MKS PR 4000 F User manual

PR 4000 F
2 Channel Power Supply and
Readout for Flow and Pressure
Instruction Manual
MKS Instruments
Deutschland GmbH
Release 05/2000

Copyright © 2000 by MKS Instruments Deutschland GmbH
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information storage
or retrieval system, except as may be expressly permitted in writing by MKS Instruments.
Printed in the Federal Republic of Germany

PR4000F Table of Contents
iii
Table of Contents
Safety Information......................................................................................................................1
Symbols Used in This Instruction Manual................................................................................ 1
Symbols Found on the Unit.................................................................................................... 2
Safety Procedures and Precautions........................................................................................ 3
Chapter 1: General Information..................................................................................................5
1.1 General Description..................................................................................................... 5
1.2 How This Manual Is Organized..................................................................................... 6
1.1 Customer Support ....................................................................................................... 6
Chapter 2: Installation................................................................................................................7
2.1 Unpacking................................................................................................................... 7
2.2 Unpacking Checklist.................................................................................................... 7
2.3 Cables........................................................................................................................ 8
Interconnection Cabels from MKS....................................................................................... 8
Generic Shielded Cable Description.................................................................................... 9
2.4 Installation, Mounting..................................................................................................10
Dimensions ......................................................................................................................11
Line Power and Fuses.......................................................................................................12
2.5 Switching on the unit...................................................................................................12
Chapter 3: Overview................................................................................................................13
3.1 Front Panel................................................................................................................13
3.2 Rear Panel.................................................................................................................14
Connections .....................................................................................................................14
3.3 Connectors ................................................................................................................15

Table of Contents PR4000F
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Chapter 4: Operation............................................................................................................... 19
4.1 Structure of the Menu.................................................................................................19
4.2 Editor........................................................................................................................20
Switching on Edit mode.....................................................................................................20
Switching off Edit mode.....................................................................................................20
Decimal point ...................................................................................................................20
4.3 Setup........................................................................................................................21
Entering Setup .................................................................................................................21
Trip Limits........................................................................................................................29
Interface RS485 ...............................................................................................................31
Exit Setup........................................................................................................................32
4.4 Control......................................................................................................................33
Display for measurement values and setpoints...................................................................33
Status Displays................................................................................................................34
Control Display.................................................................................................................34
4.5 Operation with pressure transducers ...........................................................................35
Operation with Baratron Type 120 .....................................................................................36
4.6 Operation with mass flow controllers (MFC).................................................................37
Control Modes with Mass Flow Controllers:........................................................................37
4.7 Operation with flow meters .........................................................................................38
4.8 Operation with pressure controllers .............................................................................38
4.9 Limit switches and relays............................................................................................39
SLEEP ............................................................................................................................39
LIMIT...............................................................................................................................39
BAND..............................................................................................................................39
MLIMIT............................................................................................................................39
MBAND ...........................................................................................................................39
4.10 Relay Settings ...........................................................................................................40

PR4000F Table of Contents
v
Chapter 5: Interface.................................................................................................................43
5.1 General..........................................................................................................................43
5.2 Command syntax............................................................................................................43
5.3 Reply syntax ..................................................................................................................44
5.4 Error reply syntax ...........................................................................................................44
5.5 Commands.....................................................................................................................45
Sample Command ............................................................................................................45
Display Text (DT)..............................................................................................................45
Request Key (KY).............................................................................................................45
Dialog (DG) ......................................................................................................................45
ID String (ID)....................................................................................................................46
Remote Mode (RT) ...........................................................................................................46
Access Channel (AC)........................................................................................................46
Actual Value (AV)..............................................................................................................46
Setpoint (SP)....................................................................................................................47
External Input (EX)............................................................................................................47
Status (ST) .......................................................................................................................47
Valves (VL).......................................................................................................................47
Relays (RL) ......................................................................................................................48
Displays (DP)...................................................................................................................48
Display 4 (DP4).................................................................................................................48
Range (RG)......................................................................................................................48
Gain (GN).........................................................................................................................49
Offset (OF).......................................................................................................................49
RTD Offset (RO)...............................................................................................................49
Autozero (AZ) ...................................................................................................................49
Input Range (IN)...............................................................................................................49
Output Range (OT) ...........................................................................................................50
External Input Range (EI)..................................................................................................50
External Output Range (EO)..............................................................................................50
Signal Mode (SM).............................................................................................................50
Scale (SC)........................................................................................................................51
Linearization (LN, LS)........................................................................................................51
Limit Mode (LM)................................................................................................................51
Dead Band (DB)...............................................................................................................51

Table of Contents PR4000F
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Upper Limit (UL)...............................................................................................................52
Lower Limit (LL)...............................................................................................................52
Formula Relay (FR)..........................................................................................................52
Formula Temporary (FT)...................................................................................................52
Parity (PY).......................................................................................................................53
Baudrate (BD)..................................................................................................................53
Address (AD) ...................................................................................................................53
Interface Mode (IM) ..........................................................................................................53
Resolution (RS)................................................................................................................54
Reset Status (RE).............................................................................................................54
Default (DF).....................................................................................................................54
Appendix A: Specifications...................................................................................................... 55
Appendix B: Error Messages................................................................................................... 57
Appendix C: Default - Configuration......................................................................................... 59
MKS Worldwide Calibration & Service Centers.......................................................................... 61

PR4000F List of Figures and Tables
vii
List of Figures and Tables
Figures
Figure 1: Dimensions ..............................................................................................................11
Figure 2: Front Panel ..............................................................................................................13
Figure 3: Rear Panel of the PR4000F.......................................................................................14
Figure 4: Structure of the menu................................................................................................19
Tables
Table 1: Definition of Symbols Found on the Unit....................................................................... 2
Table 2: Standard Interconnecting Cables ................................................................................. 9
Table 3: Fuse Information........................................................................................................12

List of Figures and Tables PR4000F
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PR4000F Safety Information
1
Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not correctly
performed or adhered to, could result in injury to personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.

Safety information PR4000F
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007 Off (Supply)
IEC 417, No.5008 Earth (ground)
IEC 417, No.5017
Protective earth
(ground)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020 Equipotentiality IEC 417, No.5021 Direct current IEC 417, No.5031
Alternating current
IEC 417, No.5032
Both direct and
alternating current
IEC 417, No.5033-a
Class ll equipment
IEC 417, No.5172-a
Three phase
alternating current
IEC 617-2 No.020206
Caution, refer to
accompanying
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6
Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit

PR4000F Safety Information
3
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument. Return
the instrument to an MKS Calibration and Service Center for service and repair to ensure that all
safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal
adjustments must be made by qualified service personnel only.
GROUNDING THE PRODUCT
This product is grounded through the grounding conductor of the power cord. To avoid electrical
shock, plug the power cord into a properly wired receptacle before connecting it to the product
input or output terminals. A protective ground connection by way of the grounding conductor in the
power cord is essential for safe operation.
DANGER ARISING FROM LOSS OF GROUND
Upon loss of the protective-ground connection, all accessible conductive parts (including knobs and
controls that may appear to be insulating) can render an electrical shock.
GROUND AND USE PROPER ELECTRICAL FITTINGS
Dangerous voltages are contained within this instrument. All electrical fittings and cables must be
of the type specified, and in good condition. All electrical fittings must be properly connected and
grounded.
USE THE PROPER POWER CORD
Use only a power cord that is in good condition and which meets the input power requirements
specified in the manual.
Use only a detachable cord set with conductors that have a cross-sectional area equal to or greater
than 0.75 mm2. The power cable should be approved by a qualified agency such as VDE, Semko,
or SEV.

Safety information PR4000F
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PR4000F Chapter 1: General Information
5
Chapter 1: General Information
1.1 General Description
The control unit PR4000F is designed for the use with mass flow controllers (MFC), mass flow
meters (MFM), pressure transducers and in-line-pressure controllers, e.g. type 640 from MKS
Instruments. Compatibility is just restricted in case of disagreement of electrical specifications.
The PR4000 is available as single or dual channel power supply, readout and control unit. This
instruction manual however describes only the dual channel version PR4000F. Two or more units
PR4000 can be combined thus performing multichannel control units.
Further features:
•Display format four or five digits, selectable
•2 trip limits and 2 relays, can be combined and configured in a wide variety of functions and
combinations
•linearization possible for both channels
•Interface either RS232 (standard) or RS485 (optional)
•3 different power supplies: ±15 V / 0,8 A (standard); ±15 V / 1,5 A (optional) ; 24 V / 1 A
(optional)
•two line display, configurable, allows simultanous readout of both channels or one channel
actual value plus setpoint
•physical values displayed with engineering units
•non volatile memory for easy restart after power loss or switching off power
For more details and specifications refer to Appendix A, Specifications

Chapter 1: General Information PR4000F
6
1.2 How This Manual Is Organized
This manual provides instructions on how to install, set up and operate the PR4000F unit.
Before installing your PR4000F unit in a system and/or operating it, carefully read and
familiarize yourself with all precautionary notes in the Safety Messages and Procedures
section at the front of this manual. In addition, observe and obey all WARNING and CAUTION
notes provided throughout the manual.
Chapter 1 General Information; (this chapter) introduces the product and ist manual
Chapter 2 Installation; explains environmental requirements and practical considerations for
the installation.
Chapter 3 Overview; reviews the PR4000F controller. It describes the components on both
the front and rear panels and describes the electrical connections.
Chapter 4 Operation; explains the parameter editing (Setup), describes how to operate the
unit and contains examples for system configurations.
Chapter 5 Interfaces; describes the RS232 and RS485 interfaces.
Appendix A Specifications; lists the technical data of the unit.
Appendix B Error Messages; contains a list of error messages shown in the display.
Appendix C Default Configurations; lists the default settings for both pressure and flow.
1.1 Customer Support
Standard maintenance and repair services are available at all of our regional MKS Calibration and
Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your Type
PR4000F instrument, or to obtain information about companion products MKS offers, contact any
authorized MKS Calibration and Service Center. If it is necessary to return the instrument to MKS,
your service center can inform you about the need for an ERA Number (Equipment Return
Authorization Number) or a form for declaration of decontamination or other regulations before
shipping. The ERA Number expedites handling and ensures proper servicing of your instrument.
Please refer to the last page of this manual for a list of MKS Calibration and Service Centers.
Warning All returns to MKS Instruments must be free of harmful, corrosive,
radioactive, or toxic materials.

PR4000F Chapter 2: Installation
7
Chapter 2: Installation
2.1 Unpacking
MKS has carefully packed the Type PR4000F unit so that it will reach you in perfect operating
order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors,
etc., to be certain that damage has not occurred during shipment.
Note Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. Please refer to the last page of
this manual for a list of MKS calibration and service centers.
Caution Only qualified individuals should perform the installation and any
user adjustments. They must comply with all the necessary ESD
and handling precautions while installing and adjusting the
instrument. Proper handling is essential when working with all
highly sensitive precision electronic instruments.
2.2 Unpacking Checklist
Standard Equipment:
•Type PR4000F readout unit
•Power cable
•Mating connector kit (if no connection cable was ordered)
•Instruction manual (this book)
Optional:
•Connection cable(s), e.g. for transducers, controllers etc.
•Mounting kit

Chapter 2: Installation PR4000F
8
2.3 Cables
The unit complies with the European standards
•EN50011:1991: Interference Emmissions
(Group 1, Class B)
•EN50082-2:1995: Immunity from Noise
ESD according to IEC801-2:1991
EMF according to ENV50140:1993 resp. 50204:1995
Burst according to IEC801-4:1988
Line Noise according to ENV50141:1993
•EN61010-1:1993: Device Safety
and thus it is labelled with the CE-mark. To fullfill the above listed guidelines it is mandatory to use
the approbriate interconnection cables.
Note An overall metal braided shielded cable, properly grounded at both
ends, is required to meet CE specifications.
We recommend to use the cables offered by MKS Instruments.
Cables which are in compliance with the CE guidelines are marked
with an „E“ or „S“ (example: CB259E-... or CB259S-...).
Interconnection Cables from MKS
The following table lists the standard cables provided by MKS Instruments. They are all in
compliance with the CE guidelines. If the cable needed for your particular instruments is not listed
there then please contact your MKS center.
The cable length is 3 meters (standard length), 5m or 10m (optional).
For cable length greater than 10m please contact your MKS center.
(continued on next page)

PR4000F Chapter 2: Installation
9
Cables for combination with the PR4000F
For pressure transducers or in-line pressure controllers
type or series MKS-Cable Type
120
121
622, 623, 624, 625, 223, 122A
621, 626, 627, 628, 640, 641, 127, 128, 722A (with 15-pin type D
connector)
722 (9-pin type D connector)
722 (terminal block)
For mass flow meters (MFM) or mass flow controllers (MFC)
with 15-pin type D connector:
179, 1179, 2179, 1479, 1259, 2259, 258, 358, 1359, 558, 1559,
M100, 1640
with 9-pin type D connectorr:
1179, 2179, 1479, M200, M330
CBE 120-96-3M
CBE 112-14-3M
CBE 112-2-3M
CBE 259-5-3M
CBE 700-1-3M
CBE 700-99-3M
CBE 259-5-3M
CBE147-12-3M
Table 2: Standard Interconnecting Cables
Note Flow controllers with 9-pin connector do not have the „Valve Close“ input
(remotely closing of the control valve).
Generic Shielded Cable Description
MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own
cables, follow the guidelines listed below:
1. The cable must have a braided shield, covering all wires. Neither aluminum foil nor spiral
shielding will be as effective; using either may nullify regulatory compliance.
2. The connectors must have a metal case which has direct contact to the cable’s shield on the
whole circumference of the cable. The inductance of a flying lead or wire from the shield to the
connector will seriously degrade the shield’s effectiveness. The shield should be grounded to
the connector before its internal wires exit.
3. With very few exceptions, the connector(s) must make good contact to the device’s case
(ground). “Good contact” is about 0.01 ohms; and the ground should surround all wires.
Contact to ground at just one point may not suffice.

Chapter 2: Installation PR4000F
10
4. For shielded cables with flying leads at one end; it is important at such end, to ground the
shield before the wires exit. Make this ground with absolute minimum length. After picking up
the braid’s ground, keep wires and braid flat against the case. With very few exceptions,
grounded metal covers are not required over terminal strips. If one is required, it will be stated
in the Declaration of Conformity or in the instruction manual.
5. In selecting the appropriate type and wire size for cables, consider:
A. The voltage ratings;
B. The cumulative I2R heating of all the conductors (keep them safely cool);
C. The IR drop of the conductors, so that adequate power or signal voltage gets to the device;
D. The capacitance and inductance of cables which are handling fast signals, (such as data lines
or stepper motor drive cables); and
E. That some cables may need internal shielding from specific wires to others; please see the
instruction manual for details regarding this matter.
2.4 Installation, Mounting
The PR4000F is designed for use in dry and warm environment with sufficient ventilation. The
device must be installed in such a way that air can circulate free. Do not cover the openings at the
instrument’s housing. If there are heat loss generating devices located next to the unit make sure
that no excessive heat is transferred to the PR4000F.
Note Position the unit with proper clearance , to allow air cooling, so that the
unit can operate within the specified temperature as listed in appendix A.
Do not cover the openings at the instrument’s housing.

PR4000F Chapter 2: Installation
11
Dimensions
Figure 1: Dimensions
(above: Front and Rear Panel; below: Side View)

Chapter 2: Installation PR4000F
12
Line Power and Fuses
The two wire line power connection is protected by two fuses. Before connecting the unit to the AC
power source you must check that the voltage selector switch is set to the correct mains voltage.
Refer to the following table in case that the line fuses must be changed or replaced respectively.
Voltage selector, fuse holder and line cord plug are located at the rear panel (see figure 3).
Voltage Selector Switch Version Fuse Type
230 VAC ±15 V; 0,8 A T315mA
230 VAC ±15 V; 1,5 A T500mA
230 VAC +24 V; 1 A T315mA
115 VAC ±15 V; 0,8 A T630mA
115 VAC ±15 V; 1,5 A T1A
115 VAC +24 V; 1 A T630mA
Table 3: Fuse Information
The version of your PR4000F is derived from the informations on the serial label.
Caution Check to make sure the voltage setting is correct for your local
electrical source.
Check to make sure the fuse type is appropriate for your voltage
setting.
Protective Grounding
Connect the power cord PR4000F only into a grounded outlet.
2.5 Switching on the unit
After all connections to the peripheral instruments, e.g. pressure transducer, mass flow controller
etc. are properly done the unit can be switched on. Refer to the instructions for the peripheral units
for proper installation, connection, set up and warm up.
The elements on the front and rear panel and their functions are explained in the following chapter.