Pfeiffer Vacuum PM 061 360-T User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
HIPACE
Heating sleeve

Dear customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new Pfeiffer Vacuum accessory
should support you in your individual application with full performance and without
malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/20

Table of contents
1 About this manual 4
1.1 Validity 4
1.1.1 Applicable documents 4
1.1.2 Variants 4
1.2 Target group 4
1.3 Conventions 4
1.3.1 Instructions in the text 4
1.3.2 Pictographs 4
1.3.3 Stickers on the product 5
2 Safety 6
2.1 General safety information 6
2.2 Safety instructions 6
2.3 Safety precautions 6
2.4 Limits of use of the product 7
2.5 Proper use 7
2.6 Foreseeable misuse 7
2.7 Personnel qualification 7
3 Product description 9
3.1 Function 9
3.2 Identifying the product 9
3.3 Scope of delivery 9
4 Installation 10
5 Operation 12
6 Service solutions by Pfeiffer Vacuum 13
7 Technical data 15
Declaration of conformity 19
Table of contents
3/20

1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-
scribe the functions of the named product and provide the most important information for the safe use of
the device. The description is written in accordance with the valid directives. The information in this op-
erating instructions refers to the product's current development status. The document shall remain valid
provided that the customer does not make any changes to the product.
1.1.1 Applicable documents
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
Heating sleeve for:
● HiPace 60 P
● HiPace 80
● HiPace 300
● HiPace 300 M
● HiPace 350
● HiPace 400
● HiPace 450
● HiPace 700
● HiPace 700 M
● HiPace 800
● HiPace 800 M
● HiPace 1200
● HiPace 1500
● HiPace 2300
1.2 Target group
This operating instructions is intended for persons who
●install,
●operate,
The work described in this document may be carried out only by people who have completed suitable
technical training (experts), or who have received equivalent training from Pfeiffer Vacuum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
Pictographs used in the document indicate useful information.
About this manual
4/20

Note
Tip
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meaning.
Mod.-Nr.: PM 071 272 -T
D-35641 Asslar
Made in Germany
Input: 230 V 50/60 Hz
Output: 200 W
12/2019
Rating plate (example)
The rating plate is located on the relay box
Warning hot surface
This sticker warns of injuries caused by high temperatures in case of
touching without protection during operation.
Two stickers included in the scope of delivery.
Tbl. 1: Stickers on the product
2
1
Fig. 1: Position of the stickers on the product
1 Hot surface warning sign 2 Rating plate
About this manual
5/20

2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
All safety instructions in this document are based on the results of the risk assessment. Where applica-
ble, all life cycle phases of the product were taken into account.
Risks during operation
CAUTION
Danger of burns on hot surfaces
When baking out the turbopump or vacuum chamber, there is a danger of burns caused by touching,
even after the housing heater has been switched off.
►Implement thermal insulation measures on the heating sleeve, pump housing, and vacuum
chamber.
►Wear personal protective equipment if necessary.
►Allow the turbopump to cool down.
2.3 Safety precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Safety
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Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Recommendation: Establish a secure connection to the earthed conductor (PE); protection class I.
►Never disconnect plug connections during operation.
►Keep lines and cables away from hot surfaces (> 70 °C).
►Do not carry out your own conversions or modifications on the unit.
►Observe the unit protection category prior to installation or operation in other environments.
2.4 Limits of use of the product
Parameter Heating sleeve
Required design of flange CF-F
Permissible flange temperature with heating max. +120 °C1)
Ambient temperature +12 °C to +40 °C
Protection category IP54
Cooling Water cooling is essential for the turbopump
Relative air humidity ≤ 85 % not condensing
Tbl. 2: Permissible ambient and operating conditions
2.5 Proper use
►Use the heating sleeve exclusively for the baking out of Pfeiffer Vacuum turbopumps with a stain-
less steel high vacuum flange.
►Adhere to the installation, commissioning, operating, and maintenance instructions.
►Do not use any accessory parts other than those recommended by Pfeiffer Vacuum.
2.6 Foreseeable misuse
Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as improper use, in particular:
●Connection to pumps or equipment which are not suitable for this purpose according to their oper-
ating instructions
●Connection to equipment with exposed live parts
2.7 Personnel qualification
The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervision of
trained personnel.
1) Depending on the turbopump being used
Safety
7/20

3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and understood
these operating instructions and all applicable documents, in particular the safety, maintenance
and repair information.
Safety
8/20

3 Product description
3.1 Function
The use of heating sleeves on turbopumps increases the desorption rates and reduces the pump-down
times due to the final pressure being reached more quickly. A stainless steel high vacuum flange is es-
sential for the use of heating sleeves.
1
3
2
Fig. 2: Structure of heating sleeve
1 Interior hexagon socket screw 3 Relay box
2 Heating sleeve
3.2 Identifying the product
►To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always
keep all of the information on the rating plate to hand.
3.3 Scope of delivery
The scope of delivery includes the following parts:
●Heating sleeve with relay box and connecting cable
●Base plate for securing the relay box to the wall
●2x "Hot surface" sticker
●Set of screws
●Operating instructions
Product description
9/20

4 Installation
Operational conditions for a housing heater
Heating sleeves may only be used on turbopumps with a stainless steel high vacuum
flange. Use of a housing heater is only permissible in conjunction with water cooling.
●Observe the maximum permissible flange temperature at the high vacuum connection
to the vacuum system supplied by the customer.
●Observe the maximum permissible rotor temperature applicable for the respective type.
●Do not exceed the maximum permissible irradiated thermal output.
●If necessary, install screening sheets (information available upon request).
Required tools
●Allen key, size 4 or 5
●Calibrated torque wrench (tightening factor ≤ 1.6)
3
5
2
2×
4
1
Fig. 3: Example: Assembling a heating sleeve on the HiPace 80
1 Pump housing 4 Heating relay box
2 Interior hexagon socket screw 5 "Hot surface" warning sticker
3 Heating sleeve
4
23
(2×)
5
1
Fig. 4: Example: Assembling a heating sleeve on the HiPace 700
1 Pump housing 4 Heating sleeve
2 "Hot surface" warning sticker 5 Heating relay box
3 Interior hexagon socket screw
Installation
10/20

3
5 (2x) 24
1
Fig. 5: Example: Assembling a heating sleeve on the HiPace 1200
1 Pump housing 4 Heating relay box
2 Interior hexagon socket screw 5 "Hot surface" warning sticker
3 Heating sleeve
Assembling a heating sleeve
1. Carefully bend out the heating sleeve at the outer clamping strap.
2. Push the sleeve onto the cylindrical section of the pump housing, either from above or from the
side, depending on the respective installation situation.
3. Make sure that the heater bands are not deformed and that the sleeve is sitting flush against the
housing.
4. Secure the heating sleeve onto the housing with the interior hexagon socket screw.
5. Attach the "Hot surface" sticker to the pump housing.
6. Install suitable screening sheets as protection in case the irradiated heat input exceeds the per-
missible maximum values.
Fixing screw
thread
Tightening torque in
cold condition
Tightening torque for
bakeout
One-time retightening
after cooling
M5 6 Nm 7 Nm 7 Nm
M6 11 Nm 12 Nm 12 Nm
Tbl. 3: Tightening torques for heating sleeve fixing screws
Connecting the control line
1. Connect the accessory control line to the electronic drive unit using the corresponding accessory
connection, and screw the plug tight.
2. Check the specification in the configuration of the respective turbopump "accessory A1".
Connecting to the mains power supply
►Make sure that the supply voltage is correct.
►Connect the plug on the mains cable to a suitable socket.
►Always ensure a secure connection to the earthed conductor (PE), protection class I.
Installation
11/20

5 Operation
CAUTION
Danger of burns on hot surfaces
When baking out the turbopump or vacuum chamber, there is a danger of burns caused by touching,
even after the housing heater has been switched off.
►Implement thermal insulation measures on the heating sleeve, pump housing, and vacuum
chamber.
►Wear personal protective equipment if necessary.
►Allow the turbopump to cool down.
NOTICE
Damage to the turbopump due to excess temperature
High process temperatures will cause damage to the pump.
►Always use water cooling when using the vacuum pump with a housing heating or during opera-
tion with heated vacuum chambers.
►Avoid additional energy input in the vacuum pump when using a housing heater.
►Observe the limit values specified in the ambient conditions.
Important settings and function-related variables programmed ex factory as parameters in the vacuum
pump electronic drive unit. Each parameter has a three-digit number and a description. Parameter-driv-
en operation and control is supported via Pfeiffer Vacuum displays and control units, or externally via
RS-485 using Pfeiffer Vacuum protocol.
Parameter Name Designation Setting
[P:001] Heating Heating 1 = On
[P:035] CfgAccA1 Accessory connection A1 2 = heating
Tbl. 4: Parameter settings in the electronic drive unit of the turbopump
Information regarding commissioning of the turbopump with heating sleeve
1. Observe the cooling water flow and flow rate.
Information regarding operation
The heating duration depends on the degree of contamination in the process, as well as the final pres-
sure to be reached.
►Determine the optimum bake-out time by running a pump-out to reach the prescribed final pres-
sure.
Operation
12/20

6 Service solutions by Pfeiffer Vacuum
We offer first-class service
High vacuum component service life, in combination with low downtime, are clear expectations that you
place on us. We meet your needs with efficient products and outstanding service.
We are always focused on perfecting our core competence – servicing of vacuum components. Once
you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly
where service begins. Obviously, in proven Pfeiffer Vacuum quality.
Our professional sales and service employees are available to provide you with reliable assistance,
worldwide. Pfeiffer Vacuum offers an entire range of services, from original replacement parts to service
contracts.
Make use of Pfeiffer Vacuum service
Whether preventive, on-site service carried out by our field service, fast replacement with mint condition
replacement products, or repair carried out in a Service Center near you – you have various options for
maintaining your equipment availability. You can find more detailed information and addresses on our
homepage, in the Pfeiffer Vacuum Service section.
You can obtain advice on the optimal solution for you, from your Pfeiffer Vacuum representa-
tive.
For fast and smooth service process handling, we recommend the following:
1. Download the up-to-date form templates.
─Explanations of service requests
─Service requests
─Contamination declaration
a) Remove and store all accessories (all external parts, such as valves, pro-
tective screens, etc.).
b) If necessary, drain operating fluid/lubricant.
c) If necessary, drain coolant.
ANFORDERUNG SERVICE
ERKLÄRUNG KONTAMINIERUNG
2. Complete the service request and contamination declaration.
3. Send the forms by email, fax, or post to your local Service Center.
4. You will receive an acknowledgment from Pfeiffer Vacuum.
Submission of contaminated products
No microbiological, explosive, or radiologically contaminated products will be accepted. Where products
are contaminated, or the contamination declaration is missing, Pfeiffer Vacuum will contact you before
starting service work. Depending on the product and degree of pollution, additional decontamination
costs may be incurred.
Service solutions by Pfeiffer Vacuum
13/20

5. Prepare the product for transport in accordance with the provisions
in the contamination declaration.
a) Neutralize the product with nitrogen or dry air.
b) Seal all openings with blind flanges, so that they are airtight.
c) Shrink-wrap the product in suitable protective foil.
d) Package the product in suitable, stable transport containers only.
e) Maintain applicable transport conditions.
ERKLÄRUNG KONTAMINIERUNG
6. Attach the contamination declaration to the outside of the packag-
ing.
7. Now send your product to your local Service Center.
8. You will receive an acknowledgment/quotation, from Pfeiffer Vac-
uum.
Our sales and delivery conditions and repair and maintenance conditions for vacuum devices and com-
ponents apply to all service orders.
Service solutions by Pfeiffer Vacuum
14/20

7 Technical data
Classification Heating sleeve for Hi-
Pace® 80, 230 V AC
Heating sleeve for
HiPace® 80, 208 V
AC
Heating sleeve for
HiPace® 80, 115 V
AC
Order number PM 061 360 -T PM 061 361 -T PM 061 362 -T
Pump HiPace 80 with TC 110 HiPace 80 with TC
110
HiPace 80 with TC
110
Mains cable Type FR, DE US US
Voltage 230 V AC 208 V AC 115 V AC
Power consumption of
heating sleeve, max.
40 W 40 W 40 W
Plug M8 M8 M8
Nominal diameter 82 mm 82 mm 82 mm
Tbl. 5: Technical data heating sleeve for HiPace 80 with TC 110
Classification Heating sleeve,
screened, for HiPace
80, 230 V AC
Heating sleeve,
screened, for HiPace
80, 208 V AC
Heating sleeve,
screened, for HiPace
80, 115 V AC
Order number PM 071 260 -T PM 071 261 -T PM 071 262 -T
Pump HiPace 80 with TC 110
PB
HiPace 80 with TC 110
PB
HiPace 80 with TC 110
PB
Mains cable Type FR, DE US US
Voltage 230 V AC 208 V AC 115 V AC
Power consumption
of heating sleeve,
max.
40 W 40 W 40 W
Plug M8 M8 M8
Nominal diameter 82 mm 82 mm 82 mm
Tbl. 6: Technical data heating sleeve for HiPace 80 with TC 110 PB, screened
Classification Heating sleeve for Hi-
Pace® 300, 230 V AC
Heating sleeve for
HiPace® 300, 208 V
AC
Heating sleeve for
HiPace® 300, 115 V
AC
Order number PM 061 363 -T PM 061 364 -T PM 061 365 -T
Pump HiPace 300 with TC
110
HiPace 300 with TC
110
HiPace 300 with TC
110
Mains cable Type FR, DE US US
Voltage 230 V AC 208 V AC 115 V AC
Power consumption of
heating sleeve, max.
120 W 120 W 120 W
Plug M8 M8 M8
Nominal diameter 130 mm 130 mm 130 mm
Tbl. 7: Technical data heating sleeve for HiPace 300 with TC 110
Classification Heating sleeve,
screened, for HiPace
300, 230 V AC
Heating sleeve,
screened, for HiPace
300, 208 V AC
Heating sleeve,
screened, for HiPace
300, 115 V AC
Order number PM 071 263 -T PM 071 264 -T PM 071 265 -T
Pump HiPace 300 with TC 110
PB
HiPace 300 with TC
110 PB
HiPace 300 with TC
110 PB
Mains cable Type FR, DE US US
Voltage 230 V AC 208 V AC 115 V AC
Technical data
15/20

Classification Heating sleeve,
screened, for HiPace
300, 230 V AC
Heating sleeve,
screened, for HiPace
300, 208 V AC
Heating sleeve,
screened, for HiPace
300, 115 V AC
Power consumption
of heating sleeve,
max.
120 W 120 W 120 W
Plug M8 M8 M8
Nominal diameter 130 mm 130 mm 130 mm
Tbl. 8: Technical data heating sleeve for HiPace 300 with TC 110 PB, screened
Classification Heating sleeve for Hi-
Pace® 300, 230 V AC
Heating sleeve for
HiPace® 300, 208 V
AC
Heating sleeve for
HiPace® 300, 115 V
AC
Order number PM 061 366 -T PM 061 367 -T PM 061 368 -T
Pump HiPace 300 with TC
400
HiPace 300 with TC
400
HiPace 300 with TC
400
Mains cable Type FR, DE US US
Voltage 230 V AC 208 V AC 115 V AC
Power consumption of
heating sleeve, max.
120 W 120 W 120 W
Plug M12 M12 M12
Nominal diameter 130 mm 130 mm 130 mm
Tbl. 9: Technical data heating sleeve for HiPace 300 with TC 400
Classification Heating sleeve for Hi-
Pace® 400/700/800,
230 V AC
Heating sleeve for Hi-
Pace® 400/700/800,
208 V AC
Heating sleeve for Hi-
Pace® 400/700/800,
115 V AC
Order number PM 061 369 -T PM 061 370 -T PM 061 371 -T
Pump HiPace 400/700/800 HiPace 400/700/800 HiPace 400/700/800
Mains cable Type FR, DE US US
Voltage 230 V AC 208 V AC 115 V AC
Power consumption
of heating sleeve,
max.
120 W 120 W 120 W
Plug M12 M12 M12
Nominal diameter 184 mm 184 mm 184 mm
Tbl. 10: Technical data heating sleeve for HiPace 400 – HiPace 800 with TC 400
Classification Heating sleeve,
screened, for HiPace®
300, 230 V AC
Heating sleeve,
screened, for HiPace®
300, 208 V AC
Heating sleeve,
screened, for HiPace®
300, 115 V AC
Order number PM 071 266 -T PM 071 267 -T PM 071 268 -T
Pump HiPace 300 with TC 400
PB | HiPace 300 M with
TM 700
HiPace 300 with TC 400
PB | HiPace 300 M with
TM 700
HiPace 300 with TC 400
PB | HiPace 300 M with
TM 700
Mains cable Type FR, DE US US
Voltage 230 V AC 208 V AC 115 V AC
Power consump-
tion of heating
sleeve, max.
120 W 120 W 120 W
Plug M12 M12 M12
Nominal diameter 130 mm 130 mm 130 mm
Tbl. 11: Technical data heating sleeve for HiPace 300 with TC 400 PB, screened
Technical data
16/20

Classification Heating sleeve for HiPace
350/450, 230 V AC
Heating sleeve screened, for
HiPace 350/450, 115 V AC
Order number PM 071 700 -T PM 071 705 -T
Pump HiPace 350/450 with TC
110/120
HiPace 350/450 with TC 400
Mains cable Type FR, DE US
Voltage 230 V AC 115 V AC
Power consumption of heating
sleeve, max.
120 W 120 W
Plug M8 M12
Nominal diameter 145 mm 145 mm
Tbl. 12: Technical data heating sleeve for HiPace 350 and HiPace 450
Classification Heating sleeve,
screened, for HiPace®
400/700/800, 230 V AC
Heating sleeve,
screened, for HiPace®
400/700/800, 208 V AC
Heating sleeve,
screened, for HiPace®
400/700/800, 115 V AC
Order number PM 071 269 -T PM 071 270 -T PM 071 271 -T
Pump HiPace 400/700/800 with
TC 400 PB | HiPace
700/800 M with TM 700
HiPace 400/700/800 with
TC 400 PB | HiPace
700/800 M with TM 700
HiPace 400/700/800 with
TC 400 PB | HiPace
700/800 M with TM 700
Mains cable
Type
FR, DE US US
Voltage 230 V AC 208 V AC 115 V AC
Power consump-
tion of heating
sleeve, max.
120 W 120 W 120 W
Plug M12 M12 M12
Nominal diame-
ter
184 mm 184 mm 184 mm
Tbl. 13: Technical data heating sleeve for HiPace 400 – HiPace 800, screened
Classification Heating sleeve,
screened, for HiPace®
1200/1500, 230 V AC
Heating sleeve,
screened, for Hi-
Pace® 1200/1500, 208
V AC
Heating sleeve,
screened, for Hi-
Pace® 1200/1500, 115
V AC
Order number PM 071 272 -T PM 071 273 -T PM 071 274 -T
Pump HiPace 1200/1500 HiPace 1200/1500 HiPace 1200/1500
Mains cable Type FR, DE US US
Voltage 230 V AC 208 V AC 115 V AC
Power consumption
of heating sleeve,
max.
200 W 200 W 200 W
Plug M12 M12 M12
Nominal diameter 264 mm 264 mm 264 mm
Tbl. 14: Technical data heating sleeve for HiPace 1200 | HiPace 1500, screened
Classification Heating sleeve,
screened, for Hi-
Pace® 2300/230 V AC
Heating sleeve,
screened, for Hi-
Pace® 2300/208 V AC
Heating sleeve,
screened, for Hi-
Pace® 2300, 115 V AC
Order number PM 071 275 -T PM 071 276 -T PM 071 277 -T
Pump HiPace 2300 HiPace 2300 HiPace 2300
Mains cable Type FR, DE US US
Voltage 230 V AC 208 V AC 115 V AC
Technical data
17/20

Classification Heating sleeve,
screened, for Hi-
Pace® 2300/230 V AC
Heating sleeve,
screened, for Hi-
Pace® 2300/208 V AC
Heating sleeve,
screened, for Hi-
Pace® 2300, 115 V AC
Power consumption of
heating sleeve, max.
450 W 450 W 450 W
Plug M12 M12 M12
Nominal diameter 311 mm 311 mm 311 mm
Tbl. 15: Technical data heating sleeve for HiPace 2300, screened
Technical data
18/20

Declaration of conformity
Declaration for product(s) of the type:
Heating sleeve
HiPace 80 – 2300 turbopumps
We hereby declare that the listed product satisfies all relevant provisions of the following
European Directives.
Electromagnetic compatibility 2014/30/EU
Low voltage 2014/35/EC
Restriction of the use of certain hazardous substances 2011/65/EU
Restriction of the use of certain hazardous substances, delegated directive
2015/863/EU
Harmonized standards and applied national standards and specifications:
DIN EN 61000-3-2: 2014
DIN EN 61000-3-3: 2013
DIN EN 61010-1: 2010
DIN EN 61326-1: 2013
DIN EN 62061: 2005
Signature:
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany
(Daniel Sälzer)
Managing Director
Aßlar, 2020-01-15

*PT0233* ed. D - Date 2003 - P/N:PT0233BEN