Tektronix Keithley S500 User manual

S500 Integrated Test System
Administrative Guide
Specifications are subject to change without notice
PA-939 Rev. C / October 2014 1 of 33
Keithley Instruments
28775 Aurora Road
Cleveland, Ohio 44139
1-888-KEITHLEY
http://www.keithley.com
System Description
The S500 Integrated Test System is an instrument-based system configuration from Keithley Instruments used
primarily for semiconductor parametric characterization testing. The S500 has a wide degree of hardware
flexibility, allowing users to configure a system best suited for their applications. Table 1 lists general S500
configuration options, while Table 2 lists configurations used specifically for High Voltage and/or High Current
testing of high-power semiconductor devices.
Table 1
S500 system configuration choices
Series 2600 System SourceMeter
®
Instruments
•
0 to 22*
•
Any combination of 2612s or 2636s
Model 4200-SCS/C Semiconductor
Characterization System
•
0 to 4*
•
With 4200-SMUs, 4210-SMUs, 4210-CVU, 4220-PGUs, 4225-PMUs,
or 4200-PAs
•
/F or /C chassis (with or without flat panel display, respectively)
Switching One of the following four choices:
•
None
•
0 to 4 ea. 708B*. Choice of switching card:
a) 1 ea. 7072, or
b) 1 ea. 7072-HV, or
c) 1 ea. 7174A
•
0 to 3 ea. 707B*. Choice of switching cards:
a) 1 to 6 ea. 7072, or
b) 1 to 6 ea. 7072-HV, or
c) 1 to 6 ea. 7174A
•
0 to 6 ea. 3706A*. Choice of switching cards (per mainframe):
a) 1 to 6 ea. 3720, or
b) 1 to 6 ea. 3721, or
c) 1 to 6 ea. 3722, or
d) 1 to 6 ea. 3723, or
e) 1 to 6 ea. 3730, or
f) 1 to 6 ea. 3740
Cabinet selection
•
37U with or without vented front door
•
37U with or without advanced seismic reinforcement
•
23U with or without partially-vented front door
Computer selection – Industrial PC with RAID
Linux®or Microsoft Windows®operating
system
•
None
•
Internal computer
Flat panel display selection
•
None
•
Monitor with support arm
•
Monitor installed externally
Other options
•
Adjustable cable support arm

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*Maximum number depends on system cabinet height of 37U as well as other items selected.
Table 2
S500 high power semiconductor testing configuration choices
Series 2600 System SourceMeter
®
Instruments
•
0 to 3
•
Either 2612s or 2636s
2657A High Power SourceMeter®Instruments
•
0 to 2
•
(not in series or parallel)
2651A High Power SourceMeter
®
Instruments
•
0 to 2
•
(2 units allow 100 A parallel operation)
CV Meter (4200-SCS-NOSMU with 4210-CVU)
•
0 to 1
•
/F or /C chassis (with or without flat panel display, respectively)
8020 High Power Interface Panel
•
0 to 2
•
Optional 3 kV CV hardware
•
Choice of output connectors (Keithley high-voltage triaxial, standard
triaxial, SHV, or Agilent high-voltage triaxial)
•
Optional unit support arm
8010 High Power Device Test Fixture
•
0 to 2
Cabinet selection
•
23U with or without vented front door
Computer selection – Industrial PC with RAID
(Linux or Windows operating system)
•
0 to 1. However, if the 4200-SCS (Semiconductor Characterization
System) is included, this unit serves as the system computer.
•
Internal or external computer
Flat panel display selection
•
None (with 4200-SCS/F-NOSMU option)
•
Monitor with support arm
•
Monitor installed externally
Examples of other items and accessories to accompany the S500 system:
•Cables (from system to probe station)
•9139A Probe Card Adapter
•Other Keithley instruments
System software options for the S500
•Keithley Instruments offers the Automated Characterization Suite (ACS) for test and prober automation and
parametric device characterization. For 2600-series wafer level reliability (WLR) testing, the optional ACS-
2600-RTM can be used with ACS for single device or parallel device testing.
•ACS Basic Edition can be used when prober automation is not required.
•Independently-developed software can also be used.

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Figure 1: Block diagram for a typical Standard and High Power S500 configuration

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Power distribution unit (PDU) connections and power distribution basics
The Model 42000-PDU consists of a 24 V DC output to supply EMO circuitry with power. This supply also provides 24 V DC
out through banana jacks. Additional outlets provided are two specially switched power outlets (factory configuration: Always
on), and three strips of four switched outlets (off only with EMO condition). Control is through a 25-pin D-sub connector.
Site Preparation & Installation
Unpacking the S500 system
The Keithley field service engineer (FSE) is responsible for unpacking the S500 system cabinet and the accessories (which
is in a separate box). However, it is recommended that the customer moves the crate and the accessories box to the area
where the system is going to be used. Here is a list of tools needed for unpacking:
•Safety glasses
•Gloves
•Standard screwdriver
•Socket wrench
•Socket head: 19 mm (or 3/4 in.)
The following information will help you when you begin to unpack your system. The system is shipped in a wooden crate (see
next figure).
Figure 2: S500 system cabinet in shipping crate

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Unpacking system components
Inspect the shock sensor located on the outside of the shipping box (see next figure). If the shock sensor indicates a shock
condition, conduct a very thorough inspection of all components contained in the system cabinet. Also, check the "TIP N
TELL" indicator to ensure that the crate has not been tipped over (see the appropriate figure). Report any damage to the
shipping agent immediately. Carefully remove all system components from the crate. While unpacking, make sure there is no
component damage. Please reuse or recycle packaging materials in accordance with your local requirements.
Figure 3: S500 Crate shock sensor
Figure 4: S500 Crate tipping indicator
You will need at least two people to unpack and move the S500 system cabinet.
1. Remove the clamps from the crate using a standard screwdriver.
Figure 5: Removing the clamps
2. Open the front of the crate. The front is identified by the wooden ramp support attached across the panel (see next
figure).
3. Make sure the ramp support is pulled away from the crate. It is held in place with Velcro.

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Figure 6: Opening the front of the crate
4. Attach the ramp using the two bolts that are attached to the bottom front part of the crate.
Figure 7: Front of crate with ramp down

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5. Remove the padding from the front of the S500 system cabinet.
Figure 8: Removing padding from cabinet

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6. Remove clamps and slide the outer box cover off of the crate.
Figure 9: Front of crate outer box off
7. Make sure that you retract the leveling feet on the bottom of the system (next to the casters), in order to put weight on
the casters and prepare the system so that it can be rolled down the ramp.
Figure 10: Leveling feet

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8. Remove the four bolts from the bottom of the crate that are attached to the bottom of the S500 system cabinet using a
19 mm socket head on a socket wrench.
Figure 11: S500 system bolted to crate
Figure 12: Removing bolts from crate
Figure 13: S500 system crate hardware

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9. Unlock the two wheels (casters) that are on the front of the S500 system cabinet by moving the locks up.
Figure 14: Cabinet caster locks moved up
10. With two people, slide the S500 system cabinet down the ramp.
Figure 15: S500 sliding down ramp
11. Remove the tape from the packing material using scissors, taking care not to scratch the S500 system cabinet.
Figure 16: Cuting the wrap off the system

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12. Move the S500 system cabinet to its final destination.
The system cabinet is shipped from the factory with all of the instruments installed. Most equipment connections and wiring in
the system’s cabinet instruments were made at the factory. Note that the accessories that come with the system are in a
separate container.
Unpacking the S500 system accessories
The accessories are shipped in a separate box (note there may be more than one depending on how many accessories are
ordered)(see next figure).
Figure 17: S500 system accessories box
The accessories box contains a computer monitor, keyboard, and mouse. It also includes required installation hardware,
USB extension cables, connectors for the keyboard and mouse, and any other accessories that may have been ordered with
the system, for example, cables to connect to the test fixture or probe card adapter, Model 9139A-PCA, heavy duty seismic
kit, or the rear cable support arm. You will also find all of the necessary documentation that is shipped with your order. See
the following figures. Please reuse or recycle packaging materials in accordance with your local requirements.

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Figure 18: Typical S500 system accessories
Figure 19: S500 monitor arm accessory
Figure 20: 8020 support arm accessory (S500 high power units only)

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Figure 21: S500 keyboard tray and arm accessory
Keithley Field Service Engineer (FSE)
The Keithley FSE will perform the following tasks:
•Install the keyboard arm and monitor arm to the system.
•Install the keyboard and the mouse on the keyboard arm, and the monitor to the monitor arm.
•Install the Model 8020 High Power Interface Panel
•Install the Model 8020 support arm (high power S500 units only)
•Install the probe card assembly (PCA)(if ordered), to the back of the system cabinet, and the 60190-PCA
(probe card assembly) to the correct prober plate (customer supplied from prober company), which is attached
to the prober.
•Plug in the system to the customer's power facilities (supplied by customer's facilities department at the final
location for the S500 system cabinet) and power up the entire cabinet.
•Verify communications of all instruments and with the properly configured prober.
•Perform diagnostics and system verification tests on the entire S500 system, to include the 60190-PCA (if
ordered).
•Record all of the information on the System Installation Form.
Power and operating conditions
Line power requirements
Nominal line power: 100 V, 115 V, 220 V, 240 V (50 Hz, 60 Hz)
Short-circuit current rating: 5 kA
Power consumption: Rated at 2.4 kVA for the 2 kW power distribution unit
Heat generation: Quiescent heat of 1720 BTU (1815 kJ) to maximum heat of 8191 BTU (8642 kJ).

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Severe personal injury or death due to electric shock or electrocution or equipment damage
may occur if you do not have the correct circuit amperage.
For S500 systems that are configured to operate between 100 V and 120 V, a 20 A circuit must
be used, and for systems that are configured to operate between 200 V and 240 V, a 15 A
circuit must be used.
System power dissipation
The total power dissipated by the S500 depends on the type and number of instruments in the test system. The power
distribution unit (PDU) limits the incoming power to these instruments. While the PDU ensures electrical safety and
compliance to the required standards, it does not prevent the system from overheating.
When a Series 26XXB instrument detects an excessive heat condition, the unit turns the output off to minimize power
dissipation. This safeguard prevents damage to individual Series 26XXB instruments, but may result in test instability. For
instance, if you continuously source more than 1 A from all the SMUs for more than 100 seconds, it may trigger a
temperature error in one or more of the Series 26XXB instruments. However, an average output of less than 1 A for an
indefinite period of time will not cause a temperature error.
For additional information about the Keithley Instruments Series 26XXB SourceMeter®instruments, refer to the supplied
documentation that is located on the Keithley Instruments CD-ROM that was shipped with your purchase.
Operating environment conditions
The S500 will not perform within specifications if operated outside of the following environmental conditions:
Temperature: 23 °C±5 °C (73.4 °F ± 9 °F)
Operating humidity: 30 percent to 60 percent relative humidity, noncondensing, after a two hour warm up time.
Vibration: High ambient vibration levels may require isolation pads or the repositioning of equipment.
Air quality: The S500 system is compatible for use in a Class 10 clean room.
Audible system noise: dB level is 65.
Air flow: The S500 system is configured for top to bottom air flow.
Altitude: Less than 2000 m (6,561 ft.) above sea level.
Noise interference: To prevent electrical noise from interfering with measurements, the ambient AC magnetic field must not
exceed 2 x 10-3 Gauss (2 x 10-7 T).
•Avoid locating the S500 next to plasma etchers, large motors, magnets, RF transmitters, equipment with flash
lamps, and other potential sources of interference
•Run power lines in a grounded conduit
•Position equipment to avoid routing signal and power cables near sources of electrical noise.

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Triaxial connector handling and contamination
Keep source-measure triaxial cable connectors (if applicable) clean and free of any foreign contaminants. Do not touch the
connector pins of the triaxial connectors. Contamination can cause current leakage in the source-measure signal paths to the
DUT, which can significantly degrade the test results.
Do not touch any connector pins or the areas adjacent to the electrical contacts of the triaxial
connectors; contamination will degrade the performance of the test system.
Cleaning: Clean contaminated connectors with methanol or isopropyl alcohol, and then blow-dry them with nitrogen gas.
After blowing dry, wait several minutes before using.
Optional 9139A-PCA vacuum requirement
A 50.80 cm (20 in.) Hg (which is the same as 40.73 PSI), with a hose connection of .64 cm (1/4 in. ) outside diameter and .32
cm (1/8 in.) inside diameter.
Lockout/Tagout
For maximum safety, always perform a lockout and tagout procedure by removing power from the entire test system and
discharge capacitors before connecting or disconnecting cables or any instrument, including the device under test, while
power is applied. When you perform lockout and tagout procedures, make sure that you note all warning labels on the
cabinet and instruments (see next figure).
Figure 22: Hazardous warning label
Severe personal injury or death due to electric shock or electrocution may result if power is
not removed before working inside the cabinet. Always disconnect the cabinet line cords from
the AC line power receptacles before opening the system cabinet. Also, never turn on the
system until all connections and safety grounds are installed.
When you perform removal and installation procedures, or maintenance on the system, lockout by placing a padlock through
the bracket by the PDU breaker and tagout as appropriate.

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Remove system power
1. You must shut down the software, and remove all power from the computer and the system (see Shut down
using ACS (on page 25).
Before proceeding, you must make sure the power indicator on the front door is NOT
illuminated.
2. Place the power switch for the PDU to the OFF position. The location of the PDU is at the back of the cabinet
below the rear door.
3. If you are working in the system cabinet, disconnect the system cabinet line cord from the AC line power
receptacles.
When you remove power, make sure that you disconnect all system cabinet line cords from AC
line power receptacles.
4. Verify that all power has been removed and discharged from the system cabinet by switching the main power
switch to the ON position (located on the front door of the cabinet) and verify that the green light does not
illuminate. If the light does not come on, the power is off. Turn main power switch back to the OFF position.
5. Lockout and tagout the system source power connection in accordance with your company’s lockout/tagout
policy.
Installation and connections
The following installation and connection procedures should be performed by trained site
installers who are familiar with the associated physical and electrical hazards. Also, you
should never turn on the system until all connections and safety grounds are installed.
Position the system cabinet
The system cabinet contains the controller and instrumentation for the test system. The cabinet is on casters, which allows
you to easily roll on a hard floor surface. The two steering casters in the rear are swivel type, while the two casters at the
front are in fixed positions.
To position the system cabinets:
1. Carefully roll the system cabinet to its desired location next to the prober. Allow approximately 597 mm (23.5
in.) of clearance between the cabinet and other instrumentation.
2. Lock the casters by pushing down on the caster-locking mechanisms located near the front-bottom of the
cabinet.
3. Adjust the height of the four legs so that the weight of the cabinet is on the legs and not on the casters. Adjust
the legs so that the cabinet is level and does not move (see the Seismic securement topic in this document).
Seismic securement is required for safety of the S500 system and for personnel. You must bolt
the legs adjacent to the four casters to the floor. See the Seismic securement topic in this
document for details.

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Floor plan
The following floor plan information is for the system cabinet only. Refer to the documentation for the prober or
other test fixture equipment to determine its floor space requirements.
The system cabinet requires a floor space of approximately 1.2 m x 2.1 m (4 ft. x 7 ft.). The next figures show a top view of
the floor plan for the S500 37U and 23U and an overall cabinet dimension diagram for both units.
Figure 23: S500 37U system floor plan, top view

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Figure 24: S500 23U system floor plan, top view

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Figure 25: S500 37U cabinet dimensions

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Figure 26: S500 High Power 23U cabinet dimensions