Ulvac EGO-40M User manual

EB0018E-01
INSTRUCTION MANUAL
MULTI-HEARTH ELECTRON BEAM SOURCE
model：EGO-40M
2nd version 2023.08.01
ULVAC Inc.
※Read this manual before operation this product
Keep this manual at your hand for immediate reference.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION
i
INTRODUCTION
Thank you for purchasing our product.
This manual is intended to serve as a guide for safe and efficient use of this product. It contains important
information, such as cautions and operating, inspecting and maintenance procedures that are required in using
this product. Carefully read this manual and fully understand them before operation to prevent accidents and
troubles.
Read this manual before use and fully understand operating, inspecting and maintaining
procedures.
Do not use this product before you fully understand them.
Read this manual until you fully understand it and can operate the product correctly.
Carefully read and fully understand SAFETY CAUTIONS and SAFETY DENOTATION .
Keep this manual at your hand for immediate reference.
If this product is moved to other location, attach this manual to it.
The contents of this manual are subject to change without notice for improvement.
If you come up with any question or trouble, contact your local ULVAC representative or
ULVAC,Inc. .
Always use the product safely and take care of it correctly.
The contents of this manual are subject to change without notice for improvement.
All contents on this instruction manual are the copyright of ULVAC inc. .
Copying some or all of this instructions manual is forbidden without permission of ULVAC.
It is forbidden to use this instruction manual for other product or without agreement of
ULVAC.
No part of this instruction manual is copied or reproduced for use by a third party without
ULVAC consent

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION
ii
１．SAFTY CAUTIONS
１
Most accidents are attributed to careless operation, inspection, maintenance or repair. Also
failure to comply with safety cautions or predict potential danger is responsible for accidents.
Accidents can be prevented by predicting a potentially dangerous situation at an early stage.
２
Personal injuries are caused by erroneous operation or inadequate maintenance or inspection.
Never try to operate the product before you read sections on operation, inspection and
maintenance and fully understand them.
３
Safety denotations are used throughout this manual and are labeled on this product.
Failure to comply with these warnings or cautions may lead to personal injuries or loss of life.
４
The supervisor, operator and maintenance personnel should read this manual before operation or
maintenance. Only those who have been trained and know how to operate correctly should
operate this equipment using correct techniques and tools.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION
iii
２．SAFETY DENOTATIONS
Safety denotations are used throughout this manual and labeled on the product to call operator s attention
to safety.
Safety denotations are classified as follows.
Failure to comply with this involves the possibility of impending death or
serious personal injury.
If you disagree with this warning, human life or plant facility, included this
product, are damaged seriously in high ratio.
Failure to comply with this involves the possibility of death or serious
personal injury.
If you disagree with this warning, human life or plant facility, included this
product, are damaged seriously.
Failure to comply with this involves the possibility of a medium degree of
injury or of serious damage to the product.
If you disagree with this caution, it is possible that operator receives a minor
injury or that this product comes down or needs adjustment.
Although there isn’t direct damage, the notice was described for operation
safety and correct operation.
It is hardly possible to predict all potential dangers in operation, inspection or maintenance under all
operating environments.
Warnings on the cautionary labels in this manual and on the equipment do not mean to meet all safety
requirements.
In operating or maintaining this product, the operator or the maintenance personnel must use every
care so that any serious accident like personal injury or damage to the equipment does not occur.
If operation, inspection or maintenance not described in this manual is performed, it is the user s
responsibility to take necessary care for safety.
DANGER
WARNING
CAUTION
NOTE

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION
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３．ABOUT THE PRODUCT
The description and illustrations given in this manual are based on the information that was available at the
time when the manual was written. Therefore, the contents of this manual are subject to change without
notice. Before using the product, contact your local ULVAC representative or ULVAC Inc. to confirm the
latest information.
ULVAC products are warranted free from defects in material and workmanship for a period of twelve (12)
months from the date of shipping. In addition, about the parts exchanged for repair, we will consider as
possession of our company as long as there are no directions.
Rules for unpaid repair
１． If any trouble imputable to such defects should occur with normal operation within the warranty period,
ULVAC will repair it free of charge. ※１
２． Even if it occurs within the warranty period, following troubles need fare-paying repair.
１）． Trouble caused by operation error including lack of operation environment, such as ambient
temperature, ambient humidity and dust, or by improper repair or unauthorized modification, or by
connecting error.
２）． Troubles caused by natural disaster like flood, earthquake, windstorm or lightning stork, by pollution
like smoke or gas, by abnormal voltage, and by not specified operation.
３）． Trouble and damage caused by improper handling in transit after shipping.
４）． In case of exchange of a consumption article caused of life.
５）． In case of unprocurable parts because of production stoppage.
６）． In case of inputting voltage outside of range by lightning surge.
※１ Acceptance of products is need for unpaid repair. Extra-cost is needs for rental of an alternate
equipment and for visiting repair
※２ In case of visiting repair, travel expense is billed on actual amount paid.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ INTRODUCTION
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４．IN CASE OF NOTICING ABNORMALITIES OF THE PRODUCT
If you notice something wrong with the product, check the symptom and the failure with reference to the
Troubleshooting in Section 7 of this manual.
To avoid mutual loss caused by misunderstanding and misconception, please clarify the details of the
trouble in order to repair the product as soon as possible.
If products seem to be broken or you have any questions, contact the repair service staff of the sales
agencies at the end of this document. When contacting the staff, always let them know the product name or
model name (the serial/lot number) and the symptom as many details as possible. The model name and the
serial number are on the name plate on the back panel.
５．DISPOSAL
Please comply with the state regulation or the local regulation for disposal of the unit. You would be
responsible for the cost relating to disposal.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ table of contents
Table of contents
１. FOR SAFETY OPERATION ......................................................................................................................................................... 1
１.１. CAUTION FOR HANDLING ..................................................................................................................................... 1
１.２. CONTACT INFORMATION ..................................................................................................................................... 1
２. GENERAL DESCRIPTION ............................................................................................................................................................ 2
２.１. INTRDUCTION ............................................................................................................................................................. 2
２.２. CHARACTER ................................................................................................................................................................ 2
２.３. CONFIGURATION ....................................................................................................................................................... 3
２.４. SPECIFICATION .......................................................................................................................................................... 3
３. PREPARATION ................................................................................................................................................................................ 4
３.１. UPPACKING .................................................................................................................................................................. 4
３.１.１. Caution for unpacking .................................................................................................................................................... 4
３.１.２. Check after Unpacking ................................................................................................................................................... 4
３.２. INSTALLATION OF EB GUN ................................................................................................................................. 6
３.２.１. Necessary Equipment ..................................................................................................................................................... 6
３.２.２. Installation of EB GUN ................................................................................................................................................... 7
３.３. SAFEGUARDS AGAINST X－RAYS (See Fig. 3-5.) ............................................................................... 10
４. OPERATION .................................................................................................................................................................................... 16
４.１. INSPECTION BEFORE OPERATION ................................................................................................................ 16
４.２. OPERATION OF EB GUN ...................................................................................................................................... 17
５. DISASSEMBLY AND REASSEMBLY OF EB GUN ........................................................................................................... 19
５.１. REPLACEMENT OF FILAMENT .......................................................................................................................... 19
５.２. METHOD FOR DISASSEMBLE AND REASSEMBLY OF EB GUN ....................................................... 21
５.３. CLEANING HEARTH AREA .................................................................................................................................. 22
５.４. ADJUSTMENT OF BEAM DAIMETER .............................................................................................................. 23
５.５. INSTALLING HEARTH POSITIONER ................................................................................................................ 25
５.６. PARTS LIST................................................................................................................................................................ 26
６. MAINTENANCE .............................................................................................................................................................................. 33
６.１. PREVENTIVE MAINTENANCE ............................................................................................................................ 34
６.２. PERIODICAL INSPECTION................................................................................................................................... 35
７. TROUBLESHOOTING .................................................................................................................................................................. 37
７.１. TROUBLESHOOTING ............................................................................................................................................. 37
８. ATTACHED MATERIALS ........................................................................................................................................................... 42

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ 1. FOR SAFETY OPERATION
1
１. FOR SAFETY OPERATION
This section describes precautions, location of warning labels
and contact information for safety operation.
１.１.CAUTION FOR HANDLING
Precautions for this product are described. Carefully read these precautions and fully understand them
before operation of this product.
DANGER
1. The voltage applied in the EB Gun is enough to give danger to a human life. If you touch the
EB Gun or a surrounding of the EB Gun, turn off the main breaker of the EB power supply
and leave it for 5 minutes or more.
2. Improper ground cable gives danger to a human life. Check the cable not to loose the
connection, or not to be superfluously long. The regulation of ground is described in a EB
power supply instruction manual.
3. Never use the EB Gun in a humid environment. Even in low-voltage, electric shock may
occur. In case of water leakage, wipe up water and use the EB Gun after drying.
１.２.CONTACT INFORMATION
If you encounter any trouble, come up with any question or order a part, please contact ULVAC or your
local ULVAC representative, after confirming information of the product. In case of trouble, let us know the
product information and trouble symptom and situation in detail as much as possible.
■Product information (These are described on the nameplate)
Product model
Manufacturing number on the product （Serial No. and Lot No.）
■Contact information
Please contact the contact listed at the end of the volume.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ 2. GENERAL DESCRIPTION
2
２. GENERAL DESCRIPTION
This section describes character, construction and specification about this product.
２.１.INTRDUCTION
The Model EGO-40M is a high-performance, high-reliability electron beam evaporation source, which is
called EB Gun, developed and engineered for deposition of optical films by ULVAC’s advanced technology
and expertise acquired over the past years.
Advantages of the EB Gun include the following:
High density energy can be applied to a very small area, allowing deposition of high fusion point metals
such as tungsten, tantalum and molybdenum, and compounds such as SiO2 and Al 2O3.
Because of the use of water-cooled copper crucibles, contamination of the portion in contact with
evaporant is very little and high-purity coating can be formed.
With the conventional resistance-heating evaporation source, it is necessary to frequently change the
filament, boat and others depending on the type of evaporant, but with the EB Gun, the consumption of
component parts is essentially much smaller.
２.２.CHARACTER
1） Employment of a four-crucible hearth with a capacity of 40 cc and 10cc makes it possible to deposit
multi-layer film on a large number of products.
2） The electron beam being deflected by the magnetic field, the effect of secondary electrons on the
material to be coated is very small.
3） Even a sublimation material can be evaporated uniformly by scanning the beam spot in the X axis and
Y axis.
4） The beam can be scanned at a maximum frequency of 500Hz in the X axis and Y axis
5） Approx. 60 x 60 mm area on the crucible can be scanned with a beam perpendicularly to the crucible
surface.
6） Since the electron beam is deflected by 270 , the filament is not exposed to evaporant vapor and can
be used for a long time.
7） The emitter assembly can be easily mounted and dismounted, so that the filament, insulator, etc. can
be easily replaced.

MULTI-HEARTH ELECTRON BEAM SOURCE ～EGO-４０M～ 2. GENERAL DESCRIPTION
3
２.３.CONFIGURATION
DEF/XYOUT INTERLOCK CONTROL PROGRAM
POWER
HP
NP
S
R T
INPUT CABLE
INPUT
EARTH GUN GND
EXT START
VACUUM CHAMBER
X
DEF
Y
SOURCEI
HIGH VOLTAGE
FEED THROUGH
XYOUT CABLE
HIGH VOLTAGE CABLE
EARTH GUN GND CABLE
GROUND LOW IMPEDANCE
FIRST CLASS 10Ω OR LESS
CHAMBER
SWITCH
EB GUN
BASE PLATE
OUTLET
WATER
FLOW
SWITCH
WATER
INLET
ION GAUGE
CONTROL CABLE
GROUND LOW
IMPEDANCE
Figure 1.1 Configuration of HPS-1000G and EGO-40M
２.４.SPECIFICATION
Accelerating voltage : -4 to -10 kVDC
Emission current : 1.0 A max. ( at -10 kV )
Maximum power input : 10 kW at 40cc crucible 、 6kW at 10cc crucible
Beam deflection coil : 0.4 A to 2 A
2.6 (at 20 C)
X axis deflection coil : 0 A to ±1.5 A (500Hz Max.)
2.0 (at 20 C)
Y axis deflection coil : 0 A to ±1.5 A (500Hz Max.)
2.1 (at 20 C)
Filament voltage : 0 V to 6 VAC / 12VAC 40A Max.
Number of crucibles : 4
Capacity : 40 cc x 2 、10 cc x 2
Dimensions : 50 mm-OD 41 mm-ID 25 mm high
32 mm-OD 24 mm-ID 15 mm high
Beam deflection angle : 270
Cooling water flow rate : 10L/min 7 kg/cm2G max.
Water temperature : 15 C to 25 C
Detecting mechanism (Optional) Capacity 1A maximum 50VAC maximum
Outside dimensions : 170 W 309 D 174 H ( See Fig. 8.1 )
Weight : 18 kg
Applicable power supply : HPS-1000N series
Remarks : Use of water whose resistivity is 5k -cm or more is recommended.
CAUTION
Use of water whose resistivity is 5k -cm or more is recommended.
This EB Gun does not bear baking. Temperature of the EB Gun should be 90 C or less.