Pfeiffer Vacuum TPR-270 User manual

PG 0014 BEN/D (1611)
OPERATING INSTRUCTIONS EN
Translation of the original instructions
TPR 270, TPR 271
Pirani Gauge

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.4 Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.5 Gas type dependency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
4 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5.1 Vacuum connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5.2 Electrical connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
6.1 Removal of components for their maintenance . . . . . . . . . . . . . . . . . . . . 11
7 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
7.1 Adjusting the gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
7.2 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
8 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
8.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
9 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
10 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
11 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
11.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
11.2 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
11.3 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
11.4 Conversion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
11.5 Gas correction factor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

About this manual
3
1 About this manual
1.1 Validity
●TPR 270, TPR 271
– Pfeiffer Vacuum product number PT R26 770, PT R26 775, PT R26 780, PT R26
781
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

4
Safety
Pictographs
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations TPR 270: Pirani gauge
TPR 271: Pirani gauge with increased corrosion protection
2Safety
2.1 Safety precautions
The gauges TPR 270, TPR 271 have been tested and accepted in compliance with
EN 61010/VDE 0411 “Safety Equipment for Electrical Components”.
●Observe the safety and accident prevention regulations.
●Check regularly that all safety precautions are being complied with.
●The unit has been accredited with protection class IP 40. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
●Consider possible reactions between the materials and the process media.
●Consider possible reactions of the process media due to the heat generated by the
product.
●Do not modify or alter the unit yourself.
●Note the shipping instructions, when returning the unit.
●Inform yourself about a possible contamination before starting work.
●Adhere to the relevant regulations and take the necessary precautions, when handling
contaminated parts.
●Communicate the safety instructions to other users.
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.

Safety
5
2.2 Proper use
●Only use the TPR 270, TPR 271 gauges for measuring total pressures in the
1 • 10-4 ... 1000 hPa range.
●Only use the gauge TPR 270 for air, inert gases and gas mixtures outside their explo-
sion limits.
Because of its material, the TPR 271 gauge can also be used for corrosive gases and
gas mixtures outside their explosion limits, if the materials with media contact specified
in the technical data are not attacked by these gases and gas mixtures.
2.3 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
●operation in potentially explosive areas
●pumping of explosive media
●connection to pumps or units which are not suitable for this purpose according to their
operating instructions
●connection to units which have exposed voltage-carrying parts
●operation of the devices in areas with ionizing radiation

6
Product description
3 Product description
The gauges TPR 270, TPR 271 are equipped with a temperature-compensated Pirani
sensor and enables total pressure measurements in the range of 1 • 10-4 ... 1000 hPa.
Are the gauges being operated with a controller, a calibration factor can be applied for
correction of the non-linear characteristics in the pressure range < 0.5 hPa for different
gases.
3.1 Product identification
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Fig. 1: Product identification on the rating plate (example)
Scope of delivery The following positions are included in the delivery consignment:
– TPR 270, TPR 271
– Protective cover
– Operating instructions
3.2 Function
The sensors are based on the thermal conductivity of gases for vacuum pressure mea-
surements (Pirani principle). A thin tungsten or platin/rhodium wire is heated up cyclically
to a certain temperature. The time required for heating is a measure for the pressure.
The gauge can be operated with an ActiveLine controller or with a customer related con-
trol device.
Fig. 2: TPR 270, TPR 271
D-35641 Asslar Emmeliusstrasse33
Mod. 24V - 1W
Supply:
Ser.-Nr.: 4200061
TPR 270
Outp.: 0-10 V
15 - 30 V/DC
Mod.Nr. PT R26 770
Made in Germany 07/2012
HV Button for pressure calibration "low pressure"
ATM Button for pressure calibration "high pressure"
VACUUM
“HV“
“ATM“

Transport and storage
7
3.3 Range of application
The gauges TPR 270, TPR 271 must be installed and operated in the following ambient
conditions:
3.4 Accuracy
The gauge is factory-calibrated for air. Adjustment may be necessary because of the use
in different climatic conditions, extreme temperatures, contamination or ageing. Mea-
surement accuracy is reduced in the upper and lower range.
3.5 Gas type dependency
The measuring signal depends on the type of gas being measured. The relationship be-
tween measuring signal and pressure is accurate for N2, O2, dry air and CO . For other
gases consult the list of correction factors in the operating instructions (see p. 19, chap.
11.5). When the gauge is operated with an ActiveLine controller, a calibration factor can
be set to achieve the corrrect reading (please refer to the operating instructions of the
appropriate controller).
4 Transport and storage
Units without external protection must not come into contact with electrostatically charge-
able materials and must not be moved within electrical or magnetic fields.
In rooms with moist or aggressive atmospheres, the unit must be airproof shrink-
wrapped in a plastic bag together with a bag of desiccant.
Keep the original protective covers.
Installation location weather protected (indoor)
Protection class IP 40
Installation altitude max. 2000 m
Ambient temperature +5°C to +40°C
Relative humidity 5 ... 85 %, non-condensing
Atmospheric pressure 860 hPa - 1060 hPa

8
Installation
5 Installation
5.1 Vacuum connection
Mounting orientation The installation position can be freely selected. The preferred position is a horizontal to
vertical position so that condensate and particles do not penetrate the measurement
chamber.
To facilitate adjustment after the gauge has been installed, a free space of about 40 mm
in axial direction should be assured in front of the "ATM" and "HV" push buttons.
Connecting the
gauge
NOTICE
Vacuum component
Dirt and damage impair the function of the vacuum component.
When handling vacuum components, ensure that they are kept clean and are protect-
ed against damage.
Ensure that the connection flange is clean, dry and free of grease.
CAUTION
Excess pressure in the vacuum system 1500 to 4000 hPa
Damage to health through emission of process media, because elastomer washers
cannot withstand the pressure.
Use sealing rings with an outer centering ring.
CAUTION
Missing protective grounding!
The gauge must be electrically connected to the grounded vacuum chamber.
For gauges with a KF flange, use a conductive metallic clamping ring.
Carry out the flange connection according to the requirements of DIN EN 61010.
CAUTION
Excess pressure in the vacuum system > 1000 hPa
Danger of injuries by inadvertent opening of elements under stress due to parts flying
around.
Only use stressed elements, which can be opened and closed with appropriate tools
(e.g. strap retainer-tension ring).

Installation
9
Fig. 3: Make the flange connection
Remove the protective cover, which is required during maintenance work.
Make the flange connection.
5.2 Electrical connection
Controllers The smallest presentable reading is 5 • 10-4 hPa at operation with Pfeiffer Vacuum con-
trollers.
Fig. 4: Connect TPR 270, TPR 271
Connect the gauge to the control unit using the connection cable.
Secure the plug at the gauge with the existing screw.
Other use The gauge can also be operated with other control devices. In this case a sensor cable
(shielded) must be made by the user. For cable lengths up to 10 m (with 0.25 mm2con-
ductor cross section), the measuring signal can be read directly between analog output
(pin 2) and ground (pin 5). For longer sensor cable lengths, we recommend a differential
measurement between analog output and analog ground (pin 3). As a result of the volt-
age drop along the supply cable grounding lead, the common mode signal is approx. 0.5
V at the max. permissible cable length.
VACUUM
NOTICE
Damage to the product
Only connect cables when de-energized.
Never establish a connection using a live cable.
VACUUM

10
Installation
Fig. 5: Assemble connection cable
Pin assignment
Solder in cable according pin assignment.
Assemble cable socket.
Connect the other end of the gauge cable according to the pin assignment of the ap-
propriate control device.
Connect the gauge to the control unit using the connection cable.
Switch on the control unit.
NOTICE
Damaging the gauge
Incorrect connection, incorrect polarity or inadmissible supply voltages can damage the
transmitter.
Ground (pin 5) and shielding (pin 6) must always be grounded at the controller.
2
5
31
6
4
Pin Pin assignment
1 Identification (3.0 kΩto GND)
2 Analog output 0 ... 10V, (measuring range TPR 270: 1.5 ... 8.5 V; TPR 271: 2.2 ... 8.5 V)
3 Analog ground
4 Supply (V DC), 15 ... 30V
5 Ground (GND)
6 Shielding

Operation
11
6Operation
After switching on the power supply, the connected gauge is ready for operation. It is ad-
visable to wait for a stabilization period of 5-10 minutes before measurement. Operate
the gauge during the measurement continuously independent of the applied pressure.
6.1 Removal of components for their maintenance
Switch off the power supply on the control unit/power supply or disconnect the equip-
ment from the mains supply.
Loosen any connection cables.
Detach the gauge from the vacuum apparatus.
Close the flange opening by using the original protective cover.
7 Maintenance
The unit requires no maintenance. A damp cloth can be used to wipe away any external
dirt.
7.1 Adjusting the gauge
The gauge is factory calibrated at 24 V supply voltage. Through the use in different cli-
matic conditions, through extreme temperatures, deviating supply voltage, contamina-
tion or ageing a shifting of the characteristic curve can occur and readjustment might be
necessary. The adjustment does not affect the pressure range between 10-2 and 10 hPa.
Before adjustment, the gauge should be operated at the relevant pressure for approx. 5–
10 minutes (warm-up time).
For correct zero point adjustment, the pressure in the vacuum chamber must be
p≤1·10-5 hPa.
WARNING
Contamination of gauge parts possible due to the media measured!
Poisoning hazard through contact with harmful substances.
In the case of contamination, carry out appropriate safety precautions in order to pre-
vent danger to health through dangerous substances.
Decontaminate affected parts before carrying out maintenance work.
NOTICE
Vacuum component
Dirt and damage impair the function of the vacuum component.
When handling vacuum components, ensure that they are kept clean and are protect-
ed against damage.
Ensure that the connection flange is clean, dry and free of grease.

12
Maintenance
Fig. 6: Adjusting the gauge measuring range
Evacuate the vacuum chamber to the pressure p ≤1·10-5 hPa.
Remove the rubber plugs from the "HV" / "ATM" buttons access holes.
Push the "HV" button briefly with a small pin (screw driver, Allen key or the like).
Fig. 7: Adjusting the gauge measuring range
Vent vacuum chamber to atmospheric pressure with air or N2; afterwards wait about
10 minutes.
Push the "ATM" button briefly with a small pin (screw driver, Allen key or the like).
Reinsert "HV"/"ATM" rubber plugs.
7.2 Cleaning
Gauge
VACUUM
"HV"
Vacuum
Gauge
VACUUM
"ATM"
Vacuum
WARNING
Explosion hazard
The use of volatile or combustible cleaning agents in vacuum systems can lead to ex-
plosive vapour-air mixtures.
After cleaning ventilate and let dry completely.
CAUTION
Use suitable cleaning agents!
Cleaning agents can be detrimental to health and the environment!
Adhere to the relevant regulations when using cleaning agents.
Never use propanone (e.g. acetone) or halogenated hydrocarbons for cleaning!

Malfunctions
13
Fig. 8: Clean gauge
Detach the gauge from the vacuum apparatus.
Fill carefully with industrial alcohol; allow to soak for 5 minutes.
Pour out the alcohol and dispose of according to the local regulations.
Allow the measurement chamber to dry sufficiently (at least 10 minutes).
Connect the gauge to the vacuum chamber.
Evacuate the gauge.
Bring gauge up to operating temperature (≥5 minutes).
Adjust the gauge.
8 Malfunctions
8.1 Rectifying malfunctions
industrial
alcohol
Problem Possible causes Remedy
Measuring signal continually < 0.5 V;
Display controller: "ErLo" or
"Sensor Error"
●No supply voltage
●Gauge maladjusted
●Gauge defective
Check connecting cable,
power supply or controller
Adjust the gauge
Replace the gauge
Reading is too high at low pressures ●Strong outgassing of the sensor
●Sensor contaminated
Clean the gauge
Adjust the gauge
Replace the gauge

14
Service
9 Service Malfunctions of the transmitter, caused by contamination or wear, as well as wear parts
(e.g. heating filament) are not covered by warranty.
●A repair is uneconomical for the unit and therefore not intended in case of damage.
●Send unit and have it replaced with a new unit.
Sending of units (under warranty)
For a quick and smooth handling of the service process, Pfeiffer Vacuum recommends
the following steps:
Download the forms "Service Request" and Declaration of Contamination.1)
Fill out the "Service Request" form and send it by fax or e-mail to your local Pfeiffer
Vacuum service contact.
Include the confirmation on the "Service Request" from Pfeiffer Vacuum with your
shipment.
Fill out the Declaration of Contamination and include it in the shipment. This document
is mandatory to protect our service engineers.
– Fill out and send one declaration for each device.
If possible, send unit in the original packaging.
In the absence or incompleteness of the "Declaration of Contamination" and/or the use
of unsuitable transport packaging, Pfeiffer Vacuum reserves the right to make a decon-
tamination and/or to send the product back at the shipper’s expense.
Service orders
All service orders are carried out exclusively according to our repair conditions for vacu-
um units and components. Detailed information, addresses and forms at:
http://www.pfeiffer-vacuum.com/service/repair-services/container.action.
1) Forms under www.pfeiffer-vacuum.com

Accessories
15
10 Accessories
Designation TPR 270
Mating connector B 4707 283 MA
Sensor cable, 3 m PT 448 250 -T
Sensor cable, 6 m PT 448 251 -T
Sensor cable, 10 m PT 448 252 -T

16
Technical data and dimensions
11 Technical data and dimensions
11.1 General
Conversion table: pressure units
11.2 Technical data
mbar bar Pa hPa kPa Torr
mm Hg
mbar 1 1 · 10-3 100 1 0.1 0.75
bar 1000 1 1 · 1051000 100 750
Pa 0.01 1 · 10-5 1 0.01 1 · 10-3 7.5 · 10-3
hPa 1 1 · 10-3 100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr
mm Hg
1.33 1.33 · 10-3 133.32 1.33 0.133 1
1 Pa = 1 N/m2
Parameter TPR 270 TPR 270 TPR 270 TPR 271
Connection for gauge 6-pole female cable con-
nector, screw-fastened
6-pole female cable con-
nector, screw-fastened
6-pole female cable con-
nector, screw-fastened
6-pole female cable con-
nector, screw-fastened
Nominal diameter DN 16 ISO-KF DN 16 CF-F 1/8" NPT DN 16 ISO-KF
Protection category IP40 IP40 IP40 IP40
Output signal: Pressure range 1.5 - 8.5 V 1.5 - 8.5 V 1.5–8.5 V 2.2–8.5 V
Bakeout temperature 80 °C 80 °C 80 °C 80 °C
Power consumption max. At 24 V < 1 W At 24 V < 1 W At 24 V < 1 W At 24 V < 1 W
Seal Metal Metal Metal Metal
Pressure max. 4000 hPa 4000 hPa 4000 hPa 4000 hPa
Feedthrough Glass Glass Glass Glass
Accuracy: % of measurement <2 · 10-3hPa: <Faktor 2,
2 • 10-3 - 20 hPa: ± 10 %,
20 - 1000 hPa: ± 30 %
<2 · 10-3hPa: <Faktor 2,
2 • 10-3 - 20 hPa: ± 10 %,
20 - 1000 hPa: ± 30 %
<2 · 10-3hPa: <Faktor 2,
2 • 10-3 - 20 hPa: ± 10 %,
20 - 1000 hPa: ± 30 %
<1 · 10-2hPa: <Faktor 2,
1 • 10-2 - 10 hPa: ± 10 %,
10 - 1000 hPa: ± 30 %
Weight 105 g 135 g 95 g 105 g
Filament Tungsten Tungsten Tungsten Platinum/rhodium
Materials in contact with
media
Tungsten, stainless steel
1.4307, nickel
Tungsten, stainless steel
1.4307, nickel
Tungsten, stainless steel
1.4307, nickel
Platinum/rhodium, stain-
less steel 1.4307, nickel
Measurement range max. 1000 hPa 1000 hPa 1000 hPa 1000 hPa
Measurement range min. 1 · 10-4 hPa 1 · 10-4 hPa 1 · 10-4 hPa 5 · 10-4 hPa
Sensor cable length ≤150 (5 x 0,25 mm2);
≤200 (5 x 0,34 mm2)m
≤150 (5 x 0,25 mm2);
≤200 (5 x 0,34 mm2)m
≤150 (5 x 0,25 mm2);
≤200 (5 x 0,34 mm2)m
≤150 (5 x 0,25 mm2);
≤200 (5 x 0,34 mm2)m
Method of measurement Pulse-Pirani Pulse-Pirani Pulse-Pirani Pulse-Pirani
Temperature: Operating +5-+60 °C +5-+60 °C +5-+60 °C +5-+60 °C
Temperature: Storage -40-+70 °C -40-+70 °C -40-+70 °C -40-+70 °C
Supply: Voltage 15-30 V DC 15-30 V DC 15-30 V DC 15–30 V DC
Repeatability: % of measure-
ment
2 · 10-3 - 20 hPa ± 2 % 2 · 10-3 - 20 hPa ± 2 % 2 · 10-3 - 20 hPa ± 2 % 1 · 10-2 - 10 hPa ± 2 %

Technical data and dimensions
17
11.3 Dimensions
11.4 Conversion
Conversion formula p=10(U-c) <=> U=c+log10p
●p: Pressure
●U: Measuring signal
●c: Constant
Table 1: valid in the range: 1 • 10-4 hPa < p < 1000 hPa
ø 32
62 20
20,5
DN 16 ISO-KF
ø 30
VACUUM
DN 16 CF-F
ø 32
74 20
32,3
ø 30
VACUUM
1/8’’ NPT
77
10
35
ø 32
ø 14
20
VA
Up c
[V] [mbar, hPa] 5.5
[V] [Torr] 5.625
[V] [mTorr] 2.625
[V] [micron] 2.625
[V] [Pa] 3.5
[V] [kPa] 6.5

18
Technical data and dimensions
TPR 270
TPR 271
Conversion table
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
overrange
Pa
hPa
Torr
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5
10.3
2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
sensor error
underrange
p
U [V]
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
overrange
Pa
hPa
Torr
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5
10.3
2.0
2.2
3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
sensor error
underrange
p
U [V]
Measuring signal U
[V]
Pressure p
[hPa]
< 0.5 Sensor error
0.5 ... 1.5 Underrange
1.5
2.5
3.5
4.5
5.5
6.5
7.5
8.5
1·10
-4
1·10
-3
1·10
-2
0.1
1.0
10
100
1000
8.5 ... 10.3 Overrange

Technical data and dimensions
19
11.5 Gas correction factor
In case of different gases, accurate determination is only possible with a partial pressure
measurement instrument, e. g. a quadrupole mass spectrometer.
Fig. 9: Measurement curve TPR 270, TPR 271 (Pirani)
Table 2: Correction factor for the pressure range < 1 hPa
He 1.00
Ne 1.40
Ar 1.60
Kr 2.40
N21.00
Luft 1.00
H20.57
CO 1.0
CO20.89
Correction factor K for the linear range:
peff = K x indicated pressure
102
8
6
4
2
101
8
6
4
2
100
8
6
4
2
10–1
8
6
4
2
10–2
8
6
4
2
10–3
peff [hPa]
10–3 24
610–2 24 610–1 24 610024 610124 6102
H2He Ne
Xe
Kr
Ar
CO2
Freon 12
Luft / Air
O2
CO
N2
H2O
p [hPa]

Declaration of conformity
We hereby declare that the product cited below satisfies all relevant provisions accord-
ing to the following EC directives:
●Electromagnetic Compatibility 2014/30/EU
●Restriction of the use of certain Hazardous Substances 2011/65/EU
ActiveLine
TPR 270, TPR 271
Harmonised standards and national standards and specifications which have been ap-
plied:
EN 61326-1: 2013 Group 1 / Class B
EN 50581: 2012
Signature:
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany
(Dr. Ulrich von Hülsen)
Managing Director
2016-11-07