Pall GASKLEEN PG550 Guide

PALL GASKLEEN®
BULK GAS PURIFIER
ASSEMBLIES
With AresKleenTM Purification
Materials
PG550 PG550-MAN
PG2400 PG2400-MAN
PG11000 PG11000-MAN
INSTALLATION / REPLACEMENT
INSTRUCTIONS
Revision F: March 2014

Pall Gaskleen®Bulk Purier Assemblies
Installation / Replacement Instructions
These instructions are to be used with the following Pall
Gaskleen®Bulk Purier assemblies containing Pall AresKleen™
Purication Material:
Gaskleen®PG550 PURIFIER (0.4 μm or 3 nm filtration)
Part number: GLP9xxxxP(F)VMM4*
Gaskleen®PG2400 PURIFIER (0.4 μm or 3 nm filtration)
Part number: GLP24xxxxP(F)VMM4*
Gaskleen®PG2400 PURIFIER (0.4 μm or 3 nm filtration)
Part number: GLP24xxxxP(F)VMM8*
Gaskleen®PG11000 PURIFIER (0.4 μm filtration)
Part number: GLP110xxxxPVFM8*
Addition of (F) in the part number designates 3 nm ltration.
*Part numbers with addition of a “– MAN” designation indicates the purier is
part of a manifold. Use of a manifold allows for easy replacement of the purier
without any process interruption.
Please read all instructions carefully. Questions should be
resolved prior to proceeding with the installation of any purier.
Contact Pall Corporation SLS Global Technical Support for
technical assistance. Pall Gaskleen®Bulk Puriers are engineered
specically to ensure gas consistency for high-ow specialty and
inert gas purication requirements. Specic details for each type
of purier are listed in Table 1. Reference the part number of the
assembly being installed to determine the appropriate conditions
for the intended operation.

Table 1: Hardware
Product: Purifier Purifier End Fittings: Design Flow Rate
Housing and Maximum
Dimensions: Allowable Working
Pressure (MAWP):
PG550 Diameter = .25” Fixed 75 slpm (2.65 scfm)
3.00” (76 mm) male gasket seal* 500 psig (3.45 MPa)
Length =
7.94” (202 mm)
PG550-MAN** Diameter = .25” Fixed 75 slpm (2.65 scfm)
3.00” (76 mm) female inlet / male outlet 500 psig (3.45 MPa)
Length = gasket seal*
7.94” (202 mm)
PG2400 (VMM4) Diameter = .25” Fixed 300 slpm (10.6 scfm)
4.00” (102 mm) male gasket seal* 500 psig (3.45 MPa)
Length =
17.3” (439 mm)
PG2400 (VMM8) Diameter = .50” Fixed 500 slpm (17.6 scfm)
4.00” (102 mm) male gasket seal* 500 psig (3.45 MPa)
Length =
17.3” (439 mm)
PG2400-MAN ** Diameter = .50” Fixed 500 slpm (17.6 scfm)
4.00” (102 mm) female inlet / male outlet 300 psig (2.07 MPa)
Length = gasket seal*
17.3” (439 mm)
PG11000** Diameter = .50” Fixed 1000 slpm (35.3 scfm)
6.00” (152 mm) female inlet / male outlet 250 psig (1.72 MPa)
Length = gasket seal*
29.7” (754 mm)
PG11000-MAN** Diameter = .50” Fixed 1000 slpm (35.3 scfm)
6.00” (152 mm) female inlet / male outlet 250 psig (1.72 MPa)
Length = gasket seal*
29.7” (754 mm)
* VCR compatible; VCR is a Swagelok Company trademark.
** Puriers that are apart of a manifold (part numbers with -MAN) and the PG11000
are panel mounted; dimensions do not reect end to end length of assembly with
valves (reference customer drawings for assembly lengths).

!
IMPORTANT: Use of this equipment with other than intended gases
may create potentially hazardous conditions. The process gas to be
puried must correspond with the part number specied on the label
attached to the purier. Verify that purier has the appropriate part
number for its intended gas service (see Table 2 below).
Pall Gaskleen®Bulk Puriers improve and maintain the purity of
specic process gases or gas mixtures used in semiconductor
manufacturing and other purity-critical applications. Purier
datasheets should be referenced for performance specications.
Table 2: Purication Material Designations (“xxxxP” in part number)
and Intended Process Gases
INP:
Helium (He)
Nitrogen (N2)
Neon (Ne)
Argon (Ar)
Krypton (Kr)
Xenon (Xe)
Tetrachlorosilane (SiCl4)*
SIP:
Hydrogen (H2)
Methane (CH4)
Ethene / Ethylene (C2H4)
Ethane (C2H6)
Propene / Propylene (C3H6)
Propane (C3H8)
Butane (C4H10)
Cyclopropane (c-C3H6)
Dimethyl Ether ((CH3)2O)
Carbon Monoxide (CO)
Silane (SiH4)
Disilane (Si2H6)
Methylsilane (SiH3CH3)
Trimethylsilane (SiH(CH3)3)
Carbonyl Sulde (COS)
FCP:
Fluoromethane (CH3F)
Diuoromethane (CH2F2)
Triuoromethane (CHF3)
Tetrauoromethane (CF4)
Tetrauoroethane (C2H2F4)
Pentauoroethane (C2HF5)
Peruoroethane (C2F6)
Heptauoropropane (C3HF7)
Peruoropropane (C3F8)
Peruorocyclobutane (C4F8)
GEH4P:
Germane (GeH4)
SF6P:
Sulfur Hexauoride (SF6)
NH3P:
Ammonia (NH3)

CLXP:
Boron Trichloride (BCl3)
Chlorine (Cl2)
Carbon Tetrachloride (CCl4)
Chlorosilane (SiH3Cl)
Dichlorosilane (SiH2Cl2)
Trichlorosilane (SiHCl3)
Tetrachlorosilane (SiCl4)*
HCLP:
Hydrogen Chloride (HCl)
Chlorosilanes (SiH3Cl,
SiH2Cl2, SiHCl3, and SiCl4)*
All gases listed for use with
OXP except Oxygen (O2)
OXP:
Air (CDA)
Oxygen (O2)
Carbon Dioxide (CO2)
Nitrous Oxide (N2O)
Inerts (see INP)
HBRP:
Hydrogen Bromide (HBr)
CDAP:
Air (CDA)
* Contact Pall Corporation SLS for technical assistance.
CAUTION: Puriers are shipped under 5 – 15 psig argon pressure. Always
wear safety glasses when removing caps.
Table 2 (continued): Purication Material Designations
WARNINGS:
• Reaction of the purication material with large concentrations of air
or water may evolve.
ºHeat and ammable gas for INP, SIP, and FCP purication materials.
ºHeat and corrosive gas for CLXP, HCLP, and HBRP purication
materials.
ºHeat, ammable gas, and corrosive gas for SF6P and NH3P
purication materials.
ºHeat, ammable gas, and toxic gas for GEH4P purication material.
ºHeat for OXP purication material.
• NEVER PASS PURE OXYGEN OR AIR THROUGH A PALL
GASKLEEN®PURIFIER CONTAINING INP, SIP, FCP, GEH4P, SF6P,
OR NH3P PURIFICATION MATERIALS.

Note: Purier models PG2400 and PG11000 containing these materials
have an aluminized label afxed to the housing which states “WARNING:
Possible Burn Hazard, For Use With Substantially Oxygen-Free Process
Gases Only!”
• Do not puncture the housing (or remove plug from ll port, models
PG2400 and PG11000). Modication of the purier assembly could
result in contact with chemicals that may cause severe burns to the
eyes and irritation of the skin (Reference Safety Data Sheets, SDS,
supplied with assembly).
• Hazardous gas should never be introduced into the purier or
associated piping until a eld leak test demonstrates the system is
ready for service (see step 12 of this installation procedure). Pall
Corporation assumes no liability for damage or injury resulting from
improper installation or operation of the Gaskleen®purier assembly.
The user is ultimately responsible for equipment integrity and to
comply with any applicable safety standards.

INSTALLATION PROCEDURE:
Figure 1: Flow Schematics
The schematics above show a suggested tubing arrangement
for a Pall Gaskleen®Bulk Gas Purier or Pall Gaskleen®Bulk Gas
Purier with bypass manifold. The PG550 and PG2400 models
come without shut-off valves. The PG11000 model comes
mounted on a panel with shut-off valves. Puriers with bypass
manifolds come with all the valves shown in the schematic.
Additional gas lines and valves are necessary if the purication
material requires conditioning before use (see Step 5 below).

Puriers are supplied with an over-temperature indicator, which
should be checked during installation. If the indicator turns
black, contact Pall Corporation SLS for technical assistance.
INSTALLATION AND SAFETY NOTES:
• Only trained personnel should install, operate, and maintain gas control
equipment.
• All compressed gases are potentially hazardous and must be handled
only by trained personnel. Incorrect execution of operations can cause
re, explosion, atmospheric release of hazardous gas, or costly
contamination of process equipment.
• Safety Data Sheets (SDS) for all gases and purication materials used
in the facility should be available for consultation by all concerned
personnel. These data sheets are obtainable from gas suppliers and
Pall Corporation.
• An upstream process gas pressure regulator and pressure relief device
must be installed when a potential exists for overpressurization (i.e.
pressure surge beyond MAWP of assembly).
• For in-line puriers (PG550 and PG2400 models) the inlet tting must
be installed nger-tight with inert gas purge ow introduced within
one minute after removal of the protective cap. Delay may result in
degradation of the purication material.
• For puriers that are a part of a bypass manifold systems and the
PG11000, do not at any time prior to purier installation attempt to
open manual valves or otherwise allow air to contact the purication
material bed. Valves must remain closed until installation is complete
and all equipment has been suitably leak tested and purged.
• Before starting a job, all personnel responsible for equipment installation
or operation must fully understand the specic procedures to be
accomplished and all pertinent safety considerations.

Table 3: Installation Information
1. SITE PREPARATION
• When working with components that contact process or purge gases
(for example, gasket-seal connection gaskets) always wear new, clean
latex gloves to prevent ngerprint contamination.
• Inspect all gasket-seal connector sealing surfaces for dirt, scratches,
dents, pitting, or corrosion before assembly. Clean or replace affected
connectors before assembly.
• Perform helium leak test on all affected process gas connections to
ensure system is leak free prior to installing purier. A spool piece with
appropriate end connections can be used in place of the purier for this
test. If the leak test is failed, locate and repair the leak and repeat the
test. Leak testing procedures are documented in SEMI F1, ASTM E
498, or ASTM E 499.
• Prior to installing purier, purge all tubing, ttings, and components in
the installation zone with inert gas (nitrogen or argon).
Product: Minimum Purge Tools Required for Installation:
Gas Flow Rate:
PG550 2 slpm (4.2 scfh) .625" and .75" open-end wrenches
PG550-MAN 2 slpm (4.2 scfh) .625" and .75" open-end wrenches
PG2400 (VMM4) 5 slpm (10.6 scfh) Two .75" open-end wrenches
PG2400 (VMM8) 10 slpm (21.2 scfh) 0.9375" and 1.0625" open-end wrenches
PG2400-MAN 10 slpm (21.2 scfh) 0.9375" and 1.0625" open-end wrenches
PG11000 10 slpm (21.2 scfh) 0.9375" and 1.0625" open-end wrenches
PG11000-MAN 10 slpm (21.2 scfh) 0.9375" and 1.0625" open-end wrenches

2. PURIFIER INSTALLATION
• Attach the purier in a vertical orientation to a suitable interior wall or
other architecturally stable element with suitable fasteners in accordance
with Uniform Building Code (UBC) requirements. See product datasheet
or drawings for bolting pattern. Most puriers are not intended for
exterior installation; however, bulk puriers are often installed outdoors.
Contact Pall Corporation SLS for technical assistance.
• User installation of bypass valve and piping is recommended to enable
direct purging of the process gas line. When the manifold option is
selected no additional piping is needed.
3. PROCESS GAS INLET AND OUTLET CONNECTIONS
• Do not remove purier or manifold inlet and outlet gasket-seal
connector terminators until immediately prior to equipment installation.
• When a purier is used for hazardous gas purication, it must be
installed within a suitable, exhausted enclosure. All connections external
to the enclosure must be welded and supported in accordance with
pertinent safety ordinances and regulations. Dual containment lines
may be mandated for certain hazardous gases.
• Retain the inlet and outlet gasket-seal connection terminators for future
use when disconnecting the purier.
• Damage to the sealing surface may result if the gasket seal connector
is over-tightened or installed without a gasket. New gaskets must be
installed for each connection made (supplied with the purier).
PG550, PG2400, and PG11000:
1. Start inert gas purge ow (Ref. Table 3, middle column) to the installation
zone by opening an upstream valve. MAINTAIN purge gas ow until
the installation of the assembly is complete.