Pfeiffer Vacuum TPR 261 User manual

Operating manual
incl. Declaration of conformity
Compact Pirani Gauge
TPR 261
BG 805 105 BE (9909)
Validity
This document applies to products with part number
PT R21 000 (Flange DN 16 ISO-KF short)
PT R21 001 (Flange DN 16 CF-R short)
PT R21 010 (Flange DN 16 ISO-KF long)
PT R21 011 (Flange DN 16 CF-R long)
The part number can be taken from the product nameplate.
We reserve the right to make technical changes without prior
notice.
Intended use
The above Compact Pirani Gauges have been designed for
vacuum measurement of gases in a pressure range of
5×10-4 … 1000 mbar.
The gauge can be operated in connection with a
Pfeiffer Vacuum controller for Compact Gauges or with
another evaluation unit.
Safety
• Take into account the relevant regulations and safety
measures for the process media used.
Consider possible reactions with the materials.
Consider possible reactions of the process media due to
the heat generated by the product.
The end-user assumes the responsibility in conjunction with
the process media used.
Pfeiffer Vacuum assumes no responsibility and the warranty
becomes null and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of changes (modifications, alterations etc.)
to the product
• use the product with accessories not listed in the corre-
sponding product documentation.
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and envi-
ronmental damage.
Note
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Skilled personnel
All work described in this document may only be carried out
by persons who have suitable technical training and the
necessary experience or who have been instructed by the
end-user of the product.
Installation
Vacuum connection
Note
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take
appropriate measures to ensure cleanliness and
prevent damages.
DANGER
Caution: overpressure in the vacuum system
> 1 bar
If clamps are opened incorrectly or inadvertently,
injury can be caused by catapulted parts and
your health can be endangered by leaking pro-
cess gases.
Use the type of clamps which can only be
opened and closed by means of a tool (e.g. hose
clip clamping ring).
DANGER
Caution: overpressure in the vacuum system
> 4 bar
KF flange connections with elastomer sealing
rings (e.g. O-rings) cannot withstand such pres-
sures. Process media can thus leak and possibly
endanger your health.
Use sealing rings provided with an outer center-
ing ring.
DANGER
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
• CF flanges fulfill this requirement
• For gauges with a KF flange, use a conduc-
tive metallic clamping ring.
The gauge can be mounted in any orientation. We recom-
mend, however, installing it horizontally because it has been
aligned in this position. In other orientations, deviations of the
measurement value may occur at pressures above 100mbar.
If adjustment must be possible after the gauge has been in-
stalled, be sure to install it so that trimmer potentiometers
<HV> and <ATM> can be accessed with a screwdriver.
èRemove the protective cap.
The protective cap
will be needed for
maintenance.
Protective cap
Make the flange connection.
Clamping ring Seal
Power connection
Make sure the gauge is connected to the vacuum system (see
above).
Use with Pfeiffer Vacuum measurement unit
If the gauge is used
with a
Pfeiffer Vacuum
control unit for
Compact Gauges, a
corresponding con-
nection cable is
required (→Options).
• Secure the con-
nector on the
gauge with the
screw.
Use with another evaluation unit
If no sensor cable is available, make one according to the
diagram.
Figure 1 Electrical connection
Pin 1 identification
Pin 2 signal output
(measuring signal)
Pin 3 signal common
Pin 4 supply (15 … 30 V=)
Pin 5 supply common
Pin 6 screening
2
5
31
6
4
Connector
solder side
WARNING
Supply common (pin 5) and screen (pin 6) must
be grounded to the supply unit.
Incorrect connection, incorrect polarity or inad-
missible supply voltages can damage the gauge.
Connect the gauge to the supply and evaluation unit.
Secure the connector at the gauge with the screw.
Operation
When voltage is being supplied to the gauge, the measuring
signal is available between pins 2 and 3. Over the whole
measurement range, the measuring signal is output as loga-
rithm of the pressure (relationship between measuring signal
and pressure →Technical data).
Allow for a stabilization period of approx. 10 minutes. It is
advisable to operate the gauge continuously, independent of
the pressure.
Gas type dependence
The measuring signal depends on the type of gas being
measured. The relationship between measuring signal and
pressure (→Technical data) is accurate for N2, O2, dry air and
CO. They can be mathematically converted for other gases
(→Technical data).
Is the gauge being operated in connection with a
Pfeiffer Vacuum controller for Compact Gauges, a calibration
factor can be applied for correction of the reading (→
& of the
corresponding controller).

Adjusting the gauge
The gauge is factory calibrated. Due to use in different climatic
conditions, extreme temperatures, contamination or aging, a
shifting of the characteristic curve can occur and readjustment
may thus be required.
èActivate the gauge.
Evacuate to p <<10-4 mbar, and wait ≥10 min.

Adjust the potentiometer <HV> ...
... to 5×10-4 mbar or ... to 1.3 V
Then turn it approx.
"
counter-clockwise.
Vent with air to atmospheric pressure, and wait
≥10 min.

Adjust the potentiometer <ATM> ...
... to 1000 mbar or ... to 8.5 V
Technical data
Measurement principle thermal conduction Pirani
Measurement range (air, N2) 5×10–4 … 1000 mbar
Accuracy ≈10 % of reading
(in the range of
1×10-3 … 100 mbar, beyond
this range up to factor 2)
Repeatability ≈2 % of reading
(in the range of
1×10-3 … 100 mbar)
Temperature compensation
all types
long types in the range of 5 °C ... 55 °C up to 150 °C in bakeout area
with reduced accuracy
Output signal (measuring
signal) ≈0 V … ≈+10.5 V
Measurement range 2.2 V … +8.5 V
Voltage/pressure
relationship logarithmic, increase 1 V / decade
Error signal < 0.5 V (filament rupture)
Output impedance 2×10 Ω
Minimum load 10 kΩ, short-circuit proof
Response time ≈10 ms
Gauge identification 3.0 kΩresistance referenced
to supply common
Adjustment
Trimmer potentiometer
<HV>
Trimmer potentiometer
<ATM>
adjustment at 5×10-4 mbar
adjustment at atmosphere
Supply
DANGER
The gauge may only be connected to supply and
evaluation units that conform to the requirements
of a grounded protective extra-low voltage
(SELV-E according to EN 61010). The connec-
tion to the gauge has to be fused.1)
Voltage at the gauge 15.0 … 30.0 V=
(ripple max. 1 Vpp)
Power consumption < 60 mA
Fuse 1) < 1 AT
The minimum voltage supply unit must be increased pro-
portionally to the length of the sensor cable.
Voltage at the supply unit
at maximum cable length 16.0 … 30.0 V= (ripple max. 1 Vpp)
Electrical connection Hirschmann compact
connector, type GO 6,
6 poles, male
Cable 5 poles plus screen
Cable length max. 100 m (0.25 mm² conductor)
150 m (0.34 mm² conductor)
500 m (1.00 mm² conductor)
Grounding concept →Figure 1
Vacuum flange-measuring
common electrically isolated (max. voltage differential
±50 V)
Supply common-signal
common conducted separately; differ- ential measurement recom-
mended for cable lengths
≥10 m
Materials on the vacuum side
Flange
Filament
Feedthrough
Baffle
Other materials
stainless steel
nickel
glass
stainless steel
nickel, soft solder (Sn, Ag),
Au
Internal volume ≈1 cm³
Pressure max. ≤10 bar (absolute)
limited to inert gases and
flange temperatures <100°C
Admissible temperatures
Storage
Operation of all types
Operation of long types
–40 °C … +65 °C
+ 5 °C … +55 °C
150 °C in bakeout area
Relative humidity max. 80% up to +31 °C
decreasing to 50 % at +40 °C
Use indoors only, altitude up to
2000 m
Type of protection IP 40
Relationship measuring signal – pressure
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
overrange
Pa
mbar
torr
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
sensor error
underrange
Measuring signal U[V]
Pressure p
p = 10(U-c) ⇔U = c + log10 p
Up c Up c
[V] [mbar] 5.5 [V] [micron] 2.625
[V] [µbar] 2.5 [V] [Pa] 3.5
[V] [Torr] 5.625 [V] [kPa] 6.5
[V] [mTorr] 2.625
1) Pfeiffer Vacuum controllers for Compact Gauges fulfill this
requirement.
where valid in the range
p pressure
U measuring signal
c constant (pressure unit
dependent)
5×10-4 mbar<p<1000 mbar
3.75×10-4 Torr<p<750 Torr
5×10-2 Pa<p<1×105Pa
Measuring
signal
U [V] [mbar]
Pressure p
[Torr] [Pa]
<0.5 Sensor error
0.5 … 2.2 Underrange
2.2 5.0×10–4 3.8×10–4 5.0×10–2
2.5 1.0×10–3 7.5×10–4 0.1
3.5 1.0×10–2 7.5×10–3 1.0
4.5 0.1 7.5×10–2 10
5.5 1.0 0.75 100
6.5 10 7.5 1000
7.5 100 75 1.0×104
8.5 1000 750 1.0×105
8.5 … 10.5 Overrange
Gas type dependence
Indicated pressure
(Gauge calibrated for air)
102
8
6
4
2
101
8
6
4
2
100
8
6
4
2
10–1
8
6
4
2
10–2
8
6
4
2
10–3
p (mbar)
peff (mbar)
10–3 246
10–2 246 10–1 246 100246 101246 102
H2He Ne
Xe
Kr
Ar
CO2
Freon 12
Luft / Air
O2
CO
N2
Water vapor
Calibration factors for the pressure range below 1 mbar
Gas
type Calibration factor K Gas type Calibration factor K
He 0.8 H20.5
Ne 1.4 N2, O2, CO, air 1.0
Ar 1.7 CO20.9
Kr 2.4 water vapor 0.5
Xe 3.0 Freon 12 0.7
peff = K × indicated pressure
Note
A mixture of gases is often involved. In this case,
accurate determination is only possible with a
partial pressure measurement instrument.

Dimensions
11.3
30
65
20
107.8
106.5
DN 16 ISO-KF DN 16 CF-R
50
20
22
21
DN 16 ISO-KF DN 16 CF-R
Weight 110 g (Flange DN 16 ISO-KF short)
130 g (Flange DN 16 CF-R short)
140 g (Flange DN 16 ISO-KF long)
160 g (Flange DN 16 CF-R long)
Maintenance, troubleshooting
Gauge failures due to contamination are not covered by the
warranty.
Cleaning the gauge
DANGER
Caution: cleaning agents
Cleaning agents can be detrimental to health and
environment.
Adhere to the relevant regulations and take the
necessary precautions when handling and dis-
posing of cleaning agents. Consider possible
reactions with the product materials.
èRemove the gauge from the vacuum system
Carefully remove the
baffle by means of a
screwdriver.
Fill the gauge with
cleaning alcohol and
allow it to work for 5 min.
Pour out the cleaning
alcohol and dispose of it.
Allow the measurement chamber to dry for at least
10 min.
òInsert the cleaned baffle.
óPut the gauge into operation:
• Establish the flange connection.
• Evacuate the gauge (the cleaning agent residuals
will evaporate).
• Establish the electrical connection.
• Adjust the gauge.
What to do in case of problems
Problem Possible cause Correction
Measuring signal
continually < 0.5 V No supply voltage Turn on the supply voltage
Measurement
element defective
(filament rupture)
Replace the gauge
Readout is too
high at low
pressures
Gauge
contaminated Adjust the gauge
Clean the gauge
Replace the gauge
Removing the product
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Note
Caution: dirt sensitive area
Dirt prolongs the pumpdown process.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
èVent the vacuum system.
Turn the gauge off .
Disconnect the sensor
cable.
Remove the gauge from the vacuum apparatus.
Clamping ring Seal
Place the protective
cap.
Protective cap
Options
Ordering number
Sensor cable for connection to
Pfeiffer Vacuum measurement and
control unit for Compact Gauges
3 m
6 m
10 m
Hirschmann connector
GO 6 WF, 6 poles, angled, female
BG 448 250 –T
BG 448 251 –T
BG 448 252 –T
B 4707 283 MA
Returning the product
WARNING
Caution: forwarding contaminated products
Products returned to Pfeiffer Vacuum for service
or repair should preferably be free of harmful
substances (e.g. radioactive, toxic, caustic or
microbiological).
Adhere to the forwarding regulations of all in-
volved countries and forwarding companies and
enclose a completed declaration of contamina-
tion.
Products that are not clearly declared as "free of harmful
substances" are decontaminated at the expense of the
customer.
When returning a product for service, put it in a tight and
impact resistant package.
Disposal
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
N
WARNING
Caution: substances detrimental to the environ-
ment
Electronic components must be disposed of in
accordance with special regulations.
Dispose of such products in accordance with the
relevant local regulations.
Separating the components
After disassembling the product, separate its components
according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in
accordance with the relevant national regulations,
separated according to their materials, and recycled.
• Other components
Such components must be separated according to their
materials and recycled.
Original: German BG 805 105 BD (9909)

Declaration of contamination
Legally binding declaration:
I hereby declare that the information supplied on this form is complete and accurate. The dispatch of the contaminated product will
be in accordance with the appropriate regulations covering packaging, transportation and labelling of dangerous substances.
Name of organisation or company
Address Post code, place
Phone Fax
E-Mail
Name
Date and legally binding signature Company stamp
*) Products thus conta-
minated will not be
accepted without
written evidence of
decontamination!
Process related contamination of product:
toxic no
q
yes
q
corrosive no
q
yes
q
biological hazard no
q
yes
q
*)
explosive no
q
yes
q
*)
radioactive no
q
yes
q
*)
other harmful substances no
q
yes
q
The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been
submitted. Non-completion will result in delay.
This declaration can only be completed and signed by authorised and qualified staff.
Copies:
Original to manufacturer or representative - 1 copy attach to consignment packaging - 1 copy for file of sender
Harmful substances, gases and/or by-products
Please list all substances, gases and by-products which may have come into contact with the product:
Trade/product name
manufacturer Chemical name
(or symbol) Dangerous
material class Measures if spillage First aid in case of
contact
Description of product
Type
Article No.
Serial No.
Reason for return
Operating fluid(s) used
Theproduct is free of any substances
which are damaging to health yes
q
Download:
www.bi.balzers.com/library/misc
Declaration of conformity
Compact Pirani Gauge
TPR 261
EU declaration of conformity as defined
by the listed guidelines
We herewith declare that the product listed above comply
with the provisions of the listed guidelines.
Guidelines, harmonized standards, national standards in lan-
guages and specifications which have been applied:
73/23/EEC (7/93) ................................................................
89/336/EEC (7/93) ..............................................................
EN 61010-1: 1993 ...............................................................
EN 50081-1: 1992 ...............................................................
EN 50082-2: 1995 ...............................................................
...................................................................................................
...................................................................................................
Signature
Asslar, 28 September 1999
Wolfgang Dondorf
Managing director
Pfeiffer Vacuum GmbH
Emmeliusstrasse 33
D–35614 Asslar
Deutschland
Tel [phone]
Fax [phone]
[email protected]
www.pfeiffer-vacuum.de