Ulvac EGO-40M User manual

EB0018E-01
INSTRUCTION MANUAL
MULTI-HEARTH ELECTRON BEAM SOURCE
model：EGO-40M
2nd version 2023.08.01
ULVAC Inc.
※Read this manual before operation this product
Keep this manual at your hand for immediate reference.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION
i
INTRODUCTION
Thank you for purchasing our product.
This manual is intended to serve as a guide for safe and efficient use of this product. It contains important
information, such as cautions and operating, inspecting and maintenance procedures that are required in using
this product. Carefully read this manual and fully understand them before operation to prevent accidents and
troubles.
Read this manual before use and fully understand operating, inspecting and maintaining
procedures.
Do not use this product before you fully understand them.
Read this manual until you fully understand it and can operate the product correctly.
Carefully read and fully understand SAFETY CAUTIONS and SAFETY DENOTATION .
Keep this manual at your hand for immediate reference.
If this product is moved to other location, attach this manual to it.
The contents of this manual are subject to change without notice for improvement.
If you come up with any question or trouble, contact your local ULVAC representative or
ULVAC,Inc. .
Always use the product safely and take care of it correctly.
The contents of this manual are subject to change without notice for improvement.
All contents on this instruction manual are the copyright of ULVAC inc. .
Copying some or all of this instructions manual is forbidden without permission of ULVAC.
It is forbidden to use this instruction manual for other product or without agreement of
ULVAC.
No part of this instruction manual is copied or reproduced for use by a third party without
ULVAC consent

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION
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１．SAFTY CAUTIONS
１
Most accidents are attributed to careless operation, inspection, maintenance or repair. Also
failure to comply with safety cautions or predict potential danger is responsible for accidents.
Accidents can be prevented by predicting a potentially dangerous situation at an early stage.
２
Personal injuries are caused by erroneous operation or inadequate maintenance or inspection.
Never try to operate the product before you read sections on operation, inspection and
maintenance and fully understand them.
３
Safety denotations are used throughout this manual and are labeled on this product.
Failure to comply with these warnings or cautions may lead to personal injuries or loss of life.
４
The supervisor, operator and maintenance personnel should read this manual before operation or
maintenance. Only those who have been trained and know how to operate correctly should
operate this equipment using correct techniques and tools.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION
iii
２．SAFETY DENOTATIONS
Safety denotations are used throughout this manual and labeled on the product to call operator s attention
to safety.
Safety denotations are classified as follows.
Failure to comply with this involves the possibility of impending death or
serious personal injury.
If you disagree with this warning, human life or plant facility, included this
product, are damaged seriously in high ratio.
Failure to comply with this involves the possibility of death or serious
personal injury.
If you disagree with this warning, human life or plant facility, included this
product, are damaged seriously.
Failure to comply with this involves the possibility of a medium degree of
injury or of serious damage to the product.
If you disagree with this caution, it is possible that operator receives a minor
injury or that this product comes down or needs adjustment.
Although there isn’t direct damage, the notice was described for operation
safety and correct operation.
It is hardly possible to predict all potential dangers in operation, inspection or maintenance under all
operating environments.
Warnings on the cautionary labels in this manual and on the equipment do not mean to meet all safety
requirements.
In operating or maintaining this product, the operator or the maintenance personnel must use every
care so that any serious accident like personal injury or damage to the equipment does not occur.
If operation, inspection or maintenance not described in this manual is performed, it is the user s
responsibility to take necessary care for safety.
DANGER
WARNING
CAUTION
NOTE

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION
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３．ABOUT THE PRODUCT
The description and illustrations given in this manual are based on the information that was available at the
time when the manual was written. Therefore, the contents of this manual are subject to change without
notice. Before using the product, contact your local ULVAC representative or ULVAC Inc. to confirm the
latest information.
ULVAC products are warranted free from defects in material and workmanship for a period of twelve (12)
months from the date of shipping. In addition, about the parts exchanged for repair, we will consider as
possession of our company as long as there are no directions.
Rules for unpaid repair
１． If any trouble imputable to such defects should occur with normal operation within the warranty period,
ULVAC will repair it free of charge. ※１
２． Even if it occurs within the warranty period, following troubles need fare-paying repair.
１）． Trouble caused by operation error including lack of operation environment, such as ambient
temperature, ambient humidity and dust, or by improper repair or unauthorized modification, or by
connecting error.
２）． Troubles caused by natural disaster like flood, earthquake, windstorm or lightning stork, by pollution
like smoke or gas, by abnormal voltage, and by not specified operation.
３）． Trouble and damage caused by improper handling in transit after shipping.
４）． In case of exchange of a consumption article caused of life.
５）． In case of unprocurable parts because of production stoppage.
６）． In case of inputting voltage outside of range by lightning surge.
※１ Acceptance of products is need for unpaid repair. Extra-cost is needs for rental of an alternate
equipment and for visiting repair
※２ In case of visiting repair, travel expense is billed on actual amount paid.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION
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４．IN CASE OF NOTICING ABNORMALITIES OF THE PRODUCT
If you notice something wrong with the product, check the symptom and the failure with reference to the
Troubleshooting in Section 7 of this manual.
To avoid mutual loss caused by misunderstanding and misconception, please clarify the details of the
trouble in order to repair the product as soon as possible.
If products seem to be broken or you have any questions, contact the repair service staff of the sales
agencies at the end of this document. When contacting the staff, always let them know the product name or
model name (the serial/lot number) and the symptom as many details as possible. The model name and the
serial number are on the name plate on the back panel.
５．DISPOSAL
Please comply with the state regulation or the local regulation for disposal of the unit. You would be
responsible for the cost relating to disposal.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ table of contents
Table of contents
１. FOR SAFETY OPERATION ......................................................................................................................................................... 1
１.１. CAUTION FOR HANDLING ..................................................................................................................................... 1
１.２. CONTACT INFORMATION ..................................................................................................................................... 1
２. GENERAL DESCRIPTION ............................................................................................................................................................ 2
２.１. INTRDUCTION ............................................................................................................................................................. 2
２.２. CHARACTER ................................................................................................................................................................ 2
２.３. CONFIGURATION ....................................................................................................................................................... 3
２.４. SPECIFICATION .......................................................................................................................................................... 3
３. PREPARATION ................................................................................................................................................................................ 4
３.１. UPPACKING .................................................................................................................................................................. 4
３.１.１. Caution for unpacking .................................................................................................................................................... 4
３.１.２. Check after Unpacking ................................................................................................................................................... 4
３.２. INSTALLATION OF EB GUN ................................................................................................................................. 6
３.２.１. Necessary Equipment ..................................................................................................................................................... 6
３.２.２. Installation of EB GUN ................................................................................................................................................... 7
３.３. SAFEGUARDS AGAINST X－RAYS (See Fig. 3-5.) ............................................................................... 10
４. OPERATION .................................................................................................................................................................................... 16
４.１. INSPECTION BEFORE OPERATION ................................................................................................................ 16
４.２. OPERATION OF EB GUN ...................................................................................................................................... 17
５. DISASSEMBLY AND REASSEMBLY OF EB GUN ........................................................................................................... 19
５.１. REPLACEMENT OF FILAMENT .......................................................................................................................... 19
５.２. METHOD FOR DISASSEMBLE AND REASSEMBLY OF EB GUN ....................................................... 21
５.３. CLEANING HEARTH AREA .................................................................................................................................. 22
５.４. ADJUSTMENT OF BEAM DAIMETER .............................................................................................................. 23
５.５. INSTALLING HEARTH POSITIONER ................................................................................................................ 25
５.６. PARTS LIST................................................................................................................................................................ 26
６. MAINTENANCE .............................................................................................................................................................................. 33
６.１. PREVENTIVE MAINTENANCE ............................................................................................................................ 34
６.２. PERIODICAL INSPECTION................................................................................................................................... 35
７. TROUBLESHOOTING .................................................................................................................................................................. 37
７.１. TROUBLESHOOTING ............................................................................................................................................. 37
８. ATTACHED MATERIALS ........................................................................................................................................................... 42

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ 1. FOR SAFETY OPERATION
1
１. FOR SAFETY OPERATION
This section describes precautions, location of warning labels
and contact information for safety operation.
１.１.CAUTION FOR HANDLING
Precautions for this product are described. Carefully read these precautions and fully understand them
before operation of this product.
DANGER
1. The voltage applied in the EB Gun is enough to give danger to a human life. If you touch the
EB Gun or a surrounding of the EB Gun, turn off the main breaker of the EB power supply
and leave it for 5 minutes or more.
2. Improper ground cable gives danger to a human life. Check the cable not to loose the
connection, or not to be superfluously long. The regulation of ground is described in a EB
power supply instruction manual.
3. Never use the EB Gun in a humid environment. Even in low-voltage, electric shock may
occur. In case of water leakage, wipe up water and use the EB Gun after drying.
１.２.CONTACT INFORMATION
If you encounter any trouble, come up with any question or order a part, please contact ULVAC or your
local ULVAC representative, after confirming information of the product. In case of trouble, let us know the
product information and trouble symptom and situation in detail as much as possible.
■Product information (These are described on the nameplate)
Product model
Manufacturing number on the product （Serial No. and Lot No.）
■Contact information
Please contact the contact listed at the end of the volume.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ 2. GENERAL DESCRIPTION
2
２. GENERAL DESCRIPTION
This section describes character, construction and specification about this product.
２.１.INTRDUCTION
The Model EGO-40M is a high-performance, high-reliability electron beam evaporation source, which is
called EB Gun, developed and engineered for deposition of optical films by ULVAC’s advanced technology
and expertise acquired over the past years.
Advantages of the EB Gun include the following:
High density energy can be applied to a very small area, allowing deposition of high fusion point metals
such as tungsten, tantalum and molybdenum, and compounds such as SiO2 and Al 2O3.
Because of the use of water-cooled copper crucibles, contamination of the portion in contact with
evaporant is very little and high-purity coating can be formed.
With the conventional resistance-heating evaporation source, it is necessary to frequently change the
filament, boat and others depending on the type of evaporant, but with the EB Gun, the consumption of
component parts is essentially much smaller.
２.２.CHARACTER
1） Employment of a four-crucible hearth with a capacity of 40 cc and 10cc makes it possible to deposit
multi-layer film on a large number of products.
2） The electron beam being deflected by the magnetic field, the effect of secondary electrons on the
material to be coated is very small.
3） Even a sublimation material can be evaporated uniformly by scanning the beam spot in the X axis and
Y axis.
4） The beam can be scanned at a maximum frequency of 500Hz in the X axis and Y axis
5） Approx. 60 x 60 mm area on the crucible can be scanned with a beam perpendicularly to the crucible
surface.
6） Since the electron beam is deflected by 270 , the filament is not exposed to evaporant vapor and can
be used for a long time.
7） The emitter assembly can be easily mounted and dismounted, so that the filament, insulator, etc. can
be easily replaced.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ 2. GENERAL DESCRIPTION
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２.３.CONFIGURATION
DEF/XYOUT INTERLOCK CONTROL PROGRAM
POWER
HP
NP
S
R T
INPUT CABLE
INPUT
EARTH GUN GND
EXT START
VACUUM CHAMBER
X
DEF
Y
SOURCEI
HIGH VOLTAGE
FEED THROUGH
XYOUT CABLE
HIGH VOLTAGE CABLE
EARTH GUN GND CABLE
GROUND LOW IMPEDANCE
FIRST CLASS 10Ω OR LESS
CHAMBER
SWITCH
EB GUN
BASE PLATE
OUTLET
WATER
FLOW
SWITCH
WATER
INLET
ION GAUGE
CONTROL CABLE
GROUND LOW
IMPEDANCE
Figure 1.1 Configuration of HPS-1000G and EGO-40M
２.４.SPECIFICATION
Accelerating voltage : -4 to -10 kVDC
Emission current : 1.0 A max. ( at -10 kV )
Maximum power input : 10 kW at 40cc crucible 、 6kW at 10cc crucible
Beam deflection coil : 0.4 A to 2 A
2.6 (at 20 C)
X axis deflection coil : 0 A to ±1.5 A (500Hz Max.)
2.0 (at 20 C)
Y axis deflection coil : 0 A to ±1.5 A (500Hz Max.)
2.1 (at 20 C)
Filament voltage : 0 V to 6 VAC / 12VAC 40A Max.
Number of crucibles : 4
Capacity : 40 cc x 2 、10 cc x 2
Dimensions : 50 mm-OD 41 mm-ID 25 mm high
32 mm-OD 24 mm-ID 15 mm high
Beam deflection angle : 270
Cooling water flow rate : 10L/min 7 kg/cm2G max.
Water temperature : 15 C to 25 C
Detecting mechanism (Optional) Capacity 1A maximum 50VAC maximum
Outside dimensions : 170 W 309 D 174 H ( See Fig. 8.1 )
Weight : 18 kg
Applicable power supply : HPS-1000N series
Remarks : Use of water whose resistivity is 5k -cm or more is recommended.
CAUTION
Use of water whose resistivity is 5k -cm or more is recommended.
This EB Gun does not bear baking. Temperature of the EB Gun should be 90 C or less.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ３．PREPARATION
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３. PREPARATION
The section describes necessary preparation
and precaution before operation of the product.
３.１.UPPACKING
３.１.１. Caution for unpacking
Carefully unpack the case containing an EB Gun.
Prepare a clean room for inspecting an EB Gun.
３.１.２. Check after Unpacking
After an EB Gun and all standard accessories have been taken out from the case, check the
following items. If an EB Gun is already mounted in a deposition unit, open the chamber so that the
interior of the unit can be inspected.
1) Visually check the EB Gun for scar or dent.
2) Check that the protruded portions of the unit such as the cooling pipes, emitter assembly and
magnet coil electrodes do not be damaged.
3) Check if the hearth moves smoothly by turning it slowly by hand. Also check that the six
crucibles are positioned properly with a click when they have moved to their positions.
4) Check the quantity of accessories with referring to the Standard accessories List in Table 3.1.
CAUTION
Hold the EB Gun carefully not to drop it down when taking it out.
Be careful not to hold the protruded portion of the EB Gun or hit the EB Gun against other
objects.
When lifting it, hold it at the hearth.
Wear clean gloves and take out the EB Gun.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ３．PREPARATION
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Table 3.1 Standard accessories List
Q’ty Item Specifications Part number
5 Filament Tungsten, D=6 mm, L=10 mm 210004028000
2 Insulator D=12 mm, L=22 mm 210004028100
2 Insulation bushing OD=8 mm, ID=4 mm, L=3.5 mm 210004028200
1 Insulation spacer OD=10 mm, ID=6 mm, t=1 mm 210004029000
2 Filament setscrew M4 8 210004024100
4 O-ring Fluorine JIS B2401 P9 C10000000417
O-ring Fluorine JIS B2401 P21 C10000000334
O-ring Fluorine JIS B2401 P26 C10000000351
1 Allen wrench For M3 bolt -
1 Allen wrench For M4 bolt -
1 Allen wrench For M5 bolt -
1 Dimensional inspection jig For EB Gun dimension and
Adjustment of beam adjustment plate
200001725700
1 Assembling jig For filament holder assembly 200001725800

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ３．PREPARATION
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３.２.INSTALLATION OF EB GUN
３.２.１. Necessary Equipment
WARNING
Never use a part that does not meet electrical specifications or mechanical specifications
described in this instruction manual.
1） Electron beam power supply unit
HPS-1000N(G-type), ULVAC Electron beam power supply unit which is called EB power supply
2） Exhaust system for deposition 1 set
3） Gun base (SUS 304) for EB Gun 1 set
4） High voltage feedthrough 2P (dual) / EB gun
50 A, 12,000 VDC or more
ULVAC BERH311A (100 A, 12,000 VDC, 1P) can be used.
5） Current feedthrogh for magnet coil 1P / EB gun
Current capacity 5 A, breakdown voltage 250 VAC or more
ULVAC recommends the use of PTS-004 (8P).
6） Ground terminal 1P / EB gun
Fix an M10 bolt to an EB Gun chamber wall and connect it to a vacuum side of the gun by means of
a copper strip.
7） Grounding
See an Electron Beam Power Supply instruction manual.
8） Flow switch for cooling a hearth
ULVAC Model GTF-A (2 L to 20 L/min) can be used.
9） Chamber close switch, 125 VAC, 0.5 A
10） Vacuum interlock switch, 125 VAC, 0.5 A
ULVAC Model DTA-002 can be used. Interlocking can be done more effectively by using a filament
power distribution or a meter relay of the ionization gauge.
11） Water feedthrough
Inside diameter : 8mm or more 2P/ EB gun
12） Evaporation source shutter mechanism 1 set
13） Hearth rotation mechanism 1 set
One turn of the hearth drive shaft of the EGO-40M moves one crucible.
NOTE
If the hearth is to be driven with motor, the revolution of the hearth drive shaft should be set at
below 5 rpm.
14） Current feedthrogh for hearth position detection
ULVAC Model PTS-004 can be used. However, this feedthrough terminal is not required if the
hearth drive shaft is turned by hand and a mechanism for detecting the crucible position
mechanically is provided.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ３．PREPARATION
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15） Cooling water equipment
EGO-40M requires a water flow rate of 10 L / min or more.
WARNING
1. Keep quantity of cooling water for EB Gun to the value described in the instruction manual.
2. It is recommended to use water whose resistivity is 5 k cm or more (dissolved solid
components 100 ppm or less). Water with a resistivity of less than 5 k cm can also be
used, but the water path in the hearth will be contaminated over a long time of operation,
resulting in insufficient cooling, which may shorten the service life of the hearth.
３.２.２. Installation of EB GUN
Always observe the following items for safe operation of the EB Gun. Wear clean gloves when
handling parts to be installed in a vacuum chamber.
1) Gun base
Use a SUS304 stainless steel gun base. The gun base should be strong enough to bear the weight
of the EGO-40M, which weighs 18 kg.
NOTE
Because the weight of EGO-40M is 18kg, use gun base whose strength withstands the weight.
If an exhaust port is located under the gun base, make a notch or a hole in the gun base so that the
exhaust efficiency is not lowered.
2) Installation of EB GUN
The EB Gun installation area must be wide enough to easily mount and dismount the emitter
assembly in maintenance.
Install the EB Gun in a horizontal position and couple it with the hearth rotation mechanism.
The EB Gun is the magnetic deflection type. If there is any ferromagnetic material near the
magnetic pole, the magnetic flux will concentrate on the material, causing magnetic loss or
disturbance of the magnetic flux distribution. Under this condition, the beam spot will be deformed
or the beam position will deflect, making normal operation impossible. A steel bell jar can cause
such a trouble also.
NOTE
See to it that ferromagnetic material is more than 100 mm away from the EB Gun.
there is a magnetic device such as an ion pump nearby, make sure that the magnetic flux density
at the EB Gun installation position is 10-4 Tesla or less.
CAUTION
Be careful that a hand etc. is not caught in the machine when a hearth is driven by motor.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ３．PREPARATION
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3) Installation of multiple EB guns
Magnetic interference will occur if two or more EB guns are installed in proximity to each other.
Magnetic interference will increase the beam size or deform the beam. In an extreme case, the beam
cannot be deflected and may deflect out of the crucible. To prevent this, provide a space of more
than 84 mm between the sides of EB guns when the filament is mounted in the same direction.
Even if these actions are taken, the beam spot may be deformed slightly or the beam may not be
deflected over the entire surface of the crucible.
NOTE
When filaments are mounted in the same direction, distance between crucibles is 250 mm. In
case of mounting filaments in the opposite direction, the same distance is also need. Considering
the focusing of beam of EGO series, it is advisable to mount filaments in same direction.
4) High voltage feedthrough
In installing a high voltage feedthrough, avoid a location that provides easy access to operator’s
hand. Cover the electrode on the atmosphere side with a rigid metal cover.
DANGER
An electrode cover must be a sealed one that does not allow access of fingers, sticks or the like.
5) Filament cable
Use a single or multi-core copper cable having a cross section of 10 mm2 or more. Use a
solderless terminal removed of plating for a cable terminal and crimp it with a crimping machine.
Filament cables are energized with a high voltage of 10 kVDC in maximum; so lay cables at least 15
mm away from the ground potential portion.
Make wiring arrangement so that the distance between the filament terminal of the EB Gun and that
the terminals of the high voltage feedthrough is as short as possible and the gun shield (mentioned in
the latter part of this manual) can be easily set.
6) Gun shield (See Fig. 3.2.)
Cover the filament cables with a SUS304 stainless steel cover (0.4 to 1.0 mm). Figure 3.2 shows
an example for the gun shield. Since the filament cables are energized with a high voltage of 10
kVDC in maximum, keep a spacing of 15 mm or more between the gun shield and the cable.
Also consider the exhaust conductance so that the vacuum level inside the shield is not
deteriorated due to gas emitted from evaporant.
If the gun shield is not provided, gas particles ionized with the electron beam will sputter the filament
cables and the cables will wear in a short time. It is also likely that an insulation layer will be formed
on the surface of the filament cable and this may cause abnormal discharge. The ionized particles
will also enter the electron beam path and strike against a part of the emitter assembly, causing local
wear.
7) Cooling water piping (See Fig. 3.3.)
Use copper pipes more than 8 mm in diameter for the cooling water piping inside the vacuum
chamber.
Use nylon tube and pressure-proof rubber hose more than 1/2 inch in diameter for the water
feeding and draining lines outside the chamber.
Provide a pressure switch on the water supply side and a flow switch on the water drain side. Also
installation of a valve at the water supply and drain ports for maintenance of the EB gun is

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ３．PREPARATION
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recommended.
DANGER
Never use in humid environment. It is possible to get a shock even if there is low voltage. If there is
water leakage, wipe away water and dry it before use.
CAUTION
1. The flow switch recommended by ULVAC uses a magnetic float, which may be deposited with
iron powder. Periodically disassemble and clean it.
2. The pressure switch has been so set that it is turned ON at 3 kg/cm2 and OFF at 2.5 kg/cm2 by
initial adjustment, but it will need re-adjustment if there is back pressure.
8) Wiring of deflection coils (See Fig. 3.4)
Glass-cloth sheathed wire or Teflon sheathed wire or ceramic beads-sheathed wire is suited to
wiring inside the vacuum chamber. Place this wiring as far away from the filament cables as
possible.
WARNING
If the distance between these wires is not more than 20 mm, arc discharge of the high voltage will
take place and the power supply may fail.
9) Wiring of flow switch
Connect the flow switch contacts to the GUN WATER interlock circuit of the EB Gun power supply.
CAUTION
If there is a heat source (for example, resistance evaporation source) near the EB gun, provide an
interlock such that the heat source is not activated unless cooling water is fed to the hearth and
coil.
10) Grounding
Class 1 grounding (ground resistance of 10 or less) is recommended. (See the EB Gun power
supply instruction manual.) Connect the ground terminal of the EB Gun chamber wall to Class 1
ground.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ３．PREPARATION
10
３.３.SAFEGUARDS AGAINST X－RAYS (See Fig. 3-5.)
Although this EB Gun is energized with a relatively low voltage of 10 kVDC, long wavelength X-rays are
emitted from the hearth bombarded with electron beam. If the vacuum chamber is made of metal, most
X-rays are absorbed by the metal, but a small dose of X-rays may leak defending on the thickness of the
gasket. X-rays can be harmful to the human body if exposed for a long time. For safety, ULVAC
recommends the following methods.
View port glass
Use Pyrex glass inside and lead glass (8 mm thick) outside for the window.
Gasket section
Patch a 0.8 to 1.0 mm thick SUS304 sheet inside or outside the gasket.
After this treatment, measure the dose of X-rays with the EB Gun in operation, and make sure that it is well
below the internationally approved tolerance.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ３．PREPARATION
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250mm MINIMUM DISTANCE
BETWEEN CENTER LINES
EGO-40M
ELECTRON BEAM GUNS
84mm MINIMUM
DISTANCE BETWEEN GUNS
Figure 3.1 Installation of multiple EB guns

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ３．PREPARATION
12
PLASMA
ION BEAM
EVAPORATION
MATERIAL FILAMENT HIGH VOLTAGE LEADS
SPUTTERING
GUN SHIELD
ELECTRON BEAM
SECONDARY
ELECTRON
ELECTRON BEAM GUN
GUN SHIELD
HIGH VOLTAGE LEADS
Figure 3.2 Sputtering mechanism and gun shield

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ ３．PREPARATION
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FEEDTHROUGH COLLAR
OR
SOURCE PLATE
ELECTRON BEAM GUN
EGO-40M
OUTLET
INLET
COPPER
8φ×10φmm
WATER
FEED THROUGH
PRESSURE
SWITCH
MAINTENANCE
VALUE
FLOW METER
AND
FLOW SWICTH
WATER
INLET
10L/min minimum
WATER OUTLET
1/2“ TUBE
1/2“ TUBE
GUN WATER
INTERLOCK
TO EB POWER SUPPLY
Figure 3.3 Typical water cooling piping arrangement