Matsusada Precision ECU Series User manual

Rev. 0.3
B/N 213.9.004 *213.9.004*
MODEL ECU SERIES
Instruction Manual
F-RA-001-3R0

i
SAFETY
1. BE SURE TO GROUND!!
Be sure to ground the power supply unit before use.
2. DO NOT TOUCH ANY HIGH VOLTAGE TERMINALS!!
Do not operate the power supply unless someone who is familiar with the operation precede, the
hazards of high voltage, and the treatment for the electrical shock is present.
3. UNDERSTAND THE HAZARDS OF HIGH VOLTAGE!!
In case you let somebody operate the power supply for you, must be sure that he/she fully
understands the hazards of high voltage and the areas where never can be touched.
4. CUT OFF THE POWER BEFORE TOUCH THE UNIT!!
Cut off the power, and check that the power is OFF, before you touch the power supply.
Capacitors in the output circuit are still charged and dangerous even after the power has been
cut off.Discharge all remaining high voltage by grounding them.
5. DISCONNECT THE INPUT LINES(AC LINES) !!
In case you need to touch the inside of the power supply following instruction manual, cut off
the power and disconnect the input lines(AC lines), and ground all the capacitors and high
voltage section.
Don’t remove the case or touch the inside of power supply unless so instructed in the
instruction manual.
6. OPERATE THE POWER SUPPLY WITH YOUR RIGHT HAND!!
In order to avoid the electric shock to your important organs, operate the power supply with
your right hand and keep your left hand off from the power supply.
This power supply unit generates high voltage and energy.
Electric shock may lead to death or serious injury.
Be sure to follow the instructions below and handle the unit with caution.

ii
Various symbols are used in this instruction manual and on the product for ensuring safety.
What will be caused by ignoring the instructions given with the symbols or by improper handling
are classified as shown below. Read carefully and understand the descriptions before
proceeding to the main body of this manual.
Symbols
Meanings of the Symbols
Some of the symbols used
are shown on the right.
Indicates that which requires caution.
Indicates that which forbidden.
Indicates that which must be done.
Indicates electric shock hazard.
failure to follow the instructions with this indication may lead to death or serious injury.
failure to follow the instructions with this indication may lead to injury or damage in property.
Warning:
Caution:
！ 
！ 
！

！

！ 
Warning
Do not touch the output terminal or the
leads or load connected to it while the
unit is in operation or immediately after it
is stopped. Otherwise it may cause
electric shock or injury.
Do not install the unit in a place subject
to steam or water vapor.
Otherwise it may cause poor insulation
and lead to fire or electric shock.
Do not install the unit in a place subject
to dew condensation.
Otherwise it may cause electric shock.
Do not modify or damage the cables.
Otherwise it may cause electric shock.
Be sure to ground the unit to avoid a rare
possibility of electric shock.
Otherwise it may lead to fire, electric
shock or injury.
Do not place any object on the unit.
Dangerous situations may occur if the
object drops or falls.
Do not put any object in the unit.
It may cause damage.
Do not disassemble, remodel or repair the
unit. High voltage may be built up inside,
which may cause electric shock.
Disassembly, remodeling or repair hamper
ensuring of safety and may lead to
dangerous situations.
Do not install the unit outdoors or in a
place subject to leaking of water, flood
or snow.
Otherwise it may cause electric shock.
NO
NO
NO
NO
DISASSEMBLY
NO
NO
GROUND
NO

iii
■ After reading this manual, be sure to store it in a place convenient for the users so that it can be
referred to at anytime.
！ 
Caution
Do not install the unit upside down or
on a wrong side.
Insufficient heat release may cause
deterioration of parts, which may
generate smoke or set fire.
Do not use the unit in a place subject to
high temperature or in an enclosed,
limited area.
It not only hampers the unit from
achieving its performance but also
causes deterioration of parts leading to
smoking or burning.
Do not wipe the unit with chemicals
(such as thinner) or wet cloth.
It may allow water inside leading to
electric shock, electrical leak or burning.
Do not cover the vent holes of the unit.
Vent holes are provided to prevent
elevation of temperature inside.
Covering them not only hampers the unit
from achieving its performance but also
causes deterioration of parts, which may
generate smoke or set fire.
Do not install the unit and the remote
controller in a place subject to direct
cold air. Condensation may lead to
electrical leak/burning.
Do not install the unit in a place subject
to corrosive gas or liquid (such as a
place where chemicals are handled).
Deterioration of parts may cause
generation of smoke or burning.
NO NO
NO NO
NO NO

iv
RESCUE
1. Free victim from contact with live conductor quickly.
Avoid contact with neither live conductor nor victim’s body.
2. Shut off high voltage at once and ground the circuit. If high voltage cannot be turned off
quickly, ground the circuit to discharge, or cut high voltage line by an ax with dry wooden
handle. Be careful of electric flash.
3. If circuit cannot be broken or grounded, use a dry board, dry clothing, or other
nonconductor to free victim.
4. Call an ambulance immediately.
SYMPTOMS
NEVER TAKE ELECTRICALLY SHOCKED CONDITION AS DEATH.
Symptoms of electric shock may include unconsciousness, failure to breathe, absence of
pulse, pallor, and stiffness, as well as severe burns.
Whenever victim is not breathing properly, give artificial respiration(see next page).
TREATMENT
1. Start artificial respiration at scene of accident. Only in case victim’s or
operator’s life is endangered, remove victim to safe location nearby.
2. After starting artificial respiration, continue without loss of rhythm until victim start
breathing without help, or being passed to medical aid.
3. When operator change while giving artificial respiration, do so without losing the
rhythm of respiration.
4. After giving first aid, try to get a diagnosis by a doctor as soon as possible because
shock can cause internal burn, which can be lethal if left untreated.
AFTER VICTIM REVIVES
Be prepared to resume artificial respiration, as he may stop breathing again.
Keep victim warm and lying down until he or she has been conscious for at least thirty minutes.
First-aid procedures to be implemented in case of electrical shock

v
1. PLACE VICTIM
Place victim in face-upward position horizontally.
2. CLEAR THROAT
Turn head to one side quickly wipe out any fluid, mucus, or
foreign body from mouth and throat with fingers.
3. OPEN AIR PASSAGE
Tilt head back and extend neck to open air passage.
4. LIFT JAW FORWARD
Put thumb in victim’s mouth and grasp jaw firmly. Lift jaw
forward to pull tongue out of air passage. Do not hold or depress
tongue.
5. PINCH NOSTRILS CLOSED
With other hand pinch nostrils closed to prevent air leak.
6. BLOW AIR IN
Take a deep breath, seal victim’s open mouth and exhale firmly into
victim’s mouth until chest is seen to lift.
Make sure to open mouth widely to avoid air leakage.
7.REMOVE MOUTH AND CHECK
Check the sound of breathing out air and see normal breathing
when releasing mouth. If no sound, repeat from OPEN AIR
PASSAGE. Continue at a rate of 12 to 20 times per minute.
Quantity of air have to be increased gradually. Especially when victim is infant, be carefully not to be
too strong, not to blow in too much air.
Keep giving artificial respiration until victim start breathing without help, or being passed to medical
aid.
Artificial respiration
7.Remove mouth and
check
6.Blow air in
3.Open air
passage
2.Clear throat

vi
1. WARRANTY POLICY
Matsusada Precision Inc. ("Matsusada") warrants that the products supplied by it will be free from
defects in materials and workmanship for a period of twelve (12) months from the date of original
shipment to buyer. This warranty shall not apply to any product which has been repaired, modified
or worked on by persons unauthorized by Matsusada, used other than in accordance with the
instruction manuals, used in inappropriate environment (with corrosive gas, high humidity, etc) or
damaged by any event beyond Matsusada's control such as force majeure. Matsusada shall in no
way be liable for any incidental, special or consequential damages relating to this warranty.
Matsusada's sole liabilities and the buyer's sole remedies shall be limited, at Matsusada's discretion,
to a repair or replacement of the products.
The foregoing warranty is in lieu of all other warranties, express or implied, including those of
merchantability or fitness for a particular purpose.
As the products are not designed and manufactured for applications which require extraordinary
reliability or safety, or affecting people's life (nuclear energy, aerospace, socially fundamental
facility, medical equipment, etc), this warranty shall not be applied for such applications. The
specific design and manufacturing might be required for such applications.
No modification or supplement of this warranty shall be binding unless in writing and signed by a
duly authorized officer of Matsusada.
2. INSTRUCTION MANUAL AND TEST DATA
・Each rack mount and bench top power supply have 1 instruction manual. Extra instruction manuals
available with charge.
・Schematics of products shall not be submitted to users. Test result or test data for the products
shall be available upon request with charge.
WARRANTY

ⅶ
CONTENTS
Page
SAFETY..................................................................................................................................................................................................ⅰ
For Safe use.........................................................................................................................................................................................ⅱ
First-aid procedures to be implemented in case of electrical shock...........................................................................ⅳ
Artificial respiration...........................................................................................................................................................................ⅴ
WARRANTY...........................................................................................................................................................................................ⅵ
CONTENTS...........................................................................................................................................................................................ⅶ
１Features and specifications .......................................................................................................................... 1
1-1 Summary .................................................................................................................................................................................... 1
1-2 Features ..................................................................................................................................................................................... 1
２Exterior view diagram ....................................................................................................................................... 2
2-1 Front panel ................................................................................................................................................................................ 2
2-2 Rear panel .................................................................................................................................................................................. 2
2-3 Dimensions ................................................................................................................................................................................ 3
３Installation and connection ............................................................................................................................ 4
3-1 General........................................................................................................................................................................................ 4
3-2 Initial checking ......................................................................................................................................................................... 4
3-3 Installation ................................................................................................................................................................................. 4
3-3-1 Installation conditions ................................................................................................................................................. 4
3-4 Connection ................................................................................................................................................................................ 5
3-4-1 Connnectiong to Input cable .................................................................................................................................... 5
3-4-2 How to Ground ............................................................................................................................................................... 5
3-4-3 Connection to load ....................................................................................................................................................... 6
４Functions .............................................................................................................................................................. 7
4-1 Panel function .......................................................................................................................................................................... 7
4-2 Display ......................................................................................................................................................................................... 7
５Operations ............................................................................................................................................................ 8
5-1 Operating instruction ............................................................................................................................................................ 8
5-1-1 Switch to local control or external control. ........................................................................................................ 8
5-1-2 Setting of output voltage. .......................................................................................................................................... 9
5-1-3 Setting of output current ......................................................................................................................................... 10
5-1-4 Setting of upramp time ............................................................................................................................................. 11
5-1-5 Setting of downramp time ....................................................................................................................................... 12
5-1-6 Setting of auto discharge ........................................................................................................................................ 13
5-1-7 Setting of auto voltage reversal ........................................................................................................................... 14

ⅷ
６Digital remote .................................................................................................................................................... 15
6-1 RS-232C connector ............................................................................................................................................................ 15
6-2 Communication method ..................................................................................................................................................... 15
6-3 Delimiter ................................................................................................................................................................................... 15
6-4 Command ................................................................................................................................................................................. 16
6-4-1 Syntax ............................................................................................................................................................................. 16
6-4-2 Character set for the command ........................................................................................................................... 17
6-4-3 Command lost .............................................................................................................................................................. 18
6-4-4 Reference ...................................................................................................................................................................... 19
７Analog remote .................................................................................................................................................. 26
7-1 Function of analog remote connector .......................................................................................................................... 26
7-2 Description of analog remote features ........................................................................................................................ 27

1 MATSUSADA PRECISION Inc. EＣＵ Series
１ Features and specifications
１ Features and specifications
1-1 Summary
ECU series is designed for Electrostatic Chuck application.
1-2 Features
・User-friendly panel layout which contain all basic functions.
・Output ON/OFF control.
・Output voltage and current setting.
・Setting of ramp time.
・Setting of auto discharge and auto voltage reversal.
・Digital display monitoring value of output voltage, current and center tap voltage.
・Remotely control via PC is possible.

2
MATSUSADA PRECISION Inc. EＣＵ Series
２ Exterior view diagram
２ Exterior view diagram
2-1 Front panel
① POWER ON/OFF switch
② HV ON/OFF switch
③ HV ON LED
④ Display
⑤ LOCAL/EXTERNAL switch
⑥ MODE switch
⑦ Left direction switch
⑧ Right direction switch
⑨ Numerical value setting encoder
2-2 Rear panel
① ANALOG REMOTE connector (Dsub-25)
② 24V input connector
③ RS-232C connector (Dsub-9)
④ -HV output connector (MHV connector)
⑤ HV CT center tap connector (BNC connector)
⑥ +HV output connector (MHV connector)
⑦ GND terminal (#6-32)
HV ON POWER
MODELOCAL/REMOTE
POWER SUPPLY
⑥
⑧
⑨
①②③④
⑤ ⑦
①
②
③
④
⑤
⑥
⑦

3 MATSUSADA PRECISION Inc. EＣＵ Series
２ Exterior view diagram
2-3 Dimensions

4
MATSUSADA PRECISION Inc. EＣＵ Series
３ Installation and connection
３ Installation and connection
3-1 General
After unpacking the unit, make sure that all of the following accessories are included in addition to
the unit.
(Accessories)
・Instruction manual
・Output cables (2)
・Input cable
・D-sub connector(25pin) and screws(#4-40x2)
3-2 Initial checking
Before attempting to start the unit, check the following points to make sure there is no failure.
(Do not put the power cable into the outlet yet.)
1. Check the panel and chassis for any apparent trace of impact such as a dent.
2. Turn the knobs on the front panel several times. Make sure that the rotation is smooth.
3. Turn the power switch ON and OFF. Make sure that the operation is normal.
4. If any failure is found, contact the carrier and a nearby sales office.
3-3 Installation
3-3-1 Installation conditions
・Install the unit horizontally for use.
・
Do not put any object on the unit.
・Do not install the unit in a place subject to a large amount of dust, corrosive gas, etc.
・Do not install the unit in a place subject to dew condensation.
・When operating welding by the unit, unplug all the connecting cable from the unit.
・Do not unscrew the plastic foot(4 pcs) and fix the unit using the screw hole because it is not
strong enough, and also fixing screw might contact internal circuit board.
MUST
NO
NO
NO
NO
CAUTION

5 MATSUSADA PRECISION Inc. EＣＵ Series
3 Installation and connection
3-4 Connection
３－４－１ Connecting to Input cable
This table is relationship Input cable color to Input Voltage
３－４－２ How to Ground
・ For safe operation, be sure to ground the ground terminal of power supply at
One point on the ground.
・ Make sure to connect the GROUND terminal correctly as shown above. Improper
grounding is dangerous and may cause an electric shock or damage the power
supply.
・ If there is a possibility of development of a short-circuiting of load or discharging,
make larger and shorter the grounding conductor.
RED +24V
GREEN CASE=GND
BLACK 0V
Ground at one point
Fig.3.1
MUST
Warning
MUST
Wires should be :
・more than 5SQ
・less than about 2m
・
not bared
MUST
Output cable
-HV +HV
chassis
Ground terminal
Electrode
+ + + + + - - - - -
In case not connected to chassis,
make sure to ground at one point
MUST

6
MATSUSADA PRECISION Inc. EＣＵ Series
3 Installation and connection
3-4-3 Connecting to load
・ Select the POWER ON/OFF switch to OFF.
・ Make sure to connect the power supply main body and the load cabinet to the GROUND.
Connect the enclosed high voltage shielded cable to the load cabinet. (Fig.3.1)
1. Make the setting of an output voltage to zero (0). Turn off the HV ON/OFF switch.
2. Check and confirm that the voltage is zero at an output voltmeter of this unit. (The voltmeter
on the power supply front panel does NOT read the output voltage when the power is turned
off, even if a charge still exists on the load.)
3. Turn off the POWER ON/OFF switch.
4. Grounding an output for more than 10 seconds, check and confirm that voltage is zero at
another voltmeter (for high voltage). It is especially dangerous that the load is capacitive or a
long cable is attached there to.
5. Make it a rule to touch load with right hand.
WHEN TOUCHING LOAD AFTER TURNIG OFF A HIGH VOLTAGE

7 MATSUSADA PRECISION Inc. EＣＵ Series
４ Functions
４ Functions
4-1 Panel function
1. POWER ON/OFF switch
Turning on the power switch, the unit will be stand-by mode.
2. HV ON/OFF switch
Turning on the switch, the unit shall generate the output.
Turn off the switch to stop the output.
3. HV ON indication LED
LED turns on when output in on.
LED blinks when output is ramp.
LED turns off when output is off.
4. LOCAL/EXTERNAL switch
Switch to local control or external control.
5. MODE switch
Switch between settings in order following: output voltage setting, output current setting,
upramp time setting, downramp time setting, auto discharge setting and auto voltage
reversal setting.
6. Left direction key switch ---
Move the cursor to left direction.
7. Right direction key switch ---
Move the cursor to right direction.
8. Numerical value setting encoder
Change the value selected by cursor.
4-2 Display
Center tap monitor
＋０．００ｋＶ＋０．００ｍＡ － ０Ｖ
－０．００ｍＡ ＬＯ
Voltage monitor Current monitor (+)
Current monitor (-) Local control/Remote control

8
MATSUSADA PRECISION Inc. EＣＵ Series
５ Operations
５ Operations
This unit offers following operations
・Switch to local control or external control.
・Setting of output voltage.
・Setting of output current.
・Setting of ramp time(up and down).
・Setting of auto discharge.
・Setting of auto voltage reversal.
・Output ON/OFF control.
5-1 Operating instruction
5-1-1 Switch to local control or external control.
1. Press LOCAL/EXTERNAL switch to switch to local control or external control.
Initial setting is external control.
＋０．００ｋＶ＋０．００ｍＡ － ０Ｖ
－０．００ｍＡ ＬＯ
External control
＋０．００ｋＶ＋０．００ｍＡ － ０Ｖ
－０．００ｍＡ ＥＸ
Local control

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t
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ramp time
discharge
s
voltage re
v
n
g
y
( ,
)
s
etting
s
etting
t
ting
setting
s
etting
v
ersal
)