Tektronix Keithley S500 User manual

S500 Integrated Test System
Administrative Guide
Specifications are subject to change without notice
PA-939 Rev. C / October 2014 1 of 33
Keithley Instruments
28775 Aurora Road
Cleveland, Ohio 44139
1-888-KEITHLEY
http://www.keithley.com
System Description
The S500 Integrated Test System is an instrument-based system configuration from Keithley Instruments used
primarily for semiconductor parametric characterization testing. The S500 has a wide degree of hardware
flexibility, allowing users to configure a system best suited for their applications. Table 1 lists general S500
configuration options, while Table 2 lists configurations used specifically for High Voltage and/or High Current
testing of high-power semiconductor devices.
Table 1
S500 system configuration choices
Series 2600 System SourceMeter
®
Instruments
•
0 to 22*
•
Any combination of 2612s or 2636s
Model 4200-SCS/C Semiconductor
Characterization System
•
0 to 4*
•
With 4200-SMUs, 4210-SMUs, 4210-CVU, 4220-PGUs, 4225-PMUs,
or 4200-PAs
•
/F or /C chassis (with or without flat panel display, respectively)
Switching One of the following four choices:
•
None
•
0 to 4 ea. 708B*. Choice of switching card:
a) 1 ea. 7072, or
b) 1 ea. 7072-HV, or
c) 1 ea. 7174A
•
0 to 3 ea. 707B*. Choice of switching cards:
a) 1 to 6 ea. 7072, or
b) 1 to 6 ea. 7072-HV, or
c) 1 to 6 ea. 7174A
•
0 to 6 ea. 3706A*. Choice of switching cards (per mainframe):
a) 1 to 6 ea. 3720, or
b) 1 to 6 ea. 3721, or
c) 1 to 6 ea. 3722, or
d) 1 to 6 ea. 3723, or
e) 1 to 6 ea. 3730, or
f) 1 to 6 ea. 3740
Cabinet selection
•
37U with or without vented front door
•
37U with or without advanced seismic reinforcement
•
23U with or without partially-vented front door
Computer selection – Industrial PC with RAID
Linux®or Microsoft Windows®operating
system
•
None
•
Internal computer
Flat panel display selection
•
None
•
Monitor with support arm
•
Monitor installed externally
Other options
•
Adjustable cable support arm

S500 Integrated Test System Administrative Guide
Specifications are subject to change without notice
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*Maximum number depends on system cabinet height of 37U as well as other items selected.
Table 2
S500 high power semiconductor testing configuration choices
Series 2600 System SourceMeter
®
Instruments
•
0 to 3
•
Either 2612s or 2636s
2657A High Power SourceMeter®Instruments
•
0 to 2
•
(not in series or parallel)
2651A High Power SourceMeter
®
Instruments
•
0 to 2
•
(2 units allow 100 A parallel operation)
CV Meter (4200-SCS-NOSMU with 4210-CVU)
•
0 to 1
•
/F or /C chassis (with or without flat panel display, respectively)
8020 High Power Interface Panel
•
0 to 2
•
Optional 3 kV CV hardware
•
Choice of output connectors (Keithley high-voltage triaxial, standard
triaxial, SHV, or Agilent high-voltage triaxial)
•
Optional unit support arm
8010 High Power Device Test Fixture
•
0 to 2
Cabinet selection
•
23U with or without vented front door
Computer selection – Industrial PC with RAID
(Linux or Windows operating system)
•
0 to 1. However, if the 4200-SCS (Semiconductor Characterization
System) is included, this unit serves as the system computer.
•
Internal or external computer
Flat panel display selection
•
None (with 4200-SCS/F-NOSMU option)
•
Monitor with support arm
•
Monitor installed externally
Examples of other items and accessories to accompany the S500 system:
•Cables (from system to probe station)
•9139A Probe Card Adapter
•Other Keithley instruments
System software options for the S500
•Keithley Instruments offers the Automated Characterization Suite (ACS) for test and prober automation and
parametric device characterization. For 2600-series wafer level reliability (WLR) testing, the optional ACS-
2600-RTM can be used with ACS for single device or parallel device testing.
•ACS Basic Edition can be used when prober automation is not required.
•Independently-developed software can also be used.

S500 Integrated Test System Administrative Guide
Specifications are subject to change without notice
PA-939 Rev. C / October 2014 3 of 33
Figure 1: Block diagram for a typical Standard and High Power S500 configuration

S500 Integrated Test System Administrative Guide
Specifications are subject to change without notice
PA-939 Rev. C / October 2014 4 of 33
Power distribution unit (PDU) connections and power distribution basics
The Model 42000-PDU consists of a 24 V DC output to supply EMO circuitry with power. This supply also provides 24 V DC
out through banana jacks. Additional outlets provided are two specially switched power outlets (factory configuration: Always
on), and three strips of four switched outlets (off only with EMO condition). Control is through a 25-pin D-sub connector.
Site Preparation & Installation
Unpacking the S500 system
The Keithley field service engineer (FSE) is responsible for unpacking the S500 system cabinet and the accessories (which
is in a separate box). However, it is recommended that the customer moves the crate and the accessories box to the area
where the system is going to be used. Here is a list of tools needed for unpacking:
•Safety glasses
•Gloves
•Standard screwdriver
•Socket wrench
•Socket head: 19 mm (or 3/4 in.)
The following information will help you when you begin to unpack your system. The system is shipped in a wooden crate (see
next figure).
Figure 2: S500 system cabinet in shipping crate

S500 Integrated Test System Administrative Guide
Specifications are subject to change without notice
PA-939 Rev. C / October 2014 5 of 33
Unpacking system components
Inspect the shock sensor located on the outside of the shipping box (see next figure). If the shock sensor indicates a shock
condition, conduct a very thorough inspection of all components contained in the system cabinet. Also, check the "TIP N
TELL" indicator to ensure that the crate has not been tipped over (see the appropriate figure). Report any damage to the
shipping agent immediately. Carefully remove all system components from the crate. While unpacking, make sure there is no
component damage. Please reuse or recycle packaging materials in accordance with your local requirements.
Figure 3: S500 Crate shock sensor
Figure 4: S500 Crate tipping indicator
You will need at least two people to unpack and move the S500 system cabinet.
1. Remove the clamps from the crate using a standard screwdriver.
Figure 5: Removing the clamps
2. Open the front of the crate. The front is identified by the wooden ramp support attached across the panel (see next
figure).
3. Make sure the ramp support is pulled away from the crate. It is held in place with Velcro.

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Specifications are subject to change without notice
PA-939 Rev. C / October 2014 6 of 33
Figure 6: Opening the front of the crate
4. Attach the ramp using the two bolts that are attached to the bottom front part of the crate.
Figure 7: Front of crate with ramp down

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Specifications are subject to change without notice
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5. Remove the padding from the front of the S500 system cabinet.
Figure 8: Removing padding from cabinet

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6. Remove clamps and slide the outer box cover off of the crate.
Figure 9: Front of crate outer box off
7. Make sure that you retract the leveling feet on the bottom of the system (next to the casters), in order to put weight on
the casters and prepare the system so that it can be rolled down the ramp.
Figure 10: Leveling feet

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Specifications are subject to change without notice
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8. Remove the four bolts from the bottom of the crate that are attached to the bottom of the S500 system cabinet using a
19 mm socket head on a socket wrench.
Figure 11: S500 system bolted to crate
Figure 12: Removing bolts from crate
Figure 13: S500 system crate hardware

S500 Integrated Test System Administrative Guide
Specifications are subject to change without notice
PA-939 Rev. C / October 2014 10 of 33
9. Unlock the two wheels (casters) that are on the front of the S500 system cabinet by moving the locks up.
Figure 14: Cabinet caster locks moved up
10. With two people, slide the S500 system cabinet down the ramp.
Figure 15: S500 sliding down ramp
11. Remove the tape from the packing material using scissors, taking care not to scratch the S500 system cabinet.
Figure 16: Cuting the wrap off the system