200 ms)
≤0.5 A
≤0.8 A
≤1.4 A
Power consumption
ITR 90
ITR 90 P
≤16 W
≤18 W
Fuse necessary 1.25 AT
Sensor cable
For reasons of compatibility, the expression "sensor cable" is used for all
ITR 90 versions in this document, although the pressure reading of the
transmitters with fieldbus interface (ITR 90 P) is normally transmitted via
the corresponding bus.
Electrical connector
ITR 90
ITR 90 P
D-Sub,15-pin, male (→19)
D-Sub,15-pin, male (→20)
Cable for ITR 90
Analog values only
Without degas function
Analog values
With degas function
Analog values
With degas function
And RS232C interface
Cable for ITR 90 P
4 conductors plus shielding
5 conductors plus shielding
7 conductors plus shielding
depending on the functions used,
max. 15 conductors plus shielding
Max. cable length (supply voltage 24 V1))
Analog operation
RS232C operation
≤35 m, conductor cross-section 0.25 mm²
≤50 m, conductor cross-section 0.34 mm²
≤100 m, conductor cross-section 1.0 mm²
≤30 m
Transmitter identification 42 kΩresistor between Pin 10 (sensor
cable) and GND
1) Measured at sensor cable connector (consider the voltage drop as function of
the sensor cable length).

Technical Data
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Switching functions
ITR 90
ITR 90 P
Adjustment range
none
2 (setpoints A and B)
1×10-9 mbar … 100 mbar
Setpoints adjustable via potentiometers
(setpoints A and B), one floating, nor-
mally open relay contact per setpoint
(→20, 34)
Adjusting the setpoints via field bus is
described in the corresponding bus sec-
tions.
Relay contact rating
Voltage
Current
≤30 V
≤0.5 ADC
RS232C interface
Data rate
Data format
Connections (sensor cable connector)
TxD (Transmit Data)
RxD (Receive Data)
GND
9600 Baud
binary
8 data bits
one stop bit
no parity bit
no handshake
Pin 13
Pin 14
Pin 5
Function and interface protocol of the RS232C interface →29
Profibus interface (ITR 90 P)
Fieldbus name Profibus
Standard applied →[5]
Interface protocol data format →[3], [5]
Interface, physical RS485
Data rate ≤12 MBaud (→[3])
Node address
Local
(Adjustable via hexadecimal
"ADDRESS", "MSD", "LSD"
switches)
Via Profibus
(hexadecimal "ADDRESS" switches
set to >7dhex (>125dec))
00 … 7Dhex (0 … 125dec)
00 … 7Dhex (0 … 125dec)
Profibus connection D-Sub, 9-pin, female
Cable Shielded, special Profibus cable
(→22 and [4])
Cable length, system wiring According to Profibus specifications
(→[4], [5])

Technical Data
10 GA09420_002_C0 – (2016-10) – Leybold
Vacuum
Materials exposed to vacuum
Housing, supports, screens
Feedthroughs
Insulator
Cathode
Cathode holder
Pirani element
stainless steel
NiFe, nickel plated
glass
iridium, yttrium oxide (Y2O3)
molybdenum
tungsten, copper
Internal volume
DN 25 ISO-KF
DN 40 CF-R
≤24 cm3
≤34 cm3
Max. Pressure 2 bar (absolute)
Weight
Part numbers
120 90, 120 91
120 92, 120 94
230 030
230 031
≈290 g
≈550 g
≈430 g
≈695 g
Ambiance
Admissible temperatures
Storage
Operation
Bakeout
-20 … 70 °C
0 … 50 °C
+150 °C (without electronics unit)
Relative humidity
(year's mean / during 60 days) ≤65 / 85% (no condensation)
Use indoors only
altitude up to 2000 m NN
Type of protection IP 30

Technical Data
GA09420_002_C0 – (2016-10) – Leybold 11
Dimensions [mm]
Part numbers Part numbers
120 90 120 92
120 91 120 94
230 030 230 031
4-40UNC 2B
DN 40 CF-R
4-40UNC 2B
DN 25 ISO-KF

Installation
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3 Installation
3.1 Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.
DANGER
The transmitter must be electrically connected to the grounded
vacuum chamber. This connection must conform to the requirements
of a protective connection according to EN 61010:
•CF connections fulfill this requirement
•For transmitters with a KF vacuum connection, use a conductive
metallic clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
The transmitter may be mounted in any orientation. To keep conden-
sates and particles from getting into the measuring chamber, preferably
choose a horizontal to upright position. See dimensional drawing for
space requirements (→11).
When installing the transmitter, make sure that the area around the
connector is accessible for the tools required for adjustment while the
transmitter is mounted (→37).
When installing the transmitter, allow for installing/deinstalling the
connectors and accommodation of cable loops.
•The transmitter is supplied with a built-in grid. For potentially contaminating
applications and to protect the electrodes against light and fast charged
particles, installation (→15) of the optional baffle is recommended (→43).
•The sensor can be baked at up to 150 °C. At temperatures exceeding 50 °C,
the electronics unit has to be removed (→14) or an extension (Option
→43) has to be installed.

Installation
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3.1.1 Making the Flange Connection
Procedure
It is recommended not to apply any vacuum grease.
The protective lid will be needed for maintenance.

Installation
14 GA09420_002_C0 – (2016-10) – Leybold
3.1.2 Removing and Installing the Electronics Unit
Required tool
•Allen key, size 2.5 mm
Removing the electronics unit
Unscrew the hexagon socket set screw (1) on the side of the electronics
unit (2).
2
1
Remove the electronics unit without twisting it.
Removal of the electronics unit is completed.
Installing the electronics unit
Place the electronics unit on the sensor (3) (be careful to correctly align the
pins and notch (4)).
4
3

Installation
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Slide the electronics unit in to the mechanical stop and lock it with the hexa-
gon socket set screw (1).
The electronics unit is now installed.
3.1.3 Using the Optional Baffle
In severely contaminating processes and to protect measurement electrodes opti-
cally against light and fast charged particles, replacement of the built-in grid by the
optional baffle (→43) is recommended.
Installing/deinstalling
the baffle
The optional baffle will be installed at the sensor opening of the deinstalled trans-
mitter (Deinstallation →36).
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Required tools / material
•Baffle (→43)
•Pointed tweezers
•Pin (e.g. pencil)
•Screwdriver No 1
Procedure
Carefully remove the grid with tweezers.

Installation
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Carefully place the baffle onto the sensor opening.
Using a pin, press the baffle down in the center until it catches.
The baffle is now installed (Installation of the transmitter →12).
Deinstallation
Carefully remove the baffle with the screwdriver.

Installation
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3.2 Electrical Connection
3.2.1 Use With Leybold Transmitter Controllers
See Leybold sales literature and data sources for controllers and our range of
sensor cables on our internet home page (→[6]).
Caution
Caution: data transmission errors
If the transmitter is operated with the RS232C interface and a fieldbus
interface at the same time, data transmission errors may occur.
The transmitter must not be operated with the RS232C interface and
Profibus at the same time.
Procedure
Plug the sensor connector into the transmitter and secure it with the locking
screws.
Connect the other end of the sensor cable to the Leybold controller and
secure it.
The transmitter can now be operated with the Leybold controller.

Installation
18 GA09420_002_C0 – (2016-10) – Leybold
3.2.2 Use With Other Controllers
The transmitter can also be operated with other controllers.
Especially the fieldbus version ITR 90 P (Profibus) is usually operated as part of a
network, controlled by a master or bus controller. In such cases, the control system
has to be operated with the appropriate software and interface protocol (→[3]).
3.2.2.1 Making an Individual Sensor Cable
For reasons of compatibility, the expression "sensor cable" is used for all
ITR 90 versions in this document, although the pressure reading of the
ITR 90 P transmitter with fieldbus interface is normally transmitted via
Profibus.
The sensor cable is required for supplying all ITR 90 types with power.
In connection with the ITR 90 P transmitter with fieldbus interface it also
permits access to the relay contacts of the switching functions (→20).
Cable type
The application and length of the sensor cable have to be considered when deter-
mining the number and cross sections of the conductors (→8).
Procedure
Open the cable connector (D-Sub, 15-pin, female).
Prepare the cable and solder/crimp it to the connector as indicated in the
diagram of the transmitter used:

Installation
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Sensor cable connection ITR 90
8
91
15
TxD
ITR 90
42k 
RxD
+U
b
1.25AT
Identification
24 V
WARNING
The supply common (Pin 5) and the shielding (Pin 15) must be
connected at the supply unit with protective ground.
Incorrect connection, incorrect polarity or inadmissible supply voltages
can damage the transmitter.
For cable lengths up to 5 m (0.34 mm2 conductor cross-section) the
output signal can be measured directly between the positive signal out-
put (Pin 2) and supply common GND (Pin 5) without loss of accuracy. At
greater cable lengths, differential measurement between signal output
(Pin 2) and signal common (Pin 12) is recommended.
Reassemble the cable connector.
On the other cable end, terminate the cable according to the requirements
of the transmitter controller you are using.

Installation
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
Plug the sensor connector into
the transmitter and secure it with
the locking screws.
Connect the other end of the sensor cable to the connector of the instru-
ment or transmitter controller you are using.
The transmitter can now be operated via analog and RS232C interface.
Sensor cable connection ITR 90 P
.
SP A
SP B
SP A
SP B
TxD
RxD
Degas
Measuring signal
ITR 90 P
42k 
3
6
1
4
9
11
13
14
7
8
2
12
10
5
15
1.25 AT
24V
Degas
Identification
0V
RS232
8
91
15