Ulvac VPC-260F User manual

No.32100-2-02-6
Compact Vacuum Coater
VPC-260F
ULVAC KIKO, Inc.
User’s Manual
Please read this manual thoroughly to ensure safe and effective operation
of this equipment.
Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described in
this manual is subject to changes in dimensions and specifications without
prior notice.

Table of Contents
Items with shade include description on safety.
To Safely Use This Equipment
(1) Before Using .............................................................................. 1
1. Target Users.......................................................................... 1
2. Read the Manual Thoroughly ................................................ 1
3. Keep This Manual in a Safe Place......................................... 1
4. Warranty................................................................................ 1
5. Statutory Requirements for Disposal ..................................... 1
6. Safety during Repair.............................................................. 1
(2) Product Overview....................................................................... 2
1. Purpose of This Product and Actions that are Prohibited ...... 2
2. Safety Device and its Purpose and Functions ....................... 2
3. Product Specifications ........................................................... 3
4. Individual Unit Specifications ................................................. 3
5. Standard Accessories............................................................ 5
6. How to Use Switches, Handles, and Operation Levers ......... 6
7. Layout of Switches, Handles, and Operation Levers ............. 7
Evacuation system drawing .................................................. 7
Electrical system drawing...................................................... 7
(3) Opening the Package and Installation........................................ 8
1. General Cautions................................................................... 8
2. Package upon Delivery.......................................................... 8
3. Installation Site ...................................................................... 8
4. Power Supply ........................................................................ 9
5. Necessary Tool List ............................................................. 10
Evaporation power supply cables connection diagram ....... 10
(4) Operations................................................................................ 11
1. Risks and Safety Measures upon Operations...................... 11
2. Evacuation Device Operation Procedure............................. 12
2-1 Preparation ................................................................... 12
2-2 Operations .................................................................... 12
2-3 Stop .............................................................................. 12
3. Deposition Steps ................................................................. 13
3-1 Releasing the vacuum chamber.................................... 13
3-2 Vacuum evacuation of vacuum chamber ...................... 13

4. Film Formation Steps .......................................................... 14
4-1 Preparation ................................................................... 14
4-2 Film formation ............................................................... 14
5. Measures upon Abnormal Conditions.................................. 14
5-1 Instantaneous power outage......................................... 14
5-2 Long power outage ....................................................... 14
5-3 Operation after power recovery..................................... 14
(5) Maintenance and Repair .......................................................... 15
1. Risks and Safety Measure upon Maintenance and Repair.. 15
2. Maintenance and Repair that Can be Made by User........... 16
3. Removal, Maintenance, and Installation of Devices ............ 16
3-1 Oil sealed rotary vacuum pump .................................... 16
3-2 Oil diffusion pump ......................................................... 17
3-3 Oil Mist Trap (Sold Separately) ................................... 17
3-4 O-ring at gas bell jar...................................................... 18
3-5 Glass bell jar ................................................................. 18
4. Maintenance and Inspection Points..................................... 18
5. Troubleshooting................................................................... 19
6. Storage of Equipment.......................................................... 20
7. Consumable List.................................................................. 20
(6) Disposal ................................................................................... 22
1. Cautions upon Disposal....................................................... 22
(7) Optional Parts .......................................................................... 22
1. Standard Optional Parts List................................................ 22

A
To Safely Use This Equipment
Thank you for purchasing our product. This pump is designed exclusively for vacuum
evacuation, and it may malfunction or cause accidents if operated inappropriately.
Please read the manual thoroughly, and pay specific attention to inspection,
maintenance and safety guidelines. Read and fully understand the description of this
manual to prevent serious accidents from occurring.
The copyright of this user’s manual and safety guides are reserved by Technical
Division of Ulvac Kiko.
No part of this document, in whole or part may be reproduced without permission of
Ulvac Kiko Inc.
Read this section before using the VPC-260F. Follow the instructions below to safely
use the device and prevent personal injuries from occurring.
Please comply with them all the time.
The symbols below have the following meaning
This indicates action or practice that should be
made.
Always make connection with the earth.
This indicates the action or practice that should be
prohibited.
Do not disassemble.
Do not touch.
Danger Incorrect handling of the equipment is very likely
to result in death or serious injury to the operator.
Warning Incorrect handling of the equipment may result in
death or serious injury to the operator.
Caution
Incorrect handling of the equipment may result in
light or medium injuries to the operator or damage
to the equipment.

B
Caution
Check labels
The warning labels are pasted on the following parts.
1) Glass bell jar (PL001) (PL005)
2) Left back of the rack (PL004)
3) Main valve handle (PL008)
4) Around the oil diffusion pump (D. P) (PL007)
5) Liquid nitrogen trap (PL006)
When accompanied by a bell jar cover.
6) Bell jar cover (PL001) (PL005)
When accompanied by a lift.
7) Lift (PL003)
Contact us if label is contaminated or peeled off.
Warning
Check the
capacity
Primary power supply
Please prepare the following: Single-phase 100 V, 13.5 A
or more Single-phase 200 V, 7.5 A or more
Smaller power supply capacity may cause the breaker to trip due to
overcurrent during the operation.
Do not share
For the primary power supply, a single power supply
should be provided for the device, and other equipment
should not be connected with it.
Breaker capacity shortage may cause the breaker to trip due to
overcurrent during the operation.
Ground the
grounding wire
Employ Level D grounding.
The grounding wire for 200-V power supply is the green
wire.
Use a plug with grounding wire for 100-V power supply.
If you use a plug adapter, connect the grounding wire
with a nearest grounding terminal.
If incorrect grounding is made, this may cause electrical shock in
case of failure or current leakage.
Check the
cable
capacity
Avoid using an extension cable. However, if it must be
used by necessity, use the following cable.
For 100-V power supply: 2.0 mm2or more
For 200-V power supply: 1.25 mm2or more
If a thinner cable is used, this may cause overheating, ignition, or fire.
Avoid this
action
Do not place any object on the cable for the primary side.
Otherwise, such action may cause electrical shock or fire.
Avoid electrical
shock
Do not touch the terminal block or other connectors if the
primary cable plug is being inserted into a socket.
Otherwise, the operator may suffer electrical shock.
Power Supply
Warning Label

C
Warning
Avoid this
action
This product does not have explosion-proof design, and
thus use in environments where inflammable substances
are present should be avoided.
Otherwise, explosion could occur, causing fire and burns.
Avoid this
action
Temperature at a lower part of the oil diffusion pump is
extremely high during operation. Do not place flammable
objects around it.
This can cause fire.
Do not touch
Do not touch the product with a bare hand during
operation or within 30 minutes after operation ceases
because the temperature of the oil diffusion pump and
the oil sealed rotary vacuum pump temperature rise.
Otherwise, your hands may be burned.
Caution
Use oil mist
trap
Oil mist will be spread from the evacuation outlet of the
oil sealed rotary vacuum pump during roughing
operation. Use an oil mist trap (sold separately).
Otherwise, oil spread may contaminate the room or affect human
health.
Ventilate
Pump is heated during operation.
Room temperature rises.
Warning
Check the
environment
Install the equipment where the following conditions are
satisfied.
1) Flat surface
2) Floor with sufficient strength
3) Well-ventilated place
4) Place without direct sunlight
5) Room with temperatures between 7°C and 30°C.
6) Location where there is no risk of fire
7) Location where no corrosive chemicals or gases are
present.
8) Place without electrical noises, which may cause
adverse effect to the product.
Otherwise, operation failure or durability degradation may occur.
Caution
Work by two or
more people
Lifting and moving of the equipment should be made by
two or more people.
Otherwise, you could injure your back.
Work by two or
more people
Installation or removal of lift (sold separately) should be
made by two or more people.
Otherwise, you could injure your back.
Fix the
product
After the installation, secure the product with the stoppers
that are attached to the casters.
This is made to prevent movement or damage upon earthquake.
Environment
Installation

D
Warning
Avoid this
action
Do not apply any shock to the glass bell jar, and avoid
heating it to 50°C or higher.
In a case of explosion upon vacuum condition, the
exploded pieces will spread.
This may cause a serious damage to the product.
Check
ventilation
Please make sure to ventilate the room when using liquid
nitrogen.
The nitrogen can potentially reduce the oxygen in the
room.
This may cause an oxygen deficiency accident.
Caution
Wear gloves
When using liquid nitrogen, wear gloves to protect your
hands.
If liquid nitrogen splashes and adheres to your skin, you may feel
acute pain momentary.
Leave open
air
After the oil sealed rotary vacuum pump stops, open
BACK.P VENT(or RP LEAK) to leave the inside of the
roughing piping open air.
This must be done to prevent reverse oil flow.
Confirm
complete
close
A
fter confirming complete closure of the main valve, let
out the air in the vacuum chamber.
If air comes into the oil diffusion pump during operation, it
deteriorates the oil and lowers the performance.
Operation failure of the three-way valve may occur.
An inflow of air during liquid nitrogen injection will cause condensable
gases to adhere to the trap excessively, thus degrading the
performance.
Operations

E
Warning
Wear
protective gear
Wear a dust-proof mask and gloves to clean the thin film
adhered to the inside of the bell jar and feed-through
collar.
The thin film could by broken into minute particles, and float in the air,
which could be inhaled into human body.
Confirm
Since the glass bell jar weighs 7 kg, installation and
removal should be made with correct posture. Work
without correct posture may cause an accidental drop of
jar or lower back injuries.
Otherwise, you could injure your back.
Check
Check everyday for looseness of the fixture clips and
eyebolts of both ends of the wire rope for lift (sold
separately).
If they are loose, the bell jar could accidentally drop.
Caution
Work by two or
more people
Installation and removal of the oil diffusion pump and oil
sealed rotary vacuum pump should be performed by two
or more people.
Otherwise, you could injure your back.
Replace
periodically
Oil mist trap (sold separately) should be replaced every
six months to one year.
Clogging in the element increases evacuation resistance, which may
cause oil leakage from the axis sealing area or oil level gauge
damage.
Comply with
regulations
To dispose this product or pumps, comply with industrial
waste disposal rules.
Correctly dispose the products following the regulations stipulated in
laws or by the local government.
Avoid this
action
Do not make any modification of the product that is not
permitted by Ulvac Kiko, Inc.
We do not assume any responsibility for any damage due to such
modifications.
Maintenance, Repair, and Disposal

1
(1) Before Using
1. Target Users
Only persons who have used vacuum deposition equipment or trained based on this
manual may operate this equipment.
2. Read the Manual Thoroughly
Please read this manual thoroughly in order to use the equipment in a safe and correct
manner.
Please pay particular attention when reading the section “To Safely Use This Equipment”.
3. Keep This Manual in a Safe Place
Keep this manual in a safe place.
After reading this manual, be sure to keep it in a safe place where it is readily accessible
to other users.
4. Warranty
(1) The warranty for this pump (this equipment) extends for a period of one year from the
date of shipment.
(2) Any malfunctions or defects which occur under normal usage conditions during the
warranty period will be repaired free of charge.
Note, the warranty stated here is an individual warranty covering the pump. In addition,
the scope of the warranty coverage concerning repairs is limited to the repair and/or
replacement of parts.
Normal usage conditions refer to the following:
a) Ambient temperature and humidity during operation: 7 - 30°C, below 85% RH
b) Operation in accordance with the user manual
(3) Repair fees will incur during the warranty period for the following cases:
a) Malfunctions due to a natural disaster or fire.
b) Malfunctions caused by special atmospheric conditions, such as salt damage,
inflammable gas, corrosive gas, radiation or pollution.
c) Malfunctions caused by usage conditions that differ from those stated in the user
manual (performance specifications, maintenance and inspection, etc.).
d) Malfunctions caused by modifications or repairs carried out by a party other than
the manufacturer, or by a service company not approved by the manufacturer.
e) Malfunctions caused by noise (electric disturbance).
f) Malfunctions that occur when not using a rated power supply.
g) Malfunctions that occur when there is an abnormal rise in internal pressure due to
the pump exhaust outlet being blocked during operation, etc.
h) Malfunctions that occur, when the pump is damaged as a result of being dropped
or falling, etc.
i) Malfunctions which are determined by the manufacturer’s technical personnel to be
caused by conditions that do not comply with the usage conditions for this vacuum
pump.
j) Malfunctions due to the replacement of consumables.
(4) Disclaimer
a) We shall not be liable for any malfunctions of our products caused by the customer,
regardless if the malfunction does not fall within the warranty period, nor shall we
be liable for any loss of opportunity for the customer’s clients or for compensation
for any damages to other products, labor costs, production loss, transportation
expenses and other related work.
b) We shall not be liable for any claims and patent infringements, including secondary
damages, filed a claim by a third party against the customer.
5. Statutory Requirements for Disposal
Follow all statutory and local authority regulations when disposing of this equipment
including used oil.
Comply with regulations upon disposal.
6. Safety during Repair
When requesting repairs to this product, provide a full description of the conditions of use
(particularly any use of dangerous materials) for the safety of repair personnel.
In this case, fill in the Use Condition Check Sheet and attach to the product.
If the use conditions are unknown, repair may be refused.

2
(2) Product Overview
1. Purpose of This Product and Actions that are Prohibited
This product is a system that evaporates substances in a vacuum space by means
of resistance heating evaporation source to form a thin film.
To safely and correctly use this product, avoid the following actions that are
prohibited.
Avoid this action
Using this vacuum coater as a vacuum vessel.
Putting in materials other than evaporation materials and
sample materials in the bell jar.
Reselling, repairing, and refurbishing of the product that are
not permitted by us.
2. Safety Device and its Purpose and Functions
Item Purpose Functions How to
Check
Overload
Short-circuit
Protection for the
oil-sealed rotary
vacuum pump, oil
diffusion pump and
short-circuit
Uses current leakage breaker for the MAIN
switch of the vacuum coater.
Nominal breaking current: 1.5 kA
Nominal sensitivity current: 30 mA
Manual reset after troubleshooting
N/A
Overheated
Oil diffusion pump
Preventing overheat
If the temperature on the oil diffusion pump
side (cooling fin) gets higher than 85 °C due
to any circumstances including a cooling
fan failure, thermostat turns off the power
for the heater.
Auto-reset after troubleshooting
N/A
Abnormality of
internal wiring
circuit and
function parts
Protection of Power
Supply unit
Turn the power off with Power Switch type
Circuit Protector.
Protection of internal wiring short circuit and
wiring burnout when function parts
abnormal.
Replacement of Power Supply unit.
N/A
SCR Over load
SCR failure
Protection of Power
Supply unit
Over load protection equipment operates
(Overload warning).
Gate blocking method: Rated current 130%
(Main body alarm flashing: Output OFF)
After solving cause, reset with Power
Switch.
N/A
DC Power
Supply failure
Protection of
operation circuit
Fast response fuse for operation circuit
protection blowout (output OFF) and DC
Power Supply in the main body failure is
considered.
Replacement of Power Supply unit.
N/A
Open circuit of
the evaporation
source
Protection of Power
Supply unit
Protector operates and stop output after 3
seconds in case no load such as
evaporation source open circuit SCR output
voltage is larger than10% and zero current)
Voltage indication field _ _ hb
Current indication field _ _ _ _
After solving cause, reset with Reset Key.
Output
without
evaporati
on source
Operation with the safety devices above
disabled is prohibited.
Avoid this
action

3
3. Product Specifications
Ultimate pressure 1.3 x 10-3 Pa
(Upon no-load cleaning in vacuum chamber)
6.6 x 10-4 Pa
(Using liquid nitrogen, upon no-load cleaning in
vacuum chamber)
Evacuation time 20 minutes or less up to 4.0 x 10-3 Pa
(Upon no-load cleaning in vacuum chamber)
20 minutes or less up to 1.3 x 10-3 Pa
(Using liquid nitrogen, upon no-load cleaning in
vacuum chamber)
Necessary power 100 V single phase 1.35 kVA
200 V single phase 1.5 kVA
External dimensions
Weight
Width:530 mm × Depth: 550 mm × Height: 1135 mm
Approx. 72 kg (Standard type)
Finished color (Rack)
(Panel)
JIS S18-250 baking finish (Munsell 7.5YR5/2)
JIS S3-309 baking finish (Munsell 2.5YG8/1)
Refer to the specification sheet for special models.
4. Individual Unit Specifications
Unit Model and Specifications Quantity
1) Glass bell jar - Dimensions: Internal diameter Φ300 mm ×
Height 300 mm
- Material: Hard glass
1 pc.
2) Feed-through Collar - Number of ports: 8 ports
- Dimensions: Internal diameter
305 mm × Height 100 mm
- Material: Iron and nickel coating
- Accessories: 1-point electrode
Hermetic port
Gauge port
Service port
(including sealing flange)
Shutter
Column
1 set
2 pc.
1 pc.
1 pc.
4 pc.
1 set
4 pcs.

4
Unit Model and Specifications Quantity
3) Evaporation power
supply
- Model: PSE-150C
- Dimensions: W480 mm × D435.3 mm × H149 mm
- Input: Single phase 200 V
- Output: 150 A max.
- Rating: 30 minutes
- Control method Thyristor AC phase control method
- Output control
Constant power operation
Constant current operation
Constant voltage operation
(Setting when shipped out: constant current)
- Appurtenant devices:
- Output cable (38 mm2 × 2 m)
1 set
4) Oil diffusion pump
(D.P)
- Model: DPF-200
- Evacuation speed: 200 L/sec
- Ultimate pressure: 10– 5 Pa
- Evacuation or VG 65 or equivalent, φ27
suction opening:
- Required power: 0.45 kW
Oil for use: SX, 0.07L
1 set
5) Oil sealed rotary
vacuum pump
(R.P)
- Model: G-101D
- Evacuation speed: 100 L/min
- Ultimate pressure: 6.7 x 10-2 Pa
- Required power: 0.4 kW
Oil for use: SMR-100, 0.8L
1 set
6) Main valve - Model: Clapper valve
- Internal diameter: VG-65
1 set
7) Liquid nitrogen trap - Bore diameter: 65 A
- Injection volume: Approx. 0.75L
(including evaporation
amount)
1 set
8) Three-way valve - Model: Ball valve type 1 set
Refer to the specification sheet for special models.

5
5. Standard Accessories
1) Power supply cable - For the main unit: 100 V single-phase, with plug, 2 m
- For evaporation power: 200 V single-phase, with
crimp-type terminal, 2 m
1 pc.
1 pc.
2) Plug adapter - Plug with grounding wire for 100-V power supply 1 pc.
3) User’s manual - Standard paper 1 pc.
4) Vacuum
performance test
result table
- Standard paper 1 pc.
5) Hexagonal wrench - 3 mm 1 pc.
6) Cap for BACK.P
VENT
(or RP. LEAK)
- Cap for the leak valve of the roughing piping 1 pc.
Refer to the specification sheet for special models.

6
6. How to Use Switches, Handles, and Operation Levers
Before handling switches, handles, or operation levers,
confirm the safety and conditions.
Confirm
Name How to Operate
MAIN switch Manual ON-OFF ON: lamp illumination
BACK.P(or R.P) switch Manual ON-OFF ON: lamp illumination
MAIN.P(or D. P) switch Manual ON-OFF ON: lamp illumination
Main valve handle Counter clockwise: OPEN Clockwise: CLOSE
Important
Complete open: Turn the handle counter clockwise
until you feel a resistance. Then return it 90 degrees
and stop it.
Complete close: Turn the handle clockwise until you
feel a resistance. Then turn it 90 degrees further to
tighten and stop it.
Three-way valve Lever operation to the direction or FORE, CLOSE,
or ROUGH.
VENT.V(or AIR LEAK.V)
BACK.P VENT(or RP. LEAK)
Screw tightening type
Open: Counterclockwise Close: Clockwise

7
7. Layout of Switches, Handles, and Operation Levers
Evacuation system drawing Electrical system drawing

8
(3) Opening the Package and Installation
1. General Cautions
Confirm
1) Is the product what you requested?
2) Are the accessories and all necessary parts included?
3) Maintain a space of more than 1 m from the equipment
for safety upon installation.
4) After the installation position is determined, fix the
equipment with the stoppers that are attached to the
casters.
2. Package upon Delivery
The main unit (with wheels at the bottom) and accessories are packed in
wooden crate when delivered.
3. Installation Site
Warning
Check the
environment
Install the equipment where the following
conditions are satisfied.
1) Flat surface
2) Floor with sufficient strength
3) Well-ventilated place
4) Place without direct sunlight
5) Room with temperatures between 7°C
and 30°C.
6) Location where there is no risk of fire
7) Location without chemicals or gases,
which affect the product.
8) Place without electrical noises, which
may cause adverse effect to the product.
Otherwise, operation failure or durability degradation
may occur.
Confirm
After the installation, make sure that the product has a
clearance of at least 0.5 m from the wall to make space
without any hindrance for maintenance and for safety.

9
4. Power Supply
Warning
Check the
capacity
Primary power supply
Please prepare the following.
Single-phase 100 V, 13.5 A or more
Single-phase 200 V, 7.5 A or more
Smaller power supply capacity may cause the breaker
to trip due to overcurrent during the operation.
Specifications of Primary Cable Connection
For Single-phase 100-V power supply, Cable length: 2 m End: 3P plug with
ground
For Single-phase 200-V power supply, Cable length: 2 m End: Φ5
crimp-type terminal
Warning
Do not
share
For the primary power supply, a single power
supply should be provided for the device, and
other equipment should not be connected with
it.
Breaker capacity shortage may cause the breaker to
trip due to overcurrent during the operation.
Ground the
grounding
wire
Employ Level D grounding.
The grounding wire for 200-V power supply is
the green wire.
Use a plug with grounding wire for 100-V
power supply.
If you use a plug adapter, connect the
grounding wire with a nearest grounding
terminal.
If incorrect grounding is made, this may cause electrical
shock in case of failure or current leakage.
Check the
cable
capacity
Avoid using an extension cable. However, if it
must be used by necessity, use the following
cable.
For 100-V power supply: 2.0 mm2or more
For 200-V power supply: 1.25 mm2or more
If a thinner cable is used, this may cause overheating,
ignition, or fire.
Avoid this
action
Do not place any object on the cable for the
primary side.
Otherwise, such action may cause electrical shock or
fire.
Avoid
electrical
shock
Do not touch the terminal block or other
connectors if the primary cable plug is being
inserted into a socket
Otherwise, the operator may suffer electrical shock.

10
5. Necessary Tool List
Tool Where to be Used
Phillips head (+) screwdriver Installation of the evaporation input
power cable
25-mm crescent wrench Installation of the evaporation output
power cable
Torque wrench/socket (WAF 13) Attachment of the evaporation power
supply output cable
Evaporation power supply cables connection diagram

11
(4) Operations
1. Risks and Safety Measures upon Operations
Warning
Avoid this
action
Do not apply any shock to the glass bell
jar, and avoid heating it to 50°C or higher.
In a case of explosion upon vacuum
condition, the exploded pieces will spread.
This may cause a serious damage to the product.
Check
ventilation
Please make sure to ventilate the room
when using the liquid nitrogen trap.
The nitrogen can potentially reduce the
oxygen in the room.
This may cause an oxygen deficiency accident.
Caution
Wear gloves
When using liquid nitrogen, wear gloves to
protect your hands.
If liquid nitrogen splashes and adheres to your skin,
you may feel acute pain momentary.
Leave open air
After the oil sealed rotary vacuum pump
stops, open BACK.P VENT(or RP LEAK)
to leave the inside of the roughing piping
open air.
This must be done to prevent reverse oil flow.
Confirm
complete close
After confirming complete closure of the
main valve, let out the air in the vacuum
chamber.
If air comes into the oil diffusion pump during
operation, it deteriorates the oil and lowers the
performance.
Operation failure of the three-way valve may occur.
An inflow of air during liquid nitrogen injection will
cause condensable gases to adhere to the trap
excessively, thus degrading the performance.

12
2. Evacuation Device Operation Procedure
2-1 Preparation
1) Close completely by attaching BACK.P VENT(or RP. LEAK) cap
(accessory).
2) Three-way valve, main valve: CLOSE
3) All switches on the operation panel: OFF
4) Attach the probe to the gauge port for vacuum chamber when
using the ionization gauge.
5) User side breaker: ON
2-2 Operations
Unit setup
1) MAIN: ON
2) BACK.P(or R.P): ON
DP cooling fan: ROTATE
3) Three-way valve: FORE
4) Confirm 13 Pa or lower by using a tool such as a Pirani gauge.
(Evacuation for around 1 min)
5) MAIN.P(or D.P): ON
6) D.P warming up in 15 mins: COMPLETE
7) Liquid nitrogen (when necessary): INJECT
Note
Liquid nitrogen volume
Max. fill-in volume: Approx. 0.75 liters
(including vaporization volume upon fill-in)
The liquid nitrogen lasts approx. 5 hours when a volume of 0.75
liters is filled.
If all of the liquid nitrogen is vaporized, the trapped condensable gases
are released, which causes an adverse effect on the pressure for about
30 minutes. This is not a failure.
Open the MAIN valve to prevent inside of the vacuum chamber from
contamination.
2-3 Stop
Unit shutdown
1) Vacuum evacuation for maintaining vacuum condition inside the
vacuum chamber
2) When an ionization gauge is use Filament: OFF
3) Main valve: COMPLETE CLOSE
4) MAIN.P(or D.P): OFF
5) D.P cooling for 30 mins:
6) Three-way valve: CLOSE
7) BACK.P VENT(or RP LEAK): OPEN
8) BACK.P(or R.P): OFF
DP cooling fan: STOP
9) MAIN: OFF
10) User side breaker (when necessary): OFF
11) If there is any liquid nitrogen inside, it evaporates naturally.