Matsusada Precision ECA Series User manual

Instruction Manual
F-RA-001-3R3
MODEL ECAseries
ECA-1B6ｘ2
ECA-1B30ｘ２
ECA-3B2x2
ECA-3B10x2
ECA-5B1x2
ECA-5B6x2
ECA-10B1x2
ECA-10B0.5
ECA-10B3
B/N: 025.9.027 *025.9.027*Rev. 3.0

Note
◆All rights reserved.
◆No part of this publication may be reproduced, stored in a retrieval system, or transmitted,
in any form, or by any means, mechanical, electronic, photocopying, recording, or
otherwise, without the prior written permission of Matsusada Precision.
◆
No patent liability is assumed with respect to the use of the information contained herein.
Moreover, because Matsusada Precision is constantly striving to improve its high-quality
products, the information contained in this manual is subject to change without notice.
Every precaution has been taken in the preparation of this manual. Nevertheless,
Matsusada Precision assumes no responsibility for errors or omissions.
Neither is any liability assumed for damages resulting from the use of the information
contained in this publication.
Trademarks
◆Company names and product names in this document are the trademarks or registered
trademarks of their respective companies.
Warranty
We will repair this product free of charge if it has malfunctioned under normal usage
conditions within one year of delivery. However, repairs will be charged in the following
cases, even if during the warranty period.
1. Failures and damages that occurred due to inappropriate handling
2. Inappropriate repairs, adjustments, or modifications were made.
3. Failures and damages due to fire, natural disaster, abnormal voltage, etc.
This warranty is valid only in Japan.

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For Safe Use of the Product
◆Introduction
The product generates high-voltage and high-energy.
Therefore, wrongly handling or operating the product may result in death or serious injury and maybe
property damage as well. In order to use the product safely, read the instruction manual thoroughly before
use to understand how to use and operate it properly.
Please note that we will not be held responsible for any damage or loss caused by not following the
warnings, cautions, and procedures described in the manual.
Keep the manual with you so that you can read it whenever you want.
◆Symbols
Symbols are used in the manual and product, which indicate precautions to be observed for safe use.
Understand these symbols first and then read the manual thoroughly.
Some symbols below are not used in products.
Indicates a potentially hazardous situation, which, if not avoided, may
result in serious injury or death.
Indicates a potentially hazardous situation, which, if not avoided, may
result in minor or moderate injury or in property damage.
Indicates danger/warning/caution. Refer to
the instruction manual when this symbol
appears on the unit.
Frame or chassis terminal
Indicates the possible danger of electric
shock under specific conditions, which
may result in serious injury or death.
Ground terminal
High Temperature Caution:
Indicates the possible danger of injury by
high temperature under specific
conditions.
Power ON
Indicates general prohibitions, including
warnings.
Power OFF
Indicates what must be followed.
Standby
Protective earth terminal (ground terminal
for preventing electric shock)
Bistable push button switch
ON
Indicates the possible danger of death if
you drink it and burns or blindness if it
attaches.
Bistable push button switch
OFF
Indicates the possible danger of exposure
to radiation.
Alternative Current

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Understand the risks.
The Product generates high-voltage and high-energy.
The product is designed for electrical engineers or the equivalents who install, wire, and operate it.
Read the instruction manual thoroughly before use and familiarize yourself with the proper use and
danger of the product.
Make sure to allow only specific people to handle the product.
Make sure to allow only the following people to handle the product:
1. who are electrical engineers or the equivalents and have already familiarized themselves with the
proper use and danger of the product, or
2. who are electrical engineers or the equivalents and have already been trained by the
above-mentioned people, or
3. who work under the supervision of the above-mentioned people.
If people other than those listed above install, wire, or operate the product, it may cause electric
shock, burnout, or injury.
Do not open or remove the case or panel of the product.
Do not disassemble, repair, or modify the product by yourself. High-voltage is applied to the inside of it.
Otherwise, it may cause electric shock, fire, or malfunction.
Moreover, if you do it, the safety and functions are not covered with the warranty.
The product does not suit to install and use in places where children may be present.
The product is designed to be installed in places such as factories or laboratories. Do not install and use it
where children may be present.
Make sure to ground it.
When the product has a protection ground terminal or GND terminal, make sure to ground it.
When theAC line input of it is an inlet type, connect the attached power cable or a power cable suitable for
your area to an outlet with the ground. Otherwise, it may result in electric shock or fire.
Regarding power cable
When a power cable is enclosed or attached to the product, do not use it for other products.
When no power cable is enclosed with the product, prepare the power cable suitable for the usage
environment and area by yourself.
Regarding the connection of power cable
Electrical engineers or the equivalents who have already been familiarized with the proper use and danger
of the product should connect the power cable to the AC input by referring to the instruction manual.
Regarding products that have acquired the safety standard, check the page describing the over-voltage
categories too.
Do not process or damage power cables
It may result in electric shock or fire.
Regarding the input voltage
Check the page describing the input terminals and input voltage in the instruction manual.
Do not provide any voltage out of the specifications.

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Regarding the fuse
The product builds in a protective fuse. In the case where a fuse holder is arranged outside of the product,
you can replace it by yourself. Refer to the instruction manual to replace it.
In the case where a fuse holder is not arranged outside of the product, you cannot replace it by yourself.
In this case, do not open the case or panel of the product and contact us.
The product is designed for indoor use.
Use the product indoors only, not outdoors. Even indoors, do not use it if there is a possibility of water
leakage, flooding, or snow covering.
Regarding operating temperature and humidity
Use the product within the range of the specifications describing in the instruction manual.
Do not use it in a place where the ambient temperature exceeds the specified range or a closed place.
Do not install the product in places where condensation may occur.
Otherwise, insulation deteriorates and it may cause electric shock, fire, or malfunction.
Do not place anything on top of the product.
Otherwise, they may fall or tumble from it.
Do not put anything into the product.
Do not put foreign objects such as metal or liquid into the product through the air inlets, air outlets, or other
openings. Otherwise, it may result in electric shock, fire, or malfunction.
Operate the product with the right hand.
Use only your right hand to operate the product and keep your left hand away from it, which can reduce
the risk of electric current flowing through the left hand to the vital organs of the body in the event of an
electric shock.
Do not touch the wiring/load connected to the output and any terminals/connectors during the
operation or just after turning output off.
Very high-voltage is on the terminals and connectors during the operation and even just after the output is
turned off. Touching them may result in serious injury or death by electric shock.
The terminals here mean all terminals like input and output terminals and terminals for communications
and remote controls.
Turn off the product before touching the wiring/load connected to the product and any
terminals/connectors on the product and cut it off from the AC input.
Before touching the terminals/connectors and wiring/load, turn off the product and unplug the AC input
cable from the outlet or turn off the AC input breaker. Then, check there is no voltage remained using a
tester.
Since the output and sense terminals are connected to condensers in it, there is high-voltage remained on
them even just after it is turned off.
In order to avoid electric shock, ground the terminals to discharge using a short-circuit grounding
apparatus and check the voltage again.
The terminals here mean all terminals like input and output terminals and terminals for communications
and remote controls.

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Level the product out to use for good heat dissipation.
Do not install the product upside down or sideways. If not, the inner heat dissipation will be insufficient.
It may result in smoke or fire due to components deterioration.
Do not install the product in a place where cold air directly blows to it.
It may result in electric leakage or burnout due to condensation.
Do not install the product in a place where it is exposed to corrosive gases or liquids.
It may result in smoke or burnout due to components deterioration.
Do not install the product in a dusty place.
Accumulating dust in the air inlet will make hard to cool it down it, it may result in malfunction.
In that case, remove dust immediately.
Do not block the air inlet and outlet.
Secure 30 cm space at least around the openings.
If they are blocked, the product cannot show the rated performance due to the internal temperature
increase. Moreover, components deteriorate and it may result in smoke or fire.
Remove wiring to and from the product when work like welding near it is done.
Do not wipe the equipment with a dust cloth wet with chemicals (thinner or the like) or water.
Otherwise, it may result in an electric shock, electric leakage, or burnout due to water getting inside.
Regarding fan replacement
When products equip a fan, it has a lifetime. It will be worn out and deteriorated with the time passed and
its operation may become unstable. Also, its lifetime greatly varies depending on the usage environment
such as temperature, humidity, dust. It requires to be replaced at regular intervals to extend the lifetime.
For the replacement, contact us.
(It requires a replacement charge separately. Do not replace it by yourself, as there is a risk of electric
shock.)

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Table of Contents
Page
For Safe Use of the Product············································································································i
Table of Contents·························································································································v
1 Introduction······························································································································1
Introduction ························································································································11-1 Features····························································································································11-2 Lineup·······························································································································11-3 Specifications ·····················································································································21-4 Unpacking··························································································································21-5 Initial inspection···················································································································31-6 Installation··························································································································31-7
1-7-1 Installation conditions ·····································································································3
1-7-2 AC input cord connection·································································································4
1-7-3 GROUND connection······································································································4
1-7-4 Load connection ············································································································6
1-7-5 Troubleshooting·············································································································6
2 External View ···························································································································7
ECA-10B0.5/3·····················································································································72-1 ECA-1B/3B/5B/10B1 ············································································································82-2
3 Operation·······························································································································10
Overview ·························································································································103-1 How to Operate·················································································································103-2 Other Function··················································································································103-3
3-3-1 Protections ·················································································································10
3-3-2 Control connector: D-Sub 25-pin·····················································································11
3-3-3 Remote switch ON/OFF ································································································11
3-3-4 Interlock·····················································································································12
3-3-5 External voltage control·································································································12
3-3-6 Output current monitor ··································································································12
3-3-7 Output voltage monitor··································································································12
3-3-8 Power ON status signal·································································································13
3-3-9 Overcurrent status signal·······························································································13
3-3-10 Local/Remote status signal ··························································································13
3-3-11 Forced grounding ·······································································································14
4 Option···································································································································15
Output relay (-LRy) ············································································································154-1 RF filter 13.56MHz (-LRf(13.56M)) ························································································154-2 RF filter 500kHz (-LRf(500k)) ·······························································································154-3 Polarity change (-LPo)········································································································164-4 Output voltage limiter (-LVl)··································································································164-5

1 Introduction
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Matsusada Precision
1 Introduction
Introduction
1-1
Thank you very much for your purchase of our HIGH VOLTAGE POWER SUPPLY unit.
We have done our best for the quality control of the unit.
Please handle the unit properly according to this instruction manual so that you can use the full
performance of the unit safely for long.
We have carefully prepared this instruction manual, but if you find any doubtful or unclear points or
any omission, please contact us immediately.
Features1-2
・Designed for electrostatic chuck application
・Combining 2 channels* of output
・Available in unipolar and bipolar systems
・Built-in RF filter (option)
・No relay, high stability, long service life
*1 channel for Model: ECA-10B0.5/3
Lineup1-3
Model
Output voltage
(by channel)
Output current
(by channel)
Channel
Input current
(at 115 Vac) MAX
ECA-1B6x2
-1kV to +1kV
6mA
2ch
1A
ECA-1B30x2
30mA
3A
ECA-3B2x2
-3kV to +3kV
2mA
1A
ECA-3B10x2
10mA
3A
ECA-5B1x2
-5kV to +5kV
1mA
1A
ECA-5B6x2
6mA
3A
ECA-10B1x2
-10kV to+10kV
1mA
1A
ECA-10B0.5
-10kV to +10kV
0.5mA
1ch
1A
ECA-10B3
3mA
3A

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Specifications1-4
Model
ECA-
1B6x2
1B30x2
3B2x2
3B10x2
5B1x2
5B6x2
10B1x2
10B0.5
10B3
Input voltage
100 to 240Vac 50/60Hz single phase
Chuck ON/OFF
Local: HV switch on the front panel ON/OFF (simultaneously for
2chanels)
Remote: Remote switch ON/OFF（separately for each channel）
Output voltage control with the potentiometer on the front panel
(separately for each channel）
Output voltage control with the external control voltage
(separately for each channel）
Ac input voltage ON/OFF (simultaneously for all channels)
1ch
Output voltage
control
Local: 10-turn potentiometer on the front panel (separately for
each channel）
Remote: External control voltage source (separately for each
channel）
Vcon-in = -10V to +10V (Input impedance 10kΩor more)
The toggle switch on the front panel can change
Remote/Local control simultaneously for both channels.
1ch
Ripple
0.1rms
Output display
3-digit digital meter for each channel(Switching display of voltage or current)
Output monitor
Output voltage: -10V to +10V（separately for each channel）
Output current: -10V to +10V（separately for each channel）
Output impedance: 1kΩ
1ch
Protections
Overcurrent protection: dropping characteristic of output voltage in high voltage
Overvoltage protection: limited at 110% of rated voltage
Output short circuit
Protection against arc discharge
Interlock
Fuse: Normal break, 3A、φ6.4x30mm
Forced
discharge
Output is forcedly grounded with the external signal.
(by contact shortcut separately for each channel)
1ch
Temperature
Humidity
Operating temperature: 0℃to +40℃, Storage humidity: -20℃to +60℃, Humidity: 20%
to 80% (no condensation)
Dimension
HDW: mm
89x550x483
89x610x483
133x550x483
Weight
Approx. 10kg
Approx.15kg
Unpacking1-5
When unpacking, check the following accessories are enclosed with the unit.
If the accessories are different, missing, or broken, contact us immediately.
<Accessories>
□
□
□
Instruction manual
AC input cord
Output cable
1 pc
1 pc
2 pcs (or 1 pc for ECA-10B0.5/3)
□
D-Sub connector
1 pc

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Matsusada Precision
□
Cover for D-Sub connector
1 pc
Initial inspection1-6
Check the product for abnormality before wiring.
1. Check the panel and the chassis for obvious impact such as scratches and dents on the surface
caused by the transport or handling.
2. Confirm that the dials can turn smoothly.
3. If an abnormality is found, contact both Matsusada Precision and the delivery company.
Installation1-7
1-7-1 Installation conditions
This product is a high voltage supply.
Be sure to follow the safety precautions for proper use of the product. Otherwise, there is a danger of
electric shock that could result in death.
When using the product, follow the precautions described below to ensure proper use.
Set and use the unit horizontally.
Secure enough space for better ventilation in front and back of the unit not to block air
inlet and outlet for cooling.
When installing the unit in an enclosed cabinet, mount forced exhaust to prevent exhaust
heat from returning to the air inlet.
If dust collects in the air inlet, remove it immediately. It prevents the unit from cooling.
Do not install breakers and disconnects which are considered as difficult to operate.
Do not place anything on top of the unit.
Avoid using the product in locations that are subject to dust and corrosive gas.
Do not install the unit in a place where condensation may occur.
Do not use any substitute in the internal circuit or do not modify for yourself. Contact us
for repair and remodel.
Prevent liquids or metals from entering the unit through the air inlet and outlet. It may
result in malfunction, electric shock, or fire.
Do not store or use the product in a place where conductive dust, such as iron powder,
can enter through the air inlet/outlet.
Doing so may cause a short circuit, resulting in electric leakage, burnout, fire, or
malfunction.
Support chassis of the product with the guides when the product is installed in a rack.
Never support the unit only by using the mounting holes on the front panel.
The handles on the front panel are used to change the direction of the unit or pull out the
unit mounted in a rack. Avoid any application that the entire weight of the unit is applied
to the handles on the front panel.
Do not take impact to protrusions on the front panel or rear panel when you move the
product.

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Matsusada Precision
1-7-2 AC input cord connection
Securely attach the AC input cable to the inlet on the rear panel of the unit.
For safety reason, fix the cord with vinyl clamps.
The providedAC input code is different in types between 115Vac and 230Vac.
*The 115Vac type is available for commercial power supply.
*In the 230Vac type, the terminal of the AC input cord must be attached with a crimp terminal,
etc, to be connected in the commercial power distribution panel.
Wire colors to the distribution panel connection
NEUTRAL
Blue
LINE
Brown
GROUND
Yellow/Green
It is very dangerous if the unit is not electrically grounded by the AC input connector.
Confirm the AC input voltage displayed on the rear panel to correctly input the
voltage.
Using the unit with an incorrect voltage could cause damage to it.
1-7-3 GROUND connection
Be sure to ground the GND terminal of the power supply at a single point for safety
reason.
AC input cord connection (at 115Vac)

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5 ECA series
Matsusada Precision
A) ECA-10B0.5/3: Not grounded
B) ECA-10B0.5/3: Grounded
C) ECA-1B/3B/5B/10B1 with 2 channels
Be sure to connect the GROUND as sown above. Improper grounding may result in
electric shock or serious damage to the unit.
If there is a risk of short circuit or discharge of the load, make the GROUND line
even thicker and shorter.
Output cable
GND terminal
Ground
Load frame
Load
Ground it at one point with Class D
or more.
Wires should be:
・more than 5sq
・less than about 2m
・No bare wire
Handy case
Handy case
Output cable
GND terminal
Load frame
CH2
CH1
Output cable
+ + + + +
- - - - -
Load frame
GND
terminal
Electrode
Load
Wires should be:
・more than 5sq
・less than about 2m
・No bare wire
Ground it at one point with Class D
or more.
Ground it at one point with Class D (Class 3) or more.
If it is not
grounded the
frame, ground it at
one point with
Class D (Class 3)
or more.
Wires should be:
▪more than 5sq
▪less than about 2m
▪No bare wire

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1-7-4 Load connection
Turn the [POWER ON/OFF] OFF.
(For safety reason, it is recommended to disconnect the AC input cord of the power supply
unit.)
Be sure to connect the power supply unit and load frame to ground.
The shield wire of the attached output cable must be connected to the load frame.
When touching the load after the high voltage is turned off,
1. Set the output voltage to 0 or turn OFF the [HV ON/OFF] switch.
2. Confirm that the voltage is zero using the output voltmeter on the unit.
3. Turn the [POWER ON/OFF] switch OFF.
4. Ground the output for 10 seconds or more, and then, confirm that the voltage is zero using another
output voltmeter.
5. Be sure to touch the load with the right hand.
1-7-5 Troubleshooting
In case there is no output voltage:
1. Check if the proper input voltage is supplied to the unit.
The input voltage of the product
Control voltage for external voltage control: -10V to +10V
2. Check that the wire for external voltage control is correctly connected to the control
connector on the rear panel.
3. Check if the option function is properly used according to the instruction manual.

2 External View
7 ECA series
Matsusada Precision
ECA-10B0.5/32-1
Front panel
(1)
POWER ON/OFF switch (with cover)
(5)
REMOTE/LOCAL change switch
(2)
HV ON/OFF switch (with cover)
(6)
Voltage/Current display change switch
(3)
Output setting dial
(7)
Output polarity change switch (-LPo option)
(4)
Output voltage/current meter
(8)
Output voltage limiter (-LVl option)
Rear panel
(1)
GROUND terminal
(4)
INPUT AC connector
(2)
Output connector
(5)
Control connector
(3)
FUSE (3A)
(6)
Fan
2 External View
(7)
(2)
(1)
(3)
POWER
HV
Adj.
REMOTE
LOCAL
kV
mA
REVERSE
NORMAL
OVP
(5)
(6)
(4)
(8)
GND
FUSE
OUTPUT
CONTROL
Vinyl clamp for
fixing AC cord
(4)
(6)
(2)
(5)
(3)
(1)

2 External View
8 ECA series
Matsusada Precision
ECA-1B/3B/5B/10B12-2
Front panel
(1)
POWER ON/OFF switch (with cover)
(7)
REMOTE/LOCAL change switch
(2)
HV ON/OFF switch (with cover)
(8)
CH1 Voltage/Current display change switch
(3)
CH1 Output setting dial
(9)
CH2 Voltage/Current display change switch
(4)
CH2 Output setting dial
(10)
CH1 Output voltage limiter (-LVl option)
(5)
CH1 Output voltage/current meter
(11)
CH2 Output voltage limiter (-LVl option)
(6)
CH2 Output voltage/current meter
(12)
CH1 Output polarity change switch (-LPo option)
(13)
CH1 Output polarity change switch (-LPo option)
Rear panel: ECA-10B1x2
(1)
GROUND terminal
(5)
INPUT AC connector
(2)
CH1 Output connector
(6)
Control connector
(3)
CH2 Output connector
(7)
Fan
(4)
FUSE (3A)
(7)
(5)
(6)
(9)
(8)
(10)
(11)
(4)
(3)
(2)
(1)
(13)
(12)
mA
POWER
HV
Adj.
Adj.
REMOTE
LOCAL
kV
mA
kV
CH1
CH2
NORMAL
REVERSE
NORMAL
REVERSE
OVP
OVP
(5)
(7)
(3)
Vinyl clamp for
fixing AC cord
(6)
(4)
(2)
GND
FUSE
OUTPUT②
OUTPUT①
CONTROL
(1)

2 External View
9 ECA series
Matsusada Precision
Rear panel: ECA-1B/3B/5B
(1)
GROUND terminal
(5)
INPUT AC connector
(2)
CH1 Output connector
(6)
Control connector
(3)
CH2 Output connector
(7)
Fan
(4)
FUSE (3A)
(5)
(7)
(3)
Vinyl clamp for
fixing AC cord
(6)
(4)
(1)
(2)
GND
FUSE
OUTPUT②
OUTPUT①
CONTROL

3 Operation
10 ECA series
Matsusada Precision
Overview3-1
ECA-10B0.5/3 is a polarity switchable bipolar high voltage power supply, and the other models
employ with two output channels which are used for electrostatic chucks.
How to Operate3-2
1. Before operating the unit, check that the input and output are properly connected as shown in
[1-7-3 GROUND connection]. For safety, be sure to connect the ground terminal on the rear
panel to the ground at one point.
2. Plug the end of the enclosed AC input cord to the AC input connector on the rear panel and then
plug another end to an electric outlet.
(For safety, be sure to fix the cord with vinyl clamps for securing cables.)
3. Connect the interlock. Refer to [3-3-4 Interlock].
4. Turn ON the POWER ON/OFF switch to be in stand-by mode, and then, the lamp is on in orange.
5. In this mode, no high-voltage has been applied to the output terminal.
6. When the HV ON/OFF switch is turned ON, the HV lamp will be on in red, the unit will turn on its
output. (in local mode)
7. Turn the output setting dial to set your desired value.
When you want to lock the output at a set voltage, turn the locking lever
clockwise as shown in the diagram to the left
The output voltage and current are displayed on the front panel digital
meter.
To change the voltage/current display, use the Voltage/Current display change switch on the right
of the meter.
8. To end the operation, set the output setting dial back to 5 or leave it when the same value is used
again, and then, turn OFF the HV ON/OFF switch and POWER ON/OFF switch in order.
Output setting dial
Scale
Output voltage
0 (ccw)
-Rated voltage
5
0kV
10 (cw)
+Rated voltage
Other Function3-3
3-3-1 Protections
a. Overvoltage protection (OVP)
This unit has overvoltage protection. In case of an abnormal state, the unit will limits the output
voltage at approx. 110% of the maximum rated voltage to protect the unit and the load.
b. Overcurrent protection (OCP)
This unit has overcurrent protection. In case of an overcurrent state, the unit drops the output
voltage to limit its output current.
3 Operation
Locking
lever
OUTPUT VOLTAGE
SETTING DIAL

3 Operation
11 ECA series
Matsusada Precision
3-3-2 Control connector: D-Sub 25-pin
*ECA-10B0.5/3 has CH1 only, and CH2 is left as NC.
3-3-3 Remote switch ON/OFF
With the remote switch, the output can be turned ON/OFF regardless of the HV ON/OFF switch
setting (with Remote mode only).
CH1 Polarity change PIN 8
Common PIN
9
CH1 HV ON/OFF PIN10
Overcurrent status PIN11
Power ON status PIN12
Local/Remote status PIN13
PIN 7 CH1 Output relay
PIN 6 CH1 Forced grounding
PIN 5 CH1 Monitor Common
PIN 4 CH1 Output current monitor output
PIN 3 CH1 Output voltage monitor output
PIN 2 CH1 External control voltage common
PIN 1 CH1 External control voltage input
Status common PIN25
Interlock PIN24
CH2 HV ON/OFF* PIN23
Common* PIN22
CH2 Polarity change* PIN21
CH2 Output relay* PIN20
PIN14 CH2 External control voltage input*
PIN15 CH2 External control voltage common*
PIN16 CH2 Output voltage monitor output*
PIN17 CH2 Output current monitor output*
PIN18 CH2 Monitor Common*
PIN19 CH2 Forced grounding
13
1
25
14
D-Sub connector
M2.6 fixing screw
D-Sub connector
M2.6 fixing screw
Remote change by
switch
SHORT: Output ON
OPEN: Output OFF
Remote change
Remote change by open
collector *1
Open collector is also
available instead of switch.
E
C
Switch
(9)
(10)
CH1
Switch
(9)
(23)
CH2
E
C

3 Operation
12 ECA series
Matsusada Precision
3-3-4 Interlock
Opening the door switch will cut off the high-voltage output. For safety, once the output is cut off,
the output will not be turned on even if the switch is turned ON again.
To clear the state, short-circuit the switch and then turn ON the POWER switch again.
3-3-5 External voltage control
In remote mode set by short-circuiting between pin 20 and 17, output voltage and current can be
controlled with an external voltage from 0 to +10V.
3-3-6 Output current monitor
Avoltage of ±10V will be output at the maximum rating current. The output impedance is 1kΩ.
The polarity of the monitor output follows that of high-voltage output.
3-3-7 Output voltage monitor
Avoltage of ±10V will be output at the maximum rating voltage. The output impedance is 1kΩ.
The polarity of the monitor output follows that of high-voltage output.
(15)
(14)
COM
CH2
Icon-in
(2)
(1)
COM
CH1
Vcon-in
COM
(5)
V
(3)
Vmoni
COM
(18)
V
(15)
Vmoni
Interlock by switch
Switch
(25)
(24)
Interlock
SHORT: Output ON
OPEN: Output OFF
Interlock by open
collector*1
E
C
Open collector is also
available instead of switch.
COM
(5)
V
CH1
Imoni
(4)
COM
(18)
V
CH2
Imoni
(17)