MICRO-EPSILON interferoMETER IMS5400-DS19 Installation guide

IMS5400-DS19
IMS5400-TH45
IMS5400-TH70
IMS5400-DS19/MP
IMS5400-TH45/MP
IMS5400-TH70/MP
IMS5600-DS19
IMS5600-DS19/MP
Quick Manual
interferoMETER

MICRO-EPSILON
MESSTECHNIK
GmbH & Co. KG
Koenigbacher Str. 15
94496 Ortenburg / Germany
Tel. [phone] / 168-0
Fax [phone] / 168-90
e-mail [email protected]
www.micro-epsilon.com
You can find further information about the measurement
system in the operating instructions. They are available at:
Contents
General ........................................................... 3
Symbols used .................................................... 3
Warnings ............................................................ 3
Intended Use...................................................... 4
Proper Environment........................................... 4
Glossary ............................................................. 5
Laser Safety.................................................... 5
Operating Modes............................................ 6
Setup, Connection Options ........................... 6
Sensor Cable ..................................................... 7
Mounting, Mounting Adapter............................. 7
Pluggable Screw Terminals ............................... 8
LEDs Controller .............................................. 9
Button Multifunction......................................... 10
Initial Operation..........................................................................11
Select a Sensor...............................................................................11
Start of Measuring Range, Working Distance ................................11
Positioning the Target, Distance Measurement..............................12
Positioning the Target, Thickness Measurement............................13
Messpeak Sorting ...........................................................................14
Number of Peaks ............................................................................17
Material Selection............................................................................21
Measurement Configuration ...........................................................25
Signal Quality .................................................................................26
FFT Signal Check ...........................................................................27
Distance and Thickness Measurement, Web Page Display.....28
Data Output, Interface Selection ...............................................30
Ethernet ......................................................................................30
Set IP Address............................................................................31
Disclaimer...................................................................................31
Service, Repair ...........................................................................32
www.micro-epsilon.com/download/manuals/
man--interferoMETER-5x00--en.pdf

Page 3
General
IMS5x00
General
Symbols used
The following symbols are used in this document:
CAUTION Indicates a hazardous situation which, if not avoided, may result in minor or moderate injury.
NOTICE
Indicates a situation that may result in property damage if not avoided.
Indicates a user action.
iIndicates a tip for users.
Measure Indicates hardware or a software button/menu.
Warnings
CAUTION Connect the power supply and the display/output device according to the safety regulations for
electrical equipment.
> Risk of injury, damage to or destruction of the controller
NOTICE
The supply voltage must not exceed the specified limits.
> Damage to or destruction of the controller
Avoid shocks and impacts to the sensor and the controller.
> Damage to or destruction of the components
Never kink optical fibers or bend them in thight radii.
> Damage to or destruction of the optical fibers; failure of measurement device
Protect the ends of the optical fibers against contamination
> Failure of the measuring device
Protect the cable against damage.
> Failure of the measuring device

Page 4
General
IMS5x00
Intended Use
- The interferoMETER measuring system is designed for use in an industrial environments and domestic areas.
It is used for
measuring displacement, distance, profile, thickness and surface inspection
monitoring quality and checking dimensions.
- The measuring system must only be operated within the limits specified in the technical data, see operating instruc-
tions chap. 3.
- The measuring system must be used in such a way that no persons are endangered or machines and other
material goods are damaged in the event of malfunction or total failure of the controller.
- Take additional precautions for safety and damage prevention in case of safety-related applications.
Proper Environment
- Protection class
sensor: IP40 (with connected sensor cable only)
controller: IP40
Lenses are excluded from protection class. Contamination of the lenses causes impairment or failure of the function.
- Temperature range
operation
• sensor: +5 ... +70 °C (+41 ... +158 °F)
• controller: +15 ... +35 °C (+59 ... +95 °F)
storage: -20 ... +70 °C (-4 ... +158 °F)
- Humidity: 5 - 95 % (non-condensing)
- Ambient pressure: Atmospheric pressure
- EMC: According to EN 61000-6-3 / EN 61326-1 (Class B) and EN 61 000-6-2 / EN 61326-1

Page 5
Laser Safety
IMS5x00
Glossary
MR = Measuring range
SMR = Start of measuring range
MMR = Mid of measuring range (=SMR + 0.5MR)
SMRDistance sensor
Thickness sensor
Working distance
Operating range
MR
Measurement object
You can find further information about the sensors in the
operating instructions, chapter Technical Data.
Laser Safety
The interferoMETER measuring system works with a
pilot laser of a wavelength of 635 nm (visible / red)
offering max. power of < 0.01 mW and a measuring
laser of a wavelength of 840 nm with a max. power of
< 0.2 mW.
The measuring system falls within laser class 1. The
accessible radiation is harmless under predictable con-
ditions.
For class 1 laser devices, impairment of color vision
and disturbances, e.g., from a glare effect, cannot be
excluded.
An LED signalizes by illumination that laser radiation
emits from the optical opening of the light source
(“Pilot on”).
Class 1 Laser Product
IEC 60825-1: 2014
P≤0.01 mW; =635 nm
COMPLIES WITH 21 CFR 1040.10 AND 1040.11
EXCEPT FOR CONFORMANCE WITH IEC 60825-1
ED. 3., AS DESCRIBED IN
LASER NOTICE NO. 56, DATED MAY 8, 2019.
Class 1 Laser Product
IEC 60825-1: 2014
P≤0.2 mW; =840 nm
COMPLIES WITH 21 CFR 1040.10 AND 1040.11
EXCEPT FOR CONFORMANCE WITH IEC 60825-1
ED. 3., AS DESCRIBED IN
LASER NOTICE NO. 56, DATED MAY 8, 2019.
LASER Klasse 1
nach DIN EN 60825-1: 2015-07
P≤0,01 mW; =635 nm
LASER Klasse 1
nach DIN EN 60825-1: 2015-07
P≤0,2 mW; =840 nm

Page 6
Operating Modes
IMS5x00
Operating Modes
The interferoMETER measuring system provides highly
accurate measurements of
- distances against visually dense materials with
light-diffusing or reflective surfaces
- thicknesses for transparent layer materials.
By selecting the sensor, the distance or thickness mea-
surement operating mode is selected.
Accordingly, the result of the measurement is a distance
or thickness value.
Distance
measurements
Thickness
measurements
Measuring range 2.1 mm 35 µm ... 1.4 mm 1
Measuring ranges for distance and thickness measure-
ments
The possible resolution here is in the nanometer range.
For a quick start, we recommend to use presets defined
for different target surfaces and applications, see operat-
ing instructions Chap. 6.6.
1) Measuring range with n=1.5; for air gap measure-
ment between two glass plates (n~1) the measuring
range is 0.05 ... 2.1 mm. The measurement object
must be within the working distance.
Setup, Connection Options
Connect the components together and mount the
sensors into the clamps.
Controller
PLC
2-Port
EtherCAT
Junction
Switch /
Hub
IF2001/USB
IPC
IPC
Run
X1
X2
PS 2020
Patch cable 2x RJ45
Patch cable 2x RJ45
SC2471-x/RS422/OE
USB
Sensor
A more detailed description of the connection options is
available in the operating instructions.

Page 7
Setup, Connection Options
IMS5x00
Sensor Cable
Sensor and controller are connected through an
optical fiber.
- Do not shorten or extend the optical fiber.
- Do not pull or hold the sensor on the optical fiber.
Do not kink the optical
fiber.
Do not crush the opti-
cal fiber, do not fasten
it using cable ties.
Please do not grind the
optical fiber over sharp
corners.
Do not pull the optical
fiber.
Cleaning of the connectors requires the
corresponding know-how.
General Rules
As a matter of principle, avoid:
- any contamination of the connector, e.g., dust or finger
prints
- unnecessary mating cycles.
- any mechanical stress of the optical fiber (bending,
crushing, pulling, twisting, knotting etc.).
- tight curvature of the optical fiber because the glass fiber
is damaged in the process and this causes permanent
damage.
Never bend the cable more tightly than the permissible
bending radius.
R
Fixed: R = 30 mm or more
Flexible: R = 40 mm or more
Mounting, Mounting Adapter
The sensors use an optical measuring principle that allows for
measurements in the nm range.
iEnsure careful handling during installation and opera- tion.
Mount the sensors with an outer clamp. Use the MA5400-
10 mounting adapter from the optional accessories.
This type of sensor installation ensures the highest level of
reliability because the sensor’s cylindrical cover is clamped
over a relatively large area.

Page 8
Setup, Connection Options
IMS5x00
Pluggable Screw Terminals
Pin Description Comments
U/I out GND Shield
Analog Out
U/I out
Voltage output
0 ... 5 V; 0 ... 10 V; Riappr. 50 Ohm
5.5 V / 10.9 V with error, outside measuring
range
Current output 4 ... 20 mA; RL ≤ 500 Ohm
23.7 mA with error, outside measuring range
GND Ground analog output Galvanically connected with supply
+Sync/Trig
-Sync/Trig
Synchronization input/out-
put, trigger input RS422 level (EIA422)
+ Sync/Trig
- Sync/Trig
Digital I/O
GND Shield TrigIn GND Error 1 GND Shield Error 2 GND
TrigIn Trigger input
TTL or HTL level
TTL: Low ≤ 0.8 V, High ≥ 2 V
HTL: Low ≤ 3 V, High ≥ 8 V
Error 1 / 2 Switch outputs NPN, PNP or Push-Pull
Imax = 100 mA, UH max = 30 V
GND Ground potentials All GND conductors are interconnected with
one another and to operating voltage ground.
24 VDC Operating voltage ± 15 %, Imax < 1 A
24 VDC GND Shield
Power
GND Operating voltage ground
GND is galvanically connected to GND of
switching outputs, synchronization, analog
and encoder input
Shield Shields to respective output/input, connector housing
The plug-in screw terminals are designed for a conductor cross-section of 0.14 mm² up to 1.5 mm².

Page 9
LEDs Controller
IMS5x00
LEDs Controller
Power on Green Operating voltage available
The LED’s Intensity and Range
flashes with their current color
during a synchronization error.
1) When measuring outside
the optimum current value of
the SLED, the controller will
measure, but the measure-
ment accuracy may not be as
specified.
Status Off No error
If EtherCAT is active, meaning of the LED is conform with the Ether-CAT guidelines.
Red Signal in saturation
Yellow Signal too low
Green Signal ok
Red SLED of
Yellow SLED warms up
Green SLED ready for operation
Yellow flashing SLED current outside the optimal value range 1
Red Pilot laser off
Green Pilot laser on
Green Pilot laser is alternately turned on and off,
if no target object or outside the measuring range
IMS5400-DS19
IMS5400-TH45
IMS5400-TH70
IMS5600-DS19
IMS5400-DS19/MP
IMS5400-TH45/MP
IMS5400-TH70/MP
IMS5600-DS19/MP
Distance and thickness measurment Distance measurment Thickness measurment
Red No target object, or target object
outside the measuring range
The expected number of peaks was not found or
it was not possible to assign a distance.
The expected number of peaks was
not found or it was not possible to
assign a thickness.
Yellow Target close to mid of measuring
range
The expected number of peaks was found. A valid
distance could be found for each peak. Center
point of the target in the area surrounding the mid
of the measuring range.
-
Green Target within measuring range The expected number of peaks was found. A valid
distance could be found for each peak.
The expected number of peaks was
found. A valid thickness could be
found for each peak.

Page 10
LEDs Controller
IMS5x00
Button Multifunction
The Multifunction button of the controller has multiple functions. It enables, e.g., to operate the light source.
The button is factory-set to the Pilotlaser on/off feature.
Key function
1 / 2
Set / reset
master value Starts or stops the master measurement of the selected signals
Pilot laser Turns on/off the pilot laser
SLED Turns the light source on/off for the sensor
Inactive Key has no function
There are two defined time intervals for pressing the button; each of these can be assigned a function. All time inter-
vals are indicated by the LEDs flashing/lighting up.
Pilot laser
SLED
Master value
Function 1
2 sec05 sec 10 sec 15 sec
Function 2
Key
lock
x min time
Factory
setting
The Intensity and Range
LEDs indicate the current-
ly selected function.
Multifunction Button
Actuation Time
flashes
slowly
off flashes
slowly
both
off
green
on
off both on

Page 11
Initial Operation
IMS5x00
Initial Operation
iInitializing starts after the voltage supply has been switched on. The measuring system is ready for
use after approx. 10 seconds. To ensure precise
measurements, let the measuring system warm up
for approx. 60 minutes.
The controller is factory set to the static IP address
169.254.168.150. Use this address for a direct connec-
tion with a browser.
The start screen of the controller software is displayed in
the web browser now.
You can check the IP address of the controller, that are
connected to a PC / network, with the sensorTOOL.
exe program. This program is available online at https://
www.micro-epsilon.com/download/software/sensor-
TOOL.exe.
Start the program sensorTOOL and click the button
.
Click the Open Website button to connect the con-
troller to your default browser.
Select a Sensor
Change to the Settings > Sensor menu.
Select a sensor from
the list.
Start of Measuring Range, Working Distance
A offset distance (SMR) or working distance between each
sensor and the target must be kept.
Distance sensor SMR
Thickness sensor
Working distance
Operating range
MR
Measurement
object

Page 12
Initial Operation
IMS5x00
Positioning the Target, Distance Measurement
The red-light pilot laser supports you in aligning the
sensor to the target during commissioning.
Turn on or off the pilot laser in the menu Settings >
System settings.
Position the target (measurement object) as much
as possible in the mid of the measuring range.
100 %
50
0
Sensor SMR
SMR MMR EMR
Dis-
tance
Signal
Target
Measuring range (MR)
max. ±1 °
The LED Range on the controller front indicates the
position of the target in relation to the sensor.
Green
Pilot laser is turned on and
off alternately, if no target or
outside the measuring range
You can also position the sensor using the FFT sig-
nal 1. The interferometric measuring principle provides
measurement values in front of and behind the actual
measuring range. An incorrect measuring range dis-
tance can be recognized by the running direction of the
peak in the FFT signal. Inverse direction of FFT signal, if
the target is outside measuring range.
Distance between sensor
and target becomes smaller
Distance between sensor
and target becomes greater
Using the FFT signal for sensor positioning
Red No target or target outside the
measuring range
Yellow Target close to mid of
measuring range
Green Target within measuring range
1) FFT = Fast Fourier Transformation, frequency signal

Page 13
Initial Operation
IMS5x00
The LED Range on the controller front indicates the
position of the target in relation to the sensor.
Red No target or target outside the
measuring range
Yellow Target close to mid of
measuring range
Green Target within measuring range
Green
Pilot laser is turned on and off
alternately, if no target or
outside the measuring range
1) The maximum thickness for a air gap is 2.1 mm. The
thickness for glass (n = 1.5) is 35 µm as a minimum
and 1.4 mm as a maximum.
Positioning the Target, Thickness Measurement
The red-light pilot laser supports you in aligning the
sensor to the target during commissioning.
Turn on or off the pilot laser in the menu Settings >
System settings.
Position the target (measurement object) as much
as possible in the mid of the operating range.
The peak positions remains stable in the FFT signal,
even though the measurement target moves. The peak
position depends on the target thickness.
Operating range
Working distance
Measuring range
thickness 1
Basics thickness measurement

Page 14
Initial Operation
IMS5x00
Messpeak Sorting
The selection of peak/peaks dictates which region in the signal is used for the distance or thickness measurement.
Switch to material selection by going to Settings > Data recording.
Switch to the chart type FFT.
Choose between First peak and Highest peak.
Controller IMC5400, IMC5600
Thickness Distance
Layer 1 Peak 1
Peak 1
Peak 2
Layer 1 Peak A 1
The IMS5400-THxx evaluates one layer. The peak in the FFT
signal already corresponds to the thickness. It is not neces-
sary to decide between the first and highest peak.
Intensity [%]
0 80
Range [%]
20 40 60
The first peak is evaluated
1) During a distance measurement on transparent objects, thickness peaks are displayed in addition to the distance peaks, but the
controller does not evaluate them. For the sake of clarity, thickness peaks are marked with letters.

Page 15
Initial Operation
IMS5x00
Controller IMC5400/MP, IMC5600/MP
Thickness Distance
Each peak represents a thickness value. The peaks are count-
ed starting at the start of the measuring range (for the thinnest
layer) toward the end of the measuring range (for the thickest
layer). Combined thicknesses of adjacent layers are also eval-
uated.
The material selection for a thickness measurement starts with
the thinnest layer (layer 1) independent of the physical arrange-
ment in the measuring object, see Chap. Material Selection.
Each detected peak represents a distance value. The peaks
are counted starting at the start of the measuring range (short
distance between sensor and target) in the direction of the end
of the measuring range (long distance between sensor and
target).
Peak 4
Peak 2Peak 3
Peak 6
Peak 5
Peak 1
Layer 3
Layer 2
Layer 1
Layer 1
Peak 1
Peak A 1
Peak 3
Peak 4
Peak 2
Layer 3
Layer 2
Peak B
Intensity [%]
0 80
Range [%]
20 40 60
Intensity [%]
0 80
Range [%]
20 40 60
1
Evaluation starts with the first peak, e.g. 3 out of 4 peaks

Page 16
Initial Operation
IMS5x00
Intensity [%]
0 80
Range [%]
20 40 60
Intensity [%]
0 80
Range [%]
20 40 60
Evaluation starts with the highest peak, e.g. 3 out of 4 peaks
The number of peaks of the FFT signal that are used for evaluation in distance and thickness measurement are to be
determined separately, see Chap. Number of Peaks.
In the case of a target consisting of several transparent layers, the material must be assigned for each layer, see Chap.
Material Selection.
With distance measurements, the coating thickness can be calculated via signal processing, see operating instruc-
tions Chap. 7.3.
1) During a distance measurement on transparent objects, thickness peaks are displayed in addition to the distance
peaks, but the controller does not evaluate them.
iThis function is used if, before or between the useful peaks, a material has even smaller interfering peaks caused by thin layers on the target. This function should be used with caution and should only be used by product spe-
cialists.

Page 17
Initial Operation
IMS5x00
Number of Peaks
Number of peaks of the FFT signal used for evaluation in distance and thickness measurement. The number of peaks
can be selected in the Settings > Data recording > Number of peaks.
This function is possible for the following systems:
- IMS5400-DS19/MP: max. 13 layers or 14 distance peaks
- IMS5400-TH45/MP: max. 5 layers
- IMS5400-TH70/MP: max. 5 layers
- IMS5600-DS19/MP: max. 13 layers or 14 distance peaks
Make sure to count the peaks in the correct manner, see Chap. Messpeak Sorting.
The standard systems IMS5400-DSxx, IMS5400-THxx and IMS5600-DSxx evaluate one layer.
iIf no distances need to be determined for a measurement, Micro-Epsilon recommends using an IMS5400MP- THxx.
The material selection for a thickness measurement starts with the thinnest layer (layer 1) independent of the physical
arrangement in the measuring object. The material selection for a distance measurement corresponds to the actual
physical arrangement in the measuring object.

Page 18
Initial Operation
IMS5x00
Example of a layer of glass and gap, measpeak sorting: First, corresponding material selection
Thickness Distance
Intensity [%]
0 80 100
Range [%]
Peak 1 Peak 2 Peak 3
20 40 60
Peak 2
BK7
Peak 3
Operating
range
IMP-TH
Peak 1
Gap
Intensity [%]
0 80 100
Range [%]
Peak 1 (Peak B) (Peak A) Peak 2 Peak 3
20 40 60
Peak 1
Peak 2
BK7
Peak C
SMR
IMP-DS
EMR
(Peak C)
Peak B
Peak A 1
Gap Peak 3
1) During a distance mea-
surement on transparent
objects, thickness peaks
are displayed in addition to
the distance peaks, but the
controller does not evaluate
them. For the sake of clarity,
thickness peaks are marked
with letters.

Page 19
Initial Operation
IMS5x00
Example of laminated glass from three layers, measpeak sorting: First, corresponding material selection
Thickness Distance
Intensity [%]
Peak 1 Peak 2 Peak 3 Peak 4 Peak 5 Peak 6
Peak 4
Peak 1
Peak 2
BK7
PC
BK7
Peak 6
Peak 3
Peak 5
Operating
range
IMP-TH
0 80 100
Range [%]
20 40 60
Intensity [%]
Peak 1 (Peak C) (Peak D) (Peak A) (Peak B) Peak 2 Peak 3 Peak 4
Peak 1
Peak 2
Peak 3
Peak 4
BK7
BK7
PC
Peak F
Peak C
Peak E
SMR
IMP-DS
EMR
(Peak E) (Peak F)
Peak D
Peak A
Peak B
0 80 100
Range [%]
20 40 60
Layer 3 is the material
selection for the combined
layer 2 of peak 3.
2) The IMS5400-TH45/MP
and IMS5400-TH70/MP
controllers also evaluate
combined thicknesses of
the different layers.
Thicknesses of combined layers with the
same material can be measured using
the IMS5400-THxx/MP controllers. If the
layers cannot be separated or consist
of different materials, the thickness can
be determined using the IMS5400-TH/
MP controllers and the signal processing
(calculation programs).

Page 20
Initial Operation
IMS5x00
Example of two layers of the same thickness; measpeak sorting: First, corresponding material selection
Intensity [%]
Peak 1 Peak 2
Peak 1
Peak 1
PC
PC
Peak 2
Thickness
Operating
range
IMP-TH
0 80 100
Range [%]
20 40 60
(Peak A) (Peak B)
Peak 1
Peak 2
Peak 3
SMR
EMR
Intensity [%]
Peak 1 Peak 2 Peak 3
Peak A 1
Peak A
PC
PC
Peak B
IMP-DSDistance
0 80 100
Range [%]
20 40 60
Peak 1 is duplicated because the two layers of
equal thickness are imaged in one peak.
Layer 2 is the material selection for the combined
layer 2 of peak 2.
2) The IMS5400-TH45/MP and IMS5400-TH70/
MP controllers also evaluate combined thick-
nesses of the different layers.
iThe thickness can also be determined from the distances using the calculation
functions Thickness and Calculation, see
operating instructions Chap. 7.3.
1) During a distance measurement on transpar-
ent objects, thickness peaks are displayed in
addition to the distance peaks, but the con-
troller does not evaluate them. For the sake of
clarity, thickness peaks are marked with letters.