Olympus AL120-6 Series User manual

Operation Manual
Wafer Loader
ＡＬ120-6Series
ＡＬ120-86Series
Thank you for purchasing the Olympus AL120 Series Wafer Loader.
In order to fully utilize its performance and secure safety, please read this manual before operation.
Please also keep it at hand during operation as well as for future reference.
AX7833-05

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Operation/Maintenance Manual Introduction
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i Introduction
AL120 Series Lineup
AL120 series products consist of a model name and an applicable wafer size.
Note that only the AL120 series products with the same wafer size can be combined.
(The remote controller is common to all the AL120 series products.)
L6-150
LMB6-150
L86
L86-180
LMB86
LMB86-180
LMB8-90
Applicable
wafer size
150 mm
150 mm
150/200
mm
150/200
mm
150/200
mm
150/200
mm
200 mm
Orientation flat
alignment
Available
Available
Available
Available
Available
Available
Available
Top Macro
inspection
N. A.
Available
N. A.
N. A.
Available
Available
Available
Back Macro
inspection
N. A.
Available
N. A.
N. A.
Available
Available
Available
2nd Back Macro
inspection
N. A.
Available
N. A.
N. A.
Available
Available
Available
Microscope
Available
Available
Available
Available
Available
Available
Available
Wafer Loader
AL120-L6-150
AL120-LMB6-150
AL120-L86
AL120-L86-180
AL120-LMB86
AL120-LMB86-180
AL120-LMB8-90
Option
AL120-SLK8
Option
Tray
AL120-TRY-M61-86
Option
Microscope
MX61,MX63
Vacuum Stage
AL120-VS6
AL120-VS8
Option
Remote Controller
AL120-RC
Series name
Model name
Wafer size
Wafer thickness
LMB
AL120-
L: Microscope Loading
LMB:Microscope Loading, Top
Macro Inspection and
Back Macro Inspection
VS: Vacuum Stage
6
-150
6: Loading of 150mm wafers
86: Loading of 200mm and 150mm wafers
150:Loading of 150 m-thick wafers
180:Loading of 180 m-thick wafers
90: Loading of 90 m-thick wafers

Introduction/Precautions Operation/Maintenance Manual
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The AL120 series consists of a wafer loader, a vacuum stage, and other products.
This manual does not cover custom-order specifications or microscopes.
To acquire a comprehensive understanding of both your loader and microscope, please refer to your
microscope operation manual.
You must prepare yourself the table on which the loader is to be installed and the cassettes and wafers to be
inspected and loaded by the loader.
This loader is designed to maximize its operability when it is installed on a table with a height of 700 mm.
The operability is designed based on the SEMI Standard S8.
Our company’s designed operability is not guaranteed if the loader is installed on a table that does not satisfy
the conditions specified above.
Please refer to the SEMI Standard S8 to select a table.
1. Precautions
Operators must follow the instructions in the Operation/Maintenance Manual. If these instructions are not
followed, safety can not be assured, and malfunctions may occur.
The following 3 types of symbols are used in this Manual to draw operators' attention.
: Indicates critical advice in order to protect operators from injury as well as to protect the
loader (including its peripherals) from damage.
: Indicates a cautionary advice to protect the loader from damage.
: Indicates useful information for operation.
Ref.
Caution

Operation/Maintenance Manual Introduction/Safety Precautions
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2. Safety Precautions
1. Use the loader within the scope of the specifications.
2. Use only the OLYMPUS power cord provided with the loader.
Otherwise the safety performance of the loader can not be assured.
3. The power cord plug must be easily accessible at any time. Immediately unplug the
power cord if you find any abnormalities in the loader.
4. Bind wires and tubes to table legs and the like to prevent them from catching your
feet.
5. Be sure to ground the loader. Otherwise our intended electric safety performance of
the loader cannot be assured.
6. Never put any metallic objects in the vent. This could cause an electric shock or
malfunction.
7. Place the loader and the microscope on a sturdy and level table (with a tilt angle of no
more than 1 degree).
8. Wear gloves when clearing broken wafers.
9. Wafers under inspection could fall down when the vacuum supply is stopped. The
check valve and buffer tank should be connected to maintain a vacuum even when the
vacuum supply is stopped. Buffer tank and the check valve are not attached to Wafer
Loader. When it is necessary, please contact it to nearest OLYMPUS distributor.
10. Wafers could fall down if you touch them or apply a force to them during inspection.
Do not touch wafers during inspection.
11. Undergo maintenance training before attempting to do maintenance on the loader.
12. Consult your nearest OLYMPUS distributor if you need to move the loader.
(The loader weight is approximately 44kg.)
13. Down flow that may cause a wafer to shake may cause the wafer transfer operation to
be accompanied by physical danger. Take care that the wafer transfer operation is
performed at a location where there is no such down flow.
14. Use a cassette that complies with the SEMI standard. If a deformed cassette is used,
there is an increased risk of a wafer being damaged.

Introduction/Safety Precautions Operation/Maintenance Manual
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15. To get the best performance from this loader, make sure that there is at least the
space shown below (with dimensions in ) around the loader during assembly
and installation.
The dimensions indicated by the dot-dot-dash lines show the stage's movable range.
You can get more working space during maintenance or other work by changing the
observation tube mounting direction and moving the stage.
This installation space is determined according to the SEMI guideline (SEMI
S8-0308). Provide adequate space for operating the loader according to your intended
use by referring to the installation space and outer dimensions shown on the next
page.
Installation space
AL120-6 Series Unit: mm
Stage movable range
Working space
AL120-86 Series Unit: mm
Stage movable range
Working space

Operation/Maintenance Manual Introduction/Safety Precautions
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Position of the Center of Gravity
AL120-6 Series
Position of
the center of gravity
AL120-86 Series
Position of
the center of gravity

Introduction/Safety Precautions Operation/Maintenance Manual
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Working Environment
Please prepare the table for the equipment at your side.
This equipment is designed so as to show the best performance in being set on the table of which height is
approx. 700mm and thickness of work surface is more than 22mm.
This equipment is designed in accordance with the SEMI S8 standard.
If any other tables are selected, the best performance can not be assured.
When selecting the table, please refer to the SEMI S8 standard.
Part Dimensions
AL120-6 Series Unit: mm

Operation/Maintenance Manual Introduction/Safety Precautions
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AL120-86 Series Unit: mm

Introduction/Safety Precautions Operation/Maintenance Manual
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Earthquake Protection
(1)This loader should be secured to prevent it from falling off the table when an earthquake occurs.
1.The fixation method of the microscope
2.The fixation method of the Tray( AL120-TRY-M61-86) and Wafer Loader
The Tray( AL120-TRY-M61-86) and Wafer Loader has the holes for fixing the equipment.
Please fix the equipment on the tray and Wafer Loader not to be moved by unexpected force such as
earthquake.
Use two M8 steel bolts and boss through the holes provided to secure the Tray and Wafer Loader to
supporting surface (table etc.)
Fixing part (Recommended dimensions)
For the wafer loader For the tray
Fixing part: Bosses (optional)
Material: Stainless steel
Fixing bolt: M8 hexagon socket head bolt 55
Boss
Bolt
*The microscope fixes with an
attached bolt.
・M5 hexagon socket head bolt 16
・M5 spring washer
・M5 machine screw washer
4 points

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Fixed taps(M8) position dimensions
AL 120-6 Series
AL 120-86 Series
M8
M8

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Safety Symbols
The following symbols are affixed to this loader.
In order to safely operate this loader, be sure to familiarize yourself with the meanings of individual symbols.
Keep fingers clear.
Main switch is ON.
Main switch is OFF.
Warning Indication
The warning indication is attached on the part to which you need to pay attention to ensure safety when
operating/using the loader. Strictly follow the instructions.
If this warning label becomes dirty or peels off, contact your nearest OLYMPUS distributor for replacement
and servicing.
Position of warning indication label
CAUTION
MECHANICAL HAZARD
CONTACT TO MOVING PARTS OF THE MECHANISM MAY
RESULT IN SEVERE INJURY.
KEEP HANDS AND GARMENTS CLEAR OF MOVING PARTS.
CONSULT MANUAL FOR PRECAUTIONS DURING MAINTENANCE.

Operation/Maintenance Manual Introduction/Before Starting Operations
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3. Before Starting Operations
In order to get the best performance from the loader, as well as to ensure safety, please follow the 3
points listed below.
1. Never put your hands in the loader.
2. Do not deliberately place wafers or other objects in or remove from the loader while it is
in operation.
If excess force is applied to the wafer under inspection, it could lose its adhesiveness
and could be damaged.
3. Make sure that the main switch is turned off before removing a wafer for unavoidable
reasons such as malfunctions.
4. Maintenance and Storage
Make sure that the main switch is turned off and the power cord is unplugged before doing
any of the following operations.
1. Wipe each part of the loader using a soft cloth moistened with pure water.
Wipe heavy dirt or stains with a clean paper moistened with commercially available
absolute alcohol.
Never place absolute alcohol close to a flame as it is highly flammable.
Take care not to cause sparks by turning on or off an electric appliance or fluorescent
lamp.
2. Wear gloves to protect your hands while cleaning the loader when for example a wafer
is damaged.
3. Periodically check the loader for wear (a wafer loading arm and deterioration of the
drive mechanism), and replace the parts as needed. Contact your nearest OLYMPUS
distributor for repair.
1. Never disassemble the loader unnecessarily. This could affect the performance and
function of the loader.
2. Contact your nearest OLYMPUS distributor if you need MSDS.
3. Confirm and observe your local municipal ordinances or regulations when you dispose
of the loader.
If you have any questions, contact your nearest OLYMPUS distributor.
4. Lenses and solders used by this system are lead-free.
Caution
Caution

Introduction/Daily Check Operation/Maintenance Manual
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AL120-LMB8-90 ALL
set the cassette
No |Size |Thick |Comment
1. |200 |750-400 |
Recall Wafer Setting Memory
5. Daily Check
1. Confirm the following points before operating the loader.
(1) Vacuum supply pressure: -67KPa to -80KPa
When there are not a vacuum gauge and a regulator, please contact it to the OLYMPUS distributor.
(2) Make sure that there are no wafers or tools inside the wafer loader
2. Confirm the following points before starting the inspection.
(1) Make sure that the power is on (Check the liquid crystal panel)
Turn the main switch ON and make sure that each arm position is
initialized and the model name is shown on the liquid crystal panel.
The loader may have been set to skip initialization when the power
is turned on. This is not a malfunction. The loader executes
initialization when the [Start] button is pressed.
(2) Check the loader stop button
Press the loader stop button and make sure that the loader stops operation.

Operation/Maintenance Manual Introduction/Conformity Standards
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6. Conformity Standards
(1) This equipment is carrying out conformity or evaluation to the following standard.
(2) Although this equipment aims at using in the industrial environment, since it may not satisfy
a performance when not used by the right operation method, please carry out the proper
handling according to this manual.
FCC
This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant
to Part 15 of the FCC rules. These limits are designed to provide reasonable protection against harmful
interference when the equipment is operated in a commercial environment. This equipment generates,
use, and can radiate radio frequency energy and, if not installed and used in accordance with the
instruction manual, may cause harmful interference to radio communications.
Operation of this equipment in a residential area is likely to cause harmful interference in which case
the user will be required to correct the interference at his own expense.
SEMI
This equipment is carrying out evaluation to the guideline of the following SEMI standard.
S2-0706: Safety Guidelines for Semiconductor Manufacturing Equipment
S8-0308: Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
This equipment is an object for industrial environment (Class A). Other equipment
may be affected if it is used in a housing environment.
FCC WARNING:
Changes or modifications not expressly approved by the party responsible for
compliance could void the user's authority to operate the equipment.

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Operation Manual
Table of Contents
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1 Nomenclature 1-1
1-1 Wafer Loader Main Body································································ 1-１
1-2 Operation Panel···············································································1-2
1-3 Remote Controller (Option) ····························································1-3
1-4 Vacuum Stage ··················································································1-4
2 Outline of Operation Procedures 2-1
1Description of Symbols 2-1
2Operation Procedure 2-1
2-1 Procedure before Starting Transfer···············································2-3
Preparation 2-3
1Turning the Main Switch ON: Main Switch 2-3
2Cassette Setting 2-3
3Selecting the Type of Inspection Wafer: 4-way button 2-4
4Setting the Sequence (Inspection Type: [Observation] Button 2-5
5Setting the Inspection Mode 2-6
6Selecting Wafers for Inspection: Wafer No. Selector Button 2-8
7Setting the Orientation Flat and Notch Positions on the Microscope: [Wafer
alignment] Position Control 2-9
8Setting the Inspection Time: [Inspection Time] Control 2-9
9Detailed Settings for the Top Macro Inspection: [Top macro spin direction] and
[Top macro spin speed] Controls 2-9
10Setting Wafer Alignment when Unloading a Wafer 2-10
2-2 Vacuum Stage ················································································2-12
1How to Move the Vacuum Stage 2-12
2How to Use the Grip Handle 2-12
3How to Use the Wafer Rotating Knob 2-12
2-3 Start of Transfer·············································································2-13
1Start of Transfer: [Start] Button 2-13
2Status of the Loader in Operation 2-13
3Top Macro Inspection 2-14
4Back Macro Inspection and 2nd Back Macro Inspection: Setting the Back Macro
Tilt Angle 2-14
5Transferring a Wafer onto the Vacuum Stage 2-15
6Temporarily Registering the Inspection Results: [Registration] Button 2-16

Operation Manual Table of Contents
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2-4 Stoppage of Transfer·····································································2-17
1Temporarily Stopping the Loader during Inspection: [Pause] Button 2-17
2Removing a Wafer with Tweezers during Inspection: [Wafer Reject] Button 2-17
3Unloading a Wafer during Inspection: [Unload] Button 2-18
4Stopping the Operation Immediately: [Loader Stop] Button 2-18
5Terminating the Inspection: [Quit] Button 2-18
3Inspections 3-1
3-1 Preparations·····················································································3-1
3-2 Inspection Operations·····································································3-1
3-2-1 MICROSCOPE INSPECTION ·············································································3-1
3-2-2 TOP MACRO INSPECTION ···············································································3-3
3-2-3 BACK MACRO INSPECTION ·············································································3-4
3-2-4 BACK MACRO INSPECTION +2ND BACK MACRO INSPECTION···························3-5
3-2-5 TOP MACRO INSPECTION +MICROSCOPE INSPECTION····································3-6
3-2-6 BACK MACRO INSPECTION +MICROSCOPE INSPECTION··································3-8
3-2-7 TOP MACRO INSPECTION +BACK MACRO INSPECTION··································3-10
3-2-8 MICROSCOPE INSPECTION +TOP MACRO INSPECTION +BACK MACRO
INSPECTION +2ND BACK MACRO INSPECTION ··············································3-11
3-3 Special Operations········································································3-13
3-3-1 CHANGING THE WAFER SELECTION SETTING················································3-13
4Specifications 4-1
4-1 AL120-L6-150 and LMB6-150··························································4-1
4-2 AL120-L86-180, LMB86-180 and LMB-90·······································4-4
5Problems during Use and Solutions 5-1
5-1 When Warning Codes Are Displayed·············································5-1
5-2 When Error Codes Are Displayed··················································5-3
5-3 How to Reset the Circuit Breaker ··················································5-7
5-4 After use of Loader Stop·································································5-7
5-5 Power Failure···················································································5-7
5-6 Automatic Unloading·······································································5-8
1During the Top Macro Inspection 5-9
2During the Back Macro Inspection 5-9
3When a Wafer is on the A-arm 5-10