MKS 910 DualTrans Series Installation guide

Operation and
Maintenance Manual
Series 910 DualTransTM
Transducer

Series 910 DualTransTM
January,2003
Part # 100013085
Series 910 DualTransTM
Transducer

Series 910 DualTransTM
Part#________-__________________
Please fill in the transducer part and flange type numbers
in the space above and have them readily available when
calling for service or additional information.
(The part number can be found on your packing slip.Both
the part number and serial number are located on the
bottom side of the housing.)
For more information or literature, contact:
HPS®Products of MKS Instruments, Inc.
5330Sterling Drive
Boulder, CO 80301USA
Phone: [phone]
1-800-345-1967
Fax: [phone]
Web: www.mksinst.com/hpshome.html
For technical support, contact:
HPS®Products of MKS Instruments, Inc., Denmark Office
NordreStrandvej 119 G, 3150 HellebaekDenmark
Phone: [phone]
Fax: [phone]
©2002 by HPS®Products of MKS Instruments, Inc.
All rights reserved.

Series 910 DualTransTM
Table of Contents
Package Contents ..................................................................... 7
Symbols Used in this Manual.................................................... 8
Safety Precautions .................................................................... 9
General Specifications ............................................................ 10
Feature and Control Locations ................................................ 11
About the 910 DualTransTM.............................................................................................. 12
Typical Applications for the 910 DualTransTM............................................... 13
Installing the 910 DualTransTM ..................................................................................... 14
TransducerInstallation............................................................................14
Location ...........................................................................................14
Orientation .......................................................................................14
Contamination..................................................................................14
Vacuum Connection ...............................................................................14
ElectricalConnection .............................................................................15
Input/OutputWiring ..........................................................................15
910DualTransTM ElectricalConnectionsTable..................................16
Relay Inductive Loads and Arc Suppression ..........................................17
Pressure Reading ...................................................................................17
Operation................................................................................. 18
910DualTransTM FactoryDefaultsTable..................................................18
RS-485Protocol .....................................................................................19
StandardAddresses ........................................................................19
UniversalAddresses ........................................................................19
Queryand Command Syntax ...........................................................19
Response Syntax (ACK/NAK) .........................................................20
RS-485 Command Set ............................................................ 21
Set UpCommands .................................................................................21
Address – AD ..................................................................................21
Baud Rate – BR...............................................................................21
Factory Default – FD........................................................................21
RS Delay – RSD ..............................................................................22
Test RS485 –TST............................................................................22
Unit – U............................................................................................22
UserTag – UT ..................................................................................22
StatusCommands..................................................................................23
DeviceType – DT.............................................................................23
FirmwareVersion – FV .....................................................................23
HardwareVersion – HV ....................................................................23
Manufacturer–MF...........................................................................23

Series 910 DualTransTM
Model – MD .....................................................................................23
PressureReading–PR1,PR2.........................................................23
SerialNumber– SN .........................................................................24
Time On – TIM.................................................................................24
TransducerTemperature–TEM........................................................24
SetPoint Commands .............................................................................25
Set Point Value – SP1, SP2, SP3....................................................25
HysteresisValue – SH1, SH2, SH3 .................................................25
Set Point Direction – SD1, SD2, SD3 ..............................................26
Enable Set Point – EN1, EN2, EN3 .................................................27
Set Point Status – SS1, SS2, SS3 ..................................................27
CalibrationCommands ...........................................................................28
AtmosphereSpanCalibration – SPN ...............................................28
AtmosphereZero Calibration – ZER.................................................28
Atmospheric Calibration – ATM........................................................28
GasType Calibration – GT ...............................................................29
VacuumCalibration–VAC ...............................................................28
Analog Output ......................................................................... 30
PressuretoVoltageTable .......................................................................30
Manual Procedures for the 910 DualTransTM ................................................ 32
Calibratingfor Zero .................................................................................32
Venting to Atmosphere ...........................................................................32
LeakDetection .......................................................................................30
Maintenance and Troubleshooting .......................................... 32
MaintenanceandTroubleshootingTable ..................................................34
Cleaningthe 910 DualTransTM Caseand SensorTube ............................35
Accessories and Part Replacement ........................................ 36
Warranty .................................................................................. 38
Appendix: How the 910 DualTransTM Works............................. 39
Pirani ......................................................................................................39
MicroPirani .............................................................................................40
Piezo......................................................................................................41

Series 910 DualTransTM 7
Before unpacking the 910 DualTrans®Transducer, check all surfaces of the
packingmaterialfor shipping damage.
Confirmthat the 910 DualTrans®packagecontains these items:
♦1910DualTrans®unit (integratedsensor and electronics)
♦1910 DualTrans®TransducerOperation and MaintenanceManual
Inspect the components for visible evidence of damage during shipment. If
anythinghasbeendamaged, notifythe carrierimmediately.Keepallshipping
materialsandpackagingforclaimverification.
If any items are missing from the package, call MKS Customer
Serviceat 1-303-449-9861or 1-800-345-1967.
Do not return the product to MKS unless specified to do so by MKS Customer
Service.
MKS customer service and support:
MKS Instruments, Inc. Telephone [phone]
5330SterlingDr. Toll-Free 1-800-345-1967 (USAonly)
Boulder,CO 80301 Facsimile 1-303-449-2003
USA
Europe:
MKS Instruments Inc. Telephone [phone]
NordreStrandvej 119 G Facsimile [phone]
DK-3150Hellebaek
Denmark
PackageContents

8 Series 910 DualTransTM
CAUTION:Refer to the manual.Failure to heed the message could
result in personal injury, serious damage to the equipment, or both.
Calls attention to important procedures, practices, or conditions.
Symbols Used in this Manual

Series 910 DualTransTM 9
SafetyPrecautions
Do not substitute parts or modify instrument. Do not install
substitute parts or perform any unauthorized modification to the
instrument. Return the instrument to an MKS Calibration and Service
Center for service and repair to ensure that all of the safety features
aremaintained.
Do not use the Series 910 DualTransTM with explosive gas
mixtures or gases that are combustible in air.The MicroPirani
uses a thin film Nickel resistive element that is heated to a constant
temperature above ambient.This could ignite explosive gas mixtures.
Properly ground the transducer.The transducer shouldbe
connected to earth ground both through the vacuum flange and the
back shell of the electrical connector.
Allow only qualified technicians to service the 910 DualTransTM
transducer. Users should not remove covers, casing, or plug-in
components. Injury may result. A qualified technician must perform
any part replacement or internal adjustments.
Keep the unit free of contaminants. Donotallow contamination of
any kind to enter the unit before or during use. Contaminants such as
dust, dirt, lint, glass chips, and metal chips may permanently
damagetheunit.

10 Series 910 DualTransTM
GeneralSpecifications
1x10-5 to900Torr
0.1to1500Torr
1x10-5 to1500Torr
1%: Range 10 to 1000Torr
10%: Range 10-4 to 10Torr
1%: Range 10-2 to 1000Torr
5%: Range 10-3 to 1000Torr
10%:Range 10-4 to 1000Torr
1x10-4 to1500Torr
1 to 9 VDC
1500Torr
9 to 30VDC
<1.5Watts
200mA
1A @ 30VAC/VDC resistive load
304 stainless steel, Silicon, SiO2, SiN4,
gold, Ultem®1000,Viton®
304 stainless steel
0.6 cm3
0 to 40 oC
85oC
Any
EMCDirective2004/108/EC
NW16 KF, 4 VCR® F, 8VCR®F
1.6” x 1.6” x 3.9” (40.6 x 40.6 x 99 mm)
3.4 oz. (97 g)
Measuring range Pirani(PR1)
Measuring range Piezo(PR2)
Measuring Range
Combination(PR3)
AccuracyCombination(PR3)
Repeatability of
Combination (PR3)
Setpoint Range Comb(PR3)
Analog out Pirani
Maximum pressure
Supply voltage
Power consumption
Fuse(recoverable)
Relay contact rating
Materials exposed to
vacuum
Housing material
Internal volume
Operatingtemperature
Bakeouttemperature (off)
Installation orientation
CE Certification
Vacuum connections
Dimensions (with KF 16)
Weight (with KF 16)

Series 910 DualTransTM 11
Made In Denmark
Series 910
R
DualTrans
Transducer
www.mksinst.com
Zero
HPS Products
TM
User access is through the 15-pin D-sub connector.The ZERO adjust button
allows the user to manually perform zero calibration. See Calibration
Commands in the RS-485 Command Set section for more information.
The figures below show the front and top view of the 910.
Feature and Control Locations
FRONT VIEW
MALE, 15-PIN D-SUB CONNECTOR
ZERO ADJUST
BUTTON

12 Series 910 DualTransTM
The 910 DualTransTM is designed specifically for the semiconductor OEM
environment. It combines an absolute Piezo sensor as an acccurate
atmosphericpressure sensor and a MicroPirani sensor to measure vacuum
pressure with integrated electronic control circuits. Once integrated into the
vacuum system, the 910 DualTransTM functions are computer-controlled,
requiring little manual intervention by the user.This enables the system to
monitor pressure as a procedure invisible to the user, and when the desired
pressure is reached, trigger the next event in the system process.
This manual describes the installation and configuration tasks necessary to
set up the 910 DualTransTM .After the device is set up, a software engineer at
the user’s installation would use the communications protocol described in
this manual to create a software program (in, for example, Visual Basic, C, or
C++) that will automatically control DualTransTM operation.
For additional information on how the 910 DualTransTM works, see the
appendix How the 910 DualTransTM.
About the 910 DualTransTM

Series 910 DualTransTM 13
Typical Applications for the 910
DualTransTM
♦Semiconductorapplications.
♦Measureforeline and roughing pressures generated bymechanical
vacuum pumps.
♦Control valves and pumps to automate pump-down using relay set points.
♦Senseabnormalpressure and take appropriate security measures using
relay set points.
♦Control system pressure using digital communications or an analog
output as an input to an automatic pressure controller.
♦Start or stop system processes with a relay set point.
♦Measure pressures of backfilling gases in the range of 10-4 Torr to
atmosphere.
♦Activate high vacuum gauges in their operating range.

14 Series 910 DualTransTM
Transducer Installation
Location
LocatetheDualTransTM where itcanmeasurechamberormanifoldpressure.
Install it away from pumps and gas sources and where vibration is minimal to
givethemostrepresentativepressuremeasurement.
Orientation
The910DualTransTM can be mounted in any orientation.The MicroPirani
sensor was designed to minimize convection so that the operation is possible
in any position without compromising accuracy.
Contamination
Locate and orient the DualTransTM where contamination is least likely.For
example, if the DualTransTM is installed directly above a roughing pump in the
system, oil vapor could contaminate the MicroPirani’s filament wire and cause
the emissivity and calibration to shift.The MicroPirani sensor has a low
filamenttemperatureof only 35oC above ambient temperature; therefore, the
MicroPirani is less prone to contamination by cracking products from fore-
pump oil.The MicroPirani is not intended for use in corrosive environments.
Whenever possible, install the DualTransTM with the vacuum port facing down
to keep particulates or liquids from entering the device.
Vacuum Connection
StandardDualTransTM vacuum interfacesare shown on the followingpage.
When fitting a 1/8”NPT-M thread, do not use the case for tightening.The
vacuum tubing has 9/16”hex flats for tightening.Wrap a layer ofTeflon tape
on the threads of the tubing, in the direction of the installation, to ensure a
leak-free seal.This sensor can also use a 1/2”O-ring compression seal acting
on the tubing above the thread, but the O-ring seal cannot be used for
positivepressureapplications.
Installing the 910 DualTransTM

Series 910 DualTransTM 15
Electrical Connection
Use a cable with a female 15-pin high-density D-sub connector with strain
reliefs to ensure proper electrical connection and to reduce stress on the
connectors.
Ensure a low impedance electrical connection between the 910
sensor body and the grounded vacuum system to shield the
sensor from external electromagnetic sources.
Input/Output Wiring
Thefigureandthe910 DualTransTM Electrical Connections Table onthe
following page identify the pins of the 910 connector and their functions; make
a cable using this information.To comply with EN61326-1 immunity
requirements, use a braided, shielded cable. Connect the braid to the metal
hoods at both ends of the cable with the end for power supply connected to
earth ground.
8 VCR F
4 VCR F
®
®
Made In Denmark
Series 910
R
DualTrans
Transducer
www.mksinst.com
Zero
HPS Products
TM
3.62
[91.95] A
1.60
[40.64]
NW 16KF
NW 25KF
1-1/3" CF
2-3/4" CF
(1/2") VCR8F
(1/4")VCR4F
1/8" NPT-M
FLANGE
3.92" (99.57)
4.53" (115.01)
4.86" (123.55)
4.90" (124.41)
5.14" (130.63)
5.51" (139.98)
5.61" (142.57)
A

16 Series 910 DualTransTM
The power supply input is 9 to 30VDC.The positive side of the power supply
is connected to pin 3 and the negative side to pin 4 of the male D-sub
connector.The power supply input is protected by an internal fuse.The fuse is
self-recoverable;donotreplace it.
Damage may occur to the circuitry if excessive voltage is applied,
polarity reversed, or if a wrong connection is made.
If using analog output (described in the Analog Output section), the analog
output voltages are pins 5 (+) and 6 (-). Connect them to a differential input
voltmeter or an analog-to-digital (A/D) converter with a differential input in a
system controller.
Do not connect the negative side of the analog output (pin 6) to
the negative side of the power supply input (pin 4) or to any
other ground. Doing so will cause half of the power current to
flow through this wire. Measurement errors in the output voltage
may be seen due to the voltage drop from this current. The
longer the cable, the worse the error will be.
Do not connect the set point relay terminals to the analog output.
910 DualTransTM Electrical Connections Table
The digital communications connections are pins 1 and 2. RS-485 uses pin 1
for RS485(-) and pin 2 for RS485(+). RS-232 uses pin 1 for RS232 transmit
(TXD) and pin 2 for RS232 receive (RXD).
RELAY 2 N.O.
RELAY 1 N.C.
POWER +
POWER -
ANALOG OUT +
RELAY 1 N.O.
RS485 + / RS232 RXD(receive)
ANALOG OUT -
RS485 - / RS232 TXD(transmit)
RELAY 1 COMMON
RELAY 3 N.C.
RELAY 2 N.C.
RELAY 3 N.O.
RELAY 2 COMMON
RELAY 3 COMMON
MALE CONNECTOR
ON 910
PIN 1 PIN 5
PIN 6 PIN 10
PIN 11 PIN 15

Series 910 DualTransTM 17
Relay Inductive Loads and Arc Suppression
If using the set point relay to switch inductive loads (e.g., solenoids, relays,
transformers, etc.), the arcing of the relay contacts might interfere with 910
operation and reduce relay contact life.Therefore, an arc suppression
network, shownschematically below,isrecommended.
The values of the capacitance C and the resistance R can be calculated by
thefollowing equations:
C = I2/(1 x 107)
R = E/ Ia
where: C is in farads
R is in ohms
I is DC or Acpeak load current in amperes
E is DC or Acpeak source voltage in volts
a = 1 + (50/ E)
Note that Rmin = 0.5 Ωand Cmin = 1.0 x 10-9 F
Pressure Reading
The MicroPirani is based on measurement of thermal conductivity; therefore,
the MicroPirani readout depends on the gas type and concentration.

18 Series 910 DualTransTM
Operation
The 910 DualTransTM operation parameters are preset at the factory.The table
below shows the factory default settings. Use the user interface and the
commands described on the following pages to change parameter settings as
necessary.The user interface to the 910 DualTransTM is through either RS-232
orRS-485serialcommunications.RS-232 and RS-485 use the same
commands to communicate with the 910;however, RS-485 allows
communicationwithmultiple transducers, whereas RS-232 allows
communication with only a single transducer.The remainder of this manual
refers to RS-485 only.
910 DualTransTM Factory Defaults Table
gnitteS tluafeD
sserddA352
etaRduaB0069
stinUerusserPrroT
3,2,1tnioPteSrroT0E00.1
3,2,1siseretsyHrroT0E01.1
noitceriDtnioPteSwoleB
tnioPteSelbanEffO
epyTsaGnegortiN

Series 910 DualTransTM 19
RS-485 Protocol
The 910 supports 2400, 4800, 9600, and 19200 baud rates (factory
default: 9600).The data format is 8 data bits, no parity, and one stop bit.
StandardAddresses
Valid addresses are 3 digits, 001 to 253 (factory default:253).
UniversalAddresses
The 910 receives and responds to commands sent to address 254. For
example, use 254 to communicate with a device if its address is unknown.
The 910 receives and acts upon commands sent to address 255, but does
not respond; use 255 to broadcast messages to multiple devices attached to
the same system. For example, use 255 to change the baud rate for all
devices.
Query and Command Syntax
Queriesreturncurrent parameter settings; commands change the parameter
setting according to the value the user types in the command syntax. Each
query or command must begin with the attention character @ and end with
the termination string ;FF.
Syntax required for a query is:
@<device address><query>?;FF.
Syntax required for a command is:
@<device address><command>!<parameter>;FF.
Examples:
Querycurrent baud rate:@253BR?;FF
Changebaud rate to 19200: @253BR!19200;FF
where: @ <attentioncharacter>
253 <device address>
BR? <query> (for query syntax)
BR!19200 <command>!<parameter>(forcommandsyntax)
;FF <terminator>

20 Series 910 DualTransTM
ResponseSyntax(ACK/NAK)
The ASCII characters 'ACK' or 'NAK' preface the query or command response
string.The ACK sequence signifies the message was processed
successfully.The NAK sequence indicates there was an error.
The response to a query or a successful command is:
@<deviceaddress>ACK<data>;FF
The response to a message with an error is:
@<deviceaddress>NAK;FF
Examples:
ACKresponse: @253ACK9600;FF(baud rate changedto9600)
NAKresponse: @253NAK;FF