Polytec TMS-500 TopMap Pro.Surf User manual

Title
Operating Instructions
3D Topography Measurement
System
TMS-500 TopMap Pro.Surf
Sensor Head TMS-I-500
Controller TMS-E-500
Data Management System TMS-W-500

41569-Man-TMS500-TopMap-ProSurf-1119-04en *41569*
Warranty and Service
The warranty for this equipment complies with the regulations in our general terms and
conditions in their respective valid version.
This is conditional on the equipment being used as intended and as described in these
operating instructions.
The warranty does not apply to damage caused by incorrect usage, external mechanical
influences or by not keeping to the operating conditions. The warranty also is invalidated in the
case of the equipment being tampered with or modified without authorization.
To return the equipment, always use the original packaging. Otherwise, we reserve the right to
check the equipment for transport damage. Mark the package as fragile and sensitive to frost.
Include an explanation of the reason for returning it as well as an exact description of the fault.
Trademarks
Brand or product names mentioned in these operating instructions could be trademarks or
registered trademarks of their respective companies or organizations.
Name Plates
TMS-I-500 Sensor Head TMS-E-500 Controller TMS-W-500
Data Management System

i
Contents
Contents
1 Safety Information 1-1
1.1 Information on Using these Operating Instructions ............................................................. 1-1
1.1.1 Warning Notices Used .............................................................................................. 1-1
1.1.2 Notices Used ........................................................................................................... 1-2
1.2 Warning Labels and Mandatory Signs Used on the Equipment .......................................... 1-2
1.3 General Safety Information ................................................................................................ 1-3
1.3.1 Operating the Instrument Safely ............................................................................... 1-3
1.3.2 Intended Use ........................................................................................................... 1-3
1.3.3 User Qualification ..................................................................................................... 1-3
1.3.4 Ambient Conditions .................................................................................................. 1-4
1.3.5 Transport .................................................................................................................1-4
1.3.6 Personal Protective Equipment (PPE) ...................................................................... 1-4
1.3.7 Cleaning ..................................................................................................................1-4
1.3.8 Installing Other Components .................................................................................... 1-5
1.3.9 Disposal ................................................................................................................... 1-5
1.4 Lamp Safety ...................................................................................................................... 1-6
1.4.1 Important Warning Notices ....................................................................................... 1-6
1.4.2 Applicable Standards and Directives ........................................................................ 1-6
1.4.3 Equipment ................................................................................................................ 1-6
1.4.4 Information on Risk Category 0 ................................................................................ 1-6
1.5 Electrical Safety ................................................................................................................. 1-7
1.5.1 Important Warning Notices ....................................................................................... 1-7
1.5.2 Important Notices ..................................................................................................... 1-7
1.5.3 Applicable Standards and Directives ........................................................................ 1-8
2 Introduction 2-1
2.1 Area of Application and System Summary ......................................................................... 2-1
2.2 Operating Principle ............................................................................................................ 2-2
3 First Steps 3-1
3.1 Unpacking and Inspection .................................................................................................. 3-1
3.2 Control Elements, Displays, and Connections .................................................................... 3-3
3.2.1 Sensor Head ............................................................................................................ 3-3
3.2.2 Controller ................................................................................................................. 3-6
3.2.3 Data Management System ....................................................................................... 3-8
3.3 Assembly ..........................................................................................................................3-11
3.3.1 Mounting the Sensor Head onto the Stand ............................................................. 3-12
3.3.2 Mounting the Sensor Head without the Stand ......................................................... 3-14
3.3.3 Mounting Spacer Ring and Tip-Tilt Unit .................................................................. 3-15
3.3.4 Mounting the Test Sample onto the Tip-Tilt Unit ..................................................... 3-15

ii
Contents
3.4 Cabling .............................................................................................................................3-16
3.4.1 Connecting the Hardware .......................................................................................3-16
3.4.2 Connecting the Mains Cables .................................................................................3-17
3.5 Functional Test .................................................................................................................3-19
4 Measuring 4-1
4.1 Measuring with the Instrument ............................................................................................4-1
4.2 High-Precision Measurements ............................................................................................4-2
4.3 Setting up the Object Filter .................................................................................................4-3
4.4 Maximum Load Capacity of Tip-Tilt Unit...............................................................................4-4
5 Technical Specifications 5-1
5.1 Harmonized Standards Applied ...........................................................................................5-1
5.2 Complete System ...............................................................................................................5-1
5.3 TMS-I-500 Sensor Head .....................................................................................................5-3
5.3.1 General Data ............................................................................................................5-3
5.3.2 Optics .......................................................................................................................5-5
5.4 TMS-E-500 Controller .........................................................................................................5-7
5.5 TMS-W-500 Data Management System ..............................................................................5-8
5.5.1 General Data ............................................................................................................5-8
5.5.2 Industrial PC Configuration .......................................................................................5-8
5.6 A-SPK-0003 Tip-Tilt Unit .....................................................................................................5-9
Appendix A: TMS-A-305 Calibration Set
Appendix B: EU Declaration of Conformity
Index

1-1
1 Safety Information
1 Safety Information
1.1 Information on Using these Operating Instructions
• These operating instructions are part of the product. Keep them within
easy reach.
• Read these operating instructions carefully before operating the
instrument. Pay attention to any documentation provided by other
manufacturers.
• Make the operating instructions available to the person using the
instrument.
• If you hand over the instrument, forward the operating instructions to the
next user.
• If you should lose the operating instructions, please ask us for a
replacement.
1.1.1 Warning Notices Used
The following warning notices are used in these operating instructions and will
give you important advice on how to use the instrument safely:
WARNING!
"Type and source of danger"!
Indicates a dangerous situation or action which could lead to death or serious
injury if this warning is not observed.
» Describes how to avoid the danger.
CAUTION!
"Type and source of danger"!
Indicates a dangerous situation or action which could lead to minor injury if
this warning is not observed.
» Describes how to avoid the danger.
ATTENTION!
"Type and source of danger"!
Indicates a dangerous situation or action which could lead to property
damage if this warning is not observed.
» Describes how to avoid the danger.

1-2
1 Safety Information
1.1.2 Notices Used
In addition, the following notice is used in these operating instructions which
provides additional information on operating the instrument:
INFORMATION
Provides useful notes and information to simplify the operation of the device.
1.2 Warning Labels and Mandatory Signs Used on the Equipment
There are several warning labels and mandatory signs affixed to the
instruments which are briefly explained in the following:
Figure 1.1: Warning about axes automatically starting up
Figure 1.2: Warning of hand injuries, pinch-point!
Figure 1.3: Mandatory sign "Pay attention to operating instructions"

1-3
1 Safety Information
1.3 General Safety Information
1.3.1 Operating the Instrument Safely
Faultless and safe operation of the instruments presume proper transport and
proper storage, installation and assembly as well as careful operation of the
instruments. In addition, it is imperative for the safe operation of the devices
that you pay attention to the safety and warning notices which are listed in
these operating instructions. When assembling, installing and operating the
instrument, make sure that you adhere to the safety and accident prevention
regulations applicable to the respective application.
1.3.2 Intended Use
The instrument is intended for use in a laboratory and for operation in an
industrial environment. It may only be operated within the limits set in the
specifications. It is not necessary to tamper with the instrument to use it as
intended as this will invalidate the warranty.
Any use other than the one described in these operating instructions is not
permitted. Polytec rejects any liability for damages which occur from improper
use.
The instruments are designed in accordance with good engineering practice
to meet state-of-the-art safety requirements, have been tested, and left the
factory in a condition in which they are safe to operate.
1.3.3 User Qualification
Task Qualification
Assembly, cabling, adjustment,
operation
This instrument may be used only by qualified personnel
who are familiar with electrical measuring instruments and
have been trained to use the instrument.
Repair and maintenance This instrument may only be serviced or repaired by the
manufacturer or its authorized personnel.
Exchange/installation of
subassemblies
Subassemblies may only be exchanged or installed by
authorized service personnel from Polytec.

1-4
1 Safety Information
1.3.4 Ambient Conditions
ATTENTION!
Optics impairment caused by condensation!
If the instrument is started up in a warm environment after being stored in a
cold environment, this can cause condensation which impairs the optical
components. The measurement results can thus be falsified.
» Wait with starting the device until the temperature of the device adapted to
the ambient temperature.
Operation and
storage
Operate and store the instrument in the ambient conditions as specified in the
technical specifications.
1.3.5 Transport
ATTENTION!
Damage to sensor head caused by unsuitable transport!
The linear stage in the sensor head is mobile and can be damaged by jolting
movements.
» Only lift system components in pairs or using a suitable lifting device.
» Protect the linear stage in the sensor head during transport by using the
transport lock.
» Avoid uneven ground when using a trolley for transport.
1.3.6 Personal Protective Equipment (PPE)
1.3.7 Cleaning
WARNING!
Electric shock caused by penetrating moisture!
If the instruments are live, penetrating moisture can cause an electric shock.
» Switch off the instruments before cleaning them.
ATTENTION!
Damage to the housing surfaces caused by using unsuitable cleaning
agents!
» Do not use any aggressive solvents such as acetone or ethanol.
Source of danger Personal protective equipment
Heavy parts (transport, setup) Safety shoes

1-5
1 Safety Information
ATTENTION!
Damage to the instrument caused by dirt or moisture!
If moisture, dust, or other dirt particles from the operating environment
penetrate the instrument, this can cause lasting damage to the instrument.
» When carrying out any work on the instrument, in particular when replacing
individual components, make sure you are working in a dust-free
environment.
» If there are any available connections that you are not using, cover them
with the available protective caps, blind plates or similar.
1.3.8 Installing Other Components
ATTENTION!
Impairment of the system caused by installing third-party hardware or
software components!
Third party hardware or software components could damage the system or
impair the function of the software.
» To install components which have not been distributed by Polytec, contact
Polytec first.
» Do not update installed drivers on your Data Management System and do
not install optional updates, especially not via the Windows® Update
software updating service.
» Do not change existing driver settings.
1.3.9 Disposal
Instrument Unless otherwise specified, instruments and their components which are
defective or no longer required must be properly disposed in accordance with
the applicable legal provisions.
Components Cleaning agents
Exit window (dust) Soft, lint-free cloth, bellows
Exit window (grease
contamination)
e.g. ethanol or isopropanol
Housing surfaces Mild detergents or disinfectant solutions

1-6
1 Safety Information
1.4 Lamp Safety
1.4.1 Important Warning Notices
WARNING!
Damage to eyes caused by high light intensity!
» Do not look directly into the illumination module.
» Do not use any operating or calibrating equipment other than specified
here.
1.4.2 Applicable Standards and Directives
Polytec instruments comply with the standards IEC and EN 62471
(Photobiological Safety of Lamps and Lamp Systems).
1.4.3 Equipment
Illumination
module
The instrument is equipped with an L ED -based illumination module.
Safety
equipment
The L ED is switched on or off together with the controller.
Beam exit
aperture
The position of the beam exit aperture is shown in the following figure.
Figure 1.4: Position of the beam exit aperture with the beam direction [1]
1.4.4 Information on Risk Category 0
The instrument complies with risk category 0 and does not pose any
photobiological danger. This includes looking directly into the beam during
normal operation over a long period of time.
Under any operating conditions, there is no risk to skin.
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1-7
1 Safety Information
1.5 Electrical Safety
1.5.1 Important Warning Notices
WARNING!
Fire risk caused by inaccessible or missing disconnection device!
A fire risk exists in case of overheating, e.g. due to a device fault.
Furthermore, touching hot housing parts can cause burns. The mains switch
disconnects the device from the power supply and is used to switch it off in
case of danger. If the mains switch is not freely accessible, use the mains
plug to disconnect the device in case of danger.
» Always keep the mains switch or respectively mains plug freely accessible.
» If you can keep neither the mains switch nor the mains plug freely
accessible, install an additional disconnection device.
WARNING!
Electric shock caused by applied voltage!
» Always disconnect the instrument from the mains before maintaining or
cleaning it.
ATTENTION!
Damage to the device caused by insufficient opportunity for air
circulation!
Heat is created inside the device during operation. If the heat cannot escape
from the housing, a heat accumulation is being caused. This will overheat the
electronic parts inside the device and may result in a defect.
» Always keep free all air inlets and outlets of the device.
» Keep at least 50 mm distance to the wall when you set up the device.
» If the devices are in a system cabinet: Remove all covers of the system
cabinet before switching on the devices.
» If you notice a cooling fan failure, switch off the device immediately.
1.5.2 Important Notices
INFORMATION
This device is subject to Limit Class A and can cause radio interferences with
electrical devices in residential areas.
Take appropriate protective measures to exclude any such impairments.

1-8
1 Safety Information
1.5.3 Applicable Standards and Directives
The instrument complies with the electrical protection class 1 in accordance
with the EU Directive 2014/35/EU (Low Voltage Directive). That means when
the instrument is used as intended and connected to the power supply
correctly, exposure to electric current is prevented by the closed, grounded
metal housing.
The instrument is subjected to EU directive 2014/30/EU (EMC directive) and
therefore conforms with the limits for emission and immunity specified in the
standards this is based on. With the CE mark Polytec confirms that the
instrument has been tested successfully.

2-1
2 Introduction
2 Introduction
2.1 Area of Application and System Summary
The TMS-500 is a 3D topography measurement system for optical, non-
contact acquisition of the structure of rough and reflective surfaces.
The system components are shown in the following figure.
Figure 2.1: System components of the TMS-500
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2-2
2 Introduction
2.2 Operating Principle
The measurement system is based on the principle of the white-light
interferometer. In one arm of the interferometer, the object is fixed in position
and the interferometer setup is moved relative to the object at a constant
speed. A camera depicts the object. If the optical path lengths between the
reference mirror and the corresponding points on the object are identical, you
receive an interference on the camera chip. Depending on the topography of
the object, interferences are shown on the video camera pixel by pixel during
this measurement run. Once the predefined distance has been traveled
through, the topographical structure of the object is digitally saved. The result
can be shown in two or three dimensions using the TMS software.
Figure 2.2: Schematic layout of a white-light interferometer
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3-1
3 First Steps
3 First Steps
3.1 Unpacking and Inspection
INFORMATION
Components marked with an (*) are described in separate operating
instructions.
Always pay attention to these operating instructions, too.
Unpacking The scope of supply includes the following components:
• 1 A-CAB-BAS System Cabinet
• 1 TMS-I-500 Sensor Head
• 1 TMS-W-500 Data Management System consisting of an industrial PC
with mouse and keyboard
• 1 TMS-E-500 Controller
• 1 TFT monitor with monitor cable and mains cable
• 3 Mains cables
• 1 Hardlock (dongle)
• 1 Network cable
• 1 USB 3.0 cable (approved by Polytec)
• 1 Polytec test object
• 1 Motor cable
• 1 Control cable
• 1 A-STD-P550 Stand including 4 covering plates
• 1 A-SPK-0003 Sample Positioning Kit consisting of tip-tilt unit and spacer
ring
Assembly kit:
• 2 M6 x 25 Allen screws (sensor head – stand)
• 1 M6 x 60 Allen screw (sensor head – stand)
• 4 M6 x 25 Allen screws or 1/4"-20UNCx1" with washers (stand – base
plate)
• 4 M6 x 16 Allen screws with washers (tip-tilt unit – spacer ring or XY
positioning stage)
• 4 M6 x 25 Allen screws or 1/4"-20UNCx1" (spacer ring or XY positioning
stage – base plate)

3-2
3 First Steps
Available as an option:
• TMS-A-305 Calibration Set
• A-PST-200S XY Positioning Stage*
• A-CTR-110 Axis Controller*
• A-TAB-AIR-01 Optical Table, pneumatically vibration-damped*
• A-TAB-ELC-01 Optical Table, electronically vibration-damped*
• A-WST-001 Workstation*
Equipment provided by the customer (if no vibration-damped table is used):
• Base plate (breadboard) for fixing the stand, with M6 thread, 25 mm grid
or 1/4"-20UNC thread, 1” grid
Inspection Pay attention to the following steps when unpacking:
1. Check the packaging for signs of unsuitable handling during transport.
2. After unpacking, check all components for external damage (scratches,
loose screws, damaged components etc.).
3. In the case of a wrong delivery, damage or missing parts, immediately
inform your local Polytec representative, stating the serial numbers of the
instruments. The serial number can be found on the name plate. You will
find the name plate on the instruments as well as on the inside cover of
these operating instructions.
4. Carefully retain the original packaging in case you have to return the
instruments.

3-3
3 First Steps
3.2 Control Elements, Displays, and Connections
3.2.1 Sensor Head
Front view The front view of the sensor head with stand and tip-tilt unit is shown in the
following figure.
Figure 3.1: Front view of the sensor head with stand and tip-tilt unit
1 Beam exit window with filter wheel
To adjust various object filters
2 Spacer ring
To raise the sample to get the right stand-off distance between the sensor head
and sample
3 Tip-tilt unit
To align the sample relative to the object beam
4 Stand
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3-4
3 First Steps
Back view The back view of the sensor head is shown in the following figure.
Figure 3.2: Back view of the sensor head
1 TRANSPORT LOCK transport lock
To secure the linear stage to protect the sensor head during transport.
2 Name plate
Plate with information on model, serial number, power specifications etc.
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3-5
3 First Steps
Bottom view The bottom view of the sensor head (image section) is shown in the following
figure.
Figure 3.3: Bottom view of the sensor head (image section)
1VIDEO USB interface
Connection for the USB 3.0 cable to the industrial PC to control the video camera
and transmit the video signals.
2 Transport lock
To secure the linear stage to protect the sensor head during transport.
3MOTOR connection (17-pin circular connection)
Connection for the motor cable from the controller for the power supply and the
signal transmission of the linear stage motor.
4 CONTROL connection (25-pin Sub-D jack)
Connection for the control cable from the controller for the power supply and the
signal transmission of the linear stage motor.
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3-6
3 First Steps
3.2.2 Controller
Front view The front view of the controller is shown in the following figure.
Figure 3.4: Front view of the controller
1POWER status display
Status display is lit: The controller is ready for operation.
2I/O key switch
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