Pfeiffer Vacuum HIPACE 1500 I User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
HIPACE 1500 I | IU
Turbopump prepared for temperature management system

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to
support you by its performance, its perfect operation and without interfering your individual
application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 8
1.1 Validity 8
1.1.1 Applicable documents 8
1.1.2 Variants 8
1.2 Target group 8
1.3 Conventions 8
1.3.1 Instructions in the text 8
1.3.2 Pictographs 9
1.3.3 Stickers on product 9
1.3.4 Abbreviations 10
1.4 Trademark proof 11
2 Safety 12
2.1 General safety information 12
2.2 Safety instructions 12
2.3 Safety precautions 17
2.4 Limits of use of the product 18
2.5 Proper use 18
2.6 Foreseeable improper use 18
2.7 Personnel qualification 19
2.7.1 Ensuring personnel qualification 19
2.7.2 Personnel qualification for maintenance and repair 20
2.7.3 Advanced training with Pfeiffer Vacuum 20
3 Product description 21
3.1 Function 21
3.1.1 Cooling 21
3.1.2 Rotor bearing 21
3.1.3 Drive 21
3.2 Identifying the product 22
3.2.1 Product types 22
3.2.2 Product features 22
3.3 Scope of delivery 22
4 Transportation and Storage 23
4.1 Transport 23
4.1.1 Transport in vertical position 23
4.1.2 Transport in horizontal position 24
4.2 Storage 25
5 Installation 26
5.1 Preparatory work 26
5.2 Connecting the high vacuum side 27
5.2.1 Requirements for the dimensioning of a counter flange 27
5.2.2 Considering earthquake protection 27
5.2.3 Using a splinter shield or protective screen 28
5.2.4 Using the vibration compensator 28
5.2.5 Mounting orientations 29
5.2.6 Attaching ISO-K flange onto ISO-K 30
5.2.7 Attaching ISO-K flange to ISO-F 30
5.2.8 Attaching ISO-F flange to ISO-F 32
5.3 Filling the operating fluid 33
5.4 Connecting fore-vacuum side 34
5.5 Connecting cooling water supply 35
5.5.1 Establish cooling water connection with hose nozzles 36
5.5.2 Establish cooling water connection with pipe fittings 37
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5.6 Connecting accessories to turbopumps with TMS 38
5.7 Connecting the electrical supply 39
5.7.1 Grounding vacuum pump 39
5.7.2 Establishing the electric connection 40
5.7.3 Implement electrical safety measures 41
6 Operation 42
6.1 Commissioning 42
6.2 Operating modes 43
6.2.1 Operating without operating unit 43
6.2.2 Operation via connection "E74" 43
6.2.3 Operation via multi-function connection "remote" 43
6.2.4 Operation via Pfeiffer Vacuum control unit 43
6.3 Switching on the turbopump 44
6.4 Operating with TMS after conversion 45
6.4.1 Control commands 45
6.4.2 TMS connection 45
6.4.3 Process description for TMS 45
6.5 Operation monitoring 46
6.5.1 Operating mode display via LED 46
6.5.2 Temperature monitoring 46
6.6 Switching off and venting 47
6.6.1 Switching off 47
6.6.2 Venting 47
7 Maintenance 49
7.1 General maintenance information 49
7.2 Maintenance intervals and responsibilities 49
7.3 Changing the operating fluid 50
7.3.1 Draining the operating fluid 50
7.3.2 Filling the operating fluid 51
7.4 Replacing the electronic drive unit 52
7.4.1 Removing electronic drive unit 52
7.4.2 Installing electronic drive unit 53
7.4.3 Confirming speed specification 54
7.5 Remounting the pipe fittings 55
7.5.1 Dismantling the pipe fittings 55
7.5.2 Mounting the pipe fittings 55
8 Decommissioning 57
8.1 Stillsetzen für längere Zeit 57
8.2 Recommissioning 57
9 Recycling and disposal 59
9.1 General disposal information 59
9.2 Dispose of turbopumps 59
10 Malfunctions 60
11 Service solutions by Pfeiffer Vacuum 63
12 Spare parts 65
13 Accessories 66
13.1 Accessory information 66
13.2 Ordering accessories 66
14 Technical data and dimensions 69
14.1 General 69
14.2 Technical data 69
14.3 Substances in contact with the media 71
Table of contents
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14.4 Dimensions 72
EC Declaration of Conformity 76
UK Declaration of Conformity 77
Table of contents
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List of tables
Tbl. 1: Stickers on product 10
Tbl. 2: Abbreviations used in this document 11
Tbl. 3: Permissible ambient conditions 18
Tbl. 4: Product designation of Pfeiffer Vacuum HiPace turbopumps 22
Tbl. 5: Turbopump features 22
Tbl. 6: Delivered drive power depending on the supplied mains voltage 22
Tbl. 7: Requirements for the dimensioning of customer-specific high vacuum con-
nection
27
Tbl. 8: Reducing turbopump pumping speed through the use of a splinter shield or
protective screen
28
Tbl. 9: Requirements on the cooling water composition 36
Tbl. 10: Versions of cooling water connections 36
Tbl. 11: Preset accessory connections on the electronic drive unit for operation with
TMS
39
Tbl. 12: Terminal lay-out of the power supply connector 40
Tbl. 13: Preconfigured settings for turbopumps prepared for TMS when delivered 42
Tbl. 14: Control commands 45
Tbl. 15: Behavior and meaning of the LEDs on the electronic drive unit 46
Tbl. 16: Factory settings for delayed venting in turbopumps 47
Tbl. 17: Characteristic nominal rotation speeds of the turbopumps 54
Tbl. 18: Troubleshooting turbopumps 62
Tbl. 19: Available spare parts 65
Tbl. 20: HiPace 1500 | DN 250 | Accessories 68
Tbl. 21: Conversion table: Pressure units 69
Tbl. 22: Conversion table: Units for gas throughput 69
Tbl. 23: Technical data for HiPace 1500 I | IU 71
Tbl. 24: Materials that make contact with the process media 71
List of tables
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List of figures
Fig. 1: Position of the stickers on the product 10
Fig. 2: HiPace 1500 I | IU design 21
Fig. 3: Slinging points for vertical transport of the turbopump without packaging 24
Fig. 4: Slinging points for horizontal transport of the turbopump without packaging 25
Fig. 5: Example: Securing against displacement and tipping caused by external vi-
brations
28
Fig. 6: Mounting orientations of the standard version, upright 29
Fig. 7: Mounting orientations of the upside-down version 29
Fig. 8: Alignment of the fore-vacuum connection with horizontal mounting orienta-
tion
29
Fig. 9: Flange connection ISO-K to ISO-F, bracket screws 30
Fig. 10: Flange connection ISO-K to ISO-F, hexagon head screw and tapped hole 31
Fig. 11: Flange connection ISO-K to ISO-F, stud screw and tapped hole 31
Fig. 12: Flange connection ISO-K to ISO-F, stud screw and through hole 31
Fig. 13: Flange connection ISO-F, hexagon head screw and tapped hole 32
Fig. 14: Flange connection ISO-F, hexagon head screw and through hole 32
Fig. 15: Flange connection ISO-F, stud screw and tapped hole 32
Fig. 16: Flange connection ISO-F, stud screw and through hole 33
Fig. 17: The position of the filler screws depends on the mounting orientation. Exam-
ple: Standard versions
34
Fig. 18: The position of the filler screws depends on the mounting orientation. Exam-
ple: U versions
34
Fig. 19: Example of fore-vacuum connection 35
Fig. 20: Establishing a cooling water connection with hose nozzles 37
Fig. 21: Cooling water connection with pipe fittings 38
Fig. 22: Example: Connecting grounding cable 40
Fig. 23: Examples: Draining operating fluid for the standard and U versions 50
Fig. 24: The position of the filler screws depends on the mounting orientation. Exam-
ple: Standard versions
51
Fig. 25: The position of the filler screws depends on the mounting orientation. Exam-
ple: U versions
51
Fig. 26: Removing the electronic drive unit 53
Fig. 27: Securing the electronic drive unit 54
Fig. 28: Dismantling the pipe fittings 55
Fig. 29: Mounting the pipe fittings 56
Fig. 30: HiPace 1500 I | IU spare parts 65
Fig. 31: Dimensions HiPace 1500 | DN 250 ISO-K 72
Fig. 32: Dimensions HiPace 1500 IU | DN 250 ISO-K 73
Fig. 33: Dimensions HiPace 1500 I | DN 250 ISO-F 74
Fig. 34: Dimensions HiPace 1500 IU | DN 250 ISO-F 75
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
These operating instructions are a customer document of Pfeiffer Vacuum. The operating instructions
describe the functions of the named product and provide the most important information for the safe use
of the device. The description is written in accordance with the valid directives. The information in these
operating instructions refers to the product's current development status. The document shall remain
valid provided that the customer does not make any changes to the product.
1.1.1 Applicable documents
Document Number
Operating instructions, Electronic drive unit TC 1200. standard PT 0239 BN
Operating instructions, electronic drive unit TC 1200 E74
according to Semi E74
PT 0303 BN
Declaration of conformity A component of these instructions
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
●HiPace 1500 I, DN 250 ISO-K
●HiPace 1500 I, DN 250 ISO-F
●HiPace 1500 IU, DN 250 ISO-K
●HiPace 1500 IU, DN 250 ISO-F
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
About this manual
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Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
1.3.3 Stickers on product
This section describes all the stickers on the product along with their meanings.
CUS
TÜV Rheinland
Oil
S/N
Mod.
HiPace 1500 I
PM P06 XXX
- - - - - - - -
P/N
n, f
Mass Made in Germany 2022/03
PM 006 336 -T
37800 1/min, 630 Hz
32.0 kg
Type 1
IP 20
D-35614 Asslar
Rating plate (example)
Rating plates of individual assemblies are located on the lower
part of the turbopump or on the relevant attachments.
Operating instructions note
This sticker indicates that this operating instructions must be read
before performing any tasks.
Mounting orientation upright note
This sticker depends on the variant. The sticker shows the valid
spatial positions for the installation and operation of the turbo-
pump.
Overhead mounting orientation note
This sticker depends on the variant. The sticker shows the valid
spatial positions for the installation and operation of the turbo-
pump.
Operating fluid filler screw
This sticker describes the position of the respective filler screw for
operating fluid.
Protection class
The sticker specifies protection class I for the product. The posi-
tioning indicates the position for the ground connection.
COOLING WATER IN
max. 6 bar (90 psi)
Cooling water connection
This sticker indicates the position and conditions for the cooling
water supply of the turbopump.
About this manual
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COOLING WATER OUT
Cooling water connection
This sticker indicates the position for the cooling water discharge
of the turbopump.
warranty seal
Warranty seal
The product is sealed ex factory. Damaging or removing a warran-
ty seal results in loss of the warranty.
Is stuck on concealed underneath the electronic drive unit.
PURGE
Sealing gas connection note
This sticker describes the position for the exclusive sealing gas
connection.
Tbl. 1: Stickers on product
1
7
8
9
10
6542
3
Fig. 1: Position of the stickers on the product
1 Sticker for operating instructions 6 Sticker for operating fluid
2 Sticker for cooling water discharge 7 Sticker for sealing gas connection (purge)
3 Sticker for cooling water inlet 8 Sticker for ground terminal
4 Sticker for mounting orientation 9 Rating plate for electronic drive unit
5 Sticker for operating instructions 10 Turbopump rating plate
1.3.4 Abbreviations
Abbreviation Meaning in this document
AC Alternating current
AIC Interruption rating (ampere interrupting capacity)
dDiameter value (in mm)
DN Nominal diameter as size description
EMS Emergency stop
fRotation speed value of a vacuum pump (frequency, in rpm or Hz)
HV High vacuum flange, high vacuum side
ISO Flange: Connection in accordance with ISO 1609 and ISO 2861
LED Light emitting diode
LS Line protection
UL Underwriters Laboratories
About this manual
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Abbreviation Meaning in this document
MCB Miniature circuit breaker
NEMA National Electrical Manufacturer Association
PE Protective earth (earthed conductor)
[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in
square brackets. Frequently displayed in conjunction with a short description.
Example: [P:312] software version
RCCB Residual current operated circuit breaker
remote 26-pole D-Sub connecting socket on the turbopump electronic drive unit
WAF Width Across Flats
TTemperature (in °C), temperature-controlled
TC Turbopump electronic drive unit (turbo controller)
TMS Temperature management system
UUpside-down version
VV Fore-vacuum flange, fore-vacuum connection
Tbl. 2: Abbreviations used in this document
1.4 Trademark proof
●Han® 3 A is a trademark of HARTING Electric GmbH & Co. KG.
●Swagelok® is a registered trade name of SWAGELOK Company in 44139 Solon, US.
About this manual
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2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-
ble, all life cycle phases of the product were taken into account.
Risks during transport
WARNING
Risk of serious injury from swinging, toppling or falling objects
During transport, there is a risk of crushing and impact on swinging, toppling or falling objects. There
is a risk of injuries to limbs, up to and including bone fractures and head injuries.
►Secure the danger zone if necessary.
►Pay attention to the center of gravity of the load during transport.
►Ensure even movements and moderate speeds.
►Observe safe handling of the transport devices.
►Avoid sloping attachment aids.
►Never stack products.
►Wear protective equipment, e.g. safety shoes.
Safety
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Risks during installation
DANGER
Danger to life from electric shock
Touching exposed and voltage-bearing elements causes an electric shock. Improper connection of
the mains supply leads to the risk of touchable live housing parts. There is a risk to life.
►Before the installation, check that the connection leads are voltage-free.
►Make sure that electrical installations are only carried out by qualified electricians.
►Provide adequate grounding for the device.
►After connection work, carry out an earthed conductor check.
WARNING
Risk of fatal injury due to electric shock on account of incorrect installation
The device's power supply uses life-threatening voltages. Unsafe or improper installation can lead to
life-threatening situations from electric shocks obtained from working with or on the unit.
►Ensure safe integration into an emergency off safety circuit.
►Do not carry out your own conversions or modifications on the unit.
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
►Install a mains disconnection device according to SEMI-S2.
►Install a circuit breaker with an interruption rating of at least 10,000 A.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the
rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g.
fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the tur-
bopump during subsequent operation.
►Only remove the original protective covers immediately prior to connecting the high vacuum
flange.
►Do not reach into the high vacuum connection.
►Wear protective gloves during installation.
►Do not start the turbopump with open vacuum connections.
►Always carry out the mechanical installation before electrical connection.
►Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
WARNING
Danger of cut injuries from unexpected start up.
The use of mating plugs of the electronic drive unit (accessories) enables the automatic run-up of the
vacuum pump as soon the power is turned on. Attaching mating plugs before or during the installa-
tion leads to the movement of parts hence the risk of cut injuries by sharp-edged in the exposed high
vacuum flange.
►Only connect mating plugs after the mechanical installation.
►Only switch on the vacuum pump immediately prior to operation.
Safety
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WARNING
Risk of serious injury from oscillating, toppling or falling objects
Incorrect handling during the mechanical installation leads to a risk of oscillating, toppling or falling
heavy loads. There is a risk of crushing and impacts (e.g. on colliding flange connections). There is a
risk of injuries to limbs, up to and including bone fractures and head injuries.
►Use the intended eye bolts during the installation.
►When approaching the vacuum pump, be particularly careful at the counter flange.
►Note the center of gravity of the load.
WARNING
Danger of poisoning from toxic vapors
Igniting and heating synthetic operating fluid generates toxic vapors. Danger of poisoning if inhaled.
►Observe the application instructions and precautions.
►Do not allow tobacco products to come into contact with the operating fluid.
WARNING
Risk of scalding from suddenly escaping hot cooling water
The turbopump water connections are open to both sides. When connecting the cooling water supply,
there is a risk of scalding from suddenly escaping, hot cooling water at over pressure.
►Prior to installation, ensure that pressure is discharged from the cooling water system, and that it
is cooled down.
►Wear protective equipment, e.g., safety goggles and gloves.
Risks during operation
WARNING
Risk of burns on hot surfaces when using additional equipment for heating during operation
The use of additional equipment for heating the vacuum pump or for optimizing the process gener-
ates very high temperatures on surfaces that can be touched. There is a risk of burning.
►If necessary, set up a contact guard.
►If necessary, apply the warning stickers provided for this at the danger points.
►Ensure adequate cooling down before working on the vacuum pump or in its vicinity.
►Wear protective equipment, e.g., gloves.
WARNING
Risk of serious injury in the event of vacuum pump destruction due to over pressure
Gas entry with very high over pressure results in destruction of the vacuum pump. There is a risk of
serious injury due to ejected objects.
►Never exceed the permissible 1500 hPa (absolute) inlet pressure on the suction side or the vent-
ing and sealing gas connection.
►Make sure that high, process-related over pressures cannot directly enter the vacuum pump.
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of body parts
with the vacuum, e.g. hematomas.
►Do not fully unscrew the venting screw out of the housing during venting.
►Keep a distance from automatic venting device, such as venting valves.
Safety
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Risks during maintenance, decommissioning and disposal
WARNING
Danger to life from electric shock during maintenance and service work
The device is only completely de-energized when the mains plug has been disconnected and the tur-
bopump is at a standstill. There is a danger to life from electric shock when making contact with live
components.
►Before performing all work, switch off the main switch.
►Wait until the turbopump comes to a standstill (rotation speed f = 0).
►Remove the mains plug from the device.
►Secure the device against unintentional restarting.
WARNING
Danger of poisoning from toxic vapors
Igniting and heating synthetic operating fluid generates toxic vapors. Danger of poisoning if inhaled.
►Observe the application instructions and precautions.
►Do not allow tobacco products to come into contact with the operating fluid.
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
WARNING
Risk of burns on hot surfaces when using additional equipment for heating during operation
The use of additional equipment for heating the vacuum pump or for optimizing the process gener-
ates very high temperatures on surfaces that can be touched. There is a risk of burning.
►If necessary, set up a contact guard.
►If necessary, apply the warning stickers provided for this at the danger points.
►Ensure adequate cooling down before working on the vacuum pump or in its vicinity.
►Wear protective equipment, e.g., gloves.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum connec-
tion
Incorrect handling of the turbopump before maintenance work results in hazardous situations with
risk of injury. There is a risk of cuts from accessing sharp-edged, rotating parts when removing the
turbopump.
►Wait until the turbopump comes to a standstill (rotation speed f = 0).
►Switch the turbopump off properly.
►Secure the turbopump against re-start.
►Seal open connections immediately following removal, using the original protective cover.
Safety
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WARNING
Risk of scalding from suddenly escaping hot cooling water
The turbopump water connections are open to both sides. When connecting the cooling water supply,
there is a risk of scalding from suddenly escaping, hot cooling water at over pressure.
►Prior to installation, ensure that pressure is discharged from the cooling water system, and that it
is cooled down.
►Wear protective equipment, e.g., safety goggles and gloves.
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of body parts
with the vacuum, e.g. hematomas.
►Do not fully unscrew the venting screw out of the housing during venting.
►Keep a distance from automatic venting device, such as venting valves.
CAUTION
Electric shock and damage to the vacuum pump and electronic drive unit due to improper dis-
connection of components
Even after the mains power is switched off, the turbopump continues to deliver electrical energy dur-
ing its run-down period. If the turbopump and electronic drive unit are disconnected prematurely,
there is the risk of electric shock from contact with live components. There is a risk of electric body
contact and, as a result, the destruction of electronic components.
►Never disconnect the turbopump and electronic drive unit from each other if power is still con-
nected or if the rotor is running.
►Monitor the turbopump rotation via the parameters available in the electronic drive unit (e.g.,
[P:398]).
►Wait until the turbopump comes to a standstill (rotation speed f = 0).
Risks in the event of malfunctions
DANGER
Risk of fatal injury from electric shock in case of a leak in the cooling water system
Escaping cooling water which penetrates the heater will energize external parts of the heating jacket.
The insulation material absorbs moisture and is therefore potentially hazardous, even after the fault
has been rectified. There is a risk of fatalities from electric shock upon contact.
►Perform an overpressure test of the cooling water system at least once a year.
►In the event of a fault, always replace the heating jacket completely.
►Ensure installation of an RCCB on site.
WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life from
electric shock when making contact with live components.
►Always keep the mains connection freely accessible so you can disconnect it at any time.
Safety
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WARNING
Danger to life from the turbopump breaking away in the event of a fault
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. If the
turbopump is not properly secured, it can shear off. The energy that this would release could throw
the entire turbopump or shattered pieces from its interior through the surrounding space. Potentially
dangerous gases can escape. There is a risk of very serious injuries, including death, and extensive
property damage.
►Follow the installation instructions for this turbopump.
►Observe the requirements regarding stability and design of the counter flange.
►Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation.
WARNING
Risk of injury caused by the turbopump breaking away with the vibration compensator in the
event of a malfunction
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892.
When using a vibration compensator, this will probably lead to the turbopump being sheared off in
use. The energy that this would release could throw the entire turbopump or shattered pieces from its
interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of
very serious injuries, including death, and extensive property damage.
►Take suitable safety precautions on-site for the compensation of the occurring torques.
►Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.
WARNING
Danger to life from poisoning where toxic process media leak from damaged connections
Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate. There is the risk
of damaging on-site connections (e.g., fore-vacuum line) and resulting leaks. This results in leakage
of process media. In processes involving toxic media, there is a risk of injury and danger to life due to
poisoning.
►Keep masses connected to the turbopump as low as possible.
►Use flexible lines to connect to the turbopump where necessary.
2.3 Safety precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
►Observe the above shutdown procedures.
►Before working on the high vacuum connection, wait until the rotor has stopped completely (rota-
tion speed f = 0).
Safety
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►Never put the device into operation with the high vacuum connection open.
►Keep lines and cables away from hot surfaces (> 70°C).
►Never fill or operate the unit with cleaning agents or cleaning agent residues.
►Do not carry out your own conversions or modifications on the unit.
►Observe the unit protection class prior to installation or operation in other environments.
2.4 Limits of use of the product
Installation location weatherproof (internal space)
Air pressure 750 hPa to 1060 hPa
Installation altitude max. 2000 m
Rel. air humidity max. 80%, at T <31°C,
up to max. 50% at T <40°C
Protection class (according to IEC 61010) I
Degree of pollution (according to IEC 61010) 2
Overvoltage category II
Permissible protection degree IP20
Type 1 according to UL 50E
Ambient temperature 5°C to 40°C with water cooling
Permissible surrounding magnetic field ≤ 6 mT
Maximum irradiated thermal output 22.5 W
Maximum permissible rotor temperature of the turbopump 120 °C
Maximum permissible bakeout temperature at the high vacuum
flange
120 °C
Tbl. 3: Permissible ambient conditions
Notes on ambient conditions
The specified permissible ambient temperatures apply to operation of the turbopump at
maximum permissible backing pressure or at maximum gas throughput, depending on the
cooling type. The turbopump is intrinsically safe thanks to redundant temperature monitor-
ing.
●The reduction in backing pressure or gas throughput permits operation of the turbo-
pump at higher ambient temperatures.
●If the maximum permissible operating temperature of the turbopump is exceeded, the
electronic drive unit first reduces the drive output and then switches it off where neces-
sary.
2.5 Proper use
►Use the turbopump only for generating vacuum.
►Use the turbopump only in combination with a suitable backing pump that can deliver up to the
required maximum fore-vacuum pressure.
►Use the turbopump only in closed indoor areas.
►Use the turbopump only for the evacuation of dry and inert gases.
►Only use the turbopump with TMS within the permissible temperature range.
►Only use the turbopump with TMS in conjunction with sealing gas in order to protect the rotor
bearings.
►Use the turbopump with TMS to avoid or minimize condensing process residues.
2.6 Foreseeable improper use
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as misuse.
●Transporting, installing, or operating the vacuum pump in an impermissible spatial position
●Establishing the voltage supply without correct installation
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●Installing pump with unspecified mounting material
●Pumping explosive media
●Pumping of corrosive media
●Pumping of fluids
●Pumping of dust
●Operating without sealing gas (after converting to TMS)
●Operating with impermissible high gas throughput
●Operating with impermissible high fore-vacuum pressure
●Operating with excessive irradiated heat output
●Operating in impermissible high magnetic fields
●Operating in an incorrect gas mode
●Venting with impermissible high venting rates
●Using for pressure generation
●Using in areas with ionizing radiation
●Operation in potentially explosive areas
●Using in systems in which sporadic loads and vibrations or periodic forces act on the device
●Causing of hazardous operating conditions by a presetting on the electronic drive unit that is con-
trary to the process
●Using of accessories or spare parts that are not listed in these instructions
2.7 Personnel qualification
The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervision of
trained personnel.
3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and understood
these operating instructions and all applicable documents, in particular the safety, maintenance
and repair information.
2.7.1 Ensuring personnel qualification
Specialist for mechanical work
Only a trained specialist may carry out mechanical work. Within the meaning of this document, special-
ists are people responsible for construction, mechanical installation, troubleshooting and maintenance
of the product, and who have the following qualifications:
●Qualification in the mechanical field in accordance with nationally applicable regulations
●Knowledge of this documentation
Specialist for electrotechnical work
Only a trained electrician may carry out electrical engineering work. Within the meaning of this docu-
ment, electricians are people responsible for electrical installation, commissioning, troubleshooting, and
maintenance of the product, and who have the following qualifications:
●Qualification in the electrical engineering field in accordance with nationally applicable regulations
●Knowledge of this documentation
In addition, these individuals must be familiar with applicable safety regulations and laws, as well as the
other standards, guidelines, and laws referred to in this documentation. The above individuals must
have an explicitly granted operational authorization to commission, program, configure, mark, and earth
devices, systems, and circuits in accordance with safety technology standards.
Trained individuals
Only adequately trained individuals may carry out all works in other transport, storage, operation and
disposal fields. Such training must ensure that individuals are capable of carrying out the required activi-
ties and work steps safely and properly.
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2.7.2 Personnel qualification for maintenance and repair
Advanced training courses
Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3.
Adequately trained individuals are:
●Maintenance level 1
─Customer (trained specialist)
●Maintenance level 2
─Customer with technical education
─Pfeiffer Vacuum service technician
●Maintenance level 3
─Customer with Pfeiffer Vacuum service training
─Pfeiffer Vacuum service technician
2.7.3 Advanced training with Pfeiffer Vacuum
For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of
courses and technical trainings.
For more information, please contact Pfeiffer Vacuum technical training.
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