PI P-73 Series User manual

Physik Instrumente (PI) GmbH & Co. KG · Auf der Römerstr. 1 76228 Karlsruhe, Germany
Phone [phone] · Fax [phone] · E-mail [email protected]
PZ103E
P-73x Nanopositioners
User Manual
Version: 1.0.0
Date: 10.12.2012
This document describes the following
products:
P-733, P-734
Piezo XY stage
P-733.2CD/.2CL
P-733.2DD direct drive
P-734.2CD/.2CL ultra-straight motion
P-733
Piezo XYZ stage
P-733.3CD/.3CL
P-733.3DD direct drive
P-733
Precision Z stage
P-733.ZCD/.ZCL
.2CD/.3CD/.ZCD/.2DD/.3DD with Sub-D
connector
.2CL/.3CL/.ZCL with LEMO connector

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®,
NanoCube®, NanoAutomation®, Picoactuator®, PInano®
The products described in this document are in part protected by the following patents:
German patent no. 10021919C2
German patent no. 10234787C1
German patent no. 10348836B3
German patent no. 102005015405B3
German patent no. 102007011652B4
US patent no. 7,449,077
Japanese patent no. 4667863
Chinese patent no. ZL03813218.4
© 2012 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Deutschland. The text,
photographs and drawings in this manual are protected by copyright. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said
text, photographs and drawings is permitted only in part and only upon citation of the
source.
Original instructions
First printing: 10.12.2012
Document number: PZ103E, CBo, Version 1.0.0
Subject to change without notice. This manual is superseded by any new release. The
latest release is available for download on our website (http://www.pi.ws).

1About this Document 1
1.1 Goal and Target Audience of this User Manual ...................................................1
1.2 Symbols and Typographic Conventions...............................................................1
1.3 Other Applicable Documents................................................................................2
1.4 Downloading Manuals ..........................................................................................3
2Safety 5
2.1 Intended Use ........................................................................................................5
2.2 General Safety Instructions..................................................................................6
2.3 Organizational Measures......................................................................................7
3Product Description 9
3.1 Features and Applications....................................................................................9
3.2 Model Overview..................................................................................................10
3.2.1 Piezo XY Stage.................................................................................10
3.2.2 Piezo XYZ Stage ..............................................................................10
3.2.3 Precision Z Stage .............................................................................11
3.3 Product View.......................................................................................................11
3.4 Scope of Delivery ...............................................................................................12
3.5 Technical Features.............................................................................................12
3.5.1 PICMA® Piezo Actuators .................................................................12
3.5.2 Flexure Guides .................................................................................12
3.5.3 Capacitive Sensors...........................................................................13
3.5.4 ID Chip (Only Models with Sub-D Connector)..................................13
4Unpacking 15
5Installation 17
5.1 General Notes on Installation.............................................................................17
5.2 Connecting the P-73x to a Protective Earth Conductor .....................................19
5.3 Mounting the P-73x ............................................................................................21
5.4 Affixing the Load.................................................................................................23
6Start-up and Operation 27
6.1 General Notes on Start-Up and Operation.........................................................27
6.2 Operating the P-73x ...........................................................................................30
6.3 Discharging the P-73x ........................................................................................30
Contents

7Maintenance 31
7.1 General Notes on Maintenance..........................................................................31
7.2 Cleaning the P-73x.............................................................................................31
8Troubleshooting 33
9Customer Service 35
10 Technical Data 37
10.1 Specifications......................................................................................................37
10.1.1 Data Table........................................................................................37
10.1.2 Maximum Ratings.............................................................................39
10.1.3 Ambient Conditions and Classifications ...........................................40
10.2 Dimensions.........................................................................................................41
10.3 Torque for Stainless Steel Screws (A2-70)........................................................46
10.4 Pin Assignment...................................................................................................47
10.5 Suitable Piezo Controllers..................................................................................50
11 Old Equipment Disposal 53
12 EC Declaration of Conformity 55

1 About this Document
P-73x Nanopositioners PZ103E Version: 1.0.0 1
In this Chapter
Goal and Target Audience of this User Manual ............................................................ 1
Symbols and Typographic Conventions........................................................................ 1
Other Applicable Documents......................................................................................... 2
Downloading Manuals................................................................................................... 3
1.1 Goal and Target Audience of this User Manual
This user manual contains the necessary information for the intended use of the P-73x
(x stands for the different models (p. 10)).
Basic knowledge of control technology, drive technologies and suitable safety
measures is assumed.
The latest versions of the user manuals are available for download (p. 3) on our
website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
1 About this Document

1 About this Document
2Version: 1.0.0 PZ103E P-73x Nanopositioners
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/
Label Meaning
1.
2. Action consisting of several steps whose sequential
order must be observed
Action consisting of one or several steps whose
sequential order is irrelevant
List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product
(example: socket of the RS-232 interface)
Warning signs affixed to the product that refer to
detailed information in this manual.
1.3 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are
described in their own manuals.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Product Document
E-625.CR Controller PZ166E
E-665.CR Controller PZ127E
E-610.C0 Piezo Controller OEM Board PZ72E
E-609 OEM Piezo Controller E609T0001
E-709.CRG Digital Single-Channel Piezo
Controller PZ222E
E-753 Digital Piezo Controller PZ193E

1 About this Document
P-73x Nanopositioners PZ103E Version: 1.0.0 3
Product Document
E-500 Modular Piezo Controller PZ62E
E-509.C3A Control Module for Capacitive Sensors PZ77E
E-503 3-Channel Amplifier PZ62E
E-505 Single-Channel High-Performance
Amplifier PZ62E
E-517 Interface and Display Module PZ214E
E-712 Digital Piezo Controller PZ195E
E-725 Digital Piezo Controller PZ197E
E-761 Digital Piezo Controller PZ164E
PIMikroMove SM148E Software Manual
NanoCapture SM71E Software Manual
P-5xx / P-6xx / P-7xx Piezo Positioning Systems PZ240EK Short
Instructions
1.4 Downloading Manuals
1. Open the PI website http://www.pi-portal.ws.
2. Click Downloads.
3. Click the corresponding category (e. g. P Piezo Actuators, Nanopositioning
& Scanning Systems).
4. Click the corresponding product code (e. g. P-733).
5. Click Documents.
6. Click the desired manual and save it on the hard disk of your PC.
7. If no manual is available:
a) Log in as follows:
−Enter username and password from the file
X-xxx_Releasenews_V_x_x_x.pdf on the product CD in the User login
field on the left margin.
−Click Login.
b) Repeat step 6.

2 Safety
P-73x Nanopositioners PZ103E Version: 1.0.0 5
In this Chapter
Intended Use ................................................................................................................. 5
General Safety Instructions........................................................................................... 6
Organizational Measures............................................................................................... 7
2.1 Intended Use
The P-73x is a laboratory device as defined by DIN EN 61010-1. It is intended to be
used in interior spaces and in an environment which is free of dirt, oil, and lubricants.
Based on its design and realization, the P-73x is intended for fine positioning as well
as the fast and precise motion of small objects. The specifications of the P-73x apply
to horizontal mounting. Depending on the model, the motion is performed as follows:
in two axes horizontally,
in three axes horizontally and vertically,
in one axis vertically.
The intended use of the P-73x is only possible in combination with suitable drive and
control electronics (p. 50) available from PI. The electronics is not included in the
scope of delivery of the P-73x.
The electronics must provide the required operating voltages. To ensure proper
performance of the servo-control system, the electronics must be able to read out and
process the signals from the capacitive sensors.
2 Safety

2 Safety
6Version: 1.0.0 PZ103E P-73x Nanopositioners
2.2 General Safety Instructions
The P-73x is built according to state-of-the-art technology and recognized safety
standards. Improper use can result in personal injury and/or damage to the P-73x.
Only use the P-73x for its intended purpose, and only use it if it is in a good
working order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect
safety.
The operator is responsible for the correct installation and operation of the P-73x.
Mechanical forces can damage or misalign the P-73x.
Avoid impacts that affect the P-73x.
Do not drop the P-73x.
Do not exceed the maximum permissible compressive/tensile stress.
The P-73x is maintenance-free and achieves its positioning accuracy as a result of the
optimum alignment of mechanical components and piezo actuators. Loosened screws
cause a loss in positioning accuracy.
Only loosen screws according to the instructions in this manual.
Do not open the P-73x.

2 Safety
P-73x Nanopositioners PZ103E Version: 1.0.0 7
2.3 Organizational Measures
User manual
Always keep this user manual available by the P-73x.
The latest versions of the user manuals are available for download (p. 3) on
our website.
Add all information given by the manufacturer to the user manual, for example
supplements or Technical Notes.
If you pass the P-73x on to other users, also turn over this user manual as
well as other relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing
information due to an incomplete user manual can result in minor injury and
property damage.
Only install and operate the P-73x after having read and understood this user
manual.
Personnel qualification
The P-73x may only be started up, operated, maintained and cleaned by authorized
and qualified staff.

3 Product Description
P-73x Nanopositioners PZ103E Version: 1.0.0 9
In this Chapter
Features and Applications............................................................................................. 9
Model Overview........................................................................................................... 10
Product View ............................................................................................................... 11
Scope of Delivery ........................................................................................................ 12
Technical Features...................................................................................................... 12
3.1 Features and Applications
P-73x stages are piezo-actuator-driven precision positioning systems with up to three
motion axes.
Piezo actuators expand when an electric voltage is applied. The motion of the piezo
actuators and levers is used by the P-73x to achieve travel ranges of up to 100 μm
with resolutions in the nanometer range.
In order to achieve the specifications stated in the data table (p. 37), the stage is
calibrated at the factory as a system component with suitable electronics. The
electronics and mechanical system only offer optimum performance as a complete
calibrated system.
The electronics must be ordered separately. For suitable electronics, see
"Recommended Piezo Controllers" (p. 50).
Vacuum-compatible versions of the P-73x are available on request.
3 Product Description

3 Product Description
10 Version: 1.0.0 PZ103E P-73x Nanopositioners
3.2 Model Overview
The following standard versions of the P-733 and P-734 are available:
3.2.1 Piezo XY Stage
Model Description
P-733.2CD High-Precision XY Nanopositioning System, 100 µm × 100 µm,
Capacitive Sensors, Parallel Metrology, Sub-D Connector
P-733.2CL High-Precision XY Nanopositioning System, 100 µm × 100 µm,
Capacitive Sensors, Parallel Metrology, LEMO Connector
P-733.2DD High-Dynamics High-Precision XY Nanopositioning System,
30 µm × 30 µm, Direct Drive, Capacitive Sensors, Parallel
Metrology, Sub-D Connector
P-734.2CD High-Precision XY Nanopositioning System with Minimum
Runout, 100 µm × 100 µm, Capacitive Sensors, Parallel
Metrology, Sub-D Connector
P-734.2CL High-Precision XY Nanopositioning System with Minimum
Runout, 100 µm × 100 µm, Capacitive Sensors, Parallel
Metrology, LEMO Connector
3.2.2 Piezo XYZ Stage
Model Description
P-733.3CD Precision XYZ Nanopositioning System, 100 µm × 100 µm ×
10 µm, Capacitive Sensors, Parallel Metrology, Sub-D Connector
P-733.3CL Precision XYZ Nanopositioning System, 100 µm × 100 µm ×
10 µm, Capacitive Sensors, Parallel Metrology, LEMO Connector
P-733.3DD High-Dynamics Precision XYZ Nanopositioning System, 30 µm ×
30 µm × 10 µm, Direct Drive, Capacitive Sensors, Parallel
Metrology, Sub-D Connector

3 Product Description
P-73x Nanopositioners PZ103E Version: 1.0.0 11
3.2.3 Precision Z Stage
Model Description
P-733.ZCD Compact Precision Nanopositioning Vertical Stage, 100 µm,
Capacitive Sensor, Sub-D Connector
P-733.ZCL Compact Precision Nanopositioning Vertical Stage, 100 µm,
Capacitive Sensor, LEMO Connector
3.3 Product View
The illustration serves as an example and can differ from your stage model.
Figure 1: Example of product view
1 Moving platform
2 Base body
3 Cable outlet
4 Protective earth connection

3 Product Description
12 Version: 1.0.0 PZ103E P-73x Nanopositioners
3.4 Scope of Delivery
Order Number Items
P-73x Stage according to order (p. 10)
000036450 M4 screw set for protective earth, consisting of:
1 M4x8 flat-head screw with cross recess, ISO 7045
2 safety washers
2 flat washers
PZ240EK Short instructions for piezo positioning systems
3.5 Technical Features
3.5.1 PICMA® Piezo Actuators
P-73x stages are driven by PICMA® piezo actuators. PICMA® actuators have
all-ceramic insulation and are therefore far superior to conventional actuators in
respect to performance and lifetime. The monolithic piezoceramic block is protected
against humidity and failure due to increased leakage current by a ceramic insulation
layer. In this way, an especially high reliability is achieved even under extreme
ambient conditions. In contrast to motorized drives, there are no rotating parts or
friction. The piezo actuators are therefore backlash-, maintenance- and wear-free.
3.5.2 Flexure Guides
P-73x stages have flexure guides (flexures) for frictionless motion and high guiding
accuracies.
A flexure guide is an element which is free from static and sliding friction. It is based
on the elastic deformation (bending) of a solid (e.g. steel) and does not have any
rolling or sliding parts. Flexure elements have a high stiffness and load capacity.
Flexure guides are maintenance- and wear-free. They are 100% vacuum compatible,
function in a wide temperature range and do not require any lubricants.

3 Product Description
P-73x Nanopositioners PZ103E Version: 1.0.0 13
3.5.3 Capacitive Sensors
The capacitive sensors of the P-73x measure the position directly at the moving
platform (direct metrology) and work without contact. Neither friction nor hysteresis
interferes with the measurement, which allows excellent linearity values to be
achieved in combination with the high position resolution. In connection with suitable
electronics, capacitive sensors achieve the best resolution, stability and bandwidth.
3.5.4 ID Chip (Only Models with Sub-D Connector)
An ID chip is located in the Sub-D connector of the stage. When the stage is
calibrated at the factory with digital electronics, the calibration data is saved together
with specific product information on the ID chip. When switched on, digital electronics
read the data from the ID chip of the connected stage. Stages whose ID chip contains
the calibration data can therefore be connected to any suitable digital electronics
without a new calibration.
For more information on the ID chip, see the manual of the controller used.

4 Unpacking
P-73x Nanopositioners PZ103E Version: 1.0.0 15
1. Unpack the P-73x with care.
2. Compare the contents against the items covered by the contract and against
the packing list.
3. Inspect the contents for signs of damage. If parts are missing or you notice
signs of damage, contact PI immediately.
4. Keep all packaging materials in case the product needs to be returned.
4 Unpacking