Pfeiffer Vacuum FullRange ITR 90 User manual

BG 5040 BEN
(
2015-12
)
A
PASSION FOR PERFECTION
ITR 90
FullRange® Bayard-Alpert Gauge
Operating Instructions

2BG 5040 BEN (2015-12) ITR 90
In all communications with Pfeiffer Vacuum, please specify the information on the
product nameplate. For convenient reference copy that information into the space
provided below.
This document applies to products with the following part numbers:
PT T12 146 300 (vacuum connection DN 25 ISO-KF)
PT T12 366 300 (vacuum connection DN 40 CF-R)
The part number (No.) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this docu-
ment correspond to the gauge with no. PT T12 146 300. They apply to
other gauges by analogy.
All ITR 90 versions are shipped with an instruction sheet (→[1]).
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
The ITR 90 gauges have been designed for vacuum measurement of gases and
gas mixtures in a pressure range of 5×10-10 … 1000 mbar.
They must not be used for measuring flammable or combustible gases in mixtures
containing oxidants (e.g. atmospheric oxygen) within the explosion range.
The gauges can be operated in connection with a Pfeiffer Vacuum controller or with
other control devices.
Over the whole measuring range, the gauge has a continuous characteristic curve
and its measuring signal is output as logarithm of the pressure.
The gauge functions with a Bayard-Alpert hot cathode ionization measurement
system (p < 2.0×10-2 mbar) and a Pirani measurement system (p > 5.5×10-3 mbar).
In the overlapping pressure range of 2.0×10-2 … 5.5×10-3 mbar, a mixed signal of
the two measurement systems is output. The hot cathode is switched on by the
Pirani measurement system only below the switching threshold of 2.4×10-2 mbar
(to prevent filament burn-out). It is switched off when the pressure exceeds
3.2×10-2 mbar.
Typ:
No:
F-No:
V W
Pfeiffer Vacuum, D-35614 Asslar
Product Identification
Validity
Intended Use
Functional Principle

BG 5040 BEN (2015-12) ITR90.oi 3
Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 2
1Safety 4
1.1 Symbols Used 4
1.2 Personnel Qualifications 4
1.3 General Safety Instructions 4
1.4 Liability and Warranty 4
2Technicale Data 5
3Installation 8
3.1 Vacuum Connection 8
3.1.1 Making the Flange Connection 9
3.1.2 Removing and Installing the Electronics Unit 9
3.1.3 Using the Optional Baffle 10
3.2 Electrical Connection 12
3.2.1 Use With Pfeiffer Vacuum Gauge Controllers 12
3.2.2 Use With Other Controllers 12
4Operation 15
4.1 Measuring Principle, Measuring Behavior 15
4.2 Operational Principle of the Gauge 16
4.3 Putting the Gauge Into Operation 16
4.4 Degas 17
4.6 RS232C Interface 17
4.6.1 Description of the Functions 17
4.6.1.1 Output String (Transmit) 17
4.6.1.2 Input String (Receive) 19
5Deinstallation 20
6Maintenance, Repair 21
6.1 Maintenance 21
6.1.1 Cleaning the Gauge 21
6.2 Adjusting the Gauge 21
6.2.1 Adjustment at Atmospheric Pressure 21
6.2.2 Zero Point Adjustment 22
6.3 What to Do in Case of Problems 23
6.4 Replacing the Sensor 24
7Options 25
8Spare Parts 25
9Storage 25
10 Returning the Product 26
11 Disposal 26
Appendix 27
A: Relationship Output Signal – Pressure 27
B: Gas Type Dependence 28
C: Literature 29
For cross-references within this document, the symbol (→XY) is used, for cross-
references to further documents, listed under literature, the symbol (→[Z]).

4BG 5040 BEN (2015-12) ITR 90
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Notice
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→5) and the process
media.
Consider possible reactions (e.g. explosion) of the process media due to the
heat generated by the product.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary pre-
cautions when handling contaminated parts.
Communicate the safety instructions to other users.
Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the
end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of changes (modifications, alterations etc.) to the product
•use the product with accessories not listed in the corresponding product
documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Gauge failures due to contamination or wear and tear as well as expendable parts
(e.g. filaments) are not covered by the warranty.
1.1 Symbols Used
Symbols for residual risks
1.2 Personnel Qualifications
1.3 General Safety
Instructions
1.4 Liability and Warranty

BG 5040 BEN (2015-12) ITR90.oi 5
2 Technical Data
Display range (air, O2, CO, N2,) 5×10-10 … 1000 mbar, continuous
Measuring range (air, O2, CO, N2,) 1×10-8 … 10-2 mbar, continuous
Accuracy 15% of reading
(after 5 min stabilization)
Repeatability 5% of reading
(after 5 min stabilization)
Gas type dependence →Appendix B
Switching on threshold
Switching off threshold
2.4×10-2 mbar
3.2×10-2 mbar
Emission current
p ≤7.2×10-6 mbar
7.2×10-6 mbar <p <3.2×10-2 mbar
5 mA
25 µA
Emission current switching
25 µA 5 mA
5 mA 25 µA
7.2×10-6 mbar
3.2×10-5 mbar
Degas emission current
(p <7.2×10-6 mbar)
≈16 mA (Pde
g
as ≈4 W)
Control input signal 0 V/+24 VDC, active high
(control via RS232 →17)
Duration max. 3 min, followed by automatic stop
In degas mode, ITR 90 gauges keep supplying measurement values, however their
tolerances may be higher than during normal operation.
Output signal (measuring signal) 0 … +10 V
Display range 0.774 V … +10 V
(5×10-10 mbar … 1000 mbar)
Relationship voltage-pressure logarithmic, 0.75 V/decade
(→Appendix A)
Error signal <0.3 V/0.5 V (→23)
Minimum load impedance 10 kΩ
DANGER
The gauge must only be connected to power supplies, instruments or
control devices that conform to the requirements of a grounded extra-
low voltage (PELV). The connection to the gauge has to be fused
(Pfeiffer Vacuum controller fulfill these requirements).
Operating voltage at the ITR 90 +24 VDC (20 … 28 VDC) 1)
ripple max. 2 V
pp
Power consumption
Standard
Degas
Emission start (<200 ms)
≤0.5 A
≤0.8 A
≤1.4 A
Power consumption ≤16 W
Fuse necessary 1.25 AT
1) Measured at sensor cable connector (consider the voltage drop as function of
the sensor cable length).
Measurement
Emission
Degas
Output signal
Power supply

6BG 5040 BEN (2015-12) ITR 90
Electrical connector D-Sub, 15-pin, male (→13)
Cable for ITR 90
Analog values only
Without degas function
Analog values
With degas function
Analog values
With degas function
And RS232C interface
4 conductors plus shielding
5 conductors plus shielding
7 conductors plus shielding
Max. cable length (supply voltage 24 V1))
Analog operation
RS232C operation
≤35 m, conductor cross-section 0.25 mm²
≤50 m, conductor cross-section 0.34 mm²
≤100 m, conductor cross-section 1.0 mm²
≤30 m
Gauge identification 42 kΩresistor between Pin 10 (sensor
cable) and GND
Data rate
Data format
Connections (sensor cable connector)
TxD (Transmit Data)
RxD (Receive Data)
GND
9600 Baud
binary
8 data bits
one stop bit
no parity bit
no handshake
Pin 13
Pin 14
Pin 5
Function and interface protocol of the RS232C interface →17
Materials exposed to vacuum
Housing, supports, screens
Feedthroughs
Insulator
Cathode
Cathode holder
Pirani element
stainless steel
NiFe, nickel plated
glass
iridium, yttrium oxide (Y2O3)
molybdenum
tungsten, copper
Internal volume
DN 25 ISO-KF
DN 40 CF-R
≤24 cm3
≤34 cm3
Max. Pressure 2 bar (absolute)
DN 25 ISO-KF
DN 40 CF-R
≈290 g
≈550 g
Admissible temperatures
Storage
Operation
Bakeout
-20 … 70 °C
0 … 50 °C
+150 °C (without electronics unit)
Relative humidity
(year's mean / during 60 days) ≤65 / 85% (no condensation)
Use indoors only
altitude up to 2000 m NN
Type of protection IP 30
Sensor cable
RS232C interface
Vacuum
Weight
Ambiance

BG 5040 BEN (2015-12) ITR90.oi 7
4-40UNC 2B
DN 25 ISO-KF
DN 40 CF-R
4-40UNC 2B
Dimensions [mm]

8BG 5040 BEN (2015-12) ITR 90
3 Installation
DANGER
DANGER: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.
DANGER
The gauge must be electrically connected to the grounded vacuum
chamber. This connection must conform to the requirements of a pro-
tective connection according to EN 61010:
•CF connections fulfill this requirement
•For gauges with a KF vacuum connection, use a conductive
metallic clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
The gauge may be mounted in any orientation. To keep condensates
and particles from getting into the measuring chamber, preferably
choose a horizontal to upright position. See dimensional drawing for
space requirements (→7).
When installing the gauge, make sure that the area around the connec-
tor is accessible for the tools required for adjustment while the gauge is
mounted (→21).
When installing the gauge, allow for installing/deinstalling the connectors
and accommodation of cable loops.
•The gauge is supplied with a built-in grid. For potentially contaminating appli-
cations and to protect the electrodes against light and fast charged particles,
installation (→10) of the optional baffle is recommended (→25).
•The sensor can be baked at up to 150 °C. At temperatures exceeding 50 °C,
the electronics unit has to be removed (→9) or an extension (Option →25)
has to be installed.
3.1 Vacuum Connection

BG 5040 BEN (2015-12) ITR90.oi 9
It is recommended not to apply any vacuum grease.
The protective lid will be needed for maintenance.
•Allen key, size 2.5 mm
Unscrew the hexagon socket set screw (1) on the side of the electronics
unit (2).
2
1
3.1.1 Making the Flange
Connection
Procedure
3.1.2 Removing and Installing
the Electronics Unit
Required tool
Removing the electronics unit

10 BG 5040 BEN (2015-12) ITR 90
Remove the electronics unit without twisting it.
Removal of the electronics unit is completed.
Place the electronics unit on the sensor (3) (be careful to correctly align the
pins and notch (4)).
4
3
Slide the electronics unit in to the mechanical stop and lock it with the hexa-
gon socket set screw (1).
The electronics unit is now installed.
In severely contaminating processes and to protect measurement electrodes opti-
cally against light and fast charged particles, replacement of the built-in grid by the
optional baffle (→25) is recommended.
The optional baffle will be installed at the sensor opening of the deinstalled gauge
(Deinstallation →20).
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
•Baffle (→25)
•Pointed tweezers
•Pin (e.g. pencil)
•Screwdriver No 1
Installing the electronics unit
3.1.3 Using the Optional Baffle
Installing/deinstalling
the baffle
Required tools / material