Pfeiffer Vacuum PCR 280 User manual

BG
5181 BEN / B (2017-01)
OPERATING INSTRUCTIONS
Translation of the original instructions
PCR 280
Compact Pirani Capacitance Gauge

2
BG 5181 BEN / B (2017-01)
Product Identification
In all communications with Pfeiffer Vacuum, please specify the
information given on the product nameplate. For convenient
reference copy that information into the space provided below.
Validity
This document applies to products with part numbers
PT R26 855 (DN 16 ISO-KF)
PT R26 856 (DN 16 CF-F)
The part number (No) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with the vacuum connection
DN 16 ISO-KF. They apply to gauges with the other vacuum
connection by analogy.
We reserve the right to make technical changes without prior
notice.

BG 5181 BEN / B (2017-01) 3
Intended Use
The Compact Pirani Capacitance Gauge PCR 280 has been
designed for vacuum measurement of gases in the pressure
range of 5×10-5 … 1500 hPa.
It must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
Functional Principle
The PCR gauge is a combination gauge consisting of a Pirani
sensor and a diaphragm capacitive sensor. Both sensors are
constantly active.
At low pressures, only the signal of the Pirani sensor is used for
pressure measurement; at high pressures, only the signal of the
diaphragm capacitive sensor. To determine the output signal in
the intermediate range, both signals are used proportionally to
the pressure.
Patents
EP 0689669 B1, 0689670 B1, 0658755 B1
US Patents 5608168, 4031997, 5583297
Scope of Delivery
1× gauge in clean room packaging
1× pin for adjusting settings via buttons
1× Operating Instructions English
1× Operating Instructions German
1× Operating Instructions French

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BG 5181 BEN / B (2017-01)
Contents
Product Identification 2
Validity 2
Intended Use 3
Functional Principle 3
Patents 3
Scope of Delivery 3
1 Safety 5
1.1 Symbols Used 5
1.2 Personnel Qualifications 5
1.3 General Safety Instructions 6
1.4 Liability and Warranty 6
2 Technical Data 7
2.1 Output Signal vs. Pressure 11
2.2 Gas Type Dependence 12
3 Installation 13
3.1 Vacuum Connection 13
3.2 Power Connection 16
4 Operation 18
4.1 Light-emitting diode (LED) 18
4.2 Gas Type Dependence 19
5 Deinstallation 20
6 Maintenance, Repair 22
6.1 Adjusting the Gauge 22
6.2 Troubleshooting 23
7 Returning the Product 24
8 Disposal 25
Conversion Table 26
ETL Certification 26
EU Declaration of Conformity 27
For cross-references within this document, the symbol (→XY)
is used.

BG 5181 BEN / B (2017-01) 5
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

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BG 5181 BEN / B (2017-01)
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Pfeiffer Vacuum assumes no liability and the warranty becomes
null and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. filament) are not covered by the warranty.

BG 5181 BEN / B (2017-01) 7
2 Technical Data
Measurement range 5×10-5 … 1500 hPa
Measurement principle
10 hPa … 1500 hPa diaphragm capacitive
sensor
1 … 10 hPa crossover range
5×10-5 … 1 hPa thermal conductance acc. to
Pirani
Accuracy (N2)
5×10-4 … 1×10-3 hPa
±50% of reading
1×10-3 … 100 hPa ±15% of reading
100 … 950 hPa ±5% of reading
950 … 1050 hPa ±2.5% of reading
Repeatability (N2)
1×10-3 … 1100 hPa
±2% of reading
Output signal (measurement signal)
Voltage range 0 … +8.68 V
Measurement range +1.2 … +8.68 V
Error signal 0 V (default)
Voltage vs. pressure 1 V/decade, logarithmic
Output impedance 2 × 4.7 Ω, short circuit-proof
Load impedance >10 kΩ
Response time <30 ms
Gauge identification 3.01 kΩ
HV adjustment at <10-5 hPa
ATM adjustment at >100 hPa

8
BG 5181 BEN / B (2017-01)
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments, or control devices that conform
to the requirements of a grounded protective extra-
low voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
Supply voltage
at the gauge
Class 2 / LPS
+15 … +30 VDC
Ripple ≤1 V
pp
Power consumption ≤2.5 W
Fuse to be connected 1 AT
Electrical connection Hirschmann GO 6 UM,
6-pin, male
Tightening torque ≤0.2 Nm
Sensor cable shielded
0.14 mm2/conductor
Cable length ≤100 m
Grounding concept →"Power Connection"
Vacuum connection to
signal common
connected via 10 kΩ
Materials exposed to vacuum
Vacuum connection
Filament
Feedthrough
Orifice
Diaphragm
Further materials
stainless steel 1.4435
W
glass
stainless steel
ceramic
Ni, NiFe, stainless steel
1.4301, SnAg

BG 5181 BEN / B (2017-01) 9
Internal volume
DN 16 ISO-KF
DN 16 CF-F
4.7 cm3
8 cm3
Permissible pressure (absolute) ≤500 kPa
Bursting pressure (absolute) 1000 kPa
Permissible temperatures
Operation
Vacuum connection 1)
Filament
Storage
+10 °C … +50 °C
≤80 °C
<160 °C
–20 °C … +65 °C
Relative humidity
Year's mean
During 60 days
≤65% (no condensation)
≤85% (no condensation)
Mounting orientation any
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40
Weight <120 g
1)
For horizontal mounting orientation only. During bakeout, meas-
urement range, accuracy, and repeatability may deviate from
specifications.

10
BG 5181 BEN / B (2017-01)
Dimensions [mm]
79.5 20
45
DN 16 ISO-KF
14.5
DN 16 CF-F
30.9
30 22.5
16.5

BG 5181 BEN / B (2017-01) 11
2.1 Output Signal vs. Pressure
Output signal U [V]
Pressure p
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5
8.68
2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0
1.2
Underrange
Error
Overrange
hPa
Pa
Torr
p = 10
(U-c)
⇔
U = c + log
10
p
valid in the range 5×10
-5
hPa <p< 1500 hPa
U p c U p c
[V] [hPa] 5.5 [V] [micron] 2.625
[V] [µbar] 2.5 [V] [Pa] 3.5
[V] [Torr] 5.625 [V] [kPa] 6.5
[V] [mTorr] 2.625
where p pressure
U output signal
c constant (pressure unit dependent)

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BG 5181 BEN / B (2017-01)
2.2 Gas Type Dependence
Indicated pressure (gauge calibrated for air)
10
2
10
1
10
0
10
–1
10
–2
8
6
4
2
10
–3
10
–4
246
10
–3
246
10
–2
246 2 46
10
0
246
10
1
10
–1
10
–4
p
eff
[hPa]
246
10
2
246
10
3
10
3
p [hPa]
2
Air, O
2
, CO, N
2
He
Ar
8
6
4
2
8
6
4
2
8
6
4
2
8
6
4
2
8
6
4
2
8
6
4
2
4
2
Capacitive
diaphragm
sensor
Crossover
range
Pirani
sensor
Calibration factors
valid for Pirani pressure range below 1 hPa
p
eff
= C × indicated pressure
Gas type Calibration
factor C
Gas type Calibration
factor C
He
Ne
Ar
Kr
Xe
0.8
1.4
1.7
2.4
3.0
H
2
air, O
2
, CO, N
2
CO
2
water vapor
Freon 12
0.5
1.0
0.9
0.5
0.7

BG 5181 BEN / B (2017-01) 13
3 Installation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
3.1 Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>100 kPa
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>250 kPa
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.

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BG 5181 BEN / B (2017-01)
DANGER
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection ac-
cording to EN 61010:
•CF flanges fulfill this requirement.
•For gauges with a KF flange, use a conductive
metallic clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

BG 5181 BEN / B (2017-01) 15
Mount the gauge so that no vibrations occur. The gauge
may be mounted in any orientation. To keep conden-
sates and particles from getting into the measuring
chamber preferably choose a horizontal to upright posi-
tion and consider using a seal with centering ring and
filter. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the but-
tons can be accessed with a pin.
Remove the protective lid and connect the product to the
vacuum system.
or
Clamp
Seal with centering ring
Seal with centering
ring and filter
Protective lid
Keep the protective lid.

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BG 5181 BEN / B (2017-01)
3.2 Power Connection
Make sure the vacuum connection is properly made
(→13).
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:
•Connect the cable shield to ground on one side via
the connector housing. Do not connect the other side
of the shield.
•Connect the supply common with protective ground
directly at the power supply.
•Use differential measurement input (signal common
and supply common conducted separately).
•Potential difference between supply common and
housing ≤18 V (overvoltage protection).

BG 5181 BEN / B (2017-01) 17
If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable.
Electrical connection
2
5
3 1
64
Hirschmann GO 6
6-pin
soldering side
Pin 1 Gauge identification
Pin 2 Measurement signal
Pin 3 Signal common
Pin 4 Supply
Pin 5 Supply common (GND)
Pin 6 Screen
Female cable connector
(tightening torque ≤0.2 Nm)

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BG 5181 BEN / B (2017-01)
4 Operation
When the supply voltage is applied, the measurement signal is
available at the connector (→"Power Connection").
Allow a stabilization period of at least 10 minutes. It is advisable
to operate the gauge continuously, irrespective of the pressure.
The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary (adjusting the gauge →22).
4.1 Light-emitting diode (LED)
ADJ
ST
Status
For factory setting only
LED State Meaning
<ST> off no supply voltage
lit green measurement mode
lit solid or is
blinking red
error ( →  23)

BG 5181 BEN / B (2017-01) 19
4.2 Gas Type Dependence
Pressure range Measurement
principle
Gas type dependence
10 … 1500 hPa
diaphragm
capacitive sensor
independent of gas
type, no correction
required
1 … 10 hPa
diaphragm
capacitive sensor
and Pirani sensor
crossover range
5×10-5 … 1 hPa Pirani sensor proportional to
pressure
2
)
2)
The pressure reading applies to dry air, O
2
, CO and N
2
. For other
gases, it has to be converted (calibration factors (→12).

20
BG 5181 BEN / B (2017-01)
5 Deinstallation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.