1About this Document 1
1.1 Goal and Target Audience of this User Manual ...................................................1
1.2 Symbols and Typographic Conventions...............................................................1
1.3 Other Applicable Documents................................................................................2
1.4 Downloading Manuals ..........................................................................................3
2Safety 5
2.1 Intended Use ........................................................................................................5
2.2 General Safety Instructions..................................................................................6
2.3 Organizational Measures......................................................................................7
3Product Description 9
3.1 Features and Applications....................................................................................9
3.2 Model Overview..................................................................................................10
3.2.1 Piezo XY Stage.................................................................................10
3.2.2 Piezo XYZ Stage ..............................................................................10
3.2.3 Precision Z Stage .............................................................................11
3.3 Product View.......................................................................................................11
3.4 Scope of Delivery ...............................................................................................12
3.5 Technical Features.............................................................................................12
3.5.1 PICMA® Piezo Actuators .................................................................12
3.5.2 Flexure Guides .................................................................................12
3.5.3 Capacitive Sensors...........................................................................13
3.5.4 ID Chip (Only Models with Sub-D Connector)..................................13
4Unpacking 15
5Installation 17
5.1 General Notes on Installation.............................................................................17
5.2 Connecting the P-73x to a Protective Earth Conductor .....................................19
5.3 Mounting the P-73x ............................................................................................21
5.4 Affixing the Load.................................................................................................23
6Start-up and Operation 27
6.1 General Notes on Start-Up and Operation.........................................................27
6.2 Operating the P-73x ...........................................................................................30
6.3 Discharging the P-73x ........................................................................................30
Contents
