Olympus AL120-6 Series User manual

Operation Manual
Wafer Loader
ＡＬ120-6Series
ＡＬ120-86Series
Thank you for purchasing the Olympus AL120 Series Wafer Loader.
In order to fully utilize its performance and secure safety, please read this manual before operation.
Please also keep it at hand during operation as well as for future reference.
AX7833-05

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Operation/Maintenance Manual Introduction
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i Introduction
AL120 Series Lineup
AL120 series products consist of a model name and an applicable wafer size.
Note that only the AL120 series products with the same wafer size can be combined.
(The remote controller is common to all the AL120 series products.)
L6-150
LMB6-150
L86
L86-180
LMB86
LMB86-180
LMB8-90
Applicable
wafer size
150 mm
150 mm
150/200
mm
150/200
mm
150/200
mm
150/200
mm
200 mm
Orientation flat
alignment
Available
Available
Available
Available
Available
Available
Available
Top Macro
inspection
N. A.
Available
N. A.
N. A.
Available
Available
Available
Back Macro
inspection
N. A.
Available
N. A.
N. A.
Available
Available
Available
2nd Back Macro
inspection
N. A.
Available
N. A.
N. A.
Available
Available
Available
Microscope
Available
Available
Available
Available
Available
Available
Available
Wafer Loader
AL120-L6-150
AL120-LMB6-150
AL120-L86
AL120-L86-180
AL120-LMB86
AL120-LMB86-180
AL120-LMB8-90
Option
AL120-SLK8
Option
Tray
AL120-TRY-M61-86
Option
Microscope
MX61,MX63
Vacuum Stage
AL120-VS6
AL120-VS8
Option
Remote Controller
AL120-RC
Series name
Model name
Wafer size
Wafer thickness
LMB
AL120-
L: Microscope Loading
LMB:Microscope Loading, Top
Macro Inspection and
Back Macro Inspection
VS: Vacuum Stage
6
-150
6: Loading of 150mm wafers
86: Loading of 200mm and 150mm wafers
150:Loading of 150 m-thick wafers
180:Loading of 180 m-thick wafers
90: Loading of 90 m-thick wafers

Introduction/Precautions Operation/Maintenance Manual
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The AL120 series consists of a wafer loader, a vacuum stage, and other products.
This manual does not cover custom-order specifications or microscopes.
To acquire a comprehensive understanding of both your loader and microscope, please refer to your
microscope operation manual.
You must prepare yourself the table on which the loader is to be installed and the cassettes and wafers to be
inspected and loaded by the loader.
This loader is designed to maximize its operability when it is installed on a table with a height of 700 mm.
The operability is designed based on the SEMI Standard S8.
Our company’s designed operability is not guaranteed if the loader is installed on a table that does not satisfy
the conditions specified above.
Please refer to the SEMI Standard S8 to select a table.
1. Precautions
Operators must follow the instructions in the Operation/Maintenance Manual. If these instructions are not
followed, safety can not be assured, and malfunctions may occur.
The following 3 types of symbols are used in this Manual to draw operators' attention.
: Indicates critical advice in order to protect operators from injury as well as to protect the
loader (including its peripherals) from damage.
: Indicates a cautionary advice to protect the loader from damage.
: Indicates useful information for operation.
Ref.
Caution

Operation/Maintenance Manual Introduction/Safety Precautions
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2. Safety Precautions
1. Use the loader within the scope of the specifications.
2. Use only the OLYMPUS power cord provided with the loader.
Otherwise the safety performance of the loader can not be assured.
3. The power cord plug must be easily accessible at any time. Immediately unplug the
power cord if you find any abnormalities in the loader.
4. Bind wires and tubes to table legs and the like to prevent them from catching your
feet.
5. Be sure to ground the loader. Otherwise our intended electric safety performance of
the loader cannot be assured.
6. Never put any metallic objects in the vent. This could cause an electric shock or
malfunction.
7. Place the loader and the microscope on a sturdy and level table (with a tilt angle of no
more than 1 degree).
8. Wear gloves when clearing broken wafers.
9. Wafers under inspection could fall down when the vacuum supply is stopped. The
check valve and buffer tank should be connected to maintain a vacuum even when the
vacuum supply is stopped. Buffer tank and the check valve are not attached to Wafer
Loader. When it is necessary, please contact it to nearest OLYMPUS distributor.
10. Wafers could fall down if you touch them or apply a force to them during inspection.
Do not touch wafers during inspection.
11. Undergo maintenance training before attempting to do maintenance on the loader.
12. Consult your nearest OLYMPUS distributor if you need to move the loader.
(The loader weight is approximately 44kg.)
13. Down flow that may cause a wafer to shake may cause the wafer transfer operation to
be accompanied by physical danger. Take care that the wafer transfer operation is
performed at a location where there is no such down flow.
14. Use a cassette that complies with the SEMI standard. If a deformed cassette is used,
there is an increased risk of a wafer being damaged.

Introduction/Safety Precautions Operation/Maintenance Manual
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15. To get the best performance from this loader, make sure that there is at least the
space shown below (with dimensions in ) around the loader during assembly
and installation.
The dimensions indicated by the dot-dot-dash lines show the stage's movable range.
You can get more working space during maintenance or other work by changing the
observation tube mounting direction and moving the stage.
This installation space is determined according to the SEMI guideline (SEMI
S8-0308). Provide adequate space for operating the loader according to your intended
use by referring to the installation space and outer dimensions shown on the next
page.
Installation space
AL120-6 Series Unit: mm
Stage movable range
Working space
AL120-86 Series Unit: mm
Stage movable range
Working space

Operation/Maintenance Manual Introduction/Safety Precautions
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Position of the Center of Gravity
AL120-6 Series
Position of
the center of gravity
AL120-86 Series
Position of
the center of gravity

Introduction/Safety Precautions Operation/Maintenance Manual
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Working Environment
Please prepare the table for the equipment at your side.
This equipment is designed so as to show the best performance in being set on the table of which height is
approx. 700mm and thickness of work surface is more than 22mm.
This equipment is designed in accordance with the SEMI S8 standard.
If any other tables are selected, the best performance can not be assured.
When selecting the table, please refer to the SEMI S8 standard.
Part Dimensions
AL120-6 Series Unit: mm

Operation/Maintenance Manual Introduction/Safety Precautions
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AL120-86 Series Unit: mm

Introduction/Safety Precautions Operation/Maintenance Manual
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Earthquake Protection
(1)This loader should be secured to prevent it from falling off the table when an earthquake occurs.
1.The fixation method of the microscope
2.The fixation method of the Tray( AL120-TRY-M61-86) and Wafer Loader
The Tray( AL120-TRY-M61-86) and Wafer Loader has the holes for fixing the equipment.
Please fix the equipment on the tray and Wafer Loader not to be moved by unexpected force such as
earthquake.
Use two M8 steel bolts and boss through the holes provided to secure the Tray and Wafer Loader to
supporting surface (table etc.)
Fixing part (Recommended dimensions)
For the wafer loader For the tray
Fixing part: Bosses (optional)
Material: Stainless steel
Fixing bolt: M8 hexagon socket head bolt 55
Boss
Bolt
*The microscope fixes with an
attached bolt.
・M5 hexagon socket head bolt 16
・M5 spring washer
・M5 machine screw washer
4 points