Tektronix KEITHLEY S530 User manual

Reference Manual
S530-901-01 Rev. B / January 2019
*PS530-901-01B*
S530-901-01B
tek.com/keithley
S530 Parametric Test System

Parametric Test System
Reference Manual
S530

© 2019, Keithley Instruments, LLC
Cleveland, Ohio, U.S.A.
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,
without the prior written approval of Keithley Instruments, LLC, is strictly prohibited.
These are the original instructions in English.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley
Instruments, LLC. Other brand names are trademarks or registered trademarks of their respective
holders.
Microsoft, Visual C++, Excel, and Windows are either registered trademarks or trademarks of
Microsoft Corporation in the United States and/or other countries.
Document number: S530-901-01 Rev. B / January 2019

Safety precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.
This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the
product. Refer to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the
equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the
instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line
voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained
service personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low
transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient
overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient
overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to
mains. These instruments will be marked as category II or higher.
Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test
fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any
unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If
the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective
devices to limit fault current and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)
ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the
voltage being measured.

For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be
impaired.
Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the
specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)
connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use
of a lid interlock.
If a screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.
The symbol on an instrument means caution, risk of hazard. The user must refer to the operating instructions located in the
user documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means warning, risk of electric shock. Use standard safety precautions to avoid personal
contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be
properly disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains hazards that might result in personal injury or death. Always read
the associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may
invalidate the warranty.
The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor
injury or damage the instrument. Always read the associated information very carefully before performing the indicated
procedure. Damage to the instrument may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits —including the power
transformer, test leads, and input jacks —must be purchased from Keithley. Standard fuses with applicable national safety
approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may
only be replaced with a similarly rated power cord. Other components that are not safety-related may be purchased from other
suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through
Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement
component, call a Keithley office for information.
Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following
environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.
To clean an instrument, use a cloth dampened with deionized water or mild, water-based cleaner. Clean the exterior of the
instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that
consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never
require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board
should be returned to the factory for proper cleaning/servicing.
Safety precaution revision as of June 2017.

Introduction..............................................................................................................1-1
Contact information.............................................................................................................. 1-1
Systems documentation....................................................................................................... 1-1
System description............................................................................................................... 1-2
Optional accessories............................................................................................................ 1-3
When you receive your system............................................................................................ 1-3
Inspect for damage ...................................................................................................................1-4
Move the shipping crate to the installation location...................................................................1-5
Overview of system instruments ............................................................................2-1
Introduction .......................................................................................................................... 2-1
Switching.............................................................................................................................. 2-2
Model 707B Switch Matrix Mainframe....................................................................................... 2-2
Sourcing and measuring...................................................................................................... 2-3
Model 2636B System SourceMeter Instrument.........................................................................2-3
Optional instrumentation...................................................................................................... 2-4
Installation................................................................................................................3-1
Site preparation.................................................................................................................... 3-1
Site preparation checklist..........................................................................................................3-1
Line power requirements...........................................................................................................3-2
Operating environment conditions.............................................................................................3-3
Floor plan..................................................................................................................................3-3
System cabinet size and weight................................................................................................ 3-5
Required system securement.................................................................................................... 3-6
Keithley field service engineer installation tasks.................................................................. 3-6
System connections............................................................................................................. 3-6
Getting started .........................................................................................................4-1
Initial equipment startup....................................................................................................... 4-1
System startup..................................................................................................................... 4-2
System software................................................................................................................... 4-2
Start the KTE software..............................................................................................................4-3
Shut down using KTE................................................................................................................4-3
Emergency OFF button........................................................................................................ 4-4
Emergency shutdown procedure...............................................................................................4-4
Recovering from an emergency shutdown................................................................................4-4
Safety interlocks................................................................................................................... 4-5
Prober safety........................................................................................................................ 4-6
System communications...................................................................................................... 4-6
S530 KTE communications.......................................................................................................4-6
Table of contents

Table of contents S530 Parametric Test System Reference Manual
Editing the icconfig_<QMO>.ini file...................................................................................... 4-9
Using NPLCs to adjust speed and accuracy ....................................................................... 4-9
Setting the number of power line cycles..................................................................................4-10
Setting a custom system speed .............................................................................................. 4-10
NPLC default differences ........................................................................................................4-11
Using function libraries...........................................................................................5-1
Introduction .......................................................................................................................... 5-1
The KTE Linear Parametric Test Library (LPTLib) Library .................................................. 5-2
Combination commands ...........................................................................................................5-2
Dual-site commands .................................................................................................................5-2
General commands...................................................................................................................5-3
GPIB commands.......................................................................................................................5-3
Matrix commands......................................................................................................................5-3
Measure commands..................................................................................................................5-3
Pulse generator commands ......................................................................................................5-4
Range commands.....................................................................................................................5-4
Scope card commands .............................................................................................................5-5
Spectrum analyzer commands..................................................................................................5-5
Source commands....................................................................................................................5-5
Timing commands.....................................................................................................................5-6
The KTE Parametric Test Subroutine (PARLib) .................................................................. 5-6
Software....................................................................................................................6-1
Introduction .......................................................................................................................... 6-1
Keithley Test Environment system software........................................................................ 6-2
KTE process overview ..............................................................................................................6-4
KTE software tools....................................................................................................................6-6
KTE support utilities ..................................................................................................................6-7
Building and executing tests......................................................................................................6-9
Creating test plans............................................................................................................. 6-11
Keithley tool palette.................................................................................................................6-12
Wafer Description Utility (WDU)..............................................................................................6-14
Test Structure File Editor (TSE)..............................................................................................6-36
Keithley Interactive Test Tool (KITT).......................................................................................6-40
Parameter Set Editor (PSE)....................................................................................................6-54
Keithley User Library Tool (KULT) ..........................................................................................6-57
Limits File Editor (LFE)............................................................................................................6-75
Keithley Test Plan Manager (KTPM).......................................................................................6-80
Adaptive testing.................................................................................................................. 6-92
Zone-based testing .................................................................................................................6-92
Result-based testing ...............................................................................................................6-95
Installation of adaptive testing user libraries..........................................................................6-101
Installation of demonstration files..........................................................................................6-102
Test execution.................................................................................................................. 6-102
Keithley Operator Interface Editor (KOPED).........................................................................6-103
Keithley Test Execution Engine (KTXE)................................................................................6-105
Data analysis.................................................................................................................... 6-129
Data output formats...............................................................................................................6-129
Preview .................................................................................................................................6-130
Keithley Summary Utility (KSU).............................................................................................6-130
Keithley Curve Analysis Tool (KCAT)....................................................................................6-143

S530 Parametric Test System Reference Manual Table of contents
KDFtoKCS File Conversion Utility.........................................................................................6-146
System administration...................................................................................................... 6-149
System configuration: kth.ini file............................................................................................ 6-149
kptm.ini file............................................................................................................................6-150
Environment variables...........................................................................................................6-152
Keithley directory environment variables...............................................................................6-154
Open interface environment variables...................................................................................6-154
System environment variables..............................................................................................6-155
Diagnostics environment variables........................................................................................6-156
User library tool environment variables.................................................................................6-156
Test plan manager environment variables ............................................................................6-156
Log file environment variables...............................................................................................6-157
File management ..................................................................................................................6-159
Keithley Component Manager (KCM) utility description........................................................6-160
Project environments ............................................................................................................6-160
Select tester..........................................................................................................................6-163
System customization ...........................................................................................................6-166
System integration ................................................................................................................6-168
Data logging..................................................................................................................... 6-170
Keithley Data Files library......................................................................................................6-170
Using limits files ....................................................................................................................6-174
Programming examples ........................................................................................................6-177
Keithley Data File user tag data............................................................................................6-183
Example of use within a cassette plan..................................................................................6-185
User access points................................................................................................................6-186
Logging one PARAM at a time, data retrieval through Get routines...................................... 6-187
Logging a linked list of PARAMs, data retrieval using GetLotData........................................6-190
Keithley User Interface Library......................................................................................... 6-192
User interface constants .......................................................................................................6-192
User interface library variables..............................................................................................6-194
User interface library commands...........................................................................................6-195
KTE KUI localization .............................................................................................................6-196
KTE file formats................................................................................................................ 6-198
Wafer description file format..................................................................................................6-199
Test structure file format .......................................................................................................6-202
Keithley test macro (.ktm)......................................................................................................6-203
Probe card file format............................................................................................................6-206
Global data file format...........................................................................................................6-207
Parameter set file format.......................................................................................................6-208
Parameter limits file format....................................................................................................6-209
Wafer test plan file format .....................................................................................................6-212
Cassette test plan file format................................................................................................. 6-214
Keithley data file format.........................................................................................................6-217
User access point file format.................................................................................................6-219
Keithley plot file format..........................................................................................................6-220
KULT module file format .......................................................................................................6-221
Data pool.......................................................................................................................... 6-223
KI_ktxe_redo_macro.............................................................................................................6-224
KI_ktxe_retest_wafer ............................................................................................................6-224
KI_ktxe_skip_limits_check ....................................................................................................6-224
KUI_User...............................................................................................................................6-225
ManualProberType................................................................................................................6-225
ManualWaferLoad.................................................................................................................6-225
UAP_abort_level...................................................................................................................6-226
abort_code............................................................................................................................6-226
abort_level.............................................................................................................................6-226
cl_kwf_fname........................................................................................................................6-227
confirm_oper_wafers.............................................................................................................6-227

Table of contents S530 Parametric Test System Reference Manual
cpf_info .................................................................................................................................6-227
current_slot_list.....................................................................................................................6-228
current_wwp_list ...................................................................................................................6-228
cur_wwp_list_ptr ...................................................................................................................6-229
display_lotdlg ........................................................................................................................6-229
failed_result_list ....................................................................................................................6-229
ktm_list..................................................................................................................................6-230
ktxe_abort_logging................................................................................................................6-230
ktxe_cpf_mode......................................................................................................................6-230
ktxe_debug............................................................................................................................6-230
ktxe_disable_exec_log..........................................................................................................6-230
ktxe_disable_kdf ...................................................................................................................6-231
ktxe_disable_ktm ..................................................................................................................6-231
ktxe_disable_kui.................................................................................................................... 6-231
ktxe_disable_load_cassette_msg .........................................................................................6-231
ktxe_disable_plan_complete_msg........................................................................................6-231
ktxe_disable_prober..............................................................................................................6-231
ktxe_disable_prober..............................................................................................................6-232
ktxe_disable_statdlg..............................................................................................................6-232
ktxe_disable_uap..................................................................................................................6-232
ktxe_enable_cl_log ...............................................................................................................6-232
ktxe_disable_exec_log..........................................................................................................6-232
ktxe_enable_doc...................................................................................................................6-232
ktxe_error_gui.......................................................................................................................6-233
ktxe_fill_opr_dlg....................................................................................................................6-233
ktxe_min_SS_touch..............................................................................................................6-233
ktxe_missingSS_ok............................................................................................................... 6-233
ktxe_reload_wafer_plan........................................................................................................6-233
ktxe_report_no_klf.................................................................................................................6-234
ktxe_report_no_pcf ...............................................................................................................6-234
ktxe_sort_subsite_ktms.........................................................................................................6-234
last_prober_call.....................................................................................................................6-234
last_prober_error...................................................................................................................6-234
last_subsite...........................................................................................................................6-234
limit_list .................................................................................................................................6-235
limithashtab........................................................................................................................... 6-235
lot..........................................................................................................................................6-235
lotadd....................................................................................................................................6-235
lotid .......................................................................................................................................6-236
maxErrEvtLines.....................................................................................................................6-236
maxScrollLines......................................................................................................................6-236
next_wwp_list........................................................................................................................6-236
next_wwp_list_ptr..................................................................................................................6-236
previous_wwp_list.................................................................................................................6-237
prev_wwp_list_ptr .................................................................................................................6-237
prober_wafer_id....................................................................................................................6-237
product_file............................................................................................................................6-237
result_list...............................................................................................................................6-237
site ........................................................................................................................................6-238
sites_tested........................................................................................................................... 6-238
skip_first_wafer_load ............................................................................................................6-238
skip_next_wafer_load ...........................................................................................................6-238
subsite...................................................................................................................................6-238
sum_report_options ..............................................................................................................6-238
total_sites..............................................................................................................................6-239
total_wafers...........................................................................................................................6-239
user_arg................................................................................................................................6-239
wafer .....................................................................................................................................6-239
wafers_tested........................................................................................................................6-239
wdfptr ....................................................................................................................................6-239
wpf_info................................................................................................................................. 6-240

S530 Parametric Test System Reference Manual Table of contents
wwp_list.................................................................................................................................6-240
Advanced data pool use................................................................................................... 6-240
Data pool function descriptions.............................................................................................6-241
Example................................................................................................................................6-242
User access points (UAPs).............................................................................................. 6-243
User access point usage.......................................................................................................6-245
Types of user access points..................................................................................................6-247
UAP locations........................................................................................................................6-248
Use of LPTLib functions at UAPs..........................................................................................6-248
Distributed user libraries .......................................................................................................6-248
Test macro debugging ..........................................................................................................6-249
Version control.........................................................................................................7-1
Overview .............................................................................................................................. 7-1
Version control in the production environment .................................................................... 7-3
Revised file movement the production environment..................................................................7-3
The recipe execution process in operator mode.................................................................. 7-4
Version control in the engineering environment .................................................................. 7-6
File version tracking............................................................................................................. 7-8
The primary version control areas ....................................................................................... 7-9
Local areas................................................................................................................................7-9
Archive...................................................................................................................................... 7-9
Staging directories ..................................................................................................................7-12
Directory file structures ...................................................................................................... 7-14
Archive directory structure.......................................................................................................7-14
Production directory structure .................................................................................................7-15
Projects directory structure......................................................................................................7-16
Protecting and monitoring software operation ................................................................... 7-16
Protecting the normal and specific production areas...............................................................7-16
Monitoring staging directories for stagnant files......................................................................7-17
Copying the archive to another site ................................................................................... 7-17
Populate the production environment of a new client system............................................ 7-18
Start with a revision offset on initial entry into source control............................................ 7-18
Transferring production file bundles to the client systems................................................. 7-19
Clean up archive files and normal production environment............................................... 7-19
Viewing the history of a file ................................................................................................ 7-20
Comparing versions of a file .............................................................................................. 7-21
Viewing where a supporting file is used............................................................................. 7-22
Removing a KULT module from production....................................................................... 7-23
Step A: Fetch and load the library to be modified .................................................................7-24
Step B: Remove the PROD label from the module ...............................................................7-24
Step C: Delete the module from the local KULT library.........................................................7-25
Step D: Check out the Library Prototypes file for modification..............................................7-25
Step E: Build the local KULT library......................................................................................7-25
Step F: Deliver the updated Library Prototypes file.................................................................7-25
Step G: Install the updated KULT library...............................................................................7-26

Table of contents S530 Parametric Test System Reference Manual
Client systems.................................................................................................................... 7-26
Version control menu in KULT........................................................................................... 7-27
Automatic version control functions......................................................................................... 7-27
Alternate version-control menu ...............................................................................................7-27
Library Control submenu in KULT...........................................................................................7-28
General KULT version control menu items .............................................................................7-28
Advanced KULT version control menu items ..........................................................................7-33
Recipe Manager........................................................................................................8-1
Overview .............................................................................................................................. 8-1
Additional features ....................................................................................................................8-2
Setting up Keithley Recipe Manager.................................................................................... 8-3
System and software passwords...............................................................................................8-3
Changing passwords.................................................................................................................8-4
System configurations for Keithley Recipe Manager.................................................................8-5
Preparing information for Keithley Recipe Manager set up.......................................................8-5
Single-system setup..................................................................................................................8-8
Multiple networked systems setup ..........................................................................................8-10
Development-only system setup............................................................................................. 8-13
Add KTE files from the local area to the KRM archive ............................................................8-14
Setting up separate user accounts.......................................................................................... 8-14
Setting up an administrative group maintenance account....................................................... 8-14
The Keithley Recipe Manager user interface..................................................................... 8-15
File menu ................................................................................................................................8-16
Batch menu.............................................................................................................................8-17
View menu ..............................................................................................................................8-18
Options menu..........................................................................................................................8-19
Version Control menu .............................................................................................................8-19
The primary version control areas ..................................................................................... 8-21
Local area ...............................................................................................................................8-21
Archive.................................................................................................................................... 8-21
Staging directories ..................................................................................................................8-22
Normal and specific recipes............................................................................................... 8-22
Getting started.................................................................................................................... 8-23
Starting Keithley Recipe Manager...........................................................................................8-23
Setting up a project.................................................................................................................8-26
Using Keithley Recipe Manager with KTE tools ................................................................ 8-32
Accessing KTPM, WDU, and LFE from the Recipe Contents tab ...........................................8-33
Accessing KITT and TSE from the Parameters tab.................................................................8-34
Accessing KULT from the KRM Parameters tab..................................................................... 8-36
Searching for files from the KRM Parameters tab...................................................................8-37
Selecting and executing recipes in operator mode............................................................ 8-38
The recipe execution process in operator mode .....................................................................8-38
Executing a recipe in operator mode.......................................................................................8-39
The Keithley Recipe Manager engineering mode process................................................ 8-41
Creating a new process and product family ............................................................................8-42
Creating a new product family under an existing process.......................................................8-43
Creating a new recipe .............................................................................................................8-44
Creating a new recipe under an existing product family..........................................................8-46
Creating a new recipe using an existing recipe.......................................................................8-47
Creating a specific recipe........................................................................................................8-48
Creating new supporting files..................................................................................................8-49
Validating a recipe................................................................................................................... 8-50

S530 Parametric Test System Reference Manual Table of contents
Editing existing recipes ...........................................................................................................8-52
Checking files into the archive.................................................................................................8-60
Reverting files to precheck-out status.....................................................................................8-61
Releasing and installing a recipe or supporting file.................................................................8-61
Moving recipes between sites.................................................................................................8-66
Deleting items from the local area...........................................................................................8-67
Using batch operations to do common tasks in KRM........................................................ 8-68
Batch operation phases ..........................................................................................................8-68
Batch marking.........................................................................................................................8-69
Batch icon marking and level indicators..................................................................................8-69
Save Copies To batch operation............................................................................................. 8-70
Search/Replace batch operation.............................................................................................8-70
Search/Replace/Release batch operation............................................................................... 8-71
Check Out batch operation......................................................................................................8-71
Check In batch operation........................................................................................................8-71
Label batch operation..............................................................................................................8-72
Remove Label batch operation ...............................................................................................8-72
Release batch operation .........................................................................................................8-72
UnRelease batch operation..................................................................................................... 8-72
Delete batch operation............................................................................................................8-73
UnMark All batch operation.....................................................................................................8-73
Examples ........................................................................................................................... 8-73
Example 1: Create a new recipe using existing files...............................................................8-73
Example 2: New recipe, wafer description file from existing files............................................8-80
Example 3: Release and install a recipe .................................................................................8-90
Administration .................................................................................................................... 8-93
Configuring user-defined recipe contents fields and terminology............................................8-93
Environment variables for user-defined files in Keithley Recipe Manager............................... 8-95
Version control in KRM ...................................................................................................... 8-96
Recipe management and version control terminology....................................................... 8-97
Frequency analysis..................................................................................................9-1
Introduction .......................................................................................................................... 9-1
Prerequisites ........................................................................................................................ 9-1
Ring oscillator structures and measurement........................................................................ 9-2
Making a measurement........................................................................................................ 9-2
Measurement commands for ring oscillator applications..................................................... 9-4
RSA306B LPTLib commands....................................................................................................9-4
Scope LPTLib commands.........................................................................................................9-5
Create a KITT macro............................................................................................................ 9-5
Pulse generation....................................................................................................10-1
Introduction ........................................................................................................................ 10-1
Pulse measurement considerations................................................................................... 10-1
Command summary........................................................................................................... 10-3
Diagnostics and troubleshooting..........................................................................11-1
Overview ............................................................................................................................ 11-1

Table of contents S530 Parametric Test System Reference Manual
The diagnostics process .................................................................................................... 11-1
User interface..................................................................................................................... 11-3
Selection area.........................................................................................................................11-4
Control area ............................................................................................................................11-5
Status and result area.............................................................................................................11-6
Selection area tabs ............................................................................................................ 11-7
Dashboard tab.........................................................................................................................11-7
Matrix tab ................................................................................................................................11-8
SMU tab................................................................................................................................11-10
Optional Instruments tab....................................................................................................... 11-11
Menu and toolbar selections............................................................................................ 11-12
Command-line arguments................................................................................................ 11-13
Configuration.................................................................................................................... 11-13
Troubleshooting diagnostics software startup ................................................................. 11-14
Project environment settings.................................................................................................11-14
Hosts entries in nsswitch.conf file .........................................................................................11-15
Test sequence.................................................................................................................. 11-16
System information ...............................................................................................................11-17
Prerequisite tests ..................................................................................................................11-18
Diagnostic tests.....................................................................................................................11-21
System verification........................................................................................................... 11-54
Verification probe card ..........................................................................................................11-55
Verification tests to execute ..................................................................................................11-57
Matrix leakage tests..............................................................................................................11-57
SMU verification....................................................................................................................11-58
Troubleshooting ............................................................................................................... 11-58
Troubleshooting overview .....................................................................................................11-59
Troubleshooting flow chart....................................................................................................11-60
Troubleshooting procedure steps..........................................................................................11-61
Troubleshooting prerequisite tests........................................................................................11-63
Troubleshooting matrix diagnostic tests................................................................................11-67
Troubleshooting SMU and other instrument diagnostic tests................................................11-72
Advanced troubleshooting information..................................................................................11-74
Maintenance........................................................................................................... 12-1
Introduction ........................................................................................................................ 12-1
Repair and replacement..................................................................................................... 12-1
Adjustment ......................................................................................................................... 12-1
Power distribution and emergency off................................................................................ 12-3
Data hub license ................................................................................................................ 12-4
Decommissioning an S530 test system............................................................................. 12-6
Index ....................................................................................................................Index-1

In this section:
Contact information.................................................................. 1-1
Systems documentation........................................................... 1-1
System description................................................................... 1-2
Optional accessories................................................................ 1-3
When you receive your system................................................ 1-3
Contact information
If you have any questions after you review the information in this documentation, please contact your
local Keithley Instruments office, sales partner, or distributor. You can also call the corporate
headquarters of Keithley Instruments (toll-free inside the U.S. and Canada only) at 1-800-935-5595,
or from outside the U.S. at [phone]. For worldwide contact numbers, visit the Keithley
Instruments website (tek.com/keithley).
Systems documentation
Documentation for your system is available at tek.com/keithley. Following is a list of documentation
for your system, including the document part numbers.
S530 Parametric Test System Administrative Guide (S530-924-01)
S530 Parametric Test System Reference Manual (S530-901-01)
Keithley Test Environment (KTE) Programmer's Manual (S500-904-01)
KIGEM Automation Software Reference Manual (KIGEM-901-01)
KIGEM Automation Software User's Manual (KIGEM-900-01)
Section 1
Introduction

Section 1: Introduction S530 Parametric Test System Reference Manual
1-2
S530-901-01 Rev. B / January 2019
System description
The Keithley Instruments S530 Parametric Test System is a configurable, instrument-based system
for semiconductor parametric characterization and testing. There are two different S530 systems
available:
S530 low-current parametric test system
S530 high-voltage parametric test system
The S530 systems have flexible hardware configurations that allow you to customize them to your
specific needs. See the following table for a description of the main system configuration options, and
see the following figure for an example of a typical system configuration.
S530 system configuration options
DC source-measure units (SMU)
Two to 8 maximum
Maximum number of SMUs depends on other items in
the system rack
Model 2410 High-Voltage System SourceMeter®
instruments (older systems; quantity: 1 to 4)
Model 2636B System SourceMeter®instruments
(quantity: 1 to 4)
6-slot switching matrix
One or two Model 707B Switch Matrix Mainframes with either:
Model 7072-HV switch cards (quantity: 2 to 6)
Model 7072-HVD switch cards (quantity: 2 to 6)
Model 7530 switch cards (quantity: 2 to 6)
Optional capacitance/voltage (C-V)
One channel of C-V (using one Model 4200A-SCS with one
Model 4210-CVU card)
Optional instruments
Model DMM7510 7-1/2 Digit Graphical Sampling
Multimeter
(quantity: 0 to 1)
Up to three dual-channel pulse cards
RSA306B USB Spectrum Analyzer (quantity: 0 to 1) for
frequency and ring oscillator measurements
Included with each system
Computer inside cabinet
External 24-inch flat-panel monitor and keyboard tray
mounted on exterior of cabinet
Keithley Test Environment (KTE) or Automated
Characterization Suite (ACS) system software
LO patch panel
Safety interlock system (high-voltage systems only)
Adjustable cable support arm
Other options
Advanced seismic securement kit for additional resistance to
seismic forces

S530 Parametric Test System Reference Manual Section 1: Introduction
S530-901-01 Rev. B / January 2019
1-3
Optional accessories
Optional items and accessories that may accompany the S530 system:
Cables to connect to the test fixture or the probe card adapter
9139A-PCA (probe card adapter)
9139B-PCA (probe card adapter)
RSA306B USB Spectrum Analyzer
Advanced seismic securement kit
When you receive your system
Series 500 systems are shipped in a wooden crate (see the following figure).
Figure 1: S530 system cabinet in shipping crate
Accessories are shipped in a separate box.

Section 1: Introduction S530 Parametric Test System Reference Manual
1-4
S530-901-01 Rev. B / January 2019
Inspect for damage
The field service engineer (FSE) is responsible for unpacking the crate. If the crate is damaged when
you receive it, the FSE will do a thorough inspection of each of the system components.
Inspect the shock sensor on the outside of the shipping crate (see the following figure). If the shock
sensor indicates a shock condition, do a thorough inspection of all components in the system cabinet.
Figure 2: S530 crate shock sensor
Also, check the "TIP N TELL" indicator to ensure that the crate has not been tipped over (see the
following figure).
Figure 3: S530 crate tipping indicator
Carefully remove all system components from the crate. While unpacking, make sure there is no
component damage. Report any damage to the shipping agent immediately.

S530 Parametric Test System Reference Manual Section 1: Introduction
S530-901-01 Rev. B / January 2019
1-5
Move the shipping crate to the installation location
We recommend that you move the crate and the accessories box to the area where the system is
going to be used, but do not unpack them. The Keithley field service engineer (FSE) is responsible for
unpacking the S530 system cabinet and the accessories. For more information about unpacking, see
the S530 Administrative Guide (part number S530-924-01).

In this section:
Introduction .............................................................................. 2-1
Switching.................................................................................. 2-2
Sourcing and measuring .......................................................... 2-3
Optional instrumentation .......................................................... 2-4
Introduction
This section contains an overview of the instruments used in S530 test systems and examples of
typical connection schemes.
For more specific information about instruments used in the S530 Parametric Test System, refer to
the documentation for each specific model:
4200A-SCS Parameter Analyzer
Series 2600B System SourceMeter®Instrument
707B Semiconductor Switch Matrix
4210-CVU Capacitance-Voltage Unit Card
4220-PGU High-Voltage Pulse-Generator Unit Card
4200-SCP2HR Dual-Channel Scope Card
RSA306B USB Spectrum Analyzer
2410 High-Voltage SourceMeter®Instrument
DMM7510 7-1/2 Digit Graphical Sampling Multimeter
Refer to the documentation that is bundled with the Keithley Test Environment (KTE) software
installation. You can also visit the Keithley Instruments website at tek.com/keithley to search for
updated information by model number.
Example wiring diagrams for the S530 test system are shown later in this section.
Section 2
Overview of system instruments

Section 2: Overview of system instruments S530 Parametric Test System Reference Manual
2-2
S530-901-01 Rev. B / January 2019
Switching
The following components provide the switching capabilities of the S530.
Model 707B Switch Matrix Mainframe
The 707B Semiconductor Switch Matrix Mainframe is a programmable switch for connecting signal
paths in a matrix structure. The six-slot mainframe accepts any combination of compatible plug-in
matrix cards. Model 7530, Model 7072-HV, and Model 707-HVD matrix cards are used in the 707B in
S530 systems.
Figure 4: 707B Semiconductor Switch Matrix Mainframe
Model 7530 High-Speed Low-Current 8 × 12 Matrix Card
Low-current systems use the 7530 8 × 12 matrix card to support up to 60 pin connections to the
probe card adaptor (PCA).
Model 7072-HV High-Voltage Semiconductor Matrix Card
High-voltage systems use the 7072-HV matrix card to support up to 24-pin connections to the probe
card adaptor (PCA).
This card is not available for high-voltage systems with two 707B Semiconductor Switch Matrix
Mainframes. This system configuration uses two 7072-HVD matrix cards.