Pfeiffer Vacuum CMR 362 User manual

BG 5136 BEN / C
(2019-06)
A PASSION FOR PERFECTION
CMR 361 … CMR 365
Ceramic Capacitance Gauge
Operating instructions
EN

2BG 5136 BEN/C (2019-06)
Product identification
The details on the rating plate are required when communicating
with Pfeiffer Vacuum. Therefore, you must specify these details.

BG 5136 BEN/C (2019-06) 3
Validity
This document is applicable for products with the part numbers:
Measuring range
min. (0 V)
F.S. (9 V)
max. (9.8 V)
Type Part number Flange [hPa]
[Pascal]
[hPa]
[Pascal]
[hPa]
[Pascal]
CMR 361
PT R24 600
½" tube
10-1
101
1,000
100,000
1,100
110,000
PT R24 601
DN 16 ISO-KF
PT R24 602
DN 16 CF-R
PT R24 603
8 VCR®
CMR 362
PT R24 610
½" tube
10-2
100
100
10'000
110
11'000
PT R24 611
DN 16 ISO-KF
PT R24 612
DN 16 CF-R
PT R24 613
8 VCR®
CMR 363
PT R24 620
½" tube
10-3
10-1
10
1,000
11
1,100
PT R24 621
DN 16 ISO-KF
PT R24 622
DN 16 CF-R
PT R24 623
8 VCR®
CMR 364
PT R24 630
½" tube
10-4
10-2
1
100
1.1
110
PT R24 631
DN 16 ISO-KF
PT R24 632
DN 16 CF-R
PT R24 633
8 VCR
®
CMR 365
PT R24 640
½" tube
10-5
10-3
0.1
10
0.11
11
PT R24 641
DN 16 ISO-KF
PT R24 642
DN 16 CF-R
PT R24 643
8 VCR®
The part number (P/N) can be obtained from the rating plate.
Figures with no designation relate to gauge CMR 361 with
vacuum connection DN 16 ISO-KF. These characteristics apply
for all other gauges accordingly.
We reserve the right to make technical changes without prior
notification.
All dimensions stated in mm.

4BG 5136 BEN/C (2019-06)
Intended use
The Ceramic Capacitance Gauges from the CMR 36X series are
vacuum gauges and enable the measuring of absolute pressure
of gases in diverse measuring ranges (→3).
Function
The CMR gauge comprises a ceramic capacitive sensor element
and an electronic circuit that converts the capacity into a direct
voltage output signal.
The output signal is linear with the measured pressure and is
independent of the gas type being measured.
Type
VCR®Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US patents 6528008, 6591687, 7107855, 7140085
Scope of delivery
1× CMR 36X gauge
1× stylus
1× calibration certificate
1× operating instructions German
1× operating instructions English
1× operating instructions French

BG 5136 BEN/C (2019-06) 5
Contents
Product identification 2
Validity 3
Intended use 4
Function 4
Type 4
Patents 4
Scope of delivery 4
1Safety 6
1.1 Symbols used 6
1.2 Personnel qualifications 6
1.3 General safety instructions 7
1.4 Responsibilities and warranty 7
2Technical data 8
3Installation 13
3.1 Vacuum connection 13
3.2 Electrical connection 16
4Operation 18
4.1 Indicate (to) 18
4.2 Calibrating the gauge 18
4.3Factory reset 22
5Dismantling 23
6Maintenance, repair 24
7Returning the product 25
8Disposal of the product 25
Conversion table 27
ETL-Certification 27
EU-Declaration of Conformity 28
The (→XY) symbol is used for page references within the text.

6BG 5136 BEN/C (2019-06)
1 Safety
1.1 Symbols used
DANGER
Information to prevent any kind of injury to persons.
WARNING
Information to prevent extensive damage to property and the
environment.
Caution
Information on handling or use. Failure to observe can lead to
malfunctions or minor material damage.
Note
1.2 Personnel qualifications
Skilled personnel
The work described in this document may only be carried out
by persons that have suitable technical training and the
necessary experience or have been trained accordingly by the
operating company.

BG 5136 BEN/C (2019-06) 7
1.3 General safety instructions
•When handling the respective process media, observe the
relevant guidelines and adhere to the safety measures.
Consider possible reactions between materials and process
media.
•All work is only permissible when observing the relevant
guidelines and adhering to the protective measures.
Additionally, observe the safety instructions specified in this
document.
•Inform yourself about any contamination before starting work.
When handling contaminated parts, observe the relevant
regulations and implement the safety measures.
Pass on safety instructions to all other users.
1.4 Responsibilities and warranty
Pfeiffer Vacuum shall assume no liability nor provide any
warranty if the operating company or a third party
•disregards this document
•does not use the product for its intended purpose
•tampers with the product in any way (conversions,
modifications, etc.)
•operates the product with accessories that are not listed in the
corresponding product documentation.
The operating company is responsible for the process media
being used.
Malfunctioning of the gauge as a direct result of contamination is
not covered by the warranty.

8BG 5136 BEN/C (2019-06)
2 Technical data
Measuring range
→"Validity"
Accuracy 1)
PT R24 600 … PT R24 633
PT R24 640 … PT R24 643
0.2% of measured value
0.5% of measured value
Temperature influence at zero point
PT R24 600 … PT R24 623
PT R24 630 … PT R24 633
PT R24 640 … PT R24 643
0.005% F.S./ °C
0.015% F.S./ °C
0.02% F.S./ °C
Temperature influence in range
PT R24 600 … PT R24 633
PT R24 640 … PT R24 643
0.01% of measured value / °C
0.03% of measured value / °C
Resolution
0.003% F.S.
Gas type dependence
None
Output signal analog (measuring
signal)
Voltage range
0 … +11 V
Measuring range
+1.0 … +9.8 V
Relation voltage-pressure
Linear
Error signal <0.4 V (no supply,
sensor error)
>9.8 V (above the range
("over-range")
Output impedance
<10 Ω
Load impedance
10 kΩ(short-circuit-proof)
Response time
PT R24 600 … PT R24 633
PT R24 640 … PT R24 643
30 ms
130 ms
1) Non-linearity, hysteresis, repeat accuracy within calibrated range
at 25 °C ambient temperature without influence of temperature
after 2 hours of operation.

BG 5136 BEN/C (2019-06) 9
Identification of gauge Resistance 13.2 kΩagainst
supply earth
Supply
DANGER
The gauge may only be connected to supply devices or
measurement instruments that comply with the
requirements of the earthed protective extra low voltage
(PELV). Protection must be provided for the cable
leading to the gauge.
Supply voltage
at the gauge
ripple
+14 … +30 VDC
≤1 Vpp
Power input <500 mA
(max. switch-on current)
Power input
(dependent on supply voltage)
≤1.0 W
Internal fuse 1 AT (slow), automatic reset
(polyfuse)
Gauge is protected against polarity reversal of the supply
voltage.
Electric connection Compact connector
Hirschmann , type GO 6,
6-pin, contact pins
Measurement cable
5-pin, including shielding
Cable length
≤120 m (0.25 mm² conductor)
Larger conductor cross sections are required for longer cables
(Rconductor ≤1.0 Ω).
Earthing concept
Vacuum flange – signal earth
→"Electric connection"
Supply earth – signal earth arranged separately for
differential measurement
(10 Ω)

10 BG 5136 BEN/C (2019-06)
Material against vacuum
Flange, tube
Sensor and diaphragm
Connection sensor–diaphragm
Connection ceramic–metal
Stainless steel AISI 316L
Ceramic (Al2O3≥99.5%)
Glass ceramic solder
AgTiCu-hard solder, Vacon 70
(28% Ni, 23% Co, 49% Fe)
Internal volume
≤3.6 cm3
Maximum pressure (absolute)
PT R24 600 … PT R24 603
PT R24 610 … PT R24 633
PT R24 640 … PT R24 643
300 kPa
200 kPa
130 kPa
Burst pressure (absolute)
500 kPa
Permissible temperature
Storage
Operation
Bake out (when not in operation)
–40 °C … +65 °C
+5 °C … +50 °C
≤110 °C at flange
Relative humidity ≤80% at temperatures
≤+31 °C reducing to
50% at +40 °C
Use Indoors only,
altitude up to 2,000 m
(mean sea level)
Protection category
IP 30

BG 5136 BEN/C (2019-06) 11
Dimensions [mm]
69 23
55
DN 16 ISO-KF DN 16 CF-R
OD½"
44
8 VCR
female
Weight
≤370 g

12 BG 5136 BEN/C (2019-06)
Relation measuring signal analog – pressure
1 2 3 4 5 6 7 8 9
0.5
100
0
0.6
0.6
1.0
0.7
0.8
0.9
0.1
0.2
0.3
0.4
1.1
9.8
sensor error
underrange
overrange
sensor error
underrange
overrange
sensor error
underrange
overrange
sensor error
underrange
overrange
F.S.
Measuring signal U [V]
Pressure p [mbar]
p = (U - 1) × c (F.S.)
hPa
Pa
Torr
c
0,125
12.5
0,094
Example: Gauge CMR 361 with 1,000 hPa F.S.
Measuring signal Uout = 6 V
p = (6 V - 1 V) × 0.125 × 1,000 hPa
= 625 hPa

BG 5136 BEN/C (2019-06) 13
3 Installation
WARNING
WARNING: Risk of breakage
Impacts can destroy the ceramic sensor.
Avoid harsh impacts and never allow the product to
drop to the floor.
3.1 Vacuum connection
DANGER
DANGER: Overpressure in the vacuum system
>100 kPa
Opening tensioning pieces with overpressure in the
vacuum system can lead to injuries as a result of
flying parts, and escaping process medium could
prove harmful to health.
Never open tensioning pieces when overpressure
is prevalent in the vacuum system. Use tensioning
pieces suitable for overpressure.
DANGER
DANGER: Overpressure in the vacuum system
>250 kPa
Elastomer seals (e.g. O-rings) are no longer
capable of withstanding the pressure for
KF-connections. This could prove harmful to health
due to escaping process medium.
Use O-rings with an external centering ring.

14 BG 5136 BEN/C (2019-06)
DANGER
DANGER: Protective earth
Products that are not properly grounded can cause
fatal injuries in the event of a fault.
The gauge must be galvanically connected with the
earthed vacuum chamber. The connection must
comply with the requirements of a protective
bonding according to EN 61010:
•CF and VCR connections comply with this
requirement.
•An electrically conductive circlip must be used
for KF connections.
•Compliance with this requirement for ½"-tube
can be achieved by applying suitable measures.
Caution
Caution: Vacuum components
Dirt and damage impair the function of the vacuum
component.
When handling vacuum components, observe the
rules relating to cleanliness and protection against
damage.
Caution
Caution: Area sensitive to contamination
Touching the product, or parts of the product with
bare hands will increase the rate of desorption.
Wear clean, lint-free gloves and use clean tools.

BG 5136 BEN/C (2019-06) 15
Install the gauge vibration-free wherever possible. The
installation position is arbitrary. To prevent condensate and
particles accumulating in the measurement chamber, the
installation position should be horizontal or upright, and a seal
with centering ring and filter must be fitted where necessary.
If calibration of the gauge is possible in the installed condition,
you must ensure easy access to the buttons with a pin
(→18).
Remove the protective cap and connect the product to the
vacuum system.
Clamp
Seal with centering ring
or
Seal with centering ring
and filter
Protective lid
Store the protective cap in a safe place.

16 BG 5136 BEN/C (2019-06)
3.2 Electrical connection
The gauge must be correctly connected to the vacuum
equipment (→13).
DANGER
The gauge may only be connected to supply
devices or measurement instruments that comply
with the requirements of the earthed protective
extra low voltage (PELV). Protection must be
provided for the cable leading to the gauge.
Earth loops, potential differences or EMC can influence
the measuring signal. Please observe the following
notes on installation to ensure optimum signal quality:
•Connect the cable shielding with the earth via the
connector housing on one side only. Leave the other
end of the shielding open.
•Connect the supply earth directly with protective earth
for power supply pack.
•Use the differential measuring input (separate signal-
and supply earth).
•Potential difference between supply earth and
housing ≤18 V (overvoltage protection)

BG 5136 BEN/C (2019-06) 17
If no measurement cable is present, a measurement cable
can be fitted in accordance with the following diagram.
Electrical connection
Pin 1 Gauge identification
Pin 2 Signal output (measuring signal)
Pin 3 Signal common
Pin 4 Supply
Pin 5 Supply common
Pin 6 Chassis ground
Connector,
soldering side
2
5
31
6
4
–
+
–
+
2
3
1
4
5
100k
100nF
18 V
6
13K2
•
The cable must be shielded and grounded as
indicated in the above Illustration and the
Grounding concept *).
•
Connect the cable shield to ground on the
gauge side via Pin 6. Do not connect the other
side of the shield to prevent a ground circuit.
*)
→
"Technical Data"
Connect the measurement cable to the gauge and secure
the cable connector using the locking screw.
Connect the measurement cable to the measurement
instrument.

18 BG 5136 BEN/C (2019-06)
4 Operation
Start up the gauge.
Warm-up period
•for general pressure measurements (within
the specifications)
>¼ of an hour
•for precision measurements and zero point
calibration
>2 hours
4.1 Indicate (to)
ZERO
RUN
For factory
setting only
LED
Condition
Meaning
<RUN>
lights up
Measuring mode
is flashing Other mode, error,
outside of measuring
range
4.2 Calibrating the gauge
The gauge is calibrated in the vertical upright position before
leaving the factory (→"Calibration Test Report").
We recommend setting the zero point for initial
operation.
Long-term operation and contamination can lead to a zero point
shift, and may also necessitate a periodic zero adjustment.

BG 5136 BEN/C (2019-06) 19
Perform a zero adjustment for identical and constant ambient
conditions and with the same installation position in which the
gauge is normally used.
The output signal is dependent upon the installation position.
Shifting from a vertical upright position to a horizontal position
constitutes:
F.S.
∆
U / 90°
1000 hPa
≈2 mV
100 hPa
≈10 mV
10 hPa
≈50 mV
1 hPa
≈300 mV
0.1 hPa
≈1.8 V
If the gauge is operated with a measurement instrument,
the zero adjustment must be performed at the
measurement instrument for the entire measuring
system: Calibrate the gauge first, and then the
measurement instrument.
4.2.1
<
ZERO
>
Adjust
Evacuate the gauge up to the pressure stipulated in the
following table:
Recommended ultimate pressure
for zero adjustment
1,100 hPa
110 hPa
11 hPa
1.1 hPa
0.11 hPa
<4×10
-2
Torr
<4×10-3 Torr
<4×10-4 Torr
<4×10-5 Torr
<1×10
-5
Torr
<5×10
-2
hPa
<5×10-3 hPa
<5×10-4 hPa
<5×10-5 hPa
<1×10
-5
hPa
<5×10
-2
mbar
<5×10-3 mbar
<5×10-4 mbar
<5×10-5 mbar
<1×10
-5
mbar
If the ultimate pressure is too high during zero adjustment
(>25% of F.S.), zero is no longer achievable and the LED
<RUN> starts flashing. In this case, first activate the factory
settings and then calibrate the zero point again (→22).

20 BG 5136 BEN/C (2019-06)
Operate the gauge for at least 2 hours (until the measured
value stabilizes).
Push the <ZERO> button briefly with a pin (max. ø1.1 mm). The
zero point is calibrated automatically. The LED <RUN>
continues to flash until calibration is complete (duration ≤8 s).
Press the button
max. ø1.1 mm
Following calibration of the zero point, the gauge returns
automatically to measuring mode. The LED <RUN>
lights up.
The LED <RUN> flashes
•if the transmitter is indicating a negative output signal
(> 22 mV) with ultimate pressure, or
•if calibration of the zero point has failed.
4.2.2
<
ZERO
>
Adjust with ramp function
The ramp allows the zero point to be set with an established
reference pressure that is within the measuring range of the
gauge.