MKS Micro-Baratron 870B User manual

123655-P1
Rev A, 4/99
Instruction Manual
MKS Type 870B/872B
Micro-Baratron®
Absolute Pressure Transducer
Six Shattuck Road
Andover, MA 01810-2449
[phone] or [phone]
Fax: [phone]
E-mail: [e-mail]
Web site: http://www.mksinst.com

WARRANTY
Type 870B/872B Equipment
MKS Instruments, Inc. (MKS) warrants that for two years from the date of shipment the equipment described
above (the “equipment”) manufactured by MKS shall be free from defects in materials and workmanship and will
correctly perform all date-related operations, including without limitation accepting data entry, sequencing, sorting,
comparing, and reporting, regardless of the date the operation is performed or the date involved in the operation,
provided that, if the equipment exchanges data or is otherwise used with equipment, software, or other products
of others, such products of others themselves correctly perform all date-related operations and store and transmit
dates and date-related data in a format compatible with MKS equipment. THIS WARRANTY IS MKS’SOLE
WARRANTY CONCERNING DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending two years later, MKS will, at
its option, either repair or replace any part which is defective in materials or workmanship or with respect to the
date-related operations warranty without charge to the purchaser. The foregoing shall constitute the exclusive and
sole remedy of the purchaser for any breach by MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is asserted to be defective by the
purchaser, shall make specific written arrangements with respect to the responsibility for shipping the equipment
and handling any other incidental charges with the MKS sales representative or distributor from which the
equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover,
Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used in accordance with the
specifications recommended by MKS for the proper and normal use of the equipment. MKS shall not be liable
under any circumstances for indirect, special, consequential, or incidental damages in connection with, or arising
out of, the sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodically (typically every 6 to 12
months) to ensure accurate readings. When a product is returned to MKS for this periodic re-calibration it is
considered normal preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR IMPLIED,
INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS
FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF ANY PATENT.
11-98 123655-P1
This warranty is void if the product is installed using single or double metal ferrule compression
type vacuum fittings, shown below. These fittings are commonly tightened incorrectly, causing
damage to the pressure sensor.
SPECIAL NOTICE
Single Ferrule Double Ferrule

123655-P1
Rev B, 06/01
MKS Type 870B/872B
Micro-Baratron®
Absolute Pressure Transducer

Copyright © 2001 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or
by any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by
MKS Instruments, Inc.
Printed in the United States of America
Baratronis a registered trademark of MKS Instruments, Inc., Andover, MA
Bendixis a registered trademark of Amphenol Corp., Bendix Connector Operations., Sidney,
NY
Inconeland Incoloyare registered trademarks of Inco Alloys International, Huntington, WV
Swagelokand VCRare registered trademarks of Swagelok Marketing Co., Solon, OH

Table of Contents
iii
Table of Contents
Pressure Transducer Safety Information..............................................................................2
Symbols Used in This Instruction Manual.................................................................2
Symbols Found on the Unit......................................................................................3
Safety Procedures and Precautions..........................................................................4
Sicherheitshinweise für den Druckmeßumformer..................................................................6
In dieser Betriebsanleitung vorkommende Symbole ...................................................6
Erklärung der am Gerät angebrachten Symbole ........................................................7
Sicherheitsvorschriften und Vorsichtsmaßnahmen.....................................................8
Informations relatives à la sécurité pour le transducteur de pression.......................................10
Symboles utilisés dans ce manuel d'utilisation............................................................10
Symboles apparaissant sur l'unité .............................................................................11
Mesures de sécurité et précautions ..........................................................................12
Medidas de seguridad del transductor de presión...................................................................14
Símbolos usados en este manual de instrucciones......................................................14
Símbolos hallados en la unidad.................................................................................15
Procedimientos y precauciones de seguridad............................................................16
Chapter One: General Information......................................................................................19
Introduction............................................................................................................19
How This Manual is Organized................................................................................20
Customer Support...................................................................................................20
Chapter Two: Installation ...................................................................................................21
How To Unpack the Type 870/872 Unit...................................................................21
Ultraclean Units .........................................................................................21
Unpacking Checklist...................................................................................22
Product Location and Requirements.........................................................................22
Operating Temperature...............................................................................22
Power Requirements ..................................................................................22

Table of Contents
iv
Interface Cables.....................................................................................................23
Generic Shielded Cables..............................................................................24
Setup.....................................................................................................................25
Dimensions ................................................................................................25
Mounting Instructions..................................................................................29
Welded Connections ...................................................................................29
Mechanical Connections .............................................................................29
Electrical Information..............................................................................................30
Voltage Unit...............................................................................................30
Current Unit...............................................................................................31
Connectors.............................................................................................................33
Flying Leads...............................................................................................34
Bendix Connectors .....................................................................................35
Type “D” Connectors.................................................................................36
Startup...................................................................................................................38
Chapter Three: Overview...................................................................................................39
General Information................................................................................................39
Sensor ...................................................................................................................39
Signal Conditioner...................................................................................................39
Labels....................................................................................................................40
Serial Number Label...................................................................................40
Information Label.......................................................................................40
Bendix Connector Warning Label................................................................41
Chapter Four: Operation.....................................................................................................43
How To Adjust the Zero.........................................................................................43
Chapter Five: Maintenance and Troubleshooting..................................................................45
General Information................................................................................................45
Maintenance ..........................................................................................................45
Zero Adjustment.........................................................................................45
Troubleshooting......................................................................................................46
Appendix A: Product Specifications ....................................................................................49

Table of Contents
v
Performance Specifications.....................................................................................49
Electrical Specifications ..........................................................................................49
Physical Specifications............................................................................................50
Environmental Specifications ...................................................................................51
Appendix B: Model Code Explanation.................................................................................53
Model Code ...........................................................................................................53
Index.................................................................................................................................57

List of Figures
vii
List of Figures
Figure 1: Dimensions of the Type 870 Transducer................................................................25
Figure 2: Dimensions of Additional Fittings for the Type 870 Transducer...............................26
Figure 3: Dimensions of the Type 872 Transducer................................................................27
Figure 4: Dimensions of Additional Fittings for the Type 872 Transducer...............................28
Figure 5: Electrical Scheme for a Voltage Unit ....................................................................30
Figure 6: Line Resistance Equation .....................................................................................31
Figure 7: Total Resistance in Line .......................................................................................31
Figure 8: Electrical Scheme for a Current (4 to 20 mA) Unit.................................................32
Figure 9: Flying Leads........................................................................................................34
Figure 10: Bendix Connector ..............................................................................................35
Figure 11: 9-Pin Standard Type “D” Connector ...................................................................36
Figure 12: 15-Pin High Density Type “D” Connector ...........................................................37
Figure 13: Serial Number Label..........................................................................................40
Figure 14: Information Label...............................................................................................40
Figure 15: Bendix Connector Warning Label........................................................................41