Ulvac GI-M2 User manual

SK00-7723-EI-003-08
MODEL GI-M2
METAL IONIZATION VACUUM GAUGE
MODEL GI-D7 / GI-N8
IONIZATION VACUUM GAUGE
INSTRUCTION MANUAL
Components Division,
ULVAC , Inc.
2500 Hagisono, Chigasaki City, Kanagawa Prefecture, Japan 253-8543
http://www.ulvac.co.jp/
This manual is for the ion gauges of serial numbers.
GI-M2 ：S/N 32000G ～
GI-D7 ：S/N 32001G ～
GI-N8 ：S/N 30001G ～
Read this manual carefully before using this gauge and
keep it at your hand for immediate reference.

I

II
Before Use of This Vacuum Gauge
Upon receipt of this pump, make sure it is the correct model you ordered and that it is
free from damage in transit.
Read this instruction manual before installing, operating, inspecting,
or maintaining the product and fully understand the safety
precautions, specifications and operating procedures regarding the
product.
The copyright of this instruction manual is held by ULVAC, Inc.
You are prohibited from copying any portion of this instruction
manual without the consent of ULVAC Inc.
You are also prohibited from disclosing or transferring this
instruction manual to third parties without the express written
consent of ULVAC Inc.
The contents described in this instruction manual are subject to
change without prior notice because of changes in specifications or
because of product improvements.
Safety Denotations
Safety symbols are used throughout this instruction manual to call
the operator's attention to safety. The terminology used in safety
symbols is classified below.
Indicate status of urgency of danger when failure to comply with
DANGER results in serious personal injury or death
The work ignoring this warning will lead to serious damage to
human life or factory facility (including this equipment) at a high
probability.
Indicate status of danger when failure to comply with WARNING
results in serious worker’s injury or death.
The work ignoring this warning will cause possibility leading to
serious damage to human life or factory facility (including this
equipment)
Indicate status of danger when failure to comply with WARNING
results in minor injury or moderate damage.
The work ignoring this warning will cause possibility leading to
minor damage to worker or breakage to equipment or necessary to
adjust.
Direct hazard is not existed, describe the necessity to know
from the viewpoint of worker’s safety or correct and safe operation of
equipment
✔Note

III
Safety Cautions
For safe use of this gauge, be sure to read this manual and the following safety
cautions.
Turn off power.
If the gauge is damaged, immediately turn off the power.
Otherwise,
fire or electric shock can result. For safety reasons,
contact your local ULVAC representative or ULVAC JAPAN.
Turn off power.
If the gauge gets unusually hot or gives out smoke, immediately turn
off the power. Otherwise, fire can result. For safety reasons,
contact your local ULVAC representative or ULVAC JAPAN.
Turn off power.
Whenever you touch or may touch the sensor head terminal on the
rear of the controller, turn off the power to the gauge. A grid voltage
of 150 VDC is applied to the sensor head terminal. If you touch it
when power is turned on, you will get electric shock.
Turn off power.
Whenever you touch or may touch the sensor head pin, turn off the
power to the gauge
. A grid voltage of 150 VDC is applied to the
sensor head terminal. If you touch it when power is turned on, you
will get electric shock.
Beware of high temperature.
Do not touch the sensor head surface, which is very hot during and
immediately after operation. If you touch it, you may get burned.
Turn off power.
Turn off the power before replacing a fuse. If it is replaced with the
power turned on, you may get electric shock.
Turn off power.
Before installing the gauge, unplug the power cable.
Use fuse of specified rating.
Do not use a fuse other than specified one n
or short the fuse holder.
Damage or fire can result.
Check line voltage.
Before turning on power to the gauge, make sure the vacuum gauge
operating voltage and the supply voltage are in agreement.
Connection with an incorrect power can damage the vacuum gauge
or fire.
Be cautious with operating environment.
Do not connect the sensor head to an environment where pressure
exceeds atmospheric pressure. If the pressure in the sensor head
exceeds atmospheric pressure, the sensor head will be damaged and
the sensor head will pop out from the connection, causing damage or
injury to human body and other hazards. In that event, provide an
isolation valve or other so that the pressure in the sensor head does
not exceed atmospheric pressure.
Don′t disassemble.
Do not disassemble the vacuum gauge (controller, sensor head cable,
and sensor head)
Don′t modify.
Do not modify the vacuum gauge (controller, sensor head cable, and
sensor head). If it is modified, its action is not warranted. Also fire
or electric shock can result.
Check connection.
For safety reasons, connect the grounding terminal of the controller
to ground.

IV
Be cautious with operating environment.
Do not use the gauge where it may splashed with water. If it is
wetted, trouble, earth leakage or fire can result.
Ensure ventilation.
Do not plug the port for the fan and ventilation port. If it is plugged,
he
at will be contained inside, resulting in damage. The vacuum
gauge will not indicate a normal value either.
Keep out foreign matter.
If metal fragments or combustible material are admitted into the
gauge through the fan or ventilation port, remove them
. Otherwise,
the vacuum gauge may be damaged.
Use rated cable.
The rating of the supplied cable is 125 V 10A. If it is used at above
the rating, it will break.
Beware of impact.
Do not give an impact to the sensor head.
Comply with operating conditions.
Use the gauge in the specified environment.
Maintenance
Aluminum electrolytic capacitor, cooling fan and relay contact are
used for the electric circuit in the sensor unit. Generally, the life
expectancy of the aluminum electrolytic capacity is limited and the
higher the surrounding temperature, the shorter the life. It is
recommended to replace the aluminum electrolytic capacitor , cooling
fan
once every three years or at the time or repair or overhaul to
prevent components from being damaged.
Caution in repacking
When shipping the gauge, repack it in the same way as on delivery.
It is shipped bare, it may be damaged.
Disposal
When discarding the vacuum gauge, comply with your local
regulations. If the gauge was used in an environ
ment that can
cause hazards to human body, have it disposed of by an authorized
specialist in disposal.
Customer shall be responsible for the cost relating to disinstallation.
Check connection.
The contact output capacity is 100 VAC 0.5 A ,24VDC/1A(resistance
load). If a higher power is made/broken, do not use the vacuum
gauge contact, but use a switch with a higher capacity in conjunction.
(Use below 24 VDC is recommended.)
Connector life such as sensor cable
The female connector used for the sensor
cable used in this instrument has
alimited life.If the current load is large, so please refrain from connecting and
disconnecting connectors as much as possible.If the connector is overloarded,
the contact of the connector will be worse and it will not be usable.

V
Revision history
Date
No.
Reason
Sep.11,2008
02
GI-D7
：
Analog Output of GI-TL3 Compatibility added
May.12,2009
03
Correction of errors
Sep.15,2010
04
Added fuse type
Jun.25,2012
05
Correction of errors
Apr.5,2013
06
GI-M2
：
Added LOG output
Sep.18,2013
07
Correction of errors
Dec.2,2019
08
GI-D7
：
Added Pressure protecting function switching

1
Contents
1. FEATURES OF GI-SERIES ............... 5
2. SPECIFICATIONS AND
COMPONENTS........................................ 6
2.1. STANDARD SPECIFICATIONS.............6
2.2. STANDARD ACCESSORIES .................7
2.3. OPTIONS..........................................7
3. NOMENCLATURE AND FUNCTIONS
OF COMPONENTS .................................. 8
3.1. OPERATION SWITCH ........................8
3.2. FRONT PANEL LAMPS ......................9
3.3. FRONT PANEL MEASUREMENT
VALUE DISPLAY/SET VALUE INDICATOR ...10
3.4. REAR PANEL..................................11
3.5. EXT-I/O CONNECTOR ....................12
3.6. VIEW WHEN THE BOTTOM PANEL IN
CONTROLLER IS OPENED...........................13
4. INSTALLATION...............................14
4.1. PRELIMINARY OPERATION .............14
4.2. INSTALLING THE CONTROLLER .......14
4.3. INSTALLING THE SENSOR HEAD ......14
4.3.1. Measuring position...............14
4.3.2. Installing the sensor head ....14
4.3.3. Installation of WIB-N3、WIN-
N2/N3 （GI-D7、GI-N8）.......................15
4.4. CONNECTING THE CONTROLLER AND
SENSOR HEAD ...........................................15
4.4.1. Connection of controller (GI-
M2) and sensor head ...........................16
4.4.2. Connection of control and
sensor head cable (GI-D7/GI-N8) ........16
4.4.3. Connection of sensor head and
sensor head cable (GI-D7/GI-N8) ........17
5. FLOW OF PROGRAM RUN ..............19
6. STARTING UP GAUGE (SUPPLY OF
POWER) .................................................20
7. FRONT PANEL OPERATION...........21
7.1. FILAMENT ON/OFF.......................21
7.2. DEGASSING ON/OFF.....................22
7.3. EMISSION CURRENT (GI-N8 ONLY) 23
7.4. X-RAY FUNCTION ON/OFF (GI-N8
ONLY) 24
7.5. WHEN PRESSURE PROTECTION IS
ACTIVATED...............................................24
7.6. WHEN EXT-PROTECT IS
ACTIVATED...............................................24
7.7. DISPLAY WHEN AN ERROR OCCURS .24
8. SETTING .........................................25
8.1. SETTING OPERATION......................25
8.2. INITIAL SETTING ......................26
8.3. SELECTION OF SENSOR HEAD（GI-
D7 ONLY）...............................................27
8.4. SELECTING THE SENSITIVITY FACTOR
FUNCTION ................................................28
8.5. SETTING THE SENSITIVITY FACTOR
FUNCTION ................................................28
8.6. SETTING OF SET POINT 1/2 ............29
8.7. SELECTION OF RANGE CHANGEOVER
FUNCTION ................................................30
8.8. SETTING OF RANGE HOLD ............30
8.9. SELECTION OF DEGAS FUNCTION 31
8.10. SETTING OF DEGAS FUNCTION .31
8.11. SETTING OF FILAMENT 1/2 .........32
8.12. SELECTION OF ANALOG
FUNCTION ................................................33
8.13. SETTING OF ANALOG FUNCTION.33
8.14. SETTING OF ACTIVATED FILAMENT
（GI-N8 ONLY）......................................34
8.15. SETTING OF BAUD RATE.............34
9. FUNCTIONS ................................... 35
9.1. SETTING OF SENSITIVITY ...............35
9.1.1. Setting of sensitivity.............35
9.1.2. Setting of sensitivity.............35
9.1.3. Details of sensitivity set
values 35
9.1.4. Example for sensitivity set
values 36
9.2. SET POINT .....................................37
9.2.1. What is the set point?...........37
9.2.2. Setting of set point................37
9.2.3. Internal processing...............37
9.2.4. Set point activating
conditions ............................................37
9.2.5. Set point action when range
hold is active........................................37
9.3. SETTING OF RANGE CHANGEOVER .38
9.3.1. Setting of range changeover .38
9.3.2. Setting of range hold ............38
9.3.3. Range hold and recorder
output 38
9.4. ＤＥＧＡＳ ....................................39
9.4.1. What is DEGAS? ..................39
9.4.2. Setting of DEGAS mode .......39
9.4.3. Setting of timer mode ...........39
9.4.4. Degassing movement
conditon 39
9.4.5. Degassing operation .............39
9.4.6. Instructions in DEGAS.........40
9.5. FILAMENT CHANGEOVER ...............40
9.5.1. Filament changeover and
external output....................................40
9.5.2. Cautions in filament
chageover.............................................40
9.6. CHANGEOVER OF ANALOG OUTPUT 41
9.6.1. Setting of analog mode .........41
9.6.2. Measurement value output in
each status ..........................................41
9.6.3. LIN output in each status ....42
9.6.4. Pseudo-LOG output..............43
9.6.5. Range Hold Linear Output

2
(REC-HOLD) .......................................48
9.6.6. Logarithmic Output (GI-M2) 49
9.6.7. GI-D6 Compatibility output
（GI-D7 Only）......................................51
9.6.8. GI-TL3 Compatibility output
（GI-D7 Only）......................................55
9.7. X-RAY FUNCTION （GI-N8 ONLY）
57
9.7.1. What is X-Ray mode setting?57
9.7.2. How to actuate X-Ray
function 57
9.8. FILAMENT ACTIVATION（GI-N8
ONLY）....................................................58
9.8.1. Actuating conditions.............58
9.8.2. Operation..............................58
9.8.3. What is filament activation? 58
10. EXTERNAL INPUTS/OUTPUTS....59
10.1. SET POINT OUTPUT....................61
10.2. EXTERNAL DIGITAL OUTPUT ......61
10.3.EXTERNAL CONTROL INPUT .......63
10.4. METHOD OF EXTERNAL
CONTROL .................................................64
10.5. EXTERNAL PROTECT INPUT (EXT-
PROTECT)..............................................64
11. HOW TO USE COMMUNICATION
(RS-232C)................................................65
11.1. COMMUNICATION
SPECIFICATIONS .......................................65
11.1.1. Key specifications .................65
11.1.2. Baud rate setting..................65
11.1.3. Communication
cable/connector ....................................65
11.2. SEND COMMAND FORMAT ..........65
11.3. LIST OF COMMANDS ...................66
11.4. EXPLANATION OF COMMAND
ACTION 67
11.4.1. Changing over remote/local
control 67
11.4.2. Reading the connection
model 67
11.4.3. Control of filament................67
11.4.4. Control of degassing .............67
11.4.5. Reading the emission valid
signal 68
11.4.6. Setting the sensitivity ..........68
11.4.7. Setting and reading the set
point 68
11.4.8. Setting analog output ...........68
11.4.9. Reading the measured
pressure value and action status ........69
11.5. CAUTIONS IN OPERATION ...........69
12. TROUBLESHOOTING.................. 70
12.1. CAUSES OF NO EMISSION
CURRENT AND CORRECTIVE ACTIONS .......78
13. APPENDIX................................... 79
13.1. PRINCIPLES OF OPERATION ........79
13.2. TYPE OF MEASURABLE GAS AND
SPECIFIC SENSITIVITY FACTOR .................80
14. WARRANTY................................. 82
15. CERTIFICATE OF
CONTAMINATION................................. 83
16. CHINA ROHS DECLARATION..... 84
17. RELATED DRAWINGS................. 85
17.1. ION GAUGE.................................85
17.2. SENSOR HEAD ............................86
17.2.1. Sensor head GI-M2...............86
17.2.2. Sensor head GI-D7 ...............87
17.2.3. Sensor head GI-N8 ...............88
17.3. SENSOR HEAD CABLE（GI-M2）89
17.3.1. Sensor head cable (GI-M2)
2,5,10,15m ...........................................89
17.3.2. Sensor head cable (GI-M2) long
cable side.............................................90
17.3.3. Reference diagram of sensor
cable installation.................................91
17.4. SENSOR HEAD CABLE （GI-D7/GI-
N8）92
17.4.1. WIT socket type (GI-D7)
4,10,15,20,25ｍ....................................92
17.4.2. WIB socket type (GI-D7)
4,10,15,20,25ｍ....................................92
17.4.3. WIB-N3 socket type (GI-D7)
4,10,15,20,25ｍ....................................93
17.4.4. WIN-N2 socket type (GI-N8)
4,10ｍ93
17.4.5. WIN-N3 socket type (GI-N8)
4,10ｍ93
17.4.6. WIB Pin socket type (GI-D7)
4,10,15,20,25ｍ....................................94
17.4.7. WIN-G Pin socket type (GI-N8)
4,10ｍ94
17.4.8. Sensor head cable （GI-D7/GI-
N8）Long cable ...................................95

3
Contents
Fig. 3-1 Operation switch panel......................................................................................................8
Fig. 3-2 Front panel lamps..............................................................................................................9
Fig. 3-3 Front panel measurement value display/set value indicator .......................................10
Fig. 3-4 Rear panel.........................................................................................................................11
Fig. 3-5 Input/output connector pin assignment .........................................................................12
Fig. 3-6 View when bottom panel in controller is opened...........................................................13
Fig. 4-1 Installation of sensor head ..............................................................................................14
Fig. 4-2 Reference drawing for mounting nude gauge to short tube..........................................15
Fig. 4-3 Connection of controller (GI-M2) and sensor head........................................................16
Fig. 4-4 Conection of sensor head cable and GI-D7/N8...............................................................16
Fig. 4-5 WIT connection.................................................................................................................17
Fig. 4-6 WIB(WIT) Connection......................................................................................................17
Fig. 4-7 WIN-G Connection...........................................................................................................18
Fig. 4-8 WIB-N3、WIN-N Connection...........................................................................................18
Fig. 9-1 Analog output graph (Linear) .........................................................................................42
Fig. 9-2 Supplementary explanation of output voltage (GI-M2) ................................................44
Fig. 9-3 Supplementary explanation of output voltage (GI-D7).................................................46
Fig. 9-4 Supplementary explanation of output voltage (GI-N8).................................................47
Fig. 9-5 REC-HOLD output (REC-HOLD with E-4) ...................................................................48
Fig. 9-6 LOG output.......................................................................................................................50
Fig. 9-7 GI-D6 Compatibility output (WIT) .................................................................................52
Fig. 9-8 GI-D6 Compatibility output (WIB) .................................................................................53
Fig. 9-9 LOG output.......................................................................................................................56
Fig. 10-1 Set point internal circuit ...............................................................................................61
Fig. 10-2 Digital output internal circuit.......................................................................................61
Fig. 10-3 Data valid signal (strobe signal) actuating chart ........................................................62
Fig. 10-4 External control using internal power supply .............................................................63
Fig. 10-5 External control using external power supply.............................................................63
Fig. 10-6 Method of External Control...........................................................................................64
Fig. 17-1 Dimensional drawing・panel cut drawing ....................................................................85
Fig. 17-2 Sensor heas GI-M2.........................................................................................................86
Fig. 17-3 Sensor head electrode and pin assignment..................................................................86
Fig. 17-4 Sensor head GI-D7.........................................................................................................87
Fig. 17-5 Sensor head GI-N8.........................................................................................................88
Fig. 17-6 Sensor head cable connection diagram (GI-M2) ..........................................................89
Fig. 17-7 Sensor head cable mouting reference drawing ............................................................89
Fig. 17-8 Long cable (GI-M2).........................................................................................................90
Fig. 17-9 Sensor head cable connection diagram GI-D7 WIT socket ) .......................................92
Fig. 17-10 Sensor head cable connection diagram(GI-D7 WIB socket type) .............................92
Fig. 17-11 Sensor head cable connection diagram (GI-D7 WIB-N3 socket type)......................93
Fig. 17-12 Sensor head cable connection diagram (GI-N8 WIN socket type)............................93
Fig. 17-13 Sensor head cable connection diagram (GI-D7 Pin socket type) ..............................94
Fig. 17-14 Sensor head cable connection diagram (GI-N8 Pin socket type)..............................94
Fig. 17-15 Long cabel (GI-D7/GI-N8)............................................................................................95
Table. 8-1 Factory Set Values .......................................................................................................26
Table. 9-1 Sensitivity Factor Reference .......................................................................................36
Table. 9-2 Measurement Value Output Status............................................................................41
Table. 9-3 Measured Pressure Value Table (GI-M2)...................................................................43
Table. 9-4 Hysteresis by the pressure that increased and decreased........................................43
Table. 9-5 Measured Pressure Value Table (GI-D7) ...................................................................45
Table. 9-6 Hysteresis by the pressure that increased and decreased........................................45
Table. 9-7 Measured Pressure Value Table (GI-N8) ...................................................................47
Table. 9-8 Hysteresis by the pressure that increased and decreased........................................47

4
Table. 9-9 Measurement value outputs (GI-M2) .........................................................................49
Table. 9-10 Measurement value outputs......................................................................................51
Table. 9-11 Measurement value outputs......................................................................................53
Table. 9-12 Measurement value outputs......................................................................................55
Table. 10-1 A list of EXT-I/O functions ...........................................................................................59
Table. 13-1 Relative Sensitivity Factor of Ion Gauge for Each Gas with Respect to Nitrogen
and Relative Ionization Cross-Sectional Area ..............................................................81