Ulvac VPC-1100 User manual

No.32500-2-02-5
High Speed Vacuum Coater
VPC-1100
ULVAC KIKO, Inc.
User’s Manual
Please read this manual thoroughly to ensure safe and effective operation
of this equipment.
Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described in
this manual is subject to changes in dimensions and specifications without
prior notice.

Table of Contents
Sections marked with a gray background ( ) are those which are concerned with the safe
use of this product.
Safety Precautions
(1) Introduction ------------------------------------------------------------------------ 1
1. Intended users ------------------------------------------------------------- 1
2. How to use this manual--------------------------------------------------- 1
3. Storing the user manual -------------------------------------------------- 1
4. Warranty---------------------------------------------------------------------- 1
5. Obeying laws and regulations------------------------------------------- 1
6. Safety management during repairs ------------------------------------ 1
(2) Product Overview----------------------------------------------------------------- 2
1. Uses of this product and prohibitions---------------------------------- 2
2. Purpose and function of safety equipment--------------------------- 2
3. Specifications---------------------------------------------------------------- 3
4. Individual equipment specifications------------------------------------ 3
5. Standard accessories ----------------------------------------------------- 5
6. How to use the switches, handle and operation lever------------- 6
7. Layout of the switches, handle and operation lever---------------- 7
Flow chart--------------------------------------------------------------------- 8
Wiring diagram -------------------------------------------------------------- 8
(3) Unpacking and installation--------------------------------------------------- 9
1. General precautions ------------------------------------------------------- 9
2. Delivery packaging--------------------------------------------------------- 9
3. Installation-------------------------------------------------------------------- 9
4. Power supply ---------------------------------------------------------------- 10
5. Water -------------------------------------------------------------------------- 11
6. List of necessary tools----------------------------------------------------- 11
7. Attaching the hoist----------------------------------------------------------12
8. Attaching the liquid nitrogen intake ------------------------------------ 13
9. Checking the direction of the oil-sealed rotary vacuum pump--- 14
(4) Operating ------------------------------------------------------------------------ 15
1. Dangers and safety guidelines during operation-------------------- 15
2. Inspecting the device before use--------------------------------------- 16
3. Using the exhaust port ---------------------------------------------------- 16
3-1 Preparation----------------------------------------------------------- 16
3-2 Operation ------------------------------------------------------------ 16
3-3 Shutting down ------------------------------------------------------- 17

4. Using the evaporator ------------------------------------------------------ 17
4-1 Opening the bell jar ------------------------------------------------ 17
4-2 Bell jar evacuation-------------------------------------------------- 18
5. Using the coating equipment -------------------------------------------- 18
5-1 Preparation----------------------------------------------------------- 18
5-2 Coating---------------------------------------------------------------- 18
6. Handling emergencies ---------------------------------------------------- 19
6-1 Temporary power failure------------------------------------------ 19
6-2 Prolonged power failure-------------------------------------------19
6-3 When power is restored------------------------------------------- 19
6-4 Water supply temporarily cut off -------------------------------- 19
6-5 Water supply cut off for a prolonged period------------------ 19
6-6 When the water supply is restored ----------------------------- 19
(5) Maintenance and repairs----------------------------------------------------- 20
1. Dangers and safety guidelines during maintenance and repairs20
2. Maintenance and repairs by the customer --------------------------- 21
3. Removing, maintaining, and installing equipment------------------ 21
3-1 Oil-sealed rotary vacuum pump--------------------------------- 21
3-2 Oil diffusion pump -------------------------------------------------- 22
3-3 Oil mist trap ---------------------------------------------------------- 23
3-4 Glass bell jar O-ring------------------------------------------------ 23
3-5 Glass bell jar--------------------------------------------------------- 23
4. Maintenance and inspection checklist--------------------------------- 24
5. Troubleshooting------------------------------------------------------------- 25
6. Handling the oil-sealed rotary vacuum pump during repairs
(When only 1 is in use) --------------------------------------------------- 26
7. Storing the device ---------------------------------------------------------- 26
8. List of consumable supplies --------------------------------------------- 27
(6) Disposal-------------------------------------------------------------------------- 28
1. Precautions when disposing--------------------------------------------- 28
(7) Optional Parts------------------------------------------------------------------- 29
1. Table of standard optional parts---------------------------------------- 29

A
Safety Precautions
Thank you for purchasing our product. This pump is designed exclusively for
vacuum evacuation, and it may malfunction or cause accidents if operated
inappropriately. Please read the manual thoroughly, and pay specific attention to
inspection, maintenance and safety guidelines. Read and fully understand the
description of this manual to prevent serious accidents from occurring.
The copyright of this user’s manual and safety guides are reserved by Technical
Division of Ulvac Kiko.
No part of this document, in whole or part may be reproduced without permission
of Ulvac Kiko Inc.
Read this section before using the VPC-1100. Follow the instructions below to
safely use the device and prevent personal injuries from occurring.
Please comply with them all the time.
The symbols below have the following meaning
Danger
There is an imminent danger of serious injury to the
user, or even death, if the product is used
improperly.
Warning
There is a possibility that serious injury or death to
the user could result from the improper use of this
product.
Caution
There is a possibility of minor or moderately serious
injury to the user, or the danger of physical damage,
if the product is used improperly.
Be sure to do the following.
Make sure the ground lead is connected.
Do not do the following.
Do not disassemble.
Do not touch.

B
Check
capacity
Primary power capacity
Three-phase 200 V 30 A+
Single phase 100 V 10 A+
If the power capacity is too low, a sudden power surge may trip the
breaker.
Use a
dedicated
power source
The primary power supply should be used only for this
device, and should not be connected to any other
machinery.
If the breaker capacity is insufficient, a power surge may trip the
breaker.
Connect the
ground lead
Connect a D-type earth lead.
200V ground leads are green cables.
100V plugs use a grounded plug. If you are using a plug
adapter, connect the ground lead to the nearest terminal.
If the unit is not properly grounded, you may get an electrical shock
due to a malfunction or short circuit.
Check cable
capacity
If possible, do not use an extension cord. If using one
cannot be avoided, please observe the following
precautions:
Use one of the following power cables:
200 V 3.5 mm
2
+
100 V 2.0 mm
2
+
Using a cable that is too small may cause overheating or start a fire.
Prohibited
Do not place any objects on top of the primary power
cable.
May cause electrical shock or fires.
Warning
Risk of
electrical
shock
If the receiving light is lit up, then even after the MAIN
breaker is cut, electricity will still be flowing to the MAIN
breaker. Do not touch the terminal block or other parts.
May cause electrical shock.
Power Supply

C
Prohibited
This device does not employ an explosion-proof
construction, and therefore cannot be used with any
flammable materials.
May result in a fire or explosion.
Prohibited
Under part of the oil diffusion pump produces a lot of heat
while in operation. Do not leave any flammable materials
nearby.
May cause fires.
Warning
Do not touch
While in operation, and for 30 minutes after being
switched off, the oil diffusion pump and oil-sealed rotary
vacuum pump are extremely hot. Do not touch directly
with your hands.
May cause burns.
Use an oil
mist trap
During rough operation, oil mist will be emitted from the
exhaust port of the oil-sealed rotary vacuum pump.
Please use an oil mist trap (sold separately).
May contaminate the air and affect people’s health.
Caution
Make sure
area is
well-ventilated
Heat is produced by the pump when the device is in use.
May cause the room to heat up.
Environment

D
Warning
Check
environment
This device should be installed in a location that meets
the following criteria:
1) Flat, level surface
2) Strong flooring
3) Well-ventilated
4) Not exposed to direct sunlight
5) Room temperature between 7-30°C
6) No fire hazards
7) No gases or chemicals which may affect the device
8) No noise or other electrical interference
May cause the device to operate improperly or may affect its
durability.
Do not
attempt alone
This device should be moved by two or more people.
May cause back pains or other injuries.
Do not
attempt alone
Attaching or removing the hoist should be done by two or
more people.
May cause back pains or other injuries.
Secure pipe
The coolant pipe should be fixed in place with a hose
band.
Prevents accidents caused by cooling water leakage.
Caution
Secure
device
After installing the device, secure it in place by using the
level adjuster, attached to the caster.
Helps prevent movement or damage caused by earthquakes.
Installation

E
Check
Make sure the vaporization power output is switched OFF
before using the electrode switch.
May cause sparks or damage to the switch.
Prohibited
Do not strike the glass bell jar or heat it to above 50°C.
Damaging the inner mechanism while there is a vacuum
can cause fragments to fly out.
May cause damage.
Warning
Check
ventilation
Make sure the room is well-ventilated when using liquid
nitrogen.
Vapor from the liquid nitrogen can lower the oxygen levels
in the room.
May cause accidents due to lack of oxygen.
Wear gloves
When handling liquid nitrogen, wear rubber gloves or
other protection over exposed areas of skin.
A droplet coming into contact with your skin can be extremely painful.
Venting
After stopping the oil-sealed rotary vacuum pump, open
the RP vent and vent the inside of the rough pipe to the
atmosphere.
Prevents oil backflow.
Caution
Check it is
completely
closed
After confirming that the main valve is completely closed,
vent the inside of the bell jar to the atmosphere.
If air enters the oil diffusion pump while it is in operation, the oil from
the oil diffusion pump will be degraded and its performance will
deteriorate sharply.
If air is allowed to enter while liquid nitrogen is being poured in, large
amounts of condensed gas will gather in the trap and the
performance will deteriorate sharply.
Operation

F
Use
protective
equipment
Wear a dusk mask and gloves when cleaning the thin film
of the feed through collar of the bell jar.
The thin film can turn into a fine dust and may be inhaled.
Do not
attempt alone
The glass bell jar weighs approximately 13 kg. It should
only be installed or removed by at least two people.
Risk of accidents or back pain.
Warning
Inspection
The fixing clip and eye bolt at either end of the hoist’s wire
rope should be inspected daily to make sure they have
not come loose.
May cause the bell jar to fall.
Periodic
replacements
The oil mist trap element (sold separately) should be
replaced every six months to one year.
If the element becomes clogged, exhaust resistance can build up and
cause oil leakage from the shaft seal or damage to the oil level
gauge.
Follow all
regulations
Waste oil used in the pump must be disposed of in
accordance with all relevant laws and regulations.
Please handle waste oil in accordance with the laws and regulations.
If anything is unclear, please contact us directly.
Caution
Prohibited
Do not modify this product using any parts other than the
standard optional parts provided by our company.
We will not be responsible for any consequences.
Caution
Check
labeling
Warning labels are attached to the following locations:
1) bell jar cover
2) main valve handle
3) hoist brace
4) liquid nitrogen trap
5) rough pipe
6) upper right side of the electrode switch
Please contact us if the labels become dirty and difficult to read, or
begin to peel off.
Maintenance, Repair and Disposal
Warning Labels

１
(1) Before Using
1. Target Users
Only persons who have used vacuum deposition equipment or trained based on this
manual may operate this equipment.
2. Read the Manual Thoroughly
Please read this manual thoroughly in order to use the equipment in a safe and correct
manner.
Please pay particular attention when reading the section “To Safely Use This Equipment”.
3. Keep This Manual in a Safe Place
Keep this manual in a safe place.
After reading this manual, be sure to keep it in a safe place where it is readily accessible
to other users.
4. Warranty
(1) The warranty for this pump (this equipment) extends for a period of one year from the
date of shipment.
(2) Any malfunctions or defects which occur under normal usage conditions during the
warranty period will be repaired free of charge.
Note, the warranty stated here is an individual warranty covering the pump. In addition,
the scope of the warranty coverage concerning repairs is limited to the repair and/or
replacement of parts.
Normal usage conditions refer to the following:
a) Ambient temperature and humidity during operation: 7 - 30°C, below 85% RH
b) Operation in accordance with the user manual
(3) Repair fees will incur during the warranty period for the following cases:
a) Malfunctions due to a natural disaster or fire.
b) Malfunctions caused by special atmospheric conditions, such as salt damage,
inflammable gas, corrosive gas, radiation or pollution.
c) Malfunctions caused by usage conditions that differ from those stated in the user
manual (performance specifications, maintenance and inspection, etc.).
d) Malfunctions caused by modifications or repairs carried out by a party other than
the manufacturer, or by a service company not approved by the manufacturer.
e) Malfunctions caused by noise (electric disturbance).
f) Malfunctions that occur when not using a rated power supply.
g) Malfunctions that occur when there is an abnormal rise in internal pressure due to
the pump exhaust outlet being blocked during operation, etc.
h) Malfunctions that occur, when the pump is damaged as a result of being dropped
or falling, etc.
i) Malfunctions which are determined by the manufacturer’s technical personnel to be
caused by conditions that do not comply with the usage conditions for this vacuum
pump.
j) Malfunctions due to the replacement of consumables.
(4) Disclaimer
a) We shall not be liable for any malfunctions of our products caused by the customer,
regardless if the malfunction does not fall within the warranty period, nor shall we
be liable for any loss of opportunity for the customer’s clients or for compensation
for any damages to other products, labor costs, production loss, transportation
expenses and other related work.
b) We shall not be liable for any claims and patent infringements, including secondary
damages, filed a claim by a third party against the customer.
5. Statutory Requirements for Disposal
Follow all statutory and local authority regulations when disposing of this equipment
including used oil.
Comply with regulations upon disposal.
6. Safety during Repair
When requesting repairs to this product, provide a full description of the conditions of use
(particularly any use of dangerous materials) for the safety of repair personnel.
In this case, fill in the Use Condition Check Sheet and attach to the product.
If the use conditions are unknown, repair may be refused.

２
(2) Product Overview
1. Uses of this product and prohibitions
This device is a vacuum coater which uses resistance heating evaporation in a
vacuum to evaporate materials and create a thin film.
In order to use this device properly, please do not put it to any of the prohibited
uses outlined below.
・ Using this device as a vacuum vessel.
・ Placing anything other than evaporation or test materials inside the
glass bell jar.
・ Any resale, repair or modification not approved by our company.
Prohibited
2. Purpose and function of safety equipment
Item Purpose Mechanism How to check
Water
supply cut
off
Prevents the oil
diffusion pump from
overheating
Pressure switch detects cutoff.
Oil diffusion pump heater interlock.
Alarm warns if water supply cut off.
Auto reset when supply restored.
Simulate a water
cutoff.
Short
circuit
Prevents electrical
shocks
Main breaker circuit interrupter.
Sensed current 30 mA
Manual reset.
Use the circuit
interrupter’s test
button.
Protects the motor
from burnout
Oil-sealed rotary vacuum pump
magnetic contact’s thermal relay
shuts off current.
Manual reset.
Start the
oil-sealed rotary
vacuum pump
and lower the
thermal relay
setting.
Reset to 3.6 A
afterwards.
Power
surge
Protects the oil
diffusion pump
heater
Oil diffusion pump circuit protector
shuts off current.
N/A
Prohibited
Disable the safety equipment before using this
device.

３
3. Specifications
Max. Pressure 1.3 x 10
-4
Pa
(Using liquid nitrogen, with no load in the vacuum tank)
Evacuation time Less than 10 min. to 10
-4
Pa
(Using liquid nitrogen, with no load in the vacuum tank)
Power consumption 100 V single phase 1.0 kVA
200 V three-phase 5.0 kVA
Water consumption
Water temp./pressure
1.5 L/min.
20 °C / 200-300 kPa (gauge pressure)
Dimensions
Weight
W 1235 mm x D 836 mm x H 2155 mm
About 313 kg
Coating JIS S-5-462 printing (Munsell 5GY8/0.5)
Listed above are the standard specifications.
Please refer to the VPC-1100 (Special) specifications for details of special configurations.
4. Individual equipment specifications
Equipment Name Type / Specifications Number
1) Glass bell jar
･Dimensions Inner diameter Ø 390 mm x H 350 mm
･Material Pyrex
1
2) Evaporation power
supply -
Model: PSE-150C
- Dimensions: W480 mm × D435.3 mm × H149 mm
- Input: Single phase 200 V
- Output: 150 A max.
- Rating: 30 minutes
- Control method Thyristor AC phase control method
- Output control
Constant power operation
Constant current operation
Constant voltage operation
(Setting when shipped out: constant current)
- Load output 3-Position
- Appurtenant devices:
- Output cable (38 mm2 × 2 m)
1

４
Equipment Name Type / Specifications Number
3) Oil diffusion pump
･Type ULK-06A
･Evacuation speed 1100L/sec.
･Max. pressure < 2.6 x 10-6 Pa
･Exhaust port VG100, VG40
･Power consumption 1.2 kW
Hydraulic oil D-31 0.35 L
Cooling water 1.5 L/min.
1
4) Oil-sealed rotary
vacuum pump
･Type GLD-202A
･Evacuation speed 200L/min.
･Max. pressure 6.7 x 10-1
Pa (Measured by
Pirani vacuum gauge)
･Power consumption 0.55 kW
Oil SMR-100 1.1 L
2
5) Main valve
･Type SBVM-6AX
･ Butterfly valve
1
6) Liquid nitrogen trap
･Bore diameter 150 A
･Injection amount Approx. 3.5 L (Including vapor)
1
7) Three-way valve
･Type Slide
･Bore diameter 20 A
1
8) Feed through collar
･Number of ports 20
･Dimensions Inner diameter 390
mm x H
150 mm
･Material Nickel-plated iron
･Accessories 3-switch electrode
Hermetic port
Gauge port
Shutter
Backup ports Electrode
UFC flange
Shutter
Service port
1
4
3
1
1
4
2
1
4
9) Hoist
･Type Balance weight
･Stroke 400 mm
1

５
Equipment name Type / Specifications Number
10) Bell jar cover
･Material Perforated plate
･Coating 5GY8/0.5
1
11) Pirani vacuum
gauge
･Type GP-1G
･Probe WP-01
1
Listed above are the standard specifications. Specifications and numbers will vary for
special models.
Please refer to the VPC-1100 (Special) specifications manual for details.
5. Standard accessories
1) Power cable
･200 V three-phase crimp-style terminal 4m
･100 V single phase with plug 4m
1
1
2) Hermetic seal por t
･Sealing plate
･Socket
3
3
3) Gauge port sealing
plug
･Ø 18
2
4) User manual
･Paper
1
5) Vacuum
performance test table
･Paper
1
6) Cap
･For GLD-202A suction port
1
7) Hose cap
･Ø 10
2
8) Hexagonal wrench
･3 mm
1
Listed above are the standard specifications.
Please refer to the VPC-1100 (Special) specifications for details of special
configurations.

６
6. How to use the switches, handles and operation lever
Check
Please check the position of the switches, handles and
operating lever before using, and make sure they are secure.
Name Operation
Main breaker Manual ON—OFF
Power surge or short circuit trip
RP switch Manual ON—OFF ON: lamp is lit up.
DP switch Manual ON—OFF ON: lamp is lit up.
FAN switch
Manual ON—OFF ON: lamp is lit up.
Main valve handle
Open: Move counter-clockwise Close: Move clockwise
Fully open: Rotate the handle counter-clockwise
until it grows heavy, then turn back a quarter-turn.
Fully close: Rotate the handle clockwise until it
grows heavy, then tighten a little further.
Electrode switch handle
Align the arrow on the handle with the electrode number
labels to switch.
Three-way valve
Align the lever with the FORE, CLOSE and ROUGH
indicators.
BELL JAR VENT Screw type
Open: Move counter-clockwise Close: Move clockwise
RP VENT Screw type
Open: Move counter-clockwise Close: Move clockwise
Turning the RP, DP and FAN switches On or Off
ON OFF

７
7. Layout of the switches, handle and operation lever

８
Flow chart
Wiring diagram
GLD-202A

９
(3) Unpacking and installation
1. General precautions
1) When the device is delivered, please install it as
instructed by our representative, or by the
representative of our sales agent.
2) Installation should be performed by two or more
people.
3) For your safety during installation, please clear a
space of at least 1 m around the device.
4) Once the positioning of the device has been finalized,
fix it in place using the level adjuster.
Check
2. Delivery packaging
The unpacked main body of the device (including casters), hoist
(assembled) and box of accessories will be delivered.
The hoist will be attached on-site.
3. Installation
Warning
Check
environment
This device should be installed in a location
that meets the following criteria:
1) Flat, level surface
2) Strong flooring
3) Well-ventilated
4) Not exposed to direct sunlight
5) Room temperature between 7-30°C
6) No fire hazards
7) No gases or chemicals which may affect
the device
8) No noise or other electrical interference
May cause the machine to operate improperly or may
affect its durability.
Check
For your safety, when this device is installed please
ensure it is at least 0.5 m away from any walls.

１０
4. Power supply
Warning
Check capacity
Primary power capacity
Three-phase 200 V 30 A+
Single phase 100 V 10 A+
If the power capacity is too low, a sudden power
surge may trip the breaker.
Primary power cable connector specifications (included with
device)
100 V cable length 4 m with three-prong plug with ground lead (with
adapter)
200 V cable length 4 m with crimp-type terminal Ø 5
Use a dedicated
power source
The primary power supply should be used
only for this device, and should not be
connected to any other machinery.
If the breaker capacity is insufficient, a power surge
may trip the breaker.
Connect the
ground lead
Connect a D-type ground lead.
200 V ground leads are green cables.
100 V plugs use a grounded plug. If you
are using a plug adapter, connect the
ground lead to the nearest terminal.
If the device is not properly grounded, you may get
an electrical shock due to a malfunction or short
circuit.
Check the cable
capacity
If possible, do not use an extension cord. If
using one cannot be avoided, please
observe the following precautions:
Use one of the following power cables:
200 V 3.5 mm
2
+
100 V 2.0 mm
2
+
Using a cable that is too small may cause
overheating or start a fire.
Prohibited
Do not place any objects on top of the
primary power cable.
May cause electrical shock or fires.
Warning
Risk of electrical
shock
If the receiving light is lit up, then even
after the MAIN breaker is cut, electricity will
still be flowing to the MAIN breaker. Do not
touch the terminal block or other parts.
May cause electrical shock.

１１
5. Water
Water capacity 1.5 L/min.
Water temperature 20°C
Water pressure 200-300 kPa (Gauge pressure)
We recommend that you use pH-controlled purified water, either from the water
mains or from a cooling water circulation system.
Primary piping connector specifications (included with the device)
Hose bore diameter Outer diameter 11 mm Inner diameter 7 mm
(Hose connector screw diameter R 1/4)
Recommended hose Please use a Tetron blade hose.
Inner diameter 9 mm x Outer diameter 15 mm
Caution
Secure pipe
The coolant pipe should be fixed in place with a
hose band.
Prevents accidents caused by cooling water leakage.
Note
The Japan Refrigeration and Air Conditioning Industry Association
Water standard JRA GL-02-1994
pH value (25°C) Between 6.5 and 8.2
Electrical conductivity 800 µS/cm. 25°C
Chloride ions 200 mg. Cl
-
/L
Sulfate ions 200 mg. SO
42-
/L
Acid consumption 100 mg. CaCO
3
/L
Total hardness 200 mg. CaCO
3
/L
Calcium hardness 150 mg. CaCO
3
/L
Ion silica 50 mg. SiO
2
/L
6. List of necessary tools
Name Use
+ Screwdriver Connecting the primary power cable
25 mm monkey wrench Attaching the hoist and liquid nitrogen intake pipe