MKS 247D User manual

120714-P1
Rev A, 7/97
Instruction Manual
MKS Type 247D
Four-Channel Readout
Six Shattuck Road
Andover, MA 01810-2449
[phone] or [phone]
Fax: [phone]
E-mail: [e-mail]
Web site: http://www.mksinst.com

WARRANTY
Type 247D Equipment
MKS Instruments, Inc. (MKS) warrants that the equipment described above (the
“equipment”) manufactured by MKS shall be free from defects in materials and
workmanship for a period of one year from date of shipment and will for a period of two
years from the date of shipment, correctly perform all date-related operations, including
without limitation accepting data entry, sequencing, sorting, comparing, and reporting,
regardless of the date the operation is performed or the date involved in the operation,
provided that, if the equipment exchanges data or is otherwise used with equipment,
software, or other products of others, such products of others themselves correctly
perform all date-related operations and store and transmit dates and date-related data
in a format compatible with MKS equipment. THIS WARRANTY IS MKS’ SOLE
WARRANTY CONCERNING DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending one
year later in the case of defects in materials and workmanship, but two years later in the
case of failure to comply with the date-related operations warranty, MKS will, at its
option, either repair or replace any part which is defective in materials or workmanship
or with respect to the date-related operations warranty without charge to the purchaser.
The foregoing shall constitute the exclusive and sole remedy of the purchaser for any
breach by MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrangements
with respect to the responsibility for shipping the equipment and handling any other
incidental charges with the MKS sales representative or distributor from which the
equipment was purchased or, in the case of a direct purchase from MKS, with the MKS
home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used
in accordance with the specifications recommended by MKS for the proper and normal
use of the equipment. MKS shall not be liable under any circumstances for indirect,
special, consequential, or incidental damages in connection with, or arising out of, the
sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodically
(typically every 6 to 12 months) to ensure accurate readings. When a product is
returned to MKS for this periodic re-calibration it is considered normal preventative
maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.
11-98 120714-P1

120714-P1
Rev A, 7/97
MKS Type 247D
Four-Channel Readout

Copyright © 1997 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Baratron®is a registered trademark of MKS Instruments, Inc., Andover, MA

Table of Contents
iii
Table of Contents
Safety Information.................................................................................................................. 1
Symbols Used in This Instruction Manual.................................................................. 1
Symbols Found on the Unit ....................................................................................... 2
Safety Procedures and Precautions............................................................................. 3
Sicherheitshinweise................................................................................................................ 5
In dieser Betriebsanleitung vorkommende Symbole................................................... 5
Am Gerät angebrachte Symbole................................................................................. 6
Sicherheitsvorschriften und Vorsichtsmaßnahmen...................................................... 7
Informations relatives àla sécurité.......................................................................................... 9
Symboles utilisés dans ce manuel d'utilisation ........................................................... 9
Symboles apparaissant sur l'appareil .......................................................................... 10
Mesures de sécuritéet mises en garde........................................................................ 11
Información sobre seguridad................................................................................................... 13
Símbolos usados en el manual de instrucciones.......................................................... 13
Símbolos que aparecen en la unidad........................................................................... 14
Procedimientos y precauciones de seguridad.............................................................. 15
Chapter One: General Information......................................................................................... 17
Introduction............................................................................................................... 17
How This Manual is Organized.................................................................................. 18
Customer Support...................................................................................................... 18
Chapter Two: Installation......................................................................................................19
How To Unpack the Type 247 Unit ........................................................................... 19
Unpacking Checklist ..................................................................................... 19
Interface Cables ......................................................................................................... 20
System Interface Cables ................................................................................ 20
Generic Shielded Cables................................................................................ 22
Product Location and Requirements........................................................................... 23
Operating Environmental Requirements ........................................................ 23

Table of Contents
iv
Safety Conditions ..........................................................................................23
Setup..........................................................................................................................24
Dimensions....................................................................................................24
Power Requirements......................................................................................26
Mounting Instructions....................................................................................26
System Configurations...................................................................................27
Electrical Information.................................................................................................30
Fuses .............................................................................................................30
Grounding .....................................................................................................30
How To Set the Line Voltage.........................................................................31
Connectors and Cables...............................................................................................32
Interface Connector P6 (Channels 1 to 4).......................................................32
Interface Connector P5 (Channel 1) ...............................................................33
MFC Connectors (J1 - J4)..............................................................................34
Chapter Three: Overview.......................................................................................................35
General Information ...................................................................................................35
Flow Signal Path........................................................................................................35
Set Point Signal..........................................................................................................36
Set Point Signal Source..................................................................................36
Set Point Function with Manual Flow Control...............................................37
Set Point Function with External Flow Control..............................................38
Set Point Function with Remote Flow Control...............................................39
Front Panel Controls ..................................................................................................40
Power ON/OFF Switch..................................................................................40
Flow Indicator LED.......................................................................................40
Flow Control Switch......................................................................................41
Digital Panel Meter........................................................................................41
Channel Selector............................................................................................41
Set Point Source Switch.................................................................................41
Set Point Control...........................................................................................42
Read / Set Point Switch .................................................................................42
Zero Control..................................................................................................42
Rear Panel Controls....................................................................................................43

Table of Contents
v
Scaling Control Potentiometers ..................................................................... 43
Decimal Point Selector Switches................................................................... 44
Line Voltage Selector.................................................................................... 44
Fuse.............................................................................................................. 44
AC Line Cord................................................................................................ 44
Interface Connector J6 - Channels 1 to 4 ....................................................... 44
Interface Connector J5 - Channel 1................................................................ 45
MFC Connectors........................................................................................... 45
Scaling Controls ........................................................................................................ 46
Scaling Control Factor................................................................................... 47
Scaling Control Potentiometer....................................................................... 48
Gas Correction Factor (GCF)..................................................................................... 49
How To Calculate the GCF for Pure Gases.................................................... 50
How To Calculate the GCF for Gas Mixtures................................................ 51
Labels........................................................................................................................ 53
Serial Number Label ..................................................................................... 53
Chapter Four: Operation........................................................................................................55
How To Setup the System.......................................................................................... 55
Manual Flow Control................................................................................................. 59
How To Manually Control Individual Gas Flows .......................................... 59
How To Manually Control Ratioed Gas Flows.............................................. 61
External Flow Control ............................................................................................... 63
How To Change the Dipswitch Settings ........................................................ 64
How To Control Individual Gas Flows with an External Controller............... 66
How To Control Pressure with Ratioed Gas Flows........................................ 66
Remote Flow Control ................................................................................................ 69
How To Control Gas Flow with TTL Logic................................................... 69
Chapter Five: Maintenance and Troubleshooting................................................................... 71
General Information................................................................................................... 71
Maintenance .............................................................................................................. 71
How To Clean the Unit .................................................................................71
How To Replace the Fuses ............................................................................ 71

Table of Contents
vi
Troubleshooting.........................................................................................................73
Power Supply ................................................................................................73
Channel Amplifiers........................................................................................74
Internal +5 V Voltage Reference....................................................................75
External Ratio Amplifier................................................................................75
Digital Panel Meter........................................................................................76
Set Point Buffer and Flow Switching Circuit .................................................77
Appendix A: Product Specifications.......................................................................................79
Appendix B: Model Code Explanation...................................................................................81
Model Code ...............................................................................................................81
Appendix C: Gas Correction Factors for Commonly Used Pure Gases...................................83
Index ......................................................................................................................................87

List of Fi
g
ures
vii
List of Figures
Figure 1: Front Panel Dimensions ......................................................................................... 24
Figure 2: Top View Dimensions............................................................................................ 25
Figure 3: Manual Flow Control............................................................................................. 27
Figure 4: Pressure Control with an External Controller.......................................................... 28
Figure 5: Front Panel Controls ..............................................................................................40
Figure 6: Rear Panel Controls................................................................................................ 43
Figure 7: Scaling Control Potentiometer - Initial Setting .......................................................48
Figure 8: Serial Number Label .............................................................................................. 53
Figure 9: Scaling Control Potentiometer - Example Setting................................................... 57

List of Figures
viii

List of Tables
ix
List of Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Tabelle 2: Definitionen der am Gerät angebrachten Symbole......................................................6
Tableau 3 : Définition des symboles apparaissant sur l'appareil ................................................10
Tabla 4 : Definición de los símbolos que aparecen en la unidad................................................14
Table 5: System Interface Cables..............................................................................................20
Table 6: Fuse Information ........................................................................................................30
Table 7: Interface Connector P6 (Channels 1 to 4) Pinout.........................................................32
Table 8: Interface Connector P5 (Channel 1) Pinout .................................................................33
Table 9: MFC Interface Connectors (J1 - J4) Pinout .................................................................34
Table 10: MFC Gauge Factors..................................................................................................47
Table 11: Manual Flow Control - 247 Unit Front Panel Controls..............................................55
Table 12: Ratio Control Set Point Levels..................................................................................61
Table 13: Dipswitch S15 Initial Settings....................................................................................64
Table 14: Dipswitch S15 Settings for +5 V Full Scale Input.....................................................64
Table 15: Dipswitch S15 Settings for +1 V Full Scale Input.....................................................65
Table 16: External Controller - Front Panel Controls................................................................67
Table 17: Gas Correction Factors for Pure Gases......................................................................83

List of Tables
x

Safety Information S
y
mbols Used in This Instruction Manual
1
Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not
correctly performed or adhered to, could result in injury to
personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.

Symbols Found on the Unit Safet
y
Information
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007 Off (Supply)
IEC 417, No.5008 Earth (
g
round)
IEC 417, No.5017
Protective earth
(
g
round)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020 Equipotentiality IEC 417, No.5021 Direct current IEC 417, No.5031 Alternatin
g
Current
IEC 417, No. 5032
Both direct and
alternatin
g
Current
IEC 417, No.5033-a Class ll equipment
IEC 417, No.5172-a
Three phase
alternatin
g
Current
IEC 617-2 No. 020206
Caution, refer to
accompanyin
g
documents
ISO 3864, No. B.3.1
Caution, risk of
electric shock
ISO 3864, No. B.3.6 Caution, hot surface
IEC 417, No. 5041
Table 1: Definition of Symbols Found on the Unit

Safety Information Safet
y
Procedures and Precautions
3
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in
this manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal
adjustments must be made by qualified service personnel only.
GROUNDING THE PRODUCT
This product is grounded through the grounding conductor of the power cord. To avoid electrical
shock, plug the power cord into a properly wired receptacle before connecting it to the product
input or output terminals. A protective ground connection by way of the grounding conductor in
the power cord is essential for safe operation.
DANGER ARISING FROM LOSS OF GROUND
Upon loss of the protective-ground connection, all accessible conductive parts (including knobs
and controls that may appear to be insulating) can render an electrical shock.
GROUND AND USE PROPER ELECTRICAL FITTINGS
Dangerous voltages are contained within this instrument. All electrical fittings and cables must
be of the type specified, and in good condition. All electrical fittings must be properly connected
and grounded.
USE THE PROPER POWER CORD
Use only a power cord that is in good condition and which meets the input power requirements
specified in the manual.
Use only a detachable cord set with conductors that have a cross-sectional area equal to or greater
than 0.75 mm2. The power cable should be approved by a qualified agency such as VDE,
Semko, or SEV.

Safety Procedures and Precautions Safet
y
Information
4
USE THE PROPER POWER SOURCE
This product is intended to operate from a power source that does not apply more voltage
between the supply conductors, or between either of the supply conductors and ground, than that
specified in the manual.
USE THE PROPER FUSE
Use only a fuse of the correct type, voltage rating, and current rating, as specified for your
product.
DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.

Sicherheitshinweise In dieser Betriebsanleitun
g
vorkommende S
y
mbole
5
Sicherheitshinweise
In dieser Betriebsanleitung vorkommende Symbole
Definition der mit WARNUNG!, VORSICHT! und HINWEIS überschriebenen Abschnitte in
dieser Betriebsanleitung.
Warnung!
&CU 5[ODQN 9#4070) YGKUV CWH GKPG )GHCJTGPSWGNNG JKP 'U
OCEJV CWH GKPGP #TDGKVUCDNCWH GKPG #TDGKVUYGKUG GKPGP
<WUVCPF QFGT GKPG UQPUVKIG )GIGDGPJGKV CWHOGTMUCO FGTGP
WPUCEJIGO·G #WUHÒJTWPI D\Y WPIGPÒIGPFG
$GTÒEMUKEJVKIWPI \W -ÌTRGTXGTNGV\WPI HÒJTGP MCPP
8QTUKEJV
Das Symbol VORSICHT! weist auf eine Gefahrenquelle hin. Es
macht auf einen Bedienungsablauf, eine Arbeitsweise oder eine
sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung
bzw. Ungenügende Berücksichtigung zu einer Beschädigung oder
Zerstörung des Produkts oder von Teilen des Produkts führen kann.
*KPYGKU
Das Symbol HINWEIS weist auf eine wichtige Mitteilung hin, die auf
einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige
Gegebenheit von besonderer Wichtigkeit aufmerksam macht.

Am Gerät angebrachte Symbole Sicherheitshinweise
6
Am Gerät angebrachte Symbole
Der untenstehenden Tabelle sind die Bedeutungen der Symbole zu entnehmen, die an dem Gerät
angebracht sind.
Definitionen der am Gerät angebrachten Symbole
|
Ein (Netz)
IEC 417, Nr. 5007 Aus (Netz) IEC 417, Nr. 5008 Erde IEC 417, Nr. 5017 Schutzleiter IEC 417, Nr. 5019
Rahmen oder Chassis
IEC 417, Nr. 5020 Äquipotentialanschluß IEC 417, Nr. 5021 Gleichstrom IEC 417, Nr. 5031 Wechselstrom IEC 417, Nr. 5032
Wechselstrom und
Gleichstrom
IEC 417, Nr. 5033-a Geräteklasse II IEC 417, Nr. 5172-a Drehstrom IEC 617-2 Nr. 020206
Vorsicht! Bitte
Begleitdokumente
lesen!
ISO 3864, Nr. B.3.1
Vorsicht!
Stromschlaggefahr!
ISO 3864, Nr. B.3.6
Vorsicht!
Heiße Fläche!
IEC 417, Nr. 5041
Tabelle 2: Definitionen der am Gerät angebrachten Symbole

Sicherheitshinweise Sicherheitsvorschriften und Vorsichtsmaßnahmen
7
Sicherheitsvorschriften und Vorsichtsmaßnahmen
Die untenstehenden allgemeinen Sicherheitsvorschriften sind bei allen Betriebs-phasen
dieses Instruments zu befolgen. Jede Mißachtung dieser Sicherheits-vorschriften oder
sonstiger spezifischer Warnhinweise in dieser Betriebsanleitung stellt eine
Zuwiderhandlung der für dieses Instrument geltenden Sicherheits-standards dar und kann
die an diesem Instrument vorgesehenen Schutzvor-richtungen unwirksam machen. MKS
Instruments, Inc. haftet nicht für eine Mißachtung dieser Sicherheitsvorschriften seitens
des Kunden.
Keine Teile austauschen und keine Veränderungen vornehmen!
Bauen Sie in das Instrument keine Ersatzteile ein, und nehmen Sie keine eigenmächtigen
Änderungen am Gerät vor! Schicken Sie das Instrument zu Wartungs- und Reparatur-zwecken an
einen MKS-Kalibrierungs- und -Kundendienst ein! Dadurch wird sicher-gestellt, daßalle
Sicherheitseinrichtungen voll funktionsfähig bleiben.
Wartung nur durch qualifizierte Fachleute!
Das Gehäuse des Instruments darf vom Bedienpersonal nicht geöffnet werden. Das Auswechseln
von Bauteilen und das Vornehmen von internen Einstellungen ist nur von qualifizierten
Fachleuten durchzuführen.
Produkt erden!
Dieses Produkt ist mit einer Erdleitung und einem Schutzkontakt am Netzstecker versehen. Um
der Gefahr eines elektrischen Schlages vorzubeugen, ist das Netzkabel an einer vorschriftsmäßig
geerdeten Schutzkontaktsteckdose anzuschließen, bevor es an den Eingangs- bzw.
Ausgangsklemmen des Produkts angeschlossen wird. Das Instrument kann nur sicher betrieben
werden, wenn es über den Erdleiter des Netzkabels und einen Schutzkontakt geerdet wird.
Gefährdung durch Verlust der Schutzerdung!
Geht die Verbindung zum Schutzleiter verloren, besteht an sämtlichen zugänglichen Teilen aus
stromleitendem Material die Gefahr eines elektrischen Schlages. Dies gilt auch für Knöpfe und
andere Bedienelemente, die dem Anschein nach isoliert sind.

Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise
8
Erdung und Verwendung geeigneter elektrischer Armaturen!
In diesem Instrument liegen gefährliche Spannungen an. Alle verwendeten elektrischen
Armaturen und Kabel müssen dem angegebenen Typ entsprechen und sich in einwand-freiem
Zustand befinden. Alle elektrischen Armaturen sind vorschriftsmäßig anzubringen und zu erden.
Richtiges Netzkabel verwenden!
Das verwendete Netzkabel mußsich in einwandfreiem Zustand befinden und den in der
Betriebsanleitung enthaltenen Anschlußwerten entsprechen.
Das Netzkabel mußabnehmbar sein. Der Querschnitt der einzelnen Leiter darf nicht weniger als
0,75 mm2betragen. Das Netzkabel sollte einen Prüfvermerk einer zuständigen Prüfstelle tragen,
z.B. VDE, Semko oder SEV.
Richtige Stromquelle verwenden!
Dieses Produkt ist für eine Stromquelle vorgesehen, bei der die zwischen den Leitern bzw.
zwischen jedem der Leiter und dem Masseleiter anliegende Spannung den in dieser
Betriebsanleitung angegebenen Wert nicht überschreitet.
Richtige Sicherung benutzen!
Es ist eine Sicherung zu verwenden, deren Typ, Nennspannung und Nennstromstärke den
Angaben für dieses Produkt entsprechen.
Gerät nicht in explosiver Atmosphäre benutzen!
Um der Gefahr einer Explosion vorzubeugen, darf dieses Gerät nicht in der Nähe explosiver
Stoffe eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck zertifiziert worden ist.