Ulvac PHS-04N User manual

RF0046E-04
Instruction Manual
Phase shifter
MODEL:
Phase shifter
PHS-04N
PHS-08N
4th Edition, July 01, 2023
ULVAC, Inc.
*Please be sure to read this manual before using this product.
In addition, store this manual with care so that you can use at any time.

RF POWER SUPPLY and MATCHINGBOX
Introduction
i
Introduction
Thank you for purchasing this product.
This instruction manual is a guidebook that explains how to use this product safely and
efficiently. The basic precautions, operating points, and inspection and maintenance points
necessary for handling are listed. To prevent serious accidents, carefully read and thoroughly
understand the content of this instruction manual.
*Caution
Before using this product, always read this instruction manual and thoroughly understand
its running, operation, inspection and maintenance.
Do not run this product until you completely understand the content of this instruction
manual.
Please review content that is not clear and make efforts to use this product correctly.
About safety [Notes on safety] (Pii)
[Safety symbols] (Piii)
[For safe usage] (P1)
The items above are explained in this manual. Please understand them well before
use of the product.
Place this instruction manual near this product and store it safely.
If the product is moved to a different installation location, always move this
instruction manual along with it.
The content of this instruction manual may differ with the product you use because
the product may have been improved.
If you have any questions or concerns, please contact ULVAC or its distributors.
Please perform safe operation and proper maintenance.
There may be unavoidable changes or revisions of the content of this instruction manual
to change or improve product specifications.
*The copyright of the instruction manual and safety guide belong to ULVAC, Inc.
This instruction manual may not be copied in whole or in part without the
permission of ULVAC, Inc.
The use of this instruction manual other than for the handling of this product and to
which ULVAC, Inc. has agreed is prohibited.
Reproduction of any portion of this instruction manual for use by third party without
the consent of ULVAC is prohibited.

RF POWER SUPPLY and MATCHINGBOX
Introduction
ii
1. Notes on safety
1
Most accidents are due to careless operation, inspection, maintenance, and repair. In
addition, they are more likely to occur when basic safety precautions are not followed or
when risk prediction is neglected. Accidents can be prevented by anticipating potentially
dangerous conditions.
2
Injuries and death occur due to incorrect operation, and improper inspection and
maintenance. Always carefully read and fully understand the details of operation,
inspection, and maintenance before running this product.
3
Safety warnings and precautions are clearly specified in this instruction manual and on
the warning labels. Please note that if you disregard these warnings and precautions, an
injury or death may result.
4
Managers, operators, and maintenance personnel must read this document well before
operating or maintaining this product. Ensure that personnel that know the proper handling
and have received the prescribed training carry out the proper work using the correct
techniques and tools.

RF POWER SUPPLY and MATCHINGBOX
Introduction
iii
2. Safety Symbols
Danger
Indicates a state of immediate danger that will lead to
death or serious injury if it is not avoided.
Work that ignores this safety section will likely lead to death
or serious injury of personnel or damage to factory
equipment (including this product).
Warning
Indicates a state of danger that may lead to death or
serious injury if it is not avoided.
Work that ignores this safety section may lead to death or
serious injury of personnel or damage to factory equipment
(including this product).
Caution
Indicates a state of danger that may lead to minor
injury or damage if it is not avoided.
Work that ignores this safety section may cause minor
injury to personnel, damage equipment, or make
adjustments necessary.
Note
There is no direct danger, but the content is intended to
inform you about operational safety or proper and safe use
of this product.
It is not possible to predict accurately, operation, inspection, and maintenance dangers in
all environments.
This instruction manual and the warnings listed on the warning labels affixed to this
product do not satisfy all aspects of safety.
Each person that performs maintenance work must carefully pay attention to work and
keep safety in mind so that accidental deaths and injuries, serious malfunctions, and
product damage do not occur.
If operation, inspection, or maintenance not listed in this instruction manual is to be
performed, personnel must pay sufficient attention to safety and carry out these actions
at their own risk.

RF POWER SUPPLY and MATCHINGBOX
Introduction
iv
3. About this product
The descriptions and illustrations in this instruction manual are based on information at
the time the manual was created. The instruction manual may change without notice.
Because these changes affect inspections, check the latest information at ULVAC
distributors before starting work.
4. If you notice a problem with the product
If you notice a problem, verify the symptoms and breakdown condition. To prevent loss
due to misunderstanding or misrecognition and allow repairs to be completed promptly,
please try to make the details as clear as possible.
If you have determined there has been a breakdown or if you have questions, please
contact us. Before contacting us, note the product name or model name, serial number,
and symptoms in as much detail as possible.
5. About disposal
Dispose of this product in accordance with national and local regulations.
The customer must bear any disposal costs.

RF POWER SUPPLY and MATCHINGBOX
Introduction
v
No charge repair provisions
１This system has been shipped after undergoing an extensive in-house inspection. However, in the event a failure occurs that ULVAC Inc. is
responsible for, such as a manufacturing defect or accident during shipment, please inquire with the ULVAC Inc. or dealer regarding repairs.
The system will be repaired or replaced at no charge.
２Subject to warranty
1) Main Unit and Accessories
３Warranty period
1) Domestic transaction: 1.5 year from date of shipment from ULVAC.
2) Direct export transaction: 1.5 year from receiving B/L.
４Warranty range
1) A system damaged by problems during shipping at time of delivery. However, for direct export transactions, pursuant to the warranty
range stipulated in latest Incoterms.
2) A system that does not meet basic specifications even though it is used within the usage conditions, such as the usage temperature
range and usage power supply.
５Response method
1) For domestic transactions
①ULVAC will send a replacement system, or you will return the system to ULVAC or the nearest ULVAC service center where it will
be repaired.
②If an on-site response is required, consult separately with ULVAC, Inc or the nearest sales office or dealer.
2) For direct export transactions
①ULVAC will send a replacement system, or you will return the system to ULVAC or the nearest ULVAC service center where it will
be repaired. Return shipping expenses are borne by the customer.
６Warranty disclaimer
1) A system that has exceeded the warranty period.
2) Malfunction or failure caused by natural disasters like fire, wind and flood damage, earthquakes, lightning, and others, or disasters from
force majeure events such as war.
3) Malfunction or failure caused by inattention during handling or mistaken usage.
4) A system modified, disassembled, or repaired without ULVAC's approval.( When it is confirmed that the sheet metal of the power
supply body has been opened.)
5) Malfunction or failure from abnormal environments (strong magnetic fields, radiation environments, high temperatures, high humidity,
flammable gas atmospheres, corrosive gas atmospheres, dust).
6) Malfunction or failure from electronic noise.
7) Secondary damage that has occurred from a system defect, process patents, and/or products manufactured by your company using
this system.
8) When a defect is judged by ULVAC technicians to have occurred because usage did not meet the system's usage conditions.
9) Consumables (consumable parts are listed in “6. Maintenance”).
10) When malfunction or damage occurs from mishandling in transport/moving after delivery.
11) When replacement is necessary because of the lifespan of used parts.
12) When parts cannot be procured because their production has ended.
13) When lighting surges occur or when applying voltage outside the input fluctuation range (including applying spike voltage/during
momentary power losses).
７Others
1) When an individual contract or memorandum related to specifications exists separately from this document, the warranty conforms to
that content.
2) For questions or consultations about the system, first check the model and manufacturing numbers, then contact the nearest sales
office, dealer, or ULVAC, Inc.
3) The content of this document is subject to change without prior notice.
4) Unless otherwise indicated, parts replaced during repair are the property of ULVAC, Inc.
※1 Note that the lending of replacement equipment during the repair period and dispatch repair will incur separate expenses.
※2 For on-site dispatch repairs, the actual expenses billed are the expenses related to the trip (travel expenses).

RF POWER SUPPLY and MATCHINGBOX
Table of Contents
Table of Contents
1. For safe usage.......................................................................................................................1
1-1. Handling precautions ......................................................................................................1
1-2. Warning labels / nameplates...........................................................................................1
1-3. Inquiries...........................................................................................................................1
2. Overview................................................................................................................................2
2-1. Introduction......................................................................................................................2
2-2. Features..........................................................................................................................2
2-3. System configuration.......................................................................................................3
2-4. PHS-N Specifications......................................................................................................4
3. Preparation.............................................................................................................................6
3-1. Check of accessories......................................................................................................6
3-2. PHS installation...............................................................................................................6
3-2-1. Attachment method and rack manufacturing...........................................................7
3-2-2. PHS installation environment...................................................................................7
3-2-3. Storage environment and transportation conditions................................................8
3-5. Connection of cables.......................................................................................................8
4. Explanation of functions.......................................................................................................11
4-1. Explanation of functions of the front panel....................................................................11
4-2. Explanation of functions of the rear panel ....................................................................12
5. Operation methods ..............................................................................................................13
5-1. Switching on the power supply.....................................................................................13
5-2. Screen 1........................................................................................................................13
5-3. Screen 2........................................................................................................................14
5-4. Screen 3........................................................................................................................14
5-5. Screen 4........................................................................................................................15
5-6. Screen 5........................................................................................................................15
5-7. Screen 6........................................................................................................................16
5-8. External analog control.................................................................................................16
6. Maintenance.........................................................................................................................18
6-1. Maintenance and inspection.........................................................................................18
7. Reference materials.............................................................................................................19

RF POWER SUPPLY and MATCHINGBOX
1. For safe usage
1
1. For safe usage
1-1. Handling precautions
This section lists important safety points related to this product. Understand the following
points well before using this product.
Danger:
The voltage generated by this power supply is sufficient to endanger human
life. Use sufficient caution during handling. If by chance a person touches this
voltage, a serious accident will result. Take sufficient care not to touch
high-voltage areas. Furthermore, for your safety, never remove the covers.
1-2. Warning labels / nameplates
Note:
Keep warning labels clean and legible. Use a cloth and water to clean
warning labels. Do not use gasoline, organic solvent, or other similar items. If
a label has been damaged, lost, or become illegible, please contact ULVAC or
a distributor. The nameplate is affixed to the rear surface of the power supply.
Take special caution and ensure that it is always legible.
1-3. Inquiries
For part orders, product inquiries, and inquiries about product breakdowns, confirm the
product information, and then contact us. Particularly when a breakdown has been
determined, inform us of the product information, history, and symptoms in as much detail as
possible.
■ Product information (listed on nameplate)
Product model
Product serial number information (serial number, lot number)

RF POWER SUPPLY and MATCHINGBOX
2. Overview
2
2. Overview
This section describes the features, configuration, and specifications of this product.
2-1. Introduction
This system was designed with the goal of phase adjustment of RF ink spattering, plasma
CVD, etching, and other plasma generation power supplies. This system can change
arbitrarily the phase of output of each power supply for multiple units of RF power supply
running at 13.56 MHz.
2-2. Features
This system can output while changing the phase simultaneously up to a maximum of 4
to 8 channels.
The system can change the oscillation frequency by adopting a oscillation method by
means of DDS.
The system has been miniaturized, made lighter, and made more maintainable.

RF POWER SUPPLY and MATCHINGBOX
2. Overview
3
2-3. System configuration
This system is made up of the phase shifter unit and the RF power supply system that you
use separately. Figure 2-1 “System configuration”shows the system configuration.
The following equipment is required for basic configuration.
(1) Phase shifter unit
(2) RF power supply system (RFS-N Series)
Figure 2-1 System configuration
Plasma chamber
Single-phase AC 100 V
(When a AC input cable compliant with 200 V
is used, 200 V is also possible)
AC 100 V input cable
RFS-OSC
PHS-**N
(Phase shifter)
RFS-****N
(RF generator)
MBX-****N
(Matching box)
Breaker (short circuit
breaker)
External controller (PLC, etc.)
AC**-N
External control cable
RF**-N
AMC-N
RFS-****N
(RF generator)
Breaker (short circuit breaker)
MBX-****N
(Matching box)
External controller (PLC, etc.)
AC**-N
External control cable
RF**-N
AMC-N
Up to 4 or 8 channels can be connected
Plasma chamber

RF POWER SUPPLY and MATCHINGBOX
2. Overview
4
2-4. PHS-N Specifications
Table 2-1 PHS-04N individual specifications
Class
Category
Specification value
PHS-04N
Input
Input frequency
Single phase 50 Hz/60 Hz
Input voltage
AC100 V-240 V
Voltage change range
±10% of rated voltage (AC90 V-AC264 V)
Input capacity
70 VA or less
Input connector
IEC60320-C14 (Male)
Leakage current
3 mA or less
Output
Oscillation frequency
13.56 MHz ±0.05% (But 10°C to 40°C)
Phase setting range
0° to 360°
Output impedance
50 Ω
Output connector
BNC (Female)
OSC output
10 dBm ±3 dBm
Output channels
4 channels
Cooling
Cooling method
Natural air-cooling
Exterior
External dimensions
480(W) x 49 (H) x 192 (D) (Excluding protuberances)
Shape
Rackmount shape
Weight
About 3 kg or less
Environment
Ambient temperature
10°C to 40°C
Ambient humidity
20% to 80% (no condensation)
Atmosphere
Cannot be used within combustible, acidic, or other
corrosive gas atmospheres
Compliant standard
RoHS(EU Directive)
*Connect to a power supply line of single-phaseAC 100 V to 240 V (50 Hz to 60 Hz) and 70
VA or higher, and then install a 5 Abreaker that complies with UL 489/IEC 60947-1 etc. for a
phase shifter.

RF POWER SUPPLY and MATCHINGBOX
2. Overview
5
Table 2-2 PHS-08N individual specifications
Class
Category
Specification value
PHS-08N
Input
Input frequency
Single phase 50 Hz/60 Hz
Input voltage
AC100 V-240 V
Voltage change range
±10% of rated voltage (AC90 V-AC264 V)
Input capacity
70 VA or less
Input connector
IEC60320-C14 (Male)
Leakage current
3 mA or less
Output
Oscillation frequency
13.56 MHz ±0.05% (But 10°C to 40°C)
Phase setting range
0° to 360°
Output impedance
50 Ω
Output connector
BNC (Female)
OSC output
10 dBm ±3 dBm
Output channels
8 channels
Cooling
Cooling method
Natural air-cooling
Exterior
External dimensions
480(W) x 49 (H) x 192 (D) (Does not include
protuberances)
Shape
Rackmount shape
Weight
About 3 kg or less
Environment
Ambient temperature
10°C to 40°C
Ambient humidity
20% to 80% (no condensation)
Atmosphere
Cannot be used within combustible, acidic, or other
corrosive gas atmospheres
Compliant standard
RoHS(EU Directive)
*Connect to a power supply line of single-phaseAC 100 V to 240 V (50 Hz to 60 Hz) 70 VA or
higher, and then install a 5A breaker that complies with UL 489/IEC 60947-1 etc. for a phase
shifter.

RF POWER SUPPLY and MATCHINGBOX
3. Preparation
6
3. Preparation
This section lists the necessary preparation and cautions from receiving this product until it can be used.
3-1. Check of accessories
Table 3-1 PHS-N standard accessories
Product name
Remarks
Quantity
(1) AC 100 V input cable
For single phase 100 V, 3 m
1
User terminal AC 100 V (3 prongs with ground)
(2) External control connector
HDAB-15S(05) * Connector(male)
HDA-CTH1(10) * Cover
1
3-2. PHS installation
Install the PHS unit in the following manner.
Danger:
After making sure that the power supply switch of this equipment and the main
breaker are off, connect the power supply cord.
Caution:
This product cannot accommodate lightning surges, spike voltage, or
momentary power outages. Depending on the power receiving facilities, the input
of a lightning surge, spike voltage, or momentary power outage will result in
damage or malfunction of the product. Please use this product in an environment
without lightning surges, spike voltage, or momentary power outages.

RF POWER SUPPLY and MATCHINGBOX
3. Preparation
7
Danger:
To prevent electric shock, always implement a protective ground before
switching on the power of this equipment. The power supply cord included with
this equipment is a three-prong cord with ground wire. Therefore, use a
three-prong outlet with a protective ground terminal. Furthermore, when a
three-prong to two-prong conversion adapter is to be used, connect the ground
wire of the conversion adapter reliably to the protective ground terminal. If an
extension cord without a protective ground wire is used, the protection function
is not available. When you will use a two-prong cord, always implement a Class
D grounding of the ground terminal on the main unit.
3-2-1. Attachment method and rack manufacturing
The configuration of PHS enables attachment to a full rack. When machining rack
attachment holes, refer to the included exterior diagram.
The front panel of PHS is not constructed to bare the weight of the main unit. Therefore,
set a construction in which force is not applied to the front panel. See "Figure 3-1
Attachment example of PHS". Furthermore, ensure sufficient clearance to allow air intake
around the power supply. When the product will be used with a rackmount, ensure
sufficient ventilation so that the temperature inside the rack does not exceed the
specification temperature. If the product is operated at a temperature outside specifications,
damage may result.
Figure 3-1 Attachment example of PHS
3-2-2. PHS installation environment
At operating conditions, the ambient temperature must be from 10°C to 40°C.
When choosing an installation location, avoid direct sunlight, heat, dust, vibration,
humidity and other similar conditions, and choose a location with good ventilation.
The atmosphere must not include corrosive gas.
PHS
ラ
ッ
ク
ラ
ッ
ク
↑下から支える構造にする
パネルに力がかからないような構造
ししてください。
Construct so that force is not
applied to the panel.
Rack
Rack
↑ Set a structure to support from below

RF POWER SUPPLY and MATCHINGBOX
3. Preparation
8
Equipment must be used at an altitude of 2,000 m or lower.
Ensure good airflow to the front and rear sides.
Establish a gap of 10 cm from the front side and 10 cm or more from the rear side.
When equipment will be installed in the cabinet or similar location, use panels with
air-intake holes on the front and rear sides, and set a structure for the rear side so that
heat does not accumulate inside.
When installing in a standard rack, always use a rack with a support thickness of 3 mm
or more.
The front panel has only a function to prevent falling from the rack.
Avoid installing in a location in which the floor is not flat.
3-2-3. Storage environment and transportation conditions
When this product will be transported or stored in a warehouse, the ambient
temperature must be from -25°C to 55°C, the humidity must be 80% or less, there
must be no condensation, and there must be no ingress of water, dust, etc.
3-5. Connection of cables
Connect cables while referring to "Figure 3-2 System wiring diagram". For the cables to be
used, refer to "Table 3-2 Cable list". The customer must prepare the RF power supply
system unit.
Plasma chamber
Single-phase AC 100 V
(When a AC input cable compliant with 200 V
is used, 200 V is also possible)
AC 100 V input cable
RFS-OSC
PHS-**N
(Phase shifter)
RFS-****N
(RF generator)
MBX-****N
(Matching box)
Breaker (short circuit
breaker)
External controller (PLC, etc.)
AC**-N
External control cable
RF**-N
AMC-N
RFS-****N
(RF generator)
Breaker (short circuit breaker)
MBX-****N
(Matching box)
External controller (PLC, etc.)
AC**-N
External control cable
RF**-N
AMC-N
Up to 4 or 8 channels can be connected
Plasma chamber

RF POWER SUPPLY and MATCHINGBOX
3. Preparation
9
Figure 3-2 System wiring example

RF POWER SUPPLY and MATCHINGBOX
3. Preparation
10
* The customer must separately prepare the RF power supply system unit to be used.
* Up to 8 RF power-supply units can be used simultaneously with the PHS. When fewer than
8 units are to be used, connection to the BNC connector of an unused oscillation signal
output section is not necessary.
* Use a coaxial cable for oscillation signal output (OSC-RFS cable) of up to 24 m. When a
cable longer than 24 m is used, equipment may not operate normally due to attenuation by
the cable.
* Use the equipment after changing the setting to enable the external oscillation signal in the
settings of the RF power-supply to be used.
Table 3-2 Cable list
Product name
Remarks
Quantity
(1) AC 100 V input cable
For single phase AC 100 V, 3 m
1
User terminal AC 100 V (3 prongs with ground)
(2) RFS-OSC cable
Coaxial cable 3D-2V (24 m or less)
Number of
channels used
* When the RFS-OSC cable (3D-2V) is laid, keep it as far as possible from the chamber, RF
output coaxial cable, and matching box and do not bundle it with other cables. If the cable is
laid in direct contact, high frequencies will be superimposed on the cable, which may cause
a burnout.

RF POWER SUPPLY and MATCHINGBOX
4. Explanation of functions
11
4. Explanation of functions
This section explains the functions.
4-1. Explanation of functions of the front panel
Figure 4-1 Explanation of functions of front panel
Table 4-1. Explanation of functions of front panel
Category
Function
(1)POWER LED
Switches on when the power supply is on.
(2)FREQ LED
Reserve LED for expanded functionality. Normally not used.
(3)PLS LED
Reserve LED for expanded functionality. Normally not used.
(4)PHASE LED
Switches on when phase setting mode has been selected.
(5)ENT KEY
Press this key to enable setting changes or complete configuration.
(6)DEC KEY
Press this key to decrease a setting value or change a setting.
(7)INC KEY
Press this key to increase a setting value or change a setting.
(8)PREV KEY
Press this key to return to the previous item or page.
(9)NEXT KEY
Press this key to move to the next item or page.
(1)
(2)
(6)
(7)
(8)
(9)
(5)
(4)
(3)

RF POWER SUPPLY and MATCHINGBOX
4. Explanation of functions
12
4-2. Explanation of functions of the rear panel
Table 4-2. Explanation of functions of the rear panel
Category
Function
(1)OSC1 to OSC4
BNC (female) connector for output of the oscillator signal.
*BNC_Female
(2)OSC5 to OSC8
BNC (female) connector for output of the oscillator signal.
*BNC_Female
(3)EXT.CONT
Connector for external analog control.
*Dsub_15_Male
(4)RS-232C
*Normally not used.
(5)Protection conduction
terminal
Ground terminal. Implement Class D grounding.
*M4_Stud_Bolt
(6)AC input
Connector for power supply input. Use a three-prong
connector.
*IEC60320-C14 (Male)
* Class D grounding: grounding of 100 Ω or less by a metal wire with tensile strength of 0.39 kN or more or a
soft copper wire with a diameter of 1.6 mm or more.
(1)
Figure 4-3 Explanation of functions of the PHS-04N rear panel
(3)
(4)
(5)
Figure 4-3 Explanation of functions of the PHS-08N rear panel
(6)
(1)
(2)
(3)
(4)
(5)
(6)