Physik Instrumente H-850 Series User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
MS202E
H
-850 Hexapod Microrobot
User Manual
Version: 2.3.0
Date: 03.12.2019
This document describes the following hexapod
microrobots:

H-850.H2

H-850.H2A

H-850.H2I

H-850.H2V

H-850.G2

H-850.G2A

H-850.G2I

H-850.G2V

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: http://www.physikinstrumente.com/en/about-pi/patents
Notes on brand names and third-party trademarks:
BiSS is a registered trademark of iC-Haus GmbH.
© 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs, and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 03.12.2019
Document number: MS202E, BRo, Version 2.3.0
Subject to change. This manual is superseded by any new release. The latest respective release is available for
download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Figures ........................................................................................................................ 2
1.4 Other Applicable Documents ..................................................................................... 2
1.5 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 5
2.4 Measures for Handling Vacuum-Compatible Products.............................................. 6
3Product Description 7
3.1 Features and Applications .......................................................................................... 7
3.2 Model Overview ......................................................................................................... 7
3.3 Suitable Controllers .................................................................................................... 8
3.4 Product View .............................................................................................................. 9
3.5 Scope of Delivery........................................................................................................ 9
3.6 Accessories ............................................................................................................... 10
3.7 Technical Features.................................................................................................... 12
3.7.1 Struts............................................................................................................ 12
3.7.2 Reference Switch and Limit Switches.......................................................... 13
3.7.3 Control......................................................................................................... 13
3.7.4 Motion ......................................................................................................... 13
3.7.5 ID Chip.......................................................................................................... 17
4Unpacking 19
4.1 Unpacking the Hexapod ........................................................................................... 19
4.2 Removing the Transport Safeguard.......................................................................... 20
4.2.1 Removing the Transport Safeguard for the H-850.x2 and .x2V Models...... 20
4.2.2 Removing the Transport Safeguard for the H-850.x2A and .x2I
Models ......................................................................................................... 21
5Installation 23
5.1 General Notes on Installation................................................................................... 23
5.2 Determining the Permissible Load and Workspace ................................................. 24
5.3 Attaching the Snap-on Ferrite .................................................................................. 25
5.4 Grounding the Hexapod ........................................................................................... 26
Contents

5.5 Mounting the Hexapod on a Surface ....................................................................... 26
5.6 Fixing the Load to the Hexapod................................................................................ 28
5.7 Optional: Removing the Coordinate Cube ............................................................... 29
5.8 Connecting the Hexapod to the Controller .............................................................. 30
6Startup 37
6.1 General Notes on Startup......................................................................................... 37
6.2 Starting Up the Hexapod System ............................................................................. 38
6.3 Baking Out Vacuum-Compatible Models ................................................................. 39
7Maintenance 41
7.1 Performing a Maintenance Run ............................................................................... 41
7.2 Packing the Hexapod for Transport.......................................................................... 41
7.2.1 Attaching the Transport Safeguard ............................................................. 42
7.2.2 Packing the Hexapod ................................................................................... 46
7.3 Cleaning the Hexapod .............................................................................................. 49
8Troubleshooting 51
9Customer Service 53
10 Technical Data 55
10.1 Specifications............................................................................................................ 55
10.1.1 Data Table.................................................................................................... 55
10.1.2 Specifications for Vacuum-Compatible Versions ........................................ 58
10.1.3 Maximum Ratings........................................................................................ 60
10.2 Cable Set Specifications............................................................................................ 60
10.3 Ambient Conditions and Classifications ................................................................... 61
10.4 Dimensions ............................................................................................................... 61
10.5 Pin Assignment ......................................................................................................... 63
10.5.1 Power Supply Connection............................................................................ 63
10.5.2 Data Transmission Connection.................................................................... 63
11 Old Equipment Disposal 67
12 Glossary 69
13 Appendix 73
13.1 Explanations of the Performance Test Sheet........................................................... 73
13.2 EU Declaration of Conformity .................................................................................. 75

1 About this Document
H-850 Hexapod Microrobot MS202E Version: 2.3.0 1
In this Chapter
Objective and Target Audience of this User Manual..................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 2
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains information on using the H-850 as intended.
It assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 2.3.0 MS202E H-850 Hexapod Microrobot
Symbol/Label Meaning
1.
2.
Action consisting of several steps whose sequential order must be observed

Action consisting of one or several steps whose sequential order is
irrelevant

List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product (example: socket of the
RS-232 interface)
Warning sign on the product which refers to detailed information in this
manual.
1.3 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
1.4 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in their
own manuals.
Device/program Document
no.
Document content
C-887.5xx controller MS247EK Short instructions for hexapod systems
MS244E User manual
C887T0011 EtherCAT interface of the C-887.53 controller series
C887T0007 Coordinate Systems for Hexapod Microrobots
C887T0021 Motion of the Hexapod. Position and Orientation in
Space, Center of Rotation
PI Hexapod Simulation
Tool
A000T0068 Determining the workspace and the permissible load of
the hexapod
PC software included
in the controller's
scope of delivery
Various For details, see the user manual for the C-887.5xx
controller.

1 About this Document
H-850 Hexapod Microrobot MS202E Version: 2.3.0 3
1.5 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 53).
Downloading manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., P-882) or the product family (e.g.,
PICMA® bender).
3. Click the corresponding product to open the product detail page.
4. Click Downloads.
The manuals are shown under Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.

2 Safety
H-850 Hexapod Microrobot MS202E Version: 2.3.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures............................................................................................................... 5
Measures for Handling Vacuum-Compatible Products ................................................................. 6
2.1 Intended Use
The hexapod microrobot (short "hexapod") is a laboratory device as defined by DIN EN 61010-1.
It is built for indoor use and use in an environment which is free of dirt, oil, and lubricants.
In accordance with its design, the hexapod is intended for positioning, adjusting, and shifting of
loads on six axes at various velocities.
The hexapod can only be used as intended in conjunction with a suitable controller available
from PI (p. 8), which coordinates all motion of the hexapod.
2.2 General Safety Instructions
The H-850 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the H-850.
Use the H-850 for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any malfunctions that may affect safety immediately.
The operator is responsible for the correct installation and operation of the H-850.
2.3 Organizational Measures
User manual
Always keep this user manual together with the H-850.
The latest versions of the user manuals are available for download (p. 3) on our
website.
2
Safety

2 Safety
6 Version: 2.3.0 MS202E H-850 Hexapod Microrobot
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the H-850 to a third party, include this user manual as well as other relevant
information provided by the manufacturer.
Do the work only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the H-850 only after you have read and understood this user
manual.
Personnel qualification
The H-850 may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
When handling the vacuum version of the hexapod, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement,
powder-free gloves are worn. Afterwards, the hexapod is cleaned once again by wiping and
shrink-wrapped twice in vacuum-compatible film.
Touch the hexapod only with powder-free gloves.
If necessary, wipe the hexapod clean after unpacking.